Magnetic control coating equipment with three vacuum chambers

Abstract

The utility model discloses three-vacuum-chamber magnetic control coating equipment which comprises a front rotary conveying table, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber and a rear rotary conveying table which are sequentially arranged, and a transmission assembly of a workpiece trolley is arranged at the bottom of each vacuum chamber. Vacuum gate valves are respectively arranged between the first vacuum chamber and the front rotary conveying table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotary conveying table; the vacuum gate valve comprises a gate valve plate, a gate valve pressing plate, a balance compression spring, a supporting screw rod, gate valve hinges, a gate valve shaft and a first power driving mechanism, the gate valve plate and the gate valve pressing plate are connected through the supporting screw rod, the supporting screw rod is sleeved with the balance compression spring, and the gate valve hinges are arranged at the upper end and the lower end of the gate valve pressing plate correspondingly; one end of each gate valve hinge is connected with a gate valve shaft, and one end of the gate valve shaft is connected with a first power driving mechanism. The equipment is simple and compact in structure, and can realize rapid circulating coating of workpieces.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a three-vacuum-chamber magnetron coating equipment. Background Art

[0002] In the technical field of vacuum coating, traditional vacuum coating equipment mostly adopts a single furnace body structure form or a structure form of multiple coating chambers connected in series.

[0003] However, it is found in actual production that the vacuum coating equipment with a single furnace body structure form has only one vacuum chamber. After each coating is completed, the furnace body is filled with atmosphere again. Since the opening time of the vacuum chamber door varies each time, it is easy to affect the atmosphere change in the vacuum chamber, resulting in a large fluctuation in the vacuum degree in the furnace body. Eventually, the film layer performance of the workpieces processed in each furnace will be different, and the film layer quality of the workpieces is inconsistent. At the same time, its coating efficiency is also low.

[0004] In the vacuum coating equipment with multiple coating chambers connected in series, the workpieces are usually coated layer by layer through each coating chamber to gradually make the film layer thickness meet the process requirements. This type of vacuum coating equipment has various forms and most of them are relatively mature, but the equipment is usually relatively large, occupies a large space, and the equipment cost is also high, which is not conducive to the control of production costs. Summary of the Utility Model

[0005] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a three-vacuum-chamber magnetron coating equipment, which has a simple and compact structure and can realize rapid cyclic coating of workpieces.

[0006] The technical solution of the utility model is: a three-vacuum-chamber magnetron coating equipment, including a front rotating transfer table, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber and a rear rotating transfer table arranged in sequence along the conveying direction of the workpiece and the workpiece trolley. Transmission components for the workpiece trolley are respectively arranged at the bottoms of the first vacuum chamber, the second vacuum chamber and the third vacuum chamber. Vacuum valves are respectively arranged between the first vacuum chamber and the front rotating transfer table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotating transfer table. The vacuum valve includes a valve plate, a valve plate pressing plate, a balance compression spring, a support screw, a valve hinge, a valve shaft and a first power driving mechanism. The valve plate and the valve plate pressing plate are connected by the support screw. The balance compression spring is sleeved on the support screw. Valve hinges are respectively arranged at the upper and lower ends of the valve plate pressing plate. One end of each valve hinge is connected to the valve shaft, and one end of the valve shaft is connected to the first power driving mechanism. Among them, since the time taken for the vacuum valve to open or close accounts for a small part of the entire coating process rhythm and rapid opening and closing need to be realized, through the above structural design, the reliability and stability of the vacuum valve can be ensured.

[0007] The vacuum gate valve between the first vacuum chamber and the front rotary transfer table is arranged outside the first vacuum chamber (i.e., the atmospheric side), and the vacuum gate valves between the first vacuum chamber and the second vacuum chamber, and between the second vacuum chamber and the third vacuum chamber are respectively arranged at both inner ends of the second vacuum chamber (i.e., the high-vacuum side), and the vacuum gate valve between the third vacuum chamber and the rear rotary transfer table is arranged outside the third vacuum chamber (i.e., the atmospheric side). This setting method avoids setting vacuum gate valves in the first vacuum chamber and the third vacuum chamber, can effectively reduce the volumes of the first vacuum chamber and the third vacuum chamber, shorten the pumping time, and achieve the purpose of efficient pumping.

[0008] Support seats are respectively arranged at both ends of the gate valve shaft. The gate valve shaft is arranged parallel to the gate valve plate, and the upper and lower ends of the gate valve shaft are respectively installed through the support seats. The first power driving mechanism includes a connected first servo motor and a first reduction box, and the output shaft of the first reduction box is connected to one end of the gate valve shaft.

[0009] A groove is arranged on the side of the gate valve plate facing away from the gate valve pressing plate (i.e., the side where the gate valve plate is in contact with the side wall of the vacuum chamber), and a gate valve sealing ring is arranged in the groove. The cross section of the gate valve sealing ring is in a tip shape.

[0010] In the above vacuum gate valve structure, since the time taken for the vacuum gate valve to open or close accounts for a relatively small part of the entire coating process cycle and rapid opening and closing are required, through the above structural design, the reliability and stability of the vacuum gate valve can be ensured. Among them, the power driving mechanism adopts the method of a servo motor plus a reduction box. This driving method can achieve the rapid opening and closing of the vacuum gate valve, and its opening and closing time can be shortened to within 0.2 - 0.3 seconds; a spring is arranged between the gate valve plate and the gate valve pressing plate to balance the gate valve plate and play a shock-absorbing role. The use of a tip-shaped sealing ring can achieve a faster sealing effect, which is better than the sealing effect of a traditional circular cross-section sealing ring. In addition, among the four vacuum gate valves, for the two vacuum gate valves located on the atmospheric side, due to the pressure of the atmospheric pressure when they are closed, a servo motor (or torque motor) with a relatively small power plus a reduction box can be used to achieve their power driving; while for the two vacuum gate valves located on the high-vacuum side, since the second vacuum chamber still needs to maintain a vacuum state when the first vacuum chamber and the third vacuum chamber are put into the atmosphere, under the influence of the atmospheric pressure, these two vacuum gate valves usually require a greater torque to press the gate valve plate tightly, so a servo motor (or torque motor) with a relatively large power plus a reduction box needs to be selected to achieve their power driving.

[0011] A planar target is provided in the second vacuum chamber. The planar target includes a target material, a target seat, a magnetic conductive plate, and a magnet. The target material is locked and installed on the target seat through fixing screws. The magnet is installed in the target seat through the magnetic conductive plate. A water cooling system is provided in the target seat. A number of heat dissipation grooves are distributed on one side of the target material facing the water cooling system. In order to achieve rapid coating, it is necessary to turn up the power of the planar target to increase the power. However, when the planar target is working, the working current is large, and the heat generation of the target material will be very large, which easily affects the normal progress of the coating process. Therefore, by adding heat dissipation grooves on the target material, the cooling area of the target material can be increased. Compared with the existing planar target, the cooling area of this target material can be increased by at least six times, so as to achieve the purpose of turning up the power of the planar target to achieve rapid coating. Among them, the specific setting method of the water cooling system is the same as that of the existing planar target, and the installation method of the magnet and the magnetic conductive plate in the target seat is also the same as that of the existing planar target. In addition, a target material sealing ring is also provided on the contact surface between the target material and the target seat.

[0012] In the second vacuum chamber, a baffle is further provided on the outer periphery of the planar target. The outer periphery of the workpiece is the coating area. The part of the baffle corresponding to the coating area is in an open shape. Among them, on both sides of the baffle, the side where the planar target is provided is the target side, and the coating area on the outer periphery of the workpiece is the pumping side. Since the channel formed at the open-shaped part is relatively small, it is generally set to only allow the workpiece trolley to pass through. In this way, the working pressure on the target side is greater than the pressure on the pumping side, and the air flow flows to the pumping side; in addition, when the vacuum valves at both ends in the second vacuum chamber are opened wide, the working pressures in the first vacuum chamber and the third vacuum chamber are greater than the pressure on the pumping side in the second vacuum chamber, and the residual gases (such as air, O2, water vapor, etc.) in the first vacuum chamber and the third vacuum chamber will also flow to the pumping side in the second vacuum chamber. At this time, these gases are pumped away by the molecular pump for pumping, which can ensure that the gas inside the planar target on the target side is all argon, ensuring the purity of the magnetron sputtering coating layer.

[0013] The workpiece trolley includes a trolley body, trolley guide rails, and trolley driving wheels; the transmission assembly of the workpiece trolley adopts a screw rotation driving method, and the transmission assembly includes a driving screw and a second power driving mechanism; the workpieces are arranged side by side on the trolley body. Trolley guide rails are provided at the bottom of the trolley body, and a number of trolley driving wheels are provided at the bottom of the trolley guide rails. The trolley driving wheels are matched with the driving screw, and one end of the driving screw is connected with a second power driving mechanism.

[0014] The second power driving mechanism includes a second servo motor, a second reduction box, a magneto-fluid seal seat, a transmission seal support seat, a driving synchronous pulley, a synchronous belt, and a driven synchronous pulley. The output shaft of the second servo motor is connected to the second reduction box. The output shaft of the second reduction box is connected to the driving synchronous pulley. The driving synchronous pulley is connected to the driven synchronous pulley through the synchronous belt. One end of the driven synchronous pulley is connected to the driving screw. The driving synchronous pulley is arranged in the transmission seal support seat. The second reduction box and the transmission seal support seat are also connected through the magneto-fluid seal seat.

[0015] In the above workpiece trolley and its transmission components, a servo motor and a speed reducer are also used as its power driving mechanism. The functional characteristics of the servo motor are utilized to smoothly increase the speed (S curve) to the maximum speed for the transmission, and then smoothly decelerate (S curve) to drive the workpiece trolley, enabling the workpiece trolley to achieve fast and stable movement operations within 0.5 seconds. At the same time, in order to ensure the synchronization of independent transmissions between the two transmission components during the movement process, an absolute encoder can also be installed on the driving screw to ensure the positioning accuracy of the front and rear transmissions.

[0016] The first vacuum chamber is a front transition chamber, the second vacuum chamber is a coating chamber, and the third vacuum chamber is a rear transition chamber. The first vacuum chamber and the third vacuum chamber are connected in parallel to the first vacuum pumping unit, and the second vacuum chamber is connected to the second vacuum pumping unit.

[0017] The coating equipment is also provided with a circulating transfer table, which is connected between the front rotating transfer table and the rear rotating transfer table.

[0018] In the above coating equipment structure, the front rotating transfer table and the rear rotating transfer table can respectively rotate 180° (the specific rotating structure can adopt the existing rotating table structure on the market), so as to form a circulating transfer mechanism with the circulating transfer table and the transfer components at the bottom of each vacuum chamber; the second vacuum chamber is used as the coating chamber, and its required vacuum degree is different from that of the front transition chamber and the rear transition chamber. Therefore, the second vacuum chamber is connected to a separate set of vacuum pumping units (i.e., the above-mentioned second vacuum pumping unit), and the first vacuum chamber and the third vacuum chamber are connected in parallel and then jointly connected to another set of vacuum pumping units (i.e., the above-mentioned first vacuum pumping unit). The first vacuum pumping unit includes a connected first Roots pump and a first mechanical pump, and rough pumping valves are respectively provided on the pipelines connecting the first vacuum chamber and the second vacuum chamber. The second vacuum pumping unit includes a connected second Roots pump and a second mechanical pump, and its pipelines are respectively connected to both ends of the third vacuum chamber, and a molecular pump and an air extraction valve are respectively provided on the pipelines at both ends of the third vacuum chamber.

[0019] The working principle of the above three-vacuum-chamber magnetron sputtering coating equipment is as follows: The workpiece is placed on the workpiece trolley. The front rotating transmission table rotates the workpiece trolley to the front end of the first vacuum chamber. After filling the first vacuum chamber with air, the vacuum valve between the first vacuum chamber and the front rotating transmission table is opened. After the workpiece trolley enters the first vacuum chamber, the first vacuum pumping unit is used to pump the first vacuum chamber. When the vacuum degree of the first vacuum chamber reaches the set value, the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly opened. The workpiece trolley enters the second vacuum chamber, and the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly closed. The workpiece is quickly coated in the second vacuum chamber. After the coating is completed, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly opened. After the workpiece trolley enters the third vacuum chamber, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly closed. After filling the third vacuum chamber with air, the vacuum valve between the third vacuum chamber and the rear rotating transmission table is opened. The workpiece trolley is sent out by the rear rotating transmission table and sent back to the front rotating transmission table through the circulating transmission table to enter the next coating operation in a cycle.

[0020] The utility model has the following beneficial effects compared with the prior art:

[0021] In this three-vacuum-chamber magnetron sputtering coating equipment, by setting the structure of the three vacuum chambers and improving the vacuum valves between the vacuum chambers, planar targets in the coating chamber, etc., the rapid coating of workpieces is realized, the coating efficiency is improved, and at the same time, the equipment structure is simplified, making the overall structure of the equipment simple and compact, which is beneficial to the control of production costs.

[0022] In this three-vacuum-chamber magnetron sputtering coating equipment, the vacuum valve can be quickly opened and closed, and its switching time can be shortened to within 0.2 - 0.3 seconds. A spring is arranged between the valve plate and the valve pressing plate to balance the valve plate and play a shock-absorbing role. The use of a tip-shaped sealing ring can achieve a faster sealing effect, which is better than the sealing effect of the traditional sealing ring with a circular cross-section.

[0023] In the coating chamber of this three-vacuum-chamber magnetron sputtering coating equipment, a high-power planar target can be used. By adding heat dissipation grooves on the target material, the cooling area of the target material can be increased. Compared with the existing planar target, the cooling area of this target material can be increased by at least six times, so as to achieve the purpose of quickly coating by turning up the power of the planar target. At the same time, by arranging a baffle around the planar target and leaving an opening only at the place corresponding to the coating area outside the workpiece, it is beneficial to quickly pump the vacuum and ensure that the gas inside the planar target on the target side is all argon, ensuring the purity of the magnetron sputtering coating layer. Description of the Drawings

[0024] Figure 1 It is a schematic diagram of the planar distribution principle of this three-vacuum-chamber magnetron sputtering coating equipment.

[0025] Figure 2 This is a schematic diagram of the overall structure of a three-chamber vacuum chamber magnetron sputtering coating equipment.

[0026] Figure 3 This is a top view of the three vacuum chambers.

[0027] Figure 4 This is a schematic diagram of the structure when the vacuum valve is opened.

[0028] Figure 5 This is a schematic diagram of the structure when the vacuum valve is closed.

[0029] Figure 6 This is a cross-sectional view of the valve seal ring.

[0030] Figure 7 This is a cross-sectional view of the planar target.

[0031] Figure 8 This is a schematic diagram of the structure when a baffle is arranged on the periphery of the planar target.

[0032] Figure 9 This is a schematic diagram of the workpiece trolley and the transmission assembly.

[0033] Figure 10 This is a plan view of the workpiece trolley and the transmission assembly.

[0034] In the above figures, the components indicated by the reference numerals are as follows: 1 is the front rotary transfer table, 2 is the first vacuum chamber, 3 is the second vacuum chamber, 4 is the third vacuum chamber, 5 is the rear rotary transfer table, 6 is the circulating transfer table, 7 is the workpiece, 8 is the workpiece trolley, 8-1 is the trolley body, 8-2 is the trolley guide rail, 8-3 is the trolley drive wheel, 9 is the transmission assembly, 9-1 is the drive screw, 9-2 is the bearing seat, 9-3 is the second servo motor, 9-4 is the second reduction box, 9-5 is the magnetic fluid seal seat, 9-6 is the transmission seal support seat, 9-7 is the active synchronous pulley, 9-8 is the synchronous belt, 9-9 is the driven synchronous pulley, 10 is the vacuum valve, 10-1 is the valve plate, 10-2 is the valve pressing plate, 10-3 is the balance compression spring, 10-4 is the support screw, 10-5 is the valve hinge, 10-6 is the valve shaft, 10-7 is the support seat, 10-8 is the first servo motor, 10-9 is the first reduction box, 10-10 is the valve seal ring, 11 is the first vacuum pumping unit, 11-1 is the first Roots pump, 11-2 is the first mechanical pump, 11-3 is the rough pumping valve, 12 is the second vacuum pumping unit, 12-1 is the second Roots pump, 12-2 is the second mechanical pump, 12-3 is the molecular pump, 12-4 is the pumping valve, 13 is the planar target, 13-1 is the target material, 13-2 is the target seat, 13-3 is the magnetic conductive plate, 13-4 is the magnet, 13-5 is the fixing screw, 13-6 is the heat dissipation groove, 13-7 is the target material seal ring, 14 is the baffle. Specific embodiments

[0035] The present utility model will be further described in detail below in conjunction with embodiments, but the implementation manners of the present utility model are not limited thereto.

[0036] Embodiment

[0037] This embodiment provides a three-vacuum-chamber magnetron sputtering coating device, as Figure 1 or Figure 2 shown. The three-vacuum-chamber magnetron sputtering coating device includes a front rotary transfer table 1, a first vacuum chamber 2, a second vacuum chamber 3, a third vacuum chamber 4, a rear rotary transfer table 5, and a circulating transfer table 6 arranged in sequence along the conveying direction of the workpiece 7 and the workpiece trolley 8. Transmission components 9 for the workpiece trolley are respectively provided at the bottoms of the first vacuum chamber, the second vacuum chamber, and the third vacuum chamber. Vacuum valves 10 are respectively provided between the first vacuum chamber and the front rotary transfer table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotary transfer table. The first vacuum chamber is a front transition chamber, the second vacuum chamber is a coating chamber, and the third vacuum chamber is a rear transition chamber. The first vacuum chamber and the third vacuum chamber are connected in parallel to a first vacuum pumping unit 11, and the second vacuum chamber is connected to a second vacuum pumping unit 12. Among them, the front rotary transfer table and the rear rotary transfer table can respectively perform 180° rotation (the specific rotation structure can adopt the existing rotary table structure on the market), so as to form a circulating transfer mechanism with the circulating transfer table and the transfer components at the bottoms of each vacuum chamber. As the coating chamber, the second vacuum chamber has different vacuum requirements from the front transition chamber and the rear transition chamber. Therefore, the second vacuum chamber is connected to a separate set of vacuum pumping units (i.e., the above-mentioned second vacuum pumping unit), and the first vacuum chamber and the third vacuum chamber are connected in parallel and then jointly connected to another set of vacuum pumping units (i.e., the above-mentioned first vacuum pumping unit). The first vacuum pumping unit includes a first Roots pump 11-1 and a first mechanical pump 11-2 connected to each other, and rough pumping valves 11-3 are respectively provided on the pipelines connecting the first vacuum chamber and the second vacuum chamber. The second vacuum pumping unit includes a second Roots pump 12-1 and a second mechanical pump 12-2 connected to each other, and its pipelines are respectively connected to both ends of the third vacuum chamber, and molecular pumps 12-3 and pumping valves 12-4 are respectively provided on the pipelines at both ends of the third vacuum chamber. As Figure 3 shown, the vacuum valve between the first vacuum chamber and the front rotary transfer table is arranged outside the first vacuum chamber (i.e., the atmosphere side), the vacuum valves between the first vacuum chamber and the second vacuum chamber and between the second vacuum chamber and the third vacuum chamber are respectively arranged inside both ends of the second vacuum chamber (i.e., the high vacuum side), and the vacuum valve between the third vacuum chamber and the rear rotary transfer table is arranged outside the third vacuum chamber (i.e., the atmosphere side). This setting method avoids arranging vacuum valves in the first vacuum chamber and the third vacuum chamber, can effectively reduce the volumes of the first vacuum chamber and the third vacuum chamber, shorten the pumping time, and achieve the purpose of efficient pumping.

[0038] As Figure 4 orFigure 5 As shown in the figure, the vacuum valve includes a valve plate 10-1, a valve plate pressing plate 10-2, a balance compression spring 10-3, a support screw 10-4, a valve hinge 10-5, a valve shaft 10-6 and a first power driving mechanism. The valve plate and the valve plate pressing plate are connected by a support screw, and a balance compression spring is sleeved on the support screw. Valve hinges are provided at the upper and lower ends of the valve plate pressing plate. One end of each valve hinge is connected to the valve shaft, and one end of the valve shaft is connected to a first power driving mechanism. Support seats 10-7 are respectively provided at both ends of the valve shaft. The valve shaft is arranged parallel to the valve plate, and the upper and lower ends of the valve shaft are respectively installed through the support seats. The first power driving mechanism includes a connected first servo motor 10-8 and a first reduction gearbox 10-9. The output shaft of the first reduction gearbox is connected to one end of the valve shaft. A groove is provided on the side of the valve plate facing away from the valve plate pressing plate (i.e., the side where the valve plate is in contact with the side wall of the vacuum chamber). A valve seal ring 10-10 is provided in the groove. As Figure 6 shown in the figure, the cross-section of the valve seal ring is in a tip shape. In the above vacuum valve structure, since the time taken for the vacuum valve to open or close accounts for a relatively small part of the entire coating process cycle, it is necessary to achieve rapid opening and closing. Therefore, through the above structural design, the reliability and stability of the vacuum valve can be ensured. Among them, the power driving mechanism adopts the method of a servo motor plus a reduction gearbox. This driving method can achieve rapid opening and closing of the vacuum valve, and its opening and closing time can be shortened to within 0.2 - 0.3 seconds. A spring is provided between the valve plate and the valve plate pressing plate to balance the valve plate and play a shock-absorbing role. The use of a tip-shaped seal ring can achieve a faster sealing effect, which is better than the sealing effect of a traditional circular cross-section seal ring. In addition, among the four vacuum valves, for the two vacuum valves located on the atmospheric side, due to the pressure of the atmospheric pressure when closing, a servo motor (or torque motor) with a relatively small power plus a reduction gearbox can be used to achieve its power driving. For the two vacuum valves located on the high-vacuum side, since the second vacuum chamber still needs to maintain a vacuum state when the first vacuum chamber and the third vacuum chamber are put into the atmosphere, under the influence of the atmospheric pressure, these two vacuum valves usually require a greater torque to press the valve plate tightly. Therefore, a servo motor (or torque motor) with a relatively large power plus a reduction gearbox needs to be selected to achieve its power driving.

[0039] A planar target 13 is provided in the second vacuum chamber. As Figure 7As shown in the figure, the planar target includes a target 13-1, a target seat 13-2, a magnetic conductive plate 13-3 and a magnet 13-4. The target is locked and installed on the target seat through fixing screws 13-5. The magnet is installed in the target seat through the magnetic conductive plate. A water cooling system is provided in the target seat. A number of heat dissipation grooves 13-6 are distributed on the surface of the target facing the water cooling system. In order to achieve rapid film coating, it is necessary to turn up the power of the planar target to increase the power. However, when the planar target is working, the working current is relatively large, and the heat generated by the target will be very large, which is likely to affect the normal progress of the film coating process. Therefore, by adding heat dissipation grooves on the target, the cooling area of the target can be increased. Compared with the existing planar target, the cooling area of this target can be increased by at least six times, so as to achieve the purpose of turning up the power of the planar target to achieve rapid film coating. Among them, the specific setting method of the water cooling system is the same as that of the existing planar target, and the installation method of the magnet and the magnetic conductive plate in the target seat is also the same as that of the existing planar target. In addition, a target seal ring 13-7 is also provided on the contact surface between the target and the target seat. As Figure 8 As shown in the figure, in the second vacuum chamber, a baffle 14 is further provided on the outer periphery of the planar target. The outer periphery of the workpiece is the film coating area, and the part of the baffle corresponding to the film coating area is in an open shape. Among them, on both sides of the baffle, that is, the side where the planar target is provided is the target side, and the film coating area on the outer periphery of the workpiece is the pumping side. Since the channel formed at the open-shaped part is relatively small, it is generally set to allow only the workpiece trolley to pass through. In this way, the working pressure on the target side is greater than that on the pumping side, and the air flow moves towards the pumping side. In addition, when the vacuum doors at both ends in the second vacuum chamber are opened, the working pressures in the first vacuum chamber and the third vacuum chamber are greater than the pressure on the pumping side in the second vacuum chamber. The residual gases (such as air, O2, water vapor, etc.) in the first vacuum chamber and the third vacuum chamber will also flow towards the pumping side in the second vacuum chamber. At this time, these gases are pumped away by the molecular pump for pumping, which can ensure that the gas inside the planar target on the target side is all argon, ensuring the purity of the magnetron sputtering coating layer.

[0040] As Figure 9 or Figure 10As shown in the figure, the workpiece trolley includes a trolley body 8-1, trolley guide rails 8-2 and trolley driving wheels 8-3; the driving component of the workpiece trolley adopts a screw rotation driving method, and the driving component includes a driving screw 9-1 and a second power driving mechanism; the workpieces are arranged side by side on the trolley body, trolley guide rails are provided at the bottom of the trolley body, and a number of trolley driving wheels are provided at the bottom of the trolley guide rails. The trolley driving wheels are matched with the driving screw, one end of the driving screw is connected with the second power driving mechanism, and both ends of the driving screw are fixedly installed through bearing seats 9-2 respectively. The second power driving mechanism includes a second servo motor 9-3, a second reduction gearbox 9-4, a magneto-fluid sealing seat 9-5, a transmission sealing support seat 9-6, a driving synchronous pulley 9-7, a synchronous belt 9-8 and a driven synchronous pulley 9-9. The output shaft of the second servo motor is connected with the second reduction gearbox, the output shaft of the second reduction gearbox is connected with the driving synchronous pulley, the driving synchronous pulley is connected with the driven synchronous pulley through the synchronous belt, the driven synchronous pulley is connected with one end of the driving screw, the driving synchronous pulley is arranged in the transmission sealing support seat, and the second reduction gearbox is also connected with the transmission sealing support seat through the magneto-fluid sealing seat. In the above workpiece trolley and its driving component, a servo motor plus a reduction gearbox is also used as its power driving mechanism. The function characteristics of the servo motor are used to smoothly increase the speed (S curve) to the maximum speed for the transmission, and then smoothly decelerate (S curve) to drive the workpiece trolley, so that the workpiece trolley can achieve fast and smooth moving operation within 0.5 seconds. At the same time, in order to ensure the synchronization of independent transmission between the two driving components during the moving process, an absolute encoder can also be installed on the driving screw to ensure the positioning accuracy of the front and rear transmissions.

[0041] In this embodiment, a cyclic three-vacuum chamber rapid magnetron sputtering coating method is realized through the above coating equipment. Specifically: the workpiece is arranged on the workpiece trolley, the front rotating transmission table rotates the workpiece trolley to the front end of the first vacuum chamber. After filling the first vacuum chamber with air, the vacuum valve between the first vacuum chamber and the front rotating transmission table is opened. After the workpiece trolley enters the first vacuum chamber, the first vacuum pumping unit is used to pump the first vacuum chamber. When the vacuum degree of the first vacuum chamber reaches the set value, the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly opened, the workpiece trolley enters the second vacuum chamber, and the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly closed. Rapid coating of the workpiece is carried out in the second vacuum chamber; after the coating is completed, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly opened. After the workpiece trolley enters the third vacuum chamber, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly closed. After filling the third vacuum chamber with air, the vacuum valve between the third vacuum chamber and the rear rotating transmission table is opened, the workpiece trolley is sent out by the rear rotating transmission table, and is sent back to the front rotating transmission table through the cyclic transmission table to enter the next coating operation in a cycle.

[0042] As described above, the present utility model can be better implemented. The above embodiments are only preferred embodiments of the present utility model and are not used to limit the scope of implementation of the present utility model; that is, all equivalent changes and modifications made according to the content of the present utility model are covered by the scope protected by the claims of the present utility model.

Claims

1. A three-vacuum-chamber magnetron sputtering coating equipment, characterized in that, It includes a front rotary transfer table, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber and a rear rotary transfer table arranged in sequence along the conveying direction of the workpiece and the workpiece trolley. The bottom parts of the first vacuum chamber, the second vacuum chamber and the third vacuum chamber are respectively provided with transmission components of the workpiece trolley. Vacuum valves are respectively arranged between the first vacuum chamber and the front rotary transfer table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotary transfer table. The vacuum valve includes a valve plate, a valve plate pressing plate, a balance compression spring, a support screw, a valve hinge, a valve shaft and a first power driving mechanism. The valve plate and the valve plate pressing plate are connected by the support screw, and the balance compression spring is sleeved on the support screw. Valve hinges are respectively arranged at the upper and lower ends of the valve plate pressing plate. One end of each valve hinge is connected to the valve shaft, and one end of the valve shaft is connected with the first power driving mechanism.

2. The magnetron sputtering coating equipment with three vacuum chambers according to claim 1, characterized in that, The vacuum valve between the first vacuum chamber and the front rotary transfer table is arranged outside the first vacuum chamber. The vacuum valves between the first vacuum chamber and the second vacuum chamber and between the second vacuum chamber and the third vacuum chamber are respectively arranged on the inner sides of the two ends of the second vacuum chamber. The vacuum valve between the third vacuum chamber and the rear rotary transfer table is arranged outside the third vacuum chamber.

3. The magnetron sputtering coating equipment with three vacuum chambers according to claim 1, wherein Support seats are respectively arranged at the two ends of the valve shaft. The valve shaft is arranged parallel to the valve plate, and the upper and lower ends of the valve shaft are respectively installed through the support seats. The first power driving mechanism includes a first servo motor and a first reduction box which are connected. The output shaft of the first reduction box is connected to one end of the valve shaft.

4. The magnetron sputtering coating equipment with three vacuum chambers according to claim 1, characterized in that A groove is arranged on the side of the valve plate facing away from the valve plate pressing plate, and a valve seal ring is arranged in the groove. The cross section of the valve seal ring is in a tip shape.

5. The magnetron sputtering coating equipment with three vacuum chambers according to claim 1, characterized in that, A planar target is arranged in the second vacuum chamber. The planar target includes a target material, a target seat, a magnetic conductive plate and a magnet. The target material is locked and installed on the target seat through fixing screws. The magnet is installed in the target seat through the magnetic conductive plate. A water cooling system is arranged in the target seat, and a plurality of heat dissipation grooves are distributed on the surface of the target material facing the water cooling system.

6. The magnetron sputtering coating apparatus with three vacuum chambers according to claim 5, wherein, In the second vacuum chamber, a baffle is further arranged on the outer periphery of the planar target. The outer periphery of the workpiece is a coating area, and the part of the baffle corresponding to the coating area is in an open shape.

7. The magnetron sputtering coating apparatus with three vacuum chambers according to claim 1, wherein The workpiece trolley includes a trolley body, trolley guide rails and trolley driving wheels. The transmission component of the workpiece trolley adopts a screw rotation driving mode. The transmission component includes a driving screw and a second power driving mechanism. The workpieces are arranged side by side on the trolley body. Trolley guide rails are arranged at the bottom of the trolley body. A plurality of trolley driving wheels are arranged at the bottom of the trolley guide rails. The trolley driving wheels are matched with the driving screw, and one end of the driving screw is connected with the second power driving mechanism.

8. The magnetron sputtering coating apparatus with three vacuum chambers according to claim 7, characterized in that, The second power driving mechanism includes a second servo motor, a second reduction box, a magnetic fluid seal seat, a transmission seal support seat, a driving synchronous pulley, a synchronous belt and a driven synchronous pulley. The output shaft of the second servo motor is connected to the second reduction box. The output shaft of the second reduction box is connected to the driving synchronous pulley. The driving synchronous pulley is connected to the driven synchronous pulley through the synchronous belt. One end of the driven synchronous pulley is connected to the driving screw. The driving synchronous pulley is arranged in the transmission seal support seat. The second reduction box and the transmission seal support seat are also connected through the magnetic fluid seal seat.

9. The magnetron sputtering coating apparatus with three vacuum chambers according to claim 1, wherein The first vacuum chamber is a front transition chamber, the second vacuum chamber is a coating chamber, and the third vacuum chamber is a rear transition chamber. The first vacuum chamber and the third vacuum chamber are connected in parallel to the first vacuum pumping unit, and the second vacuum chamber is connected to the second vacuum pumping unit.

10. The magnetron sputtering coating equipment with three vacuum chambers according to claim 1, characterized in that, The coating equipment is also provided with a circulating transfer table, which is connected between the front rotary transfer table and the rear rotary transfer table.

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