Observation window anti-pollution device for vacuum coating equipment

Abstract

The utility model belongs to the technical field of vacuum coating equipment, in particular to an observation window anti-pollution device for vacuum coating equipment, which is characterized in that one end of a square elbow is hermetically connected with an observation flange of the vacuum coating equipment, an observation window is hermetically connected with the other end of the square elbow, and a lens and an anti-pollution plate are positioned in the square elbow; the magnetic driving assembly is fixed on the square elbow, the output end of the magnetic driving assembly is connected with the lens, and the lens is driven by the magnetic driving assembly to rotate relative to the observation window at the right-angle turning position in the square elbow, so that opening and closing of a sight line inside the vacuum chamber are observed through the observation window; the antifouling plate is fixedly connected to the inner wall of the square bend, and when the lens is driven by the magnetic driving assembly to rotate to a closed state, the face, back on to the observation window, of the lens abuts against the antifouling plate. The evaporation source is indirectly monitored by adjusting the angle of the lens, and the technical problem that in the evaporation monitoring process, volatile matter is solidified on the inner surface of the observation window, and the monitoring effect is affected is greatly solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating equipment, and specifically relates to an anti-pollution device for an observation window of a vacuum coating equipment. Background Art

[0002] As a common means for preparing thin film materials, vacuum coating technology has a wide range of applications in modern industrial production and scientific research. The observation window is an essential device for vacuum coating equipment. During vacuum coating, the operator can monitor the real-time operation status inside the vacuum chamber and the progress of coating through the observation window at any time, so as to ensure the smooth progress of coating and the safe operation of the equipment. Commonly used observation windows generally use baffles to protect the observation glass. The baffle is opened when observing and closed when not observing. Most pollutants are blocked by the baffle to prevent pollutants from depositing on the observation window. However, due to observing the real-time coating situation through the observation window for a long time, the observation window will be deposited with pollutants, becoming blurred and even unable to observe the working conditions inside the vacuum chamber. In this case, in order to obtain the best observation effect, it is often necessary to disassemble the observation window for cleaning. Since the observation window is directly connected to the vacuum chamber, disassembling the observation window requires breaking the vacuum inside the vacuum chamber, interrupting the coating work inside the vacuum chamber, and greatly affecting the working efficiency of coating in the vacuum chamber. Content of the Utility Model

[0003] Aiming at the above problems existing in the existing vacuum coating observation window for monitoring the inside of the vacuum chamber, the purpose of the utility model is to provide an anti-pollution device for an observation window of a vacuum coating equipment. This anti-pollution device can effectively protect the observation window from being polluted during the observation of the evaporation coating process.

[0004] The purpose of the utility model is realized through the following technical solutions:

[0005] The utility model includes a right-angle elbow, a lens, a magnetic drive assembly and an anti-pollution plate. One end of the right-angle elbow is hermetically connected to the observation flange of the vacuum coating equipment, and the observation window is hermetically connected to the other end of the right-angle elbow. The lens and the anti-pollution plate are both located inside the right-angle elbow. The magnetic drive assembly is fixed on the right-angle elbow, and the output end of the magnetic drive assembly is connected to the lens. The lens rotates relative to the observation window at the right-angle turning point inside the right-angle elbow under the drive of the magnetic drive assembly, so as to realize the opening and closing of the visual line for observing the inside of the vacuum chamber through the observation window. The anti-pollution plate is fixedly connected to the inner wall of the right-angle elbow. When the lens rotates to the closed state under the drive of the magnetic drive assembly, the side of the lens facing away from the observation window abuts against the anti-pollution plate.

[0006] Wherein: the axial center line of the observation window forms a 90° angle with the axial center line of the evaporation source inside the vacuum chamber.

[0007] The lens is made of mirror stainless steel. When the side of the lens facing away from the observation window is in the closed state, a vapor deposition material is deposited during the vacuum coating process. When the lens is in the open state again, the deposited vapor deposition material will increase the brightness and refractive index of the lens.

[0008] The lens is oval-shaped, with one end of the oval having a greater width than the other end. When the lens rotates to the closed state driven by the magnetic drive assembly, a sealed space is formed between the lens, the anti-fouling plate and the side wall of the right-angle elbow between the observation window and the vapor deposition source inside the vacuum chamber, isolating the observation window from the vapor deposition source.

[0009] The anti-fouling plate is parallel to the axial center line of the observation window.

[0010] The magnetic drive assembly includes a magnetic rotation shaft and a magnetic rotation shaft drive rod. A flange is hermetically fixed to the right-angle elbow, and the magnetic rotation shaft is hermetically rotatably connected to the flange. The magnetic rotation shaft drive rod is the output end of the magnetic drive assembly. The magnetic rotation shaft drive rod passes through the inside of the flange and into the right-angle elbow, and is fixedly connected to the lens by screws. Manually rotating the magnetic rotation shaft drives the lens to rotate through the magnetic rotation shaft drive rod, realizing the opening and closing of the line of sight for observing the inside of the vacuum chamber through the observation window.

[0011] The advantages and positive effects of the present utility model are as follows:

[0012] 1. The present utility model adjusts the angle of the lens through the magnetic drive assembly and indirectly monitors the vapor deposition source using the principle of light refraction, greatly alleviating the technical problem that volatiles solidify on the inner surface of the observation window during the monitoring of the vapor deposition process, affecting the monitoring effect.

[0013] 2. The lens of the present utility model is made of mirror stainless steel. Even if a vapor deposition material is deposited on the lens during the vacuum coating process, the lens will become brighter and have a higher refractive index. Description of the Drawings

[0014] Figure 1 is one of the internal structure schematic diagrams of the present utility model (lens in the open state);

[0015] Figure 2 is the second internal structure schematic diagram of the present utility model (lens in the closed state);

[0016] Figure 3 is a partial cross-sectional view of the whole of the present utility model; <{

[0017] Figure 4 is Figure 3 the A - A cross-sectional view in

[0018] Wherein: 1 is an observation window, 2 is a right-angle elbow, 3 is a lens, 4 is a magnetic drive assembly, 401 is a magnetic rotating shaft, 402 is a magnetic rotating shaft drive rod, 403 is a flange, 404 is a screw, 5 is an anti-fouling plate, and 6 is an evaporation source. Specific embodiments

[0019] The present invention will be further described in detail below with reference to the accompanying drawings.

[0020] As Figures 1 to 4 Shown in the figure, the present invention includes a right-angle elbow 2, a lens 3, a magnetic drive assembly 4, and an anti-fouling plate 5. One end of the right-angle elbow 2 is hermetically connected to the observation flange of the vacuum coating equipment, and the observation window 1 is hermetically connected to the other end of the right-angle elbow 2. Both the lens 3 and the anti-fouling plate 5 are located inside the right-angle elbow 2. The magnetic drive assembly 4 is fixed on the right-angle elbow 2, and the output end of the magnetic drive assembly 4 is connected to the lens 3. The lens 3 rotates relative to the observation window 1 at the right-angle turning inside the right-angle elbow 2 through the drive of the magnetic drive assembly 4, thereby realizing the opening and closing of the line of sight for observing the inside of the vacuum chamber through the observation window 1. The anti-fouling plate 5 is fixedly connected to the inner wall of the right-angle elbow 2. When the lens 3 rotates to the closed state under the drive of the magnetic drive assembly 4, the side of the lens 3 facing away from the observation window 1 abuts against the anti-fouling plate 5.

[0021] In this embodiment, the axial center line of the observation window 1 forms a 90° angle with the axial center line of the evaporation source 6 inside the vacuum chamber, effectively reducing the deposition of the evaporated coating material on the observation window 1.

[0022] The lens 3 in this embodiment is made of mirror stainless steel. Even when the side of the lens 3 facing away from the observation window 1 is in the closed state, during the vacuum coating process, the evaporated coating material deposits on the lens 3. When the lens 3 is in the open state again, the deposited evaporated coating material will also make the lens 3 brighter and increase the refractive index of the lens 3, and it will not affect the operator's observation and monitoring of the evaporation situation of the evaporation source 6 through the lens 3 from the observation window 1 at all.

[0023] The lens 3 in this embodiment is oval, and the width of one end of the oval is greater than that of the other end. When the lens 3 rotates to the closed state under the drive of the magnetic drive assembly 4, the edge of the mirror surface 3 fits against the inner wall of the right-angle elbow 2. The lens 3, the anti-fouling plate 5, and the side wall of the right-angle elbow 2 form a sealed space between the observation window 1 and the evaporation source 6 inside the vacuum chamber, completely isolating the observation window 1 from the evaporation source 6, so that the observation window 1 will not be contaminated by the coating material.

[0024] In this embodiment, the anti-fouling plate 5 is parallel to the axial center line of the observation window 1. One end of the anti-fouling plate 5 is welded to the inner wall of the right-angle elbow 2, and the other end of the anti-fouling plate 5 is a free end. When the lens 3 rotates to the closed state under the drive of the magnetic drive assembly 4, the side of the lens 3 facing away from the observation window 1 abuts against the free end of the anti-fouling plate 5.

[0025] The magnetic drive assembly 4 of this embodiment is a prior art, including a magnetic rotation shaft 401 and a magnetic rotation shaft drive rod 402. A flange 403 is hermetically and fixedly connected to the right-angle elbow 2. The magnetic rotation shaft 401 is hermetically and rotatably connected to the flange 403. The magnetic rotation shaft drive rod 402 is the output end of the magnetic drive assembly 4. The magnetic rotation shaft drive rod 402 passes through the inside of the flange 403 and penetrates into the right-angle elbow 2, and is fixedly connected to the lens 3 by a screw 404. Manually rotate the magnetic rotation shaft 401, and drive the lens 3 to rotate through the magnetic rotation shaft drive rod 402, so as to realize the opening and closing of the line of sight for observing the inside of the vacuum chamber through the observation window 1.

[0026] The working principle of the present utility model is as follows:

[0027] During the working process of the vacuum equipment, when the operator monitors the evaporation state of the evaporation source 6, manually rotate the magnetic drive assembly 4, and then drive the lens 3 to rotate, and the line of sight between the observation window 1 and the evaporation source 6 is opened. As Figure 1 shown, by adjusting the angle of the lens 3, the evaporation source 6 is indirectly monitored by using the principle of light refraction. The observation window 1 is not directly facing the evaporation source 6. The operator uses the observation window 1 to indirectly monitor the evaporation source 6 through the refracted light of the lens 3, which greatly avoids the contamination of the observation window 1 by the deposits evaporated from the evaporation source 6. In addition, the lens 3 is made of mirror stainless steel. After the evaporation material is deposited on the mirror surface, it will become brighter and can better refract light, and will not affect the operator's monitoring of the evaporation state of the evaporation source at all. When the operator does not need to monitor the evaporation state of the evaporation source 6, rotate the magnetic drive assembly 4 in the reverse direction, rotate the lens 3 in the reverse direction, and close the line of sight between the observation window 1 and the evaporation source 6. As Figure 2 shown, the lens 3 and the anti-fouling plate 5 are used to prevent the evaporation material from contaminating the observation window 1.

Claims

1. An anti-pollution device for an observation window of a vacuum coating equipment, characterized in that: It includes a right-angle elbow (2), a lens (3), a magnetic drive assembly (4) and an anti-fouling plate (5). One end of the right-angle elbow (2) is hermetically connected to the observation flange of the vacuum coating equipment. The observation window (1) is hermetically connected to the other end of the right-angle elbow (2). The lens (3) and the anti-fouling plate (5) are both located inside the right-angle elbow (2). The magnetic drive assembly (4) is fixed on the right-angle elbow (2). The output end of the magnetic drive assembly (4) is connected to the lens (3). The lens (3) rotates relative to the observation window (1) at the right-angle turning point inside the right-angle elbow (2) under the drive of the magnetic drive assembly (4), thereby realizing the opening and closing of the line of sight for observing the inside of the vacuum chamber through the observation window (1). The anti-fouling plate (5) is fixedly connected to the inner wall of the right-angle elbow (2). When the lens (3) rotates to the closed state under the drive of the magnetic drive assembly (4), the side of the lens (3) facing away from the observation window (1) abuts against the anti-fouling plate (5). The lens (3) is made of mirror stainless steel. When the side of the lens (3) facing away from the observation window (1) is in the closed state, evaporation materials are deposited during the vacuum coating process. When the lens (3) is in the open state again, the deposited evaporation materials will increase the brightness and refractive index of the lens (3).

2. The anti-pollution device for the observation window of the vacuum coating equipment according to claim 1, characterized in that: The axial center line of the observation window (1) forms a 90° angle with the axial center line of the evaporation source (6) inside the vacuum chamber.

3. The anti-pollution device for the observation window of the vacuum coating equipment according to claim 1, wherein: The lens (3) is oval. The width of one end of the oval is greater than that of the other end. When the lens (3) rotates to the closed state under the drive of the magnetic drive assembly (4), a sealed space is formed between the lens (3), the anti-fouling plate (5) and the side wall of the right-angle elbow (2) between the observation window (1) and the evaporation source (6) inside the vacuum chamber, isolating the observation window (1) from the evaporation source (6).

4. The anti-pollution device for the observation window of the vacuum coating equipment according to claim 1, characterized in that: The anti-fouling plate (5) is parallel to the axial center line of the observation window (1).

5. The anti-pollution device for the observation window of the vacuum coating equipment according to claim 1, wherein: The magnetic drive assembly (4) includes a magnetic rotating shaft (401) and a magnetic rotating shaft drive rod (402). A flange (403) is hermetically fixed on the right-angle elbow (2). The magnetic rotating shaft (401) is hermetically and rotatably connected to the flange (403). The magnetic rotating shaft drive rod (402) is the output end of the magnetic drive assembly (4). The magnetic rotating shaft drive rod (402) passes through the inside of the flange (403) and enters the right-angle elbow (2), and is fixedly connected to the lens (3) by a screw (404). Manually rotate the magnetic rotating shaft (401), and drive the lens (3) to rotate through the magnetic rotating shaft drive rod (402), realizing the opening and closing of the line of sight for observing the inside of the vacuum chamber through the observation window (1).

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