Leakage detection system for multiple single crystal furnaces

Abstract

The utility model discloses a leak detection system for multiple single crystal furnaces. The leak detection system comprises a vacuum pump, an integrated leak detection pipeline, a branch stop valve, an equipment vacuum gauge and an equipment leak detector, the integrated leak detection pipeline comprises a main pipeline and at least one branch pipeline, one end of the main pipeline is connected with the vacuum pump, two ends of the branch pipeline are respectively connected with the main pipeline and the single crystal furnace to be subjected to leak detection, and the branch stop valve is arranged on the branch pipeline; the equipment leak detector is connected with the single crystal furnace; the equipment vacuum gauge is arranged between the single crystal furnace and the branch stop valve; by arranging a plurality of branch pipelines and simultaneously performing leak detection on a plurality of single crystal furnaces, the operation time and the labor intensity are reduced, by arranging the branch stop valves, the unqualified single crystal furnaces are separated from the whole system, other furnace bodies can be vacuumized continuously, meanwhile, the unqualified single crystal furnaces are checked independently, a vacuum pump does not need to be closed, production interruption is avoided, and the production efficiency is improved. The leak detection efficiency and accuracy of the single crystal furnace are improved, and the overall production efficiency and product quality are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of photovoltaic crystal pulling equipment, and particularly relates to a leak detection system for multiple single crystal furnaces. Background Art

[0002] The production of single crystal silicon needs to be carried out in a highly vacuum and controlled atmosphere. As the equipment for producing single crystal silicon, if there is a leak in the single crystal furnace, it will cause air to enter the furnace body, affecting the growth quality of single crystal silicon and the difficulty of crystal growth. Therefore, regularly detecting the leak of the single crystal furnace is a key step to ensure production efficiency and product quality, and 100% evacuation sealing verification is required. The conventional method for detecting the leak of a single crystal furnace needs to move the vacuum pump and operate each single crystal furnace one by one, which is not only time-consuming, but also labor-intensive, affecting the overall detection efficiency, very inconvenient, and most existing solutions are the mobile docking of the vacuum pump and pipeline to the furnace body, and the mobile docking method increases the complexity of operation. When unqualified is found, it is necessary to stop the vacuum pump and open the furnace body to check the problem, resulting in the interruption of the entire production line, affecting production continuity. Frequent stopping and starting of the pump not only waste time, but also may cause waste of energy and increase production costs. Summary of the Utility Model

[0003] Aiming at the deficiencies of the background art, the purpose of the utility model is to provide a leak detection system for multiple single crystal furnaces, which solves the problems in the background art: (1) It is necessary to move the vacuum pump and operate each single crystal furnace one by one, which is time-consuming, labor-intensive, with low overall production efficiency and inconvenient; (2) The complexity of operation brought by the existing solution of the mobile docking of the vacuum pump and pipeline to the furnace body; (3) When unqualified is found, it is necessary to stop the vacuum pump and open the furnace body to check the problem, resulting in the interruption of the entire production line, affecting production continuity, and frequent stopping and starting of the pump waste time, cause waste of energy and increase production costs.

[0004] The purpose of the utility model can be realized by the following technical solutions: A leak detection system for multiple single crystal furnaces includes a vacuum pump, an integrated leak detection pipeline, a branch stop valve, an equipment vacuum gauge, and an equipment leak detector;

[0005] The integrated leak detection pipeline includes a main pipeline and at least one branch pipeline. One end of the main pipeline is connected to the vacuum pump, one end of the branch pipeline is connected to the main pipeline, the other end of the branch pipeline is connected to the single crystal furnace to be leak-detected, and the branch stop valve is arranged on the branch pipeline;

[0006] The equipment leak detector is connected to all the single crystal furnaces to be leak-detected, and the equipment vacuum gauge is arranged on the branch pipeline between the single crystal furnace to be leak-detected and the branch stop valve.

[0007] Further, the system is also provided with a main pipeline self-checking module, which includes a main pipeline stop valve, a pipeline vacuum gauge, and a pipeline leak detector. The main pipeline stop valve is located at the outlet end of the vacuum pump, and the pipeline leak detector is located between the main pipeline stop valve and the pipeline vacuum gauge.

[0008] Further, the number of the equipment leak detectors matches the number of the branch pipelines, and the number of the equipment vacuum gauges matches the number of the branch pipelines.

[0009] Further, the system is also provided with a remote control cabinet, which is connected to the equipment vacuum gauge and the pipeline vacuum gauge by signal lines. The remote control cabinet receives the status signals of the equipment vacuum gauge and the pipeline vacuum gauge. The remote control cabinet is connected to the branch pipeline stop valve and the main pipeline stop valve by control lines and signal lines. The remote control cabinet controls the actions of the branch pipeline stop valve and the main pipeline stop valve and monitors the statuses of the branch pipeline stop valve and the main pipeline stop valve.

[0010] Further, when the remote control cabinet receives the status signal of the pipeline vacuum gauge as non-vacuum, it controls the main pipeline stop valve to close. When the remote control cabinet receives the status signal of the equipment vacuum gauge as non-vacuum, it controls the corresponding branch pipeline stop valve on the branch pipeline where the equipment vacuum gauge is located to close.

[0011] Further, the remote control cabinet has a display function.

[0012] The beneficial effects of the present utility model are as follows: (1) The vacuum pump is fixed, and the single crystal furnace rotates instead of moving the vacuum pump between each single crystal furnace, reducing the time and labor intensity of equipment movement and improving the overall production efficiency; (2) The integrated leak detection pipeline and stop valve are used, enabling each single crystal furnace to be quickly connected to and disconnected from the vacuum system, and the leak detection of a single furnace body can be carried out without interrupting the entire production line; (3) When it is found that the sealing performance of a certain single crystal furnace body is unqualified, it is isolated from the system by using the stop valve, and then the other furnace bodies are continuously evacuated, while the problematic equipment is separately inspected, significantly improving the efficiency and accuracy of the leak detection of the single crystal furnace, reducing production interruptions, and improving the overall production efficiency and product quality; (4) The modular design, designing the leak detection system into an equipment leak detection module and a pipeline leak detection module, enables quick replacement or upgrade of a certain component when needed, reducing the impact on the overall production; (5) Through remote monitoring by the control cabinet, the operator can view the evacuation status of each furnace body in the control room far away from the single crystal furnace and perform corresponding control operations, reducing the number of times the operator goes to the site and improving the efficiency. Description of the Drawings

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required in the description of the embodiments or the prior art.

[0014] Figure 1 is the system diagram of the embodiment of the present invention;

[0015] In the figure, 1 - vacuum pump, 2 - integrated leak detection pipeline, 21 - main pipeline, 22 - branch pipeline, 3 - branch stop valve, 4 - equipment vacuum gauge, 5 - equipment leak detector, 6 - main pipeline self - inspection module, 61 - main stop valve, 62 - pipeline vacuum gauge, 63 - pipeline leak detector, 7 - control cabinet. Specific embodiments

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0017] A leak detection system for multiple single - crystal furnaces. Specifically, referring to Figure 1 , the system includes a vacuum pump 1, an integrated leak detection pipeline 2, a branch stop valve 3, an equipment vacuum gauge 4 and an equipment leak detector 5; the vacuum pump 1 is used to pump out the air and other gases in the single - crystal furnace body to form a necessary vacuum environment for leak detection tests;

[0018] The integrated leak detection pipeline 2 includes a main pipeline 21 and at least one branch pipeline 22. One end of the main pipeline 21 is connected to the outlet end of the vacuum pump 1, one end of the branch pipeline 22 is connected to the main pipeline 21, and the other end is connected to the single - crystal furnace to be leak - detected. The branch stop valve 3 is arranged on the branch pipeline 22;

[0019] The equipment leak detector 5 is connected to the single - crystal furnace to detect whether there is a leak in the single - crystal furnace. The equipment vacuum gauge 4 is arranged on the branch pipeline 22 between the single - crystal furnace and the branch stop valve 3 to monitor the vacuum degree in the single - crystal furnace;

[0020] By setting at least one branch pipeline 22, it is possible to detect leaks in multiple single crystal furnaces simultaneously. With a fixed vacuum pump 1 and the rotation of the single crystal furnaces, there is no need to separately set up and move the vacuum pump 1 for each single crystal furnace, which greatly reduces the operation time and labor intensity. By setting a branch shut-off valve 3, an equipment vacuum gauge 4, and an equipment leak detector 5 on each branch pipeline 22, it is possible to separately verify the vacuum tightness of each single crystal furnace without affecting other equipment. When a certain single crystal furnace fails to meet the requirements, the branch shut-off valve 3 on the branch pipeline 22 connected to this single crystal furnace is closed, isolating the unqualified single crystal furnace from the entire system. It is possible to continue evacuating other furnace bodies while separately troubleshooting the unqualified single crystal furnace. In this way, it is not necessary to shut down the vacuum pump 1, avoiding production interruptions and significantly improving the efficiency and accuracy of leak detection in single crystal furnaces, as well as enhancing the overall production efficiency and product quality.

[0021] This system is also provided with a main pipeline self-check module 6. The main pipeline self-check module 6 includes a main shut-off valve 61, a pipeline vacuum gauge 62, and a pipeline leak detector 63. The main shut-off valve 61 is located at the outlet end of the vacuum pump 1, and the pipeline leak detector 63 is located between the main shut-off valve 61 and the pipeline vacuum gauge 62; the pipeline leak detector 63 is used to detect whether there is a leak in the main pipeline 21, and the pipeline vacuum gauge 62 is used to measure the vacuum degree in the main pipeline 21. This design can effectively eliminate the reason of air leakage in the main pipeline of the system itself, ensure that the main pipeline 21 itself has no leak, thus guaranteeing the sealing of the entire system. At the same time, this design makes the vacuum leak detection of the main pipeline 21 form an independent module. When the main pipeline 21 fails or needs to be upgraded, it can be quickly replaced or upgraded for maintenance.

[0022] The number of equipment leak detectors 5 matches the number of branch pipelines 22, and the number of equipment vacuum gauges 4 matches the number of branch pipelines 22. Each branch pipeline 22 is provided with a dedicated equipment leak detector 5 and an equipment vacuum gauge 4 to achieve one-to-one monitoring of each single crystal furnace, avoiding the errors and inconveniences that may be brought about by multiple devices sharing one leak detector and vacuum gauge, reducing the cross-interference between different single crystal furnaces, and improving the stability of the system and the credibility of the leak detection results.

[0023] This system is also provided with a remote control cabinet 7. The remote control cabinet 7 is connected to the equipment vacuum gauge 4 and the pipeline vacuum gauge 62 by signal lines. The remote control cabinet 7 receives the status signals of the equipment vacuum gauge 4 and the pipeline vacuum gauge 62. The remote control cabinet 7 is connected to the branch shut-off valve 3 and the main shut-off valve 61 by control lines and signal lines. The remote control cabinet 7 controls the actions of the branch shut-off valve 3 and the main shut-off valve 61 and monitors the status of the branch shut-off valve 3 and the main shut-off valve 61. By setting the remote control cabinet 7, the operator can view the evacuation status of each single crystal furnace body in the control room far away from the single crystal furnace and perform corresponding control operations, reducing the number of times the operator goes to the site and improving the efficiency.

[0024] When the remote control cabinet 7 receives that the status signal of the pipeline vacuum gauge 62 is non-vacuum, the remote control cabinet 7 controls the main pipeline stop valve 61 to close through the control line. At the same time, the action status of the main pipeline stop valve 61 is returned to the remote control cabinet 7 through the feedback signal line. When the remote control cabinet 7 receives that the status signal of the equipment vacuum gauge 4 is non-vacuum, the remote control cabinet 7 controls the corresponding branch stop valve 3 on the branch pipeline 22 where the equipment vacuum gauge 4 is located to close through the control line. At the same time, the action status of the branch stop valve 3 is returned to the remote control cabinet 7 through the feedback signal line. After closing the stop valve, the main pipeline 21 or the single crystal furnace connected to the closed branch stop valve 3 can be inspected and repaired. Monitoring the action status of the stop valve facilitates the operator to confirm whether the operation is successfully executed, and increases the reliability of the leak detection system.

[0025] The above shows and describes the basic principle, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. A leak detection system for multiple single crystal furnaces, characterized in that: It includes a vacuum pump (1), an integrated leak detection pipeline (2), a branch cut-off valve (3), an equipment vacuum gauge (4), and an equipment leak detector (5). The integrated leak detection pipeline (2) includes a main pipeline (21) and at least one branch pipeline (22). One end of the main pipeline (21) is connected to the vacuum pump (1), one end of the branch pipeline (22) is connected to the main pipeline (21), the other end of the branch pipeline (22) is connected to the single crystal furnace to be leak detected, and the branch cut-off valve (3) is arranged on the branch pipeline (22). The equipment leak detector (5) is connected to the single crystal furnace to be leak detected, and the equipment vacuum gauge (4) is arranged on the branch pipeline (22) between the single crystal furnace to be leak detected and the branch cut-off valve (3).

2. The leak detection system for multiple single crystal furnaces according to claim 1, wherein: The system is also provided with a main pipeline self-checking module (6). The main pipeline self-checking module (6) includes a main cut-off valve (61), a pipeline vacuum gauge (62), and a pipeline leak detector (63). The main cut-off valve (61) is located at the outlet end of the vacuum pump (1), and the pipeline leak detector (63) is located between the main cut-off valve (61) and the pipeline vacuum gauge (62).

3. The leak detection system for multiple single crystal furnaces according to claim 1, wherein: The number of the equipment leak detectors (5) matches the number of the branch pipelines (22), and the number of the equipment vacuum gauges (4) matches the number of the branch pipelines (22).

4. The leak detection system for multiple single crystal furnaces according to claim 2, characterized in that: The system is also provided with a remote control cabinet (7). The remote control cabinet (7) is connected to the equipment vacuum gauge (4) and the pipeline vacuum gauge (62) by signal lines. The remote control cabinet (7) receives the status signals of the equipment vacuum gauge (4) and the pipeline vacuum gauge (62). The remote control cabinet (7) is connected to the branch cut-off valve (3) and the main cut-off valve (61) by control lines and signal lines. The remote control cabinet (7) controls the actions of the branch cut-off valve (3) and the main cut-off valve (61), and monitors the statuses of the branch cut-off valve (3) and the main cut-off valve (61).

5. The leak detection system for multiple single crystal furnaces according to claim 4, wherein: When the remote control cabinet (7) receives the status signal of the pipeline vacuum gauge (62) as non-vacuum, it controls the main cut-off valve (61) to close. When the remote control cabinet (7) receives the status signal of the equipment vacuum gauge (4) as non-vacuum, it controls the corresponding branch cut-off valve (3) on the branch pipeline (22) where the equipment vacuum gauge (4) is located to close.

6. The leak detection system for multiple single crystal furnaces according to claim 5, wherein: The remote control cabinet (7) has a display function.

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