Novel silicon carbide furnace underframe

Abstract

The utility model relates to a novel silicon carbide furnace underframe, which relates to the technical field of silicon carbide furnaces and comprises a heating furnace and a heating stove, a track is laid on the outer side of the heating stove and extends transversely, a lifting platform is arranged on the track in a sliding mode, and the heating furnace is erected on the lifting platform and moves to the position above the heating stove for heating. By arranging the movable and liftable lifting table, the damage to the silicon carbide furnace caused by direct contact between the bottom of the silicon carbide furnace and fire is avoided; a plurality of vertical lifting rails are arranged on the lifting table in a surrounding mode, a supporting frame is arranged on the lifting rails in a sliding mode, the lifting rails and the supporting frame are matched to meet the requirements for height and temperature adjustment needed by different silicon carbide furnaces, the lifting table can be moved out after heating is finished, and materials can be taken out conveniently. The temperature sensor and the height sensor are arranged at the bottom of the supporting frame, the temperature and the height are sensed and adjusted according to needs, the intelligent degree is high, the application range is wide, and the market requirement is met.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide furnaces, in particular to a new type of silicon carbide furnace chassis. Background Art

[0002] Silicon carbide crystals are the main components of semiconductor devices and have broad application prospects in fields such as aerospace and optoelectronic communication. In the prior art, the seed crystal sublimation method is used to prepare silicon carbide crystals. The sealed silicon carbide furnace is heated to form a thermal field, and the growth source is placed therein for crystal growth.

[0003] Some enterprises use coal or electric heating tubes to bake and heat the silicon carbide furnace. The bottom surface of the silicon carbide furnace is easily damaged when it comes into contact with the heat source, which affects the heating efficiency, and it is also very inconvenient for loading and unloading materials. Summary of the Utility Model

[0004] In order to improve the problems occurring in the use of the silicon carbide furnace in the above background art, the utility model provides a new type of silicon carbide furnace chassis.

[0005] A new type of silicon carbide furnace chassis provided by the utility model adopts the following technical solutions:

[0006] A new type of silicon carbide furnace chassis includes a heating furnace and a heating stove. A track is laid outside the heating stove and extends horizontally. A lifting platform is slidably arranged on the track, and the heating furnace is erected on the lifting platform and moved above the heating stove for heating.

[0007] Preferably, a plurality of vertical lifting rails are arranged around the lifting platform, and a support frame is slidably arranged on the lifting rails. The inner edge of the support frame protrudes and supports the bottom wall of the heating furnace.

[0008] Preferably, a tooth groove is formed at the contact position between the inner edge of the support frame and the bottom wall of the heating furnace to prevent the bottom wall of the heating furnace from sliding, resulting in the heating furnace tipping and slipping, which may cause safety hazards.

[0009] Preferably, a temperature sensor and a height sensor are arranged at the bottom of the support frame. Both the temperature sensor and the height sensor are communicatively connected to a console arranged on one side of the track. The temperature sensor and the height sensor sense the temperature and height and are adjusted as needed, with a high degree of intelligence.

[0010] Preferably, a heat insulation layer is laid inside the lifting platform to reduce heat dissipation.

[0011] Preferably, guardrail plates are arranged on both sides of the track to further reduce safety hazards.

[0012] Preferably, the heating stove is built with heat-resistant bricks, and a heat source is arranged inside the heating stove to heat the bottom plate of the heating furnace.

[0013] In summary, the utility model has the following beneficial technical effects:

[0014] 1. By providing a movable and liftable lifting platform, the utility model avoids direct contact between the bottom of the silicon carbide furnace and the fire, which may cause damage to the silicon carbide furnace. The cooperation between the lifting rails and the support frame meets the requirements of different silicon carbide furnaces for height and temperature adjustment, improves the heating efficiency, and after the heating is completed, the lifting platform can be moved out to facilitate the removal of materials.

[0015] 2. The utility model can be used for heating silicon carbide furnaces such as electric furnaces and carbon furnaces, with wide applicability and meeting the market demand. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is an overall structural schematic diagram of a novel bottom frame of a silicon carbide furnace according to Embodiment 1 of the utility model;

[0017] Figure 2 is a cross-sectional schematic diagram of a novel bottom frame of a silicon carbide furnace according to Embodiment 1 of the utility model;

[0018] Figure 3 is a structural schematic diagram of the support frame according to Embodiment 1 of the utility model;

[0019] Figure 4 is a cross-sectional schematic diagram of the heating stove according to Embodiment 1 of the utility model;

[0020] Figure 5 is an overall structural schematic diagram of a novel bottom frame of a silicon carbide furnace according to Embodiment 2 of the utility model.

[0021] Description of the reference numerals: 1, heating furnace; 2, heating stove; 3, track; 4, lifting platform; 5, lifting rail; 6, support frame; 7, tooth groove; 8, temperature sensor; 9, height sensor; 10, console; 11, heat insulation layer; 12, guardrail plate; 13, heat-resistant brick; 14, heat source; 15, bottom plate; 16, first motor; 17, second motor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The following further describes the utility model in detail in conjunction with Figures 1 - 5 For a further detailed description of the present utility model.

[0023] Embodiment 1 of the utility model discloses a novel bottom frame of a silicon carbide furnace.

[0024] Referring to Figure 1 , a novel bottom frame of a silicon carbide furnace includes a heating furnace 1 and a heating stove 2. A track 3 is laid outside the heating stove 2 and extends horizontally. A lifting platform 4 is slidably arranged on the track 3. The lifting platform 4 is driven to move horizontally by a first motor 16. The heating furnace 1 is erected on the lifting platform 4 and moves above the heating stove 2 for heating.

[0025] Referring to Figure 2 , multiple vertical lifting rails 5 are arranged around the lifting platform 4, a support frame 6 is slidably arranged on the lifting rails 5, the support frame 6 is driven to lift by a second motor 17, and the inner edge of the support frame 6 protrudes and supports the bottom wall of the heating furnace 1.

[0026] Referring to Figure 2 、 Figure 3 , a tooth groove 7 is formed at the contact position between the inner edge of the support frame 6 and the bottom wall of the heating furnace 1. The tooth groove 7 increases the friction between the inner edge of the support frame 6 and the bottom wall of the heating furnace 1, preventing the bottom wall of the heating furnace 1 from sliding and causing the heating furnace 1 to tip over and slide, thus eliminating potential safety hazards.

[0027] Referring to Figure 1 、 Figure 2 、 Figure 3 , a temperature sensor 8 and a height sensor 9 are arranged at the bottom of the support frame 6. Both the temperature sensor 8 and the height sensor 9 are communicatively connected to a console 10 arranged on one side of the rail 3. The communication connection is a type of electrical connection. The temperature sensor 8 and the height sensor 9 sense the temperature and height and transmit electrical signals to the console 10. The console 10 receives the electrical signals and adjusts the height of the support frame 6 on the lifting rail 5 according to the information, with a high degree of intelligence.

[0028] Referring to Figure 2 , a heat insulation layer 11 is laid on the inner side of the lifting platform 4, and the heat insulation layer 11 reduces heat dissipation.

[0029] Referring to Figure 1 , guardrail plates 12 are arranged on both sides of the rail 3. During the heating process, the guardrail plates 12 are provided to prevent the heating furnace 1 from tipping over and sliding, and at the same time prevent personnel from approaching the heating furnace 1, further reducing potential safety hazards.

[0030] Referring to Figure 2 、 Figure 4 , the heating stove 2 is built with heat-resistant bricks 13. The heating stove 2 is dug and built downward on the ground, a space for loading and unloading materials is dug in front of the heating stove 2, and a heat source 14 is arranged inside the heating stove 2 to heat the bottom plate 15 of the heating furnace 1.

[0031] The implementation principle of a new type of silicon carbide furnace bottom frame in Embodiment 1 of the utility model is as follows: A rail 3 is laid outside the heating stove 2, the lifting platform 4 is assembled and slidably arranged on the rail 3. After loading, the heating furnace 1 together with the lifting platform 4 is moved above the heating stove 2. The temperature sensor 8 and the height sensor 9 detect and display the detection results on the console 10. By comparing with the required heating temperature, the height of the support frame 6 on the lifting rail 5 is adjusted. After heating is completed, the lifting platform 4 is translated and the materials in the heating furnace 1 are taken out.

[0032] Embodiment 2 of the utility model discloses a new type of silicon carbide furnace bottom frame.

[0033] Reference Figure 5 , a new type of silicon carbide furnace bottom frame, including a heating furnace 1 and a heating stove 2. A support is arranged outside the heating stove 2, and a track 3 is laid on the top of the support. The track 3 extends horizontally, and a lifting platform 4 is slidably arranged on the track 3. The heating furnace 1 is erected on the lifting platform 4 and moves above the heating stove 2 for heating.

[0034] Reference Figure 4 , Figure 5 , the heating stove 2 is built with heat-resistant bricks 13 above the ground, and a heat source 14 is arranged inside the heating stove 2 to heat the bottom plate 15 of the heating furnace 1.

[0035] The implementation principle of a new type of silicon carbide furnace bottom frame in Embodiment 2 of the utility model is as follows: on the basis of Embodiment 1 of the utility model, the heating furnace 1 is built above the ground, and there is a certain height between the track 3 and the ground. In this structure, the bottom plate 15 at the bottom of the silicon carbide heating furnace 1 is exposed, and the bottom plate 15 can be directly disassembled, which is convenient for loading and unloading materials.

[0036] The above are all the preferred embodiments of the present utility model. The protection scope of the present utility model is not limited by this. Therefore, all equivalent changes made according to the structure, shape, and principle of the present utility model should be covered within the protection scope of the present utility model.

Claims

1. A novel silicon carbide furnace bottom frame, characterized in that: It includes a heating furnace (1) and a heating stove (2). A track (3) is laid outside the heating stove (2) and extends horizontally. A lifting platform (4) is slidably arranged on the track (3). The heating furnace (1) is mounted on the lifting platform (4) and moves above the heating stove (2) for heating.

2. The novel silicon carbide furnace bottom frame according to claim 1, characterized in that: Multiple vertical lifting rails (5) are arranged around the lifting platform (4). A support frame (6) is slidably arranged on the lifting rails (5). The inner edge of the support frame (6) protrudes and supports the bottom wall of the heating furnace (1).

3. The novel silicon carbide furnace bottom frame according to claim 2, characterized in that: A tooth groove (7) is formed at the contact position between the inner edge of the support frame (6) and the bottom wall of the heating furnace (1).

4. A novel silicon carbide furnace bottom frame according to claim 2, characterized in that: A temperature sensor (8) and a height sensor (9) are arranged at the bottom of the support frame (6). Both the temperature sensor (8) and the height sensor (9) are communicatively connected to a control console (10) arranged on one side of the track (3).

5. A novel silicon carbide furnace bottom frame according to claim 1, characterized in that: A heat insulation layer (11) is laid inside the lifting platform (4).

6. A novel silicon carbide furnace bottom frame according to claim 1, characterized in that: Guardrail plates (12) are arranged on both sides of the track (3).

7. A novel silicon carbide furnace bottom frame according to claim 1, characterized in that: The heating stove (2) is built with heat-resistant bricks (13). A heat source (14) is arranged inside the heating stove (2) to heat the bottom plate (15) of the heating furnace (1).

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