Energy-saving intelligent cooling system for lamp source of exposure machine
By combining the design of air-cooling units and water-cooling units, high-energy-consuming components are eliminated, low-energy cooling of exposure machine lamp sources is achieved, high-energy consumption and environmental protection problems in the existing technology are solved, and the energy-saving and environmental protection effect is achieved.
Patent Information
- Application Number
- CN202421628948.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-10
- Publication Date
- 2025-07-29
- Estimated Expiration
- 2034-07-10
AI Technical Summary
The existing exposure machine cooling system is high energy consumption and not environmentally friendly, mainly due to the high power loss of compressors, evaporators and heaters, and the refrigerant is destructive to the ozone layer.
The energy-saving cooling system is adopted that combines air-cooling units and water-cooling units. The fan and cold water pipes are used to cool down, and the airflow temperature is accurately controlled through temperature sensors and flow adjustment valves, and high-energy-consuming components such as compressors, evaporators and heaters are eliminated.
It achieves a low-energy cooling effect, reduces power consumption and avoids the environmental pollution of refrigerant, and improves the environmental protection and efficiency of the system.
Smart Images
Figure CN223167028U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a cooling system, in particular to an energy-saving intelligent cooling system for a light source of an exposure machine. Background Art
[0002] In recent years, exposure machines have been widely used in semiconductor, panel optoelectronics, packaging and other production industries. However, since the exposure machine is a high-energy-consuming device, its light source generates a large amount of heat energy during the manufacturing process. In order to cool the light source to maintain the stability of the system and the manufacturing process, a cooling unit for cooling air flow is usually provided in the exposure machine, and a blower for introducing the cooled air flow into the light source to carry away the heat energy. The existing cooling unit includes a compressor, an evaporator, and a heater. When cooling, the refrigerant circulates in sequence in the compressor, the evaporator, and the heater.
[0003] However, since the compressor, the evaporator, and the heater require high power consumption and maintenance costs, the overall energy consumption of the system will be increased. On the other hand, most of the refrigerant is composed of chlorofluorocarbons, and the chlorofluorocarbons will accelerate the destruction of the ozone layer, which is very environmentally unfriendly. Summary of the Utility Model
[0004] The purpose of the utility model is to provide an energy-saving intelligent cooling system for a light source of an exposure machine that can overcome at least one shortcoming of the background art.
[0005] The energy-saving intelligent cooling system for a light source of an exposure machine of the utility model includes a housing unit, an air-cooling unit, and a water-cooling unit. The housing unit is suitable for accommodating the light source. The air-cooling unit includes an air duct and a blower. The air duct has an air inlet and an air outlet. The blower generates an air flow that enters the housing unit through the air duct and discharges the air flow from the housing unit after passing through the light source. The water-cooling unit includes a cold water pipe disposed in the air duct and for cooling the air flow. The cold water pipe has a water inlet for cooling water to enter and a water outlet for the cooling water to discharge.
[0006] In the energy-saving intelligent cooling system for a light source of an exposure machine of the utility model, the water-cooling unit further includes a flow adjustment valve disposed on the cold water pipe and for adjusting the flow rate of the cooling water.
[0007] The energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model further includes a control unit electrically connected to the air blower and the flow adjustment valve. The control unit includes an inlet air temperature sensor disposed at the air inlet for detecting the temperature of the air flow, an outlet air temperature sensor disposed at the air outlet for detecting the temperature of the air flow, and a control module electrically connected to the inlet air temperature sensor and the outlet air temperature sensor. When the control module determines that the temperature difference between the inlet air temperature sensor and the outlet air temperature sensor exceeds the set temperature range, it will send a signal to drive the flow adjustment valve.
[0008] For the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model, the casing unit includes a housing. The housing has a containing space for arranging the light source, a cold air space spaced from the containing space, an air inlet located on one side of the cold air space for the air flow to enter, and an air outlet spaced from the air inlet for the air flow to discharge. The air cooling unit further includes a connecting pipe away from the air inlet and communicating with the cold air space, at least one air inlet pipe connecting the connecting pipe and the light source, and at least one air outlet pipe connecting the light source and the air outlet. The air flow enters the cold air space after being cooled by the air cooling unit, and passes through the connecting pipe and the at least one air inlet pipe to enter the light source for heat exchange to cool the light source. The air flow that has been heated up after heat exchange is discharged from the air outlet through the air outlet pipe.
[0009] For the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model, the air duct is installed beside the housing, and the air outlet of the air duct is communicatively arranged at the air inlet of the housing. The air blower is arranged in the cold air space of the housing.
[0010] For the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model, the air duct and the air blower are installed beside the housing. One side of the air blower is arranged at the air outlet of the air duct, and the other side of the air blower is arranged at the air inlet of the housing.
[0011] The control unit of the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model can also transmit the temperature signals of the inlet air temperature sensor and the outlet air temperature sensor, as well as the flow signal of the flow adjustment valve to the data collection system.
[0012] The control unit of the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model further includes a control interface electrically connected to the control module and available for operation and setting.
[0013] The energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model. The machine shell unit further includes a filter module disposed inside the shell. The filter module is located between the cold air space and the accommodation space and can filter the air flow entering the accommodation space from the cold air space.
[0014] The beneficial effects of the present utility model are as follows: Through the design of the air cooling unit and the water cooling unit, the use of electric energy can be effectively reduced, and the requirement of cooling can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 is an incomplete cross-sectional side view showing the first embodiment of the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model;
[0016] Figure 2 is an incomplete cross-sectional front view showing the first embodiment;
[0017] Figure 3 is a functional block diagram showing the first embodiment;
[0018] Figure 4 is an incomplete cross-sectional side view showing the second embodiment of the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0019] The present utility model will be described in detail below with reference to the accompanying drawings and embodiments.
[0020] Before the present utility model is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.
[0021] Refer to Figure 1 、 Figure 2 and Figure 3 , the first embodiment of the energy-saving intelligent cooling system of the light source of the exposure machine of the present utility model. The exposure machine is applied to semiconductor, panel optoelectronics, packaging and other manufacturing industries. The light source 9 of the exposure machine at least has a lens group (LENS) 91 and a microlens array (MLA) 92. This first embodiment is to retrofit an existing system, that is, to retrofit or configure the existing cooling system of the exposure machine that is already in operation, and high-energy-consuming components such as compressors, evaporators, and heaters (not shown in the figure) have been shut down or removed. The energy-saving intelligent cooling system includes a machine shell unit 1, an air cooling unit 2, a water cooling unit 3, and a control unit 4.
[0022] The housing unit 1 includes a housing 11 and a filter module 12 disposed within the housing 11. The housing 11 has a receiving space 111 for receiving the light source 9, a cold air space 112 spaced apart from the receiving space 111, an air inlet 113 and an air outlet 114 spaced apart on one side of the cold air space 112, and a ventilation opening 115 located on the other side of the cold air space 112 and communicating the cold air space 112 with the receiving space 111. In this first embodiment, the cold air space 112 is disposed above the receiving space 111. The air inlet 113 allows the cooled air flow (not shown in the figure) from the external environment to enter the cold air space 112. The air outlet 114 discharges the air flow heated by heat exchange through the light source 9. The filter module 12 is located between the cold air space 112 and the receiving space 111 and can filter and purify the air flow entering the receiving space 111 from the cold air space 112. The structure and material of the filter module 12 are not the focus of the present utility model, so they will not be described here.
[0023] The air-cooling unit 2 includes an air duct 21 installed beside the housing 11, a fan 22 disposed within the cold air space 112 of the housing 11, a connecting pipe 23 installed at the ventilation opening 115 away from the air inlet 113, two air inlet pipes 24 connecting the connecting pipe 23 and the light source 9, and two exhaust pipes 25 connecting the light source 9 and the air outlet 114. The air duct 21 has opposite air inlet 211 and air outlet 212. The air duct 21 is disposed at any position in front of the fan 22. In this first embodiment, the air outlet 212 is disposed at the air inlet 113 and is in communication with the air inlet 113. The fan 22 is the fan of the original cooling system of the exposure machine. The operation of the fan 22 generates the air flow flowing from the air inlet 211 of the air duct 21 to the air outlet 212 and entering the cold air space 112, and causes the air flow to be discharged from the housing unit 1 after passing through the light source 9. It should be noted that the number of the air inlet pipes 24 is not limited to two, and the number of the exhaust pipes 25 is not limited to two either. Each of them can be one, three, etc. according to actual needs.
[0024] The working medium of the water cooling unit 3 is cooling water (not shown in the figure), which can come from, for example but not limited to, the cooling water provided by the original plant utility system of the factory, and its temperature is 14° to 20°. The water cooling unit 3 includes a cold water pipe 31 disposed in the air duct 21 for cooling the air flow, and a flow adjustment valve 32 disposed on the cold water pipe 31 for adjusting the flow rate of the cooling water. The cold water pipe 31 has a water inlet 311 for the cooling water to enter and a water outlet 312 for the cooling water to discharge. The cold water pipe 31 surrounds or penetrates the air duct 21, which is equivalent to a water-cooled condenser, and can absorb heat from the air flow passing through it, for reducing the temperature of the air flow, so that the temperature of the air flow entering the cold air space 112 meets the requirements, and its temperature is 20° to 25°. The flow adjustment valve 32 has the functions of flow sensing and flow control, and its structure is not the focus of the present utility model, so it will not be described here.
[0025] The control unit 4 is electrically connected to the fan 22 and the flow adjustment valve 32, and includes an inlet air temperature sensor 41 disposed at the air inlet 211 for detecting the temperature of the air flow, an outlet air temperature sensor 42 disposed at the air outlet 212 for detecting the temperature of the air flow, a control module 43 electrically connected to the inlet air temperature sensor 41 and the outlet air temperature sensor 42, and a control interface 44 electrically connected to the control module 43. When the control module 43 determines that the temperature difference between the inlet air temperature sensor 41 and the outlet air temperature sensor 42 exceeds the set temperature range, it will send a signal to drive the flow adjustment valve 32 to adjust the flow rate of the cooling water, and can effectively control the temperature accuracy of the air flow passing through the cold water pipe 31 within ±0.05°C. The control interface 44 can be operated by the staff to set the air volume, temperature or flow rate required for the working conditions.
[0026] In addition, the control unit 4 can also transmit the temperature signals of the inlet air temperature sensor 41 and the outlet air temperature sensor 42, as well as the flow signal of the flow adjustment valve 32 to the data collection system 5. The data collection system 5 can be configured in a factory building, the cloud, the Internet of Things or other electronic devices, and can be further paired with the control unit 4 to achieve precise temperature control when necessary, making the energy consumption loss, process management and equipment maintenance more efficient.
[0027] In use, the blower 22 operates to allow the air flow to pass through the air duct 21. After being cooled by the air-cooling unit 2, the air flow enters the cold air space 112. A part of the air flow passes through the filter module 12 and enters the accommodation space 111, cooling the ambient air in the accommodation space 111. Another part of the air flow passes through the connecting pipe 23 and the air inlet pipe 24, and enters the light source 9 for heat exchange, so that the light source 9 is cooled. Then, the air flow that has been heated up after heat exchange is discharged from the exhaust port 114 through the exhaust pipe 25.
[0028] Referring to Figure 4 , the structure of the second embodiment of the energy-saving intelligent cooling system for the light source of the exposure machine of the present invention is substantially the same as that of the first embodiment, and the difference lies in that: this second embodiment is a new system, and high-energy-consuming components such as a compressor, an evaporator, and a heater are not provided (not shown in the figure), and the blower 22 is an independent blower. The blower 22 and the air duct 21 are installed beside the housing 11 together. One side of the blower 22 is disposed at the air outlet 212 of the air duct 21, and the other side of the blower 22 is disposed at the air inlet 113 of the housing 11.
[0029] In summary, for the energy-saving intelligent cooling system for the light source of the exposure machine of the present invention, the air duct 21 is provided in front of the blower 22, and the cold water pipe 31 is provided at the air duct 21 to cool the air flow. Therefore, it is not necessary to provide high-energy-consuming components such as a compressor, an evaporator, and a heater, and the effects of low energy consumption and low power consumption can be effectively achieved. On the other hand, the cold water pipe 31 uses the cooling water as the working fluid for cooling, and there will be no problem of refrigerant polluting the environment, which is more environmentally friendly and energy-saving. Therefore, the purpose of the present invention can be truly achieved.
[0030] The above are only specific embodiments of the present invention, and the scope of the claims of the present invention cannot be limited thereby. Moreover, equivalent variations made according to the recorded content of the claims and the description of the present invention should also be covered by the scope of the claims of the present invention.
Claims
1. An energy-saving intelligent cooling system for the light source of an exposure machine, comprising: a housing unit adapted to contain the light source, characterized in that The energy-saving intelligent cooling system further includes: an air-cooling unit and a water-cooling unit. The air-cooling unit includes an air duct and a fan. The air duct has an air inlet and an air outlet. The fan generates an air flow that enters the casing unit through the air duct and discharges the air flow from the casing unit after passing through the light source. The water-cooling unit includes a cold water pipe disposed in the air duct to cool the air flow. The cold water pipe has a water inlet for cooling water to enter and a water outlet for the cooling water to discharge.
2. The energy-saving intelligent cooling system for the light source of the exposure machine according to claim 1, wherein: The water-cooling unit further includes a flow adjustment valve disposed on the cold water pipe for adjusting the flow rate of the cooling water.
3. The energy-saving intelligent cooling system of the light source of the exposure machine according to claim 2, characterized in that: The energy-saving intelligent cooling system further includes a control unit electrically connected to the fan and the flow adjustment valve. The control unit includes an inlet air temperature sensor disposed at the air inlet for detecting the temperature of the air flow, an outlet air temperature sensor disposed at the air outlet for detecting the temperature of the air flow, and a control module electrically connected to the inlet air temperature sensor and the outlet air temperature sensor. When the control module determines that the temperature difference between the inlet air temperature sensor and the outlet air temperature sensor exceeds the set temperature range, it will send a signal to drive the flow adjustment valve.
4. The energy-saving intelligent cooling system of the light source of the exposure machine according to claim 3, characterized in that: The casing unit includes a housing. The housing has a receiving space for the light source, a cold air space spaced from the receiving space, an air inlet located on one side of the cold air space for the air flow to enter, and an air outlet spaced from the air inlet for the air flow to discharge. The air-cooling unit further includes a connecting pipe remote from the air inlet and communicating with the cold air space, at least one air inlet pipe connecting the connecting pipe and the light source, and at least one exhaust pipe connecting the light source and the air outlet. The air flow enters the cold air space after being cooled by the air-cooling unit, and passes through the connecting pipe and the at least one air inlet pipe to enter the light source for heat exchange to cool the light source. The air flow that has been heated up after heat exchange is discharged from the air outlet through the exhaust pipe.
5. The energy-saving intelligent cooling system for the light source of the exposure machine according to claim 4, characterized in that: The air duct is installed beside the housing, and the air outlet of the air duct is communicatively connected to the air inlet of the housing. The fan is disposed in the cold air space of the housing.
6. The energy-saving intelligent cooling system for the light source of the exposure machine according to claim 4, characterized in that: The air duct and the fan are installed beside the housing. One side of the fan is disposed at the air outlet of the air duct, and the other side of the fan is disposed at the air inlet of the housing.
7. The energy-saving intelligent cooling system of the light source of the exposure machine according to claim 3, characterized in that: The control unit can also transmit the temperature signals of the inlet air temperature sensor and the outlet air temperature sensor, as well as the flow signal of the flow adjustment valve to the data collection system.
8. The energy-saving intelligent cooling system of the light source of the exposure machine according to claim 3, characterized in that: The control unit further includes a control interface electrically connected to the control module and available for operation and setting.
9. The energy-saving intelligent cooling system of the light source of the exposure machine according to claim 4, characterized in that: The casing unit further includes a filter module disposed in the housing. The filter module is located between the cold air space and the receiving space and can filter the air flow entering the receiving space from the cold air space.