Operation box capable of isolating dust

Abstract

The operation box capable of isolating the dust comprises a support, an operation bin, carrier supporting clamps and a dust collecting bin, the support is used for supporting the operation bin, at least one carrier supporting clamp is arranged in the operation bin and used for placing materials to be operated, the dust collecting bin is arranged on the lower portion of the operation bin, and the carrier supporting clamps are used for placing the materials to be operated. The operation box capable of isolating the dust has the effect of isolating an operation space, polishing work of semiconductors such as silicon carbide (SiC) and gallium nitride (GaN) is completed, meanwhile, the influence on the workshop environment is reduced, and meanwhile the health and safety of operators are guaranteed.

Description

Technical Field

[0001] The utility model relates to a box body, and further relates to an operation box for isolating dust. Background Art

[0002] With the rapid development of technology, many cutting-edge technologies are developing in China, and many restrictive conditions are found. For example, during the preparation of semiconductor materials such as silicon carbide (SiC) and gallium nitride (GaN), some by-products will be generated on the surface of the wafer carrier, and these by-products need to be removed frequently to ensure the quality of the semiconductor material.

[0003] Semiconductor material preparation equipment operates in a dust-free workshop, and the removal work of the by-products of the wafer carrier is usually carried out in the same workshop. Currently, the main removal methods include manual grinding. During the grinding process, a certain amount of dust will be generated, and the dust is likely to cause the cleanliness level of the workshop to fail to meet the standard, affecting the operation of other equipment.

[0004] Another removal method is to transport the wafer carrier to another workshop for processing. In this way, both equipment and personnel need to enter and exit the dust-free workshop of the equipment, which is time-consuming and will also affect the cleanliness level of the workshop.

[0005] At the same time, dust such as silicon carbide (SiC) and gallium nitride (GaN) will be generated during the by-product removal process. If inhaled into the human body, it will cause great harm to the human body. Therefore, during the removal process, it is necessary to isolate the dust generated by grinding from the operators as much as possible to ensure the health of the operators.

[0006] In summary, during the preparation of semiconductor materials such as silicon carbide (SiC) and gallium nitride (GaN), a suitable place is urgently needed to remove the by-products of the wafer carrier. Summary of the Invention

[0007] Object of the Invention: To solve the problems that the dust formed during the removal of the by-products on the surface of the wafer carrier causes the cleanliness level of the workshop to fail to meet the standard; transporting it to another workshop for cleaning is time-consuming; and the dust cannot be isolated from the operators.

[0008] To solve the above problems, an operation box for isolating dust of the utility model includes a bracket, an operation chamber, a carrier support fixture, and a dust collection chamber. The bracket is used to support the operation chamber. At least one carrier support fixture is arranged inside the operation chamber, and the carrier support fixture is used to place the material to be operated. The dust collection chamber is arranged at the lower part of the operation chamber and is communicated with the operation chamber.

[0009] In one embodiment, the bottom of the bracket includes 4 caster cups, and the bracket is welded by square tubes, angle irons, angle steels or sheet metal bending parts. In one embodiment, the operation chamber includes an upper cover, side plates and a bottom plate. There are 1 - 200 air inlets provided on the upper cover, and the side plates are 3 - 8 in number and are enclosed between the upper cover and the bottom plate.

[0010] In one embodiment, an openable door is provided on the upper cover and / or at least one side plate for material access. The openable door is connected to the upper cover or the side plate through a hinge and a spring bolt.

[0011] In one embodiment, at least one side plate is provided with a glove isolation structure, and gloves are installed through the glove isolation structure.

[0012] In one embodiment, 1 - 5 purge structures are provided on the bottom plate, the upper cover and / or at least one side plate. The purge structure includes a pipeline and a spray gun, and gas is discharged from the spray gun into the operation chamber through the pipeline for purging the dust inside the operation chamber.

[0013] In one embodiment, the bottom plate includes several holes for serving as a passage for the dust and gas inside the operation chamber to reach the dust collection bin.

[0014] In one embodiment, the number of carrier support jigs is set to 1 - 50.

[0015] In one embodiment, the shape of the dust collection bin is in the shape of an inverted pyramid, a cone, etc., with one end large and the other end small. The large - headed side is connected to the side plate or the bottom plate of the operation chamber, and a suction port is provided on the small - headed side. The suction port is connected to a suction system.

[0016] In one embodiment, a valve is also located at the suction port, and the valve can be closed when the rear suction system is abnormal.

[0017] An operation box for isolating dust provided by the present utility model has the effect of isolating the operation space, and can complete the grinding work of semiconductor materials such as silicon carbide (SiC) and gallium nitride (GaN) in a dust - free workshop, greatly reducing the impact on the workshop environment and ensuring the health and safety of operators at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 : It is a schematic diagram of the overall structure of an operation box for isolating dust in an embodiment of the present utility model.

[0019] Figure 2 : It is a rear view of an operation box for isolating dust in an embodiment of the present utility model.

[0020] Figure 3: It is the top view of an operation box for isolating dust described in the embodiments of the present utility model.

[0021] Figure 4 : It is the front view of an operation box for isolating dust described in the embodiments of the present utility model.

[0022] The meanings of the serial numbers are as follows:

[0023] 1: Support; 11: Foot cup with casters; 2: Operation chamber; 21: Upper cover; 211: Air inlet; 22: Side plate; 221: Openable door; 2211: Door panel; 2212: Spring bolt; 2213: Hinge; 222: Glove isolation structure; 23: Bottom plate; 24; Purge structure; 241; Pipeline; 242; Spray gun; 3: Carrier support fixture; 4: Dust collection bin; 41: Cone; 42: Valve. Specific embodiments

[0024] For a clearer understanding and recognition of the present utility model, the following combines specific embodiments to elaborate on the content of the present utility model in detail.

[0025] As Figure 1 shown, an operation box for isolating dust of the present utility model includes a support 1, an operation chamber 2, a carrier support fixture 3, and a dust collection bin 4. The support 1 is used to support the operation chamber 2. At least one carrier support fixture is arranged inside the operation chamber 2 for placing semiconductor materials to be operated such as silicon carbide (SiC) and gallium nitride (GaN). The dust collection bin 4 is arranged below the operation chamber 2 and is communicated with the operation chamber 2.

[0026] The support 1 is welded by stainless steel square tubes. The bottom of the support 1 includes 4 foot cups 11 with casters. The support 1 can be welded by square tubes, angle irons, angle steels, and sheet metal bending parts. The material can be stainless steel or carbon steel. When using carbon steel, surface powder spraying or oil spraying and other rust prevention measures need to be carried out after welding. The bottom of the support 1 includes casters and foot cups. According to the weight of the operation box, one or both of the casters and foot cups can be omitted.

[0027] The operation chamber 2 is connected to the support 1 by welding or screw connection. It is connected to the dust collection bin by welding or screw connection. It is not connected to the carrier support fixture or is connected by screw connection.

[0028] The operation chamber 2 includes an upper cover 21, a side plate 22, and a bottom plate 23.

[0029] The upper cover 21 and the side plate 22 are connected by screws, quick buckles, or hinges. The material can be a transparent material or a translucent material, such as acrylic, polycarbonate (PC plastic), tempered glass, etc. An air inlet 211 is provided on the upper cover 21, and the number of air inlets can be 1 - 200. Preferably, the number of air inlets is set to 4 - 8; the total air intake cross-sectional area of the air inlet 211 is adjustable. This prevents gas from diffusing outside the operation box through this channel.

[0030] As Figure 2 As shown, the side plate 22 has 3 - 8 sides and encloses between the upper cover 21 and the bottom plate 23. The upper cover 21, the side plate 22, and the bottom plate 23 form an enclosed space. Preferably, the number of side plates 22 is 4. Among them, at least one side plate is provided with an openable door 221 for material access. The openable door 221 can be made of a single layer of plastic parts or can be set to two layers, with the outer layer being welded from carbon steel or stainless steel and the inner layer being an inlaid plastic layer. When welded with carbon steel on the outside, anti-rust measures such as painting and spraying need to be taken. When the upper cover has the function of material access and egress, the side openable door can be omitted. The door panel 2212 of the openable door 221 is made of a polypropylene (PP) plastic plate, and the openable door 221 is connected to the side plate 22 through a hinge 2213 and a spring bolt 2211.

[0031] As Figure 3 As shown, in one embodiment, at least one side plate 22 is provided with a glove isolation structure 222. Gloves are installed through the glove isolation structure 222. The operator is outside the operation chamber 2, and the arm extends into the operation chamber 2 through the glove, realizing the isolation between the inside and outside of the operation chamber 2. Preferably, 3 side plates 22 are provided with glove isolation structures 222. Further, at least one side plate 22 is provided with 1 - 5 purging structures. Preferably, the number of purging structures is 2. The purging structure includes a pipeline 241 and a spray gun 242, and gas is discharged from the spray gun 242 into the operation chamber 2 through the pipeline 241 for purging the dust inside the operation chamber. According to requirements, the purging structure can also be provided on the bottom plate 23 or the upper cover 21. The side plate 22 is a two-layer structure, with the outer layer being welded from carbon steel or stainless steel and the inner layer being an inlaid plastic layer.

[0032] As Figure 3 As shown, the bottom plate 23 is composed of plastic parts and contains several holes, which are used as channels for the dust and gas in the operation chamber 2 to reach the dust collection bin 4.

[0033] The carrier support fixture 3 is composed of plastic parts. It is used inside the operation chamber 2 to support the carrier to be operated, such as semiconductor materials like silicon carbide (SiC) and gallium nitride (GaN), facilitating the operation of the operator. The carrier support fixture is composed of plastic, metal, or a combination of plastic and metal parts. According to the usage requirements, the number of carrier support fixtures can be set to 1 - 50.

[0034] The shape of the dust collection bin 4 is in the shape of a inverted pyramid, inverted cone or the like with one end large and the other end small. One side of the large head is connected to the side plate 22 or the bottom plate 23 of the operation bin 2. The connection method can be welding, bonding or screw connection. The material can be made of plastic, metal or a mixture of plastic and metal. On one side of the small head of the dust collection bin 4, an air extraction port is provided, such as KF16, KF25, KF40, KF50, KF63, ISO63, quick coupling flange, etc. The air extraction port is connected to an air extraction system for discharging dust. Further, a valve is also provided at the position of the air extraction port. When the rear air extraction system is abnormal, the valve can be closed.

[0035] An operation box for isolating dust provided by the present utility model has the effect of isolating the operation space, and can complete the polishing work of semiconductor materials such as silicon carbide (SiC) and gallium nitride (GaN) in a dust-free workshop, greatly reducing the impact on the workshop environment, and at the same time ensuring the health and safety of operators.

[0036] The above embodiments only represent some implementation manners of the present utility model, and their descriptions are relatively specific and detailed, but should not be construed as a limitation on the scope of the invention of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the inventive concept, several modifications and improvements can still be made, and these all belong to the protection scope of the utility model invention. Therefore, the protection scope of the present utility model should be subject to the appended claims.

Claims

1. An operating box for isolating dust, characterized in that: It includes a bracket, an operation chamber, a carrier support fixture and a dust collection chamber. The bracket is used to support the operation chamber. The operation chamber includes an upper cover, side plates and a bottom plate. At least one carrier support fixture is arranged inside the operation chamber, and the carrier support fixture is used to place the material to be operated. The dust collection chamber is arranged below the operation chamber and is communicated with the operation chamber. The dust collection chamber is in the shape of a large end and a small end. One side of the large end is connected to the side plate or the bottom plate of the operation chamber, and one side of the small end is provided with an air extraction port, and the air extraction port is connected to an air extraction system.

2. The operating box for isolating dust according to claim 1, wherein: The bottom of the bracket includes 4 caster cups, and the bracket is welded by square tubes, angle irons, angle steels or sheet metal bending parts.

3. The operation box for isolating dust according to claim 1, wherein: 1-200 air inlets are arranged on the upper cover, and the side plates are 3-6 sides and enclose between the upper cover and the bottom plate.

4. The operating box for isolating dust according to claim 1, wherein: An openable door is arranged on the upper cover and / or at least one side plate for the entry and exit of materials. The openable door is connected to the upper cover or the side plate through a hinge and a spring bolt.

5. The operating box for isolating dust according to claim 1, wherein: At least one side plate is provided with a glove isolation structure, and gloves are installed through the glove isolation structure.

6. The operating box for isolating dust according to claim 1, wherein: 1-5 purging structures are arranged on the bottom plate, the upper cover and / or at least one side plate. The purging structure includes a pipeline and a spray gun, and gas is discharged from the spray gun into the operation chamber through the pipeline for purging the dust inside the operation chamber.

7. The operating box for isolating dust according to claim 1, wherein: The bottom plate includes several holes, which are used as channels for the dust and gas in the operation chamber to reach the dust collection chamber.

8. The operation box for isolating dust according to claim 1, characterized in that: The number of the carrier support fixtures is set to be 1-50.

9. The operating box for isolating dust according to claim 1, wherein: A valve is also located at the air extraction port. When the rear air extraction system is abnormal, the valve can be closed.

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