Transportation device

Abstract

The transportation device comprises an adjusting part and a plurality of bearing parts, the multiple bearing parts are arranged at intervals, one end of each bearing part is provided with a moving part, each bearing part is provided with a bearing part, the multiple moving parts are used for driving the bearing parts to move, and the multiple bearing parts are used for carrying objects cooperatively; the adjusting part comprises a plurality of adjusting beams, and each adjusting beam is connected between the two bearing parts and used for adjusting the interval between the connected bearing parts. The moving part at one end of the bearing part can drive the bearing part to move, and the bearing parts on the multiple bearing parts can carry objects cooperatively. The adjusting beam can adjust the interval between the two bearing parts connected with the adjusting beam, so that the adjusting beam has high flexibility and adaptability, can meet the transportation requirements of sealing covers of various specifications, becomes an efficient auxiliary tool on a semiconductor equipment production line, and pushes the semiconductor industry to develop to a higher level.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor transportation, and particularly relates to a transportation device. Background Art

[0002] The semiconductor industry is an important part of modern high-tech industries, and its manufacturing process involves numerous highly precise processes and technologies. At normal temperature and pressure, the environment is filled with a large number of impure substances, which are prone to oxidize and contaminate chips during semiconductor manufacturing, seriously affecting the quality and production efficiency of chips. Therefore, semiconductor production needs to be carried out in a high-vacuum environment. To achieve this harsh condition, the vacuum system in the semiconductor industry has become a key infrastructure. In the vacuum system, in order to meet diverse production needs, it is necessary to flexibly adopt vacuum chambers of different specifications, which has promoted the diversification of vacuum chamber sealing covers.

[0003] When the sealing cover is transported, a transport vehicle with corresponding dimensions needs to be customized. In the related art, the transport vehicle for the sealing cover can only be adapted to one specification of the sealing cover and cannot meet the transport requirements of multiple specifications of the sealing cover. Summary of the Utility Model

[0004] An embodiment of this application provides a transportation device that can meet the transportation requirements of multiple specifications of sealing covers.

[0005] An embodiment of this application provides a transportation device, which includes an adjusting member and a plurality of carrying members; the plurality of carrying members are arranged at intervals, one end of each carrying member is provided with a moving part, each carrying member is provided with a carrying part, the plurality of moving parts are used to drive the carrying members to move, and the plurality of carrying parts are used to cooperate in carrying objects; the adjusting member includes a plurality of adjusting beams, and each adjusting beam is connected between two of the carrying members for adjusting the interval between the connected carrying members.

[0006] Optionally, the adjusting beam includes a main beam, a secondary beam and a limiting member; the main beam is installed on one of the carrying members, the secondary beam is telescopically arranged in the main beam and is installed on another carrying member; the limiting member is installed between the main beam and the secondary beam for limiting the secondary beam.

[0007] Optionally, there are four carrying members, and the four carrying members are all parallel to the first direction; in the second direction and the third direction, the adjusting beams are connected between adjacent two of the carrying members; the second direction and the third direction are respectively perpendicular to the first direction.

[0008] Optionally, the adjusting beam arranged in the second direction is parallel to the second direction; the adjusting beam arranged in the third direction is parallel to the third direction.

[0009] Optionally, along the first direction, the adjusting beam parallel to the second direction and the adjusting beam parallel to the third direction are staggeredly installed on the bearing member.

[0010] Optionally, in the projection along the first direction, the main beam of each adjusting beam is adjacent to the secondary beam of the adjacent adjusting beam.

[0011] Optionally, along the first direction, there are multiple adjusting members, and the multiple adjusting members are arranged in parallel; in the projection along the first direction, the main beams and the secondary beams of the adjacent adjusting members are overlapped.

[0012] Optionally, a first limiting hole is provided on the main beam, a second limiting hole is provided on the secondary beam, the limiting member is respectively inserted into the first limiting hole and the second limiting hole, and the first limiting hole and / or the second limiting hole are multiple.

[0013] Optionally, the aperture of the first limiting hole is larger than the aperture of the second limiting hole, the second limiting hole is a threaded hole, and the second limiting hole is threadedly connected to the limiting member.

[0014] Optionally, the aperture of the first limiting hole is smaller than the aperture of the second limiting hole, the first limiting hole is a threaded hole, and the first limiting hole is threadedly connected to the limiting member.

[0015] Optionally, a position mark is provided on the secondary beam, an indicating portion is provided on the main beam, and the position mark cooperates with the indicating portion to indicate the size of the adjusting beam.

[0016] Optionally, a first limiting hole is provided on the main beam, the first limiting hole is a threaded hole, the limiting member is provided with a threaded portion, the threaded portion is threadedly connected to the threaded hole, and the threaded portion is provided with an abutting end, and the abutting end abuts against the secondary beam to limit the expansion and contraction of the secondary beam.

[0017] Optionally, a sliding groove is provided on the main beam, the secondary beam is located in the sliding groove and is slidably matched with the sliding groove; perpendicular to the expansion and contraction direction of the adjusting beam, the sliding groove penetrates at least a part of the surface of the main beam.

[0018] Optionally, a sliding groove is provided on the main beam, the secondary beam is located in the sliding groove and is slidably matched with the sliding groove; a first guiding portion is provided in the sliding groove, a second guiding portion is provided on the secondary beam, and the first guiding portion is attached to the second guiding portion.

[0019] Optionally, the carrier portion includes a carrier pad and a fixing arm; the carrier pad is used to contact the object to be carried; a fixing member is provided on the fixing arm, and the fixing member is used to fasten the object to be carried; along the first direction, a plurality of the carrier portions are located on a plane perpendicular to the first direction.

[0020] Optionally, along the first direction, a plurality of the carrier portions are located on a plurality of planes perpendicular to the first direction.

[0021] Optionally, the carrier member is a rectangular rod, and weight-reducing holes are provided on the carrier member; along the first direction and / or the second direction, the adjusting beam is installed in the weight-reducing holes.

[0022] The embodiment of the present application provides a transportation device, which includes a carrier member and an adjusting member. There are a plurality of carrier members, and the plurality of carrier members are arranged at intervals. The moving member at one end of the carrier member can drive the carrier member to move, and the carrier portions on the plurality of carrier members can cooperate to carry objects. The adjusting member includes a plurality of adjusting beams, and each adjusting beam is connected between two carrier members. The adjusting member can adjust the interval between any adjacent carrier members through the adjusting beam, so it has high flexibility and adaptability, can safely and efficiently transport sealing covers of various shapes and sizes, reduce the labor burden, and significantly improve the handling efficiency. Therefore, it can meet the transportation requirements of sealing covers of various specifications, become an efficient auxiliary tool on the semiconductor equipment production line, and promote the semiconductor industry to develop to a higher level. Description of the Drawings

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative efforts.

[0024] Figure 1 It is a schematic structural diagram of the transportation device provided by some embodiments of the present application;

[0025] Figure 2 It is a schematic diagram of the usage state of the transportation device provided by some embodiments of the present application;

[0026] Figure 3 It is a schematic structural diagram of the adjusting member provided by some embodiments of the present application;

[0027] Figure 4 It is a schematic structural diagram of the adjusting member provided by some other embodiments of the present application;

[0028] Figure 5 It is a schematic structural diagram of the adjusting member provided by some other embodiments of the present application.

[0029] In the drawings:

[0030] 1 - Bearing member; 11 - Bearing part; 111 - Bearing pad; 112 - Fixed arm; 12 - Moving part; 13 - Weight reduction hole;

[0031] 2 - Adjusting member; 21 - Main beam; 211 - Sliding groove; 212 - First limiting hole; 22 - Limiting member; 23 - Sub - beam; 231 - Second limiting hole; 232 - Position mark; 24 - First hinge rod; 25 - Second hinge rod; 26 - Third hinge rod; 27 - Fourth hinge rod; 28 - Lead screw; 29 - Sleeve rod; 210 - First sliding rod.

[0032] 3 - Sealing cover;

[0033] X - Third direction; Y - Second direction; Z - First direction. Detailed implementation mode

[0034] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the following further describes the present application in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than limiting the present application. For those skilled in the art, the present application can be implemented without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0035] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non - exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, the elements defined by the statement "including..." do not exclude the existence of additional identical elements in the process, method, article or device including the said elements.

[0036] The semiconductor industry is an important part of modern high-tech industries, and its manufacturing process involves numerous highly precise processes and technologies. At normal temperature and pressure, the environment is filled with a large number of impure substances. During the semiconductor manufacturing process, these substances are prone to oxidizing and contaminating the chips, seriously affecting the quality and production efficiency of the chips. Therefore, the production of semiconductors needs to be carried out in a high-vacuum environment. To achieve this stringent condition, the vacuum system in the semiconductor industry has become a key infrastructure, and this vacuum system mainly includes components such as a vacuum chamber, a sealing cover 3, and vacuum valves.

[0037] In the complex process of chip manufacturing, in order to meet diverse production requirements and ensure the stability and efficiency of the production process, it is necessary to flexibly adopt vacuum chambers of different specifications and sizes, which in turn promotes the diversification of the design of the cavity sealing cover 3.

[0038] When transporting the sealing cover 3, the size of the sealing cover 3 transport vehicle needs to match the size of the sealing cover 3. In the related art, the sealing cover 3 transport vehicle is customized according to the specification of the sealing cover 3 and is only applicable to the sealing cover 3 of this specification, and it cannot be interchanged and used between different specifications of the sealing cover 3.

[0039] Although the sealing cover transport vehicle in the related art can meet the transportation requirements of a specific sealing cover 3 to a certain extent, its versatility is poor and it cannot be applicable to the transportation of sealing covers 3 of multiple specifications. This defect is particularly obvious in the production process of highly specialized semiconductor equipment. Each type of sealing cover 3 needs to be equipped with a dedicated transport vehicle, which not only increases the production cost, prolongs the production time limit, but also directly leads to a significant increase in the floor area of the production site, causing a great waste of space resources.

[0040] In view of this, the present application provides a transport device that can meet the transportation requirements of sealing covers 3 of multiple specifications.

[0041] Please refer to Figures 1 to 5 , Figure 1 which is a schematic structural diagram of the transport device provided by some embodiments of the present application; Figure 2 which is a schematic diagram of the use state of the transport device provided by some embodiments of the present application;

[0042] Figure 3 which is a schematic structural diagram of the adjusting member provided by some embodiments of the present application; Figure 4 which is a schematic structural diagram of the adjusting member provided by some other embodiments of the present application; Figure 5 which is a schematic structural diagram of the adjusting member provided by some other embodiments of the present application.

[0043] Some embodiments of the present application provide a transportation device, which includes a carrier 1 and an adjusting member 2. There are multiple carriers 1, and the multiple carriers 1 are arranged at intervals. One end of each carrier 1 is provided with a moving member 12, and each carrier 1 is provided with a carrying part 11. The multiple moving members 12 can drive the carrier 1 to move, and the multiple carrying parts 11 can cooperate to carry objects; the adjusting member 2 includes multiple adjusting beams, and each adjusting beam is connected between two carriers 1 for adjusting the interval between the connected carriers 1.

[0044] In the transportation device, each end of each adjusting beam is connected to a carrier 1, and there are multiple adjusting beams, so that the connection between all the carriers 1 and the adjusting member 2 can be realized. When the multiple carriers 1 are connected to the adjusting member 2, the number of adjusting beams in the adjusting member 2 can be greater than the number of carriers 1, the number of adjusting beams can also be equal to the number of carriers 1, and the number of adjusting beams can also be less than the number of carriers 1. Exemplarily, when the number of carriers 1 is three, the number of adjusting beams can be two. Among the three carriers 1, two carriers are respectively connected to one adjusting beam, and the remaining one carrier is connected to two adjusting beams; when the number of carriers 1 is four, the number of adjusting beams can be four, and each carrier 1 is connected to two adjusting beams, and the four adjusting beams can be located on the four sides of a quadrilateral; when the number of carriers 1 is four, the number of adjusting beams can be six, and each carrier 1 is connected to three adjusting beams. Among the six adjusting beams, four adjusting beams can be located on the four sides of a quadrilateral, and the remaining two adjusting beams can be located on the two diagonals of the quadrilateral.

[0045] When the adjusting beam is connected to the carrier 1, the adjusting beam can be perpendicular to the carrier 1, or the adjusting beam can be non-perpendicular to the carrier 1. The adjusting beam and the carrier 1 can be fixedly connected (such as clamped connection, welded connection, bolted fastening connection, etc.), or can be movably connected (such as the adjusting beam is hinged to the carrier 1). Exemplarily, when the number of carriers 1 and the number of adjusting beams are both three, each carrier 1 is connected to two adjusting beams, and the carrier 1 is hinged to the adjusting beam. The carriers 1 can be located at the three vertices of a triangle, and the adjusting beams can be located on the three sides of the triangle. The three adjusting beams can respectively adjust the interval between the two carriers connected thereto.

[0046] In the transportation device, it can also be that among all the adjusting beams, two adjacent adjusting beams are connected, so that the entire adjusting member 1 forms a framework. On this basis, multiple carriers 1 are installed on the adjusting member 1. Exemplarily, there are four adjusting beams, and the four adjusting beams are connected into a quadrilateral framework. There are four carriers 1, and the four carriers 1 are respectively located at the four vertices of the quadrilateral framework, and each carrier 1 is connected to two adjusting beams.

[0047] The carrier 1 plays a supporting role and bears the weight of the sealing cover 3. The sealing cover 3 is placed on multiple bearing parts 11. There are multiple carriers 1, and the number thereof is at least 3. For example, the number of carriers 1 can be 3, 4, 5, 6, etc.

[0048] The adjusting member 2 can arbitrarily adjust the interval between the carriers 1 at both ends of the beam through multiple adjusting beams. Furthermore, the interval between any two adjacent carriers 1 can be adjusted, rather than only the interval between two adjacent carriers 1 in a specific direction being adjustable. When the adjusting member 2 adjusts the interval between any two adjacent carriers 1 through the adjusting beam, there can be various implementation forms.

[0049] As an implementation form of the adjusting member 2, the adjusting member 2 includes multiple adjusting beams. Between two carriers 1, the adjusting beam includes multiple hinged rods that are hinged to each other. By controlling the hinged angle of the hinged rods, the purpose of adjusting the interval between the two carriers 1 is achieved. For example, as Figure 3 shown, the adjusting beam includes a first hinged rod 24, a second hinged rod 25, a third hinged rod 26, and a fourth hinged rod 27. The first end of the first hinged rod 24 is fixedly installed on one carrier 1. The second end of the first hinged rod 24 is hinged to the first end of the second hinged rod 25. The second end of the second hinged rod 25 is hinged to the first end of the third hinged rod 26. The second end of the third hinged rod 26 is hinged to the first end of the fourth hinged rod 27. The second end of the fourth hinged rod 27 is fixedly installed on another carrier 1. By adjusting the included angle between the second hinged rod 25 and the third hinged rod 26 and fixing the included angle, the purpose of adjusting the interval between the two carriers 1 can be achieved.

[0050] As another implementation form of the adjusting member 2, between two carriers 1, the adjusting beam of the adjusting member 2 can include a sleeve rod 29 and a lead screw 28. The sleeve rod 29 is provided with internal threads along the axial direction, and the lead screw 28 is provided with external threads along the axial direction. By adjusting the length of the threaded connection between the sleeve rod 29 and the lead screw 28, the purpose of adjusting the interval between the two carriers 1 can be achieved. For example, as Figure 4 shown, one end of the sleeve rod 29 is fixedly installed on the carrier 1. The other end of the sleeve rod 29 is threadedly connected to the lead screw 28. The lead screw 28 is installed on another carrier 1 through a bearing, and the lead screw 28 can rotate on this carrier 1. By rotating the lead screw 28, the interval between the two carriers 1 can be adjusted.

[0051] As yet another implementation form of the adjusting member 2, between two carriers 1, the adjusting beam of the adjusting member 2 can include a first sliding rod 210 and a second sliding rod. The first sliding rod 210 is slidably matched with the second sliding rod. By adjusting the overlapping length of the first sliding rod 210 and the second sliding rod, the interval between the two carriers 1 can be adjusted. For example, as Figure 5As shown in the figure, a slide rail is axially installed on the first slide bar 210. A plurality of first pin holes are provided on the slide rail. A slider is installed on the second slide bar, and a second pin hole is provided on the slider. The slide rail is in sliding fit with the slider, and a limit pin is inserted into the second pin hole and the first pin hole for limiting, so that the interval between the two bearing members 1 can be adjusted.

[0052] The moving member 12 is a member for facilitating the movement of the transportation device. The moving member 12 can be a wheel or a robotic arm that can move on the ground. When the moving member 12 is a wheel, it can be a caster or an electric wheel with its own motor.

[0053] In the technical solution of the above embodiment, the transportation device includes a bearing member 1 and an adjusting member 2. There are a plurality of bearing members 1, and the plurality of bearing members 1 are arranged at intervals. The moving member 12 at one end of each bearing member 1 can drive the bearing member 1 to move, and the bearing portion 11 on each bearing member 1 can cooperate to bear the sealing cover 3 (it can also bear other objects other than the sealing cover 3). The adjusting member 1 includes a plurality of adjusting beams, and each adjusting beam is connected between two bearing members 1. The adjusting member 2 can adjust the interval between any adjacent bearing members 1 through the adjusting beam, rather than only being able to adjust the interval between specific two bearing members 1. Therefore, it has high flexibility and adaptability, can safely and efficiently transport sealing covers 3 of various shapes and sizes, reduce the labor burden, and significantly improve the handling efficiency. Thus, it can meet the transportation requirements of sealing covers 3 of various specifications, become an efficient auxiliary tool on the semiconductor equipment production line, and promote the development of the semiconductor industry to a higher level.

[0054] In some embodiments of the present application, the adjusting beam includes a main beam 21, a secondary beam 23, and a limiting member 22; the main beam 21 is installed on one bearing member 1, the secondary beam 23 is telescopically arranged in the main beam 21 and is installed on another bearing member 1; the limiting member 22 is installed between the main beam 21 and the secondary beam 23 and can limit the secondary beam 23.

[0055] Both the main beam 21 and the auxiliary beam 23 are rod-shaped, which can be round rods, square rods, or rods with an elliptical cross-section. The main beam 21 is hollow, and the auxiliary beam 23 is located inside the main beam 21 and can slide relative to the main beam 21, thereby realizing telescopic arrangement inside the main beam 21. The limiting member 22 can be installed on the main beam 21 to connect with the auxiliary beam 23 through the main beam 21, thereby limiting the auxiliary beam 23. For example, the limiting member 22 can pass through the main beam 21 in a direction perpendicular to the axis of the main beam 21 and be clamped or abutted against the auxiliary beam 23 to prevent the auxiliary beam 23 from sliding inside the main beam 21. To facilitate the limiting member 22 to pass through the main beam 21, corresponding holes can be machined on the main beam 21. In addition, the limiting member 22 can also be installed on the auxiliary beam 23 to connect with the main beam 21 through the auxiliary beam 23, thereby limiting the auxiliary beam 23. For example, the limiting member 22 can be installed inside the auxiliary beam 23, and a plurality of clamping grooves are provided inside the main beam 21, and the limiting member 22 can be connected by clamping with different clamping grooves.

[0056] There are multiple adjusting beams, and each adjusting beam is connected to a bearing member 1 at both ends. The adjusting beam is connected between two adjacent bearing members 1, and the load borne forms an acute angle with the length direction of the adjusting beam. For example, the load borne by the adjusting beam can be along the axial direction of the adjusting beam or can form an acute angle with the axial direction of the adjusting beam. As a component for connecting and adjusting the bearing member 1, the load borne by the adjusting beam is less than the load borne by the bearing member 1. To reduce the weight of the transportation device, the adjusting beam can be made of aluminum alloy material, can be made of polymer material (such as processed from nylon rods), and of course, can also be made of materials such as 45# steel and 40Cr steel. Of course, the bearing member 1 can also be made of the above materials.

[0057] Each adjusting beam is connected to a bearing member 1 at both ends, and multiple adjusting beams can be connected to each bearing member 1. Exemplarily, when there are four bearing members 1 and their projections are located at the four vertices of a rectangle, there can be four adjusting beams, and the projections of the four adjusting beams enclose a rectangle; there can also be six adjusting beams. Compared with the case of setting four adjusting beams, for the two extra adjusting beams, each adjusting beam can be connected to two bearing members 1 on the diagonal of the rectangle respectively.

[0058] In the technical solution of the above embodiment, the auxiliary beam 23 is telescopically arranged inside the main beam 21, and the main beam 21 can support the auxiliary beam 23 in the circumferential direction of the auxiliary beam 23. Thus, when the adjusting beam bears axial load and / or radial load, the auxiliary beam 23 can smoothly telescope inside the main beam 21, reducing or even avoiding jamming when adjusting the interval between the two bearing members 1.

[0059] In some embodiments of the present application, there are four bearing members 1, and all four bearing members 1 are parallel to the first direction Z; in the second direction Y and the third direction X, adjusting beams are connected between two adjacent bearing members 1; the second direction Y and the third direction X are perpendicular to the first direction Z respectively.

[0060] The first direction Z is perpendicular to the second direction Y, the first direction Z is perpendicular to the third direction X, and the second direction Y may or may not be perpendicular to the third direction X.

[0061] The four carrier members 1 are arranged in parallel, and the four carrier members 1 may be located at the four vertices of a rectangle or at the four vertices of a rhombus. In the second direction Y, both ends of the adjusting beam are respectively installed on two carrier members 1, and the adjusting beam may be perpendicular to the carrier member 1 or form an acute angle with the carrier member 1. In the third direction X, both ends of the adjusting beam are respectively installed on two carrier members 1, and the adjusting beam may be perpendicular to the carrier member 1 or form an acute angle with the carrier member 1. It should be noted that based on the idea of this embodiment, in other embodiments, the four carrier members 1 may also be located at the four vertices of any quadrilateral.

[0062] Along the second direction Y, the length of the transportation device can be adjusted; along the third direction X, the length of the transportation device can also be adjusted.

[0063] In the technical solution of the above embodiment, there are four carrier members 1, and thus the transportation device is a rectangular frame. When in use, the supporting part can form four supporting points with the sealing cover 3, which is stable and reliable. The transportation device can move forward or backward along the second direction Y and can move forward or backward along the third direction X, meeting the usage habits of users.

[0064] In some embodiments of the present application, the adjusting beam provided in the second direction Y is parallel to the second direction Y; the adjusting beam provided in the third direction X is parallel to the third direction X.

[0065] When the adjusting beam is connected between two carrier members 1, it is perpendicularly arranged with respect to the carrier member 1, that is, all adjusting beams are perpendicular to the carrier member 1, and any two adjacent adjusting beams are perpendicular in a plane perpendicular to the first direction Z.

[0066] In the technical solution of the above embodiment, the adjusting beam is perpendicular to the carrier member 1. When adjusting the distance between the carrier members 1, the adjusting beam expands and contracts axially. First, the adjustment is more direct, and the expansion and contraction length of the adjusting beam is the adjustment length; second, the force on the adjusting beam is simple, and it only bears the load along the axial direction.

[0067] In some embodiments of the present application, along the first direction Z, the adjusting beam parallel to the second direction Y and the adjusting beam parallel to the third direction X are staggeredly installed on the carrier member 1.

[0068] The adjusting beam parallel to the second direction Y is located on a plane perpendicular to the first direction Z, and the adjusting beam parallel to the third direction X is located on another plane perpendicular to the first direction Z, and the two planes do not coincide.

[0069] In the technical solution of the above embodiment, the adjusting beams installed on the carrier 1 are located at different positions of the carrier 1 along the first direction Z. First, it can disperse the stress on the carrier 1 and avoid stress concentration. Second, it can make full use of the positions on the carrier 1, and the installation space of the adjusting beams is more abundant.

[0070] In some embodiments of the present application, when projected along the first direction Z, the main beam 21 of each adjusting beam is adjacent to the secondary beam 23 of the adjacent adjusting beam.

[0071] In the plane perpendicular to the first direction Z, multiple adjusting beams are centrosymmetrically distributed, and the center of symmetry is the centroid of the four carriers 1. As Figure 1 shown, within the same adjusting member 2 (such as the upper adjusting member 2), along the second direction Y, the main beam 21 is in front and the secondary beam 23 is behind on the left side, while on the right side, the main beam 21 is behind and the secondary beam 23 is in front; along the third direction X, the main beam 21 is behind and the secondary beam 23 is in front on the left side, while on the right side, the main beam 21 is in front and the secondary beam 23 is behind. When the same carrier 1 connects two adjacent adjusting beams, it connects the main beam 21 of one adjusting beam and the secondary beam 23 of the other adjusting beam.

[0072] In the technical solution of the above embodiment, in the plane perpendicular to the first direction Z, the intersections connecting the main beam 21 and the secondary beam 23 form a rectangle, and connecting the four carriers 1 forms a rectangle. Any side of the two rectangles is not parallel. Thus, the stress of the adjusting beam can be optimized, and the jamming during adjustment can be reduced.

[0073] In some embodiments of the present application, along the first direction Z, there are multiple adjusting members 2, and the multiple adjusting members 2 are arranged in parallel; when projected along the first direction Z, the main beam 21 and the secondary beam 23 of adjacent adjusting members 2 overlap.

[0074] Along the first direction Z, there are multiple adjusting members 2. For example, there can be two adjusting members 2. As Figure 1 shown, the adjusting beams of the two adjusting members 2 correspond to each other one by one. Along the first direction Z, in the two corresponding adjusting beams, the main beam 21 of the lower adjusting beam is directly above the secondary beam 23 of the upper adjusting beam, and the main beam 21 of the upper adjusting beam is directly above the secondary beam 23 of the lower adjusting beam.

[0075] In the technical solution of the above embodiment, multiple adjusting beams are installed between two adjacent carriers 1, thereby improving the structural strength of the transportation device. When projected along the first direction Z, the main beam 21 and the secondary beam 23 of adjacent adjusting members 2 overlap, which can optimize the stress of the adjusting beam when adjusting the distance between the carriers 1 and reduce the risk of jamming of the adjusting member 2.

[0076] In some embodiments of the present application, a first limiting hole 212 is provided on the main beam 21, a second limiting hole 231 is provided on the auxiliary beam 23, and the limiting member 22 is respectively inserted into the first limiting hole 212 and the second limiting hole 231, and the first limiting hole 212 and / or the second limiting hole 231 are multiple.

[0077] Exemplarily, it may be that the first limiting hole 212 is multiple while the second limiting hole 231 is one; it may be that the first limiting hole 212 is one while the second limiting hole 231 is multiple; or it may be that the first limiting hole 212 is multiple while the second limiting hole 231 is multiple.

[0078] The aperture of the first limiting hole 212 may be communicated with the aperture of the second limiting hole 231, or may be larger than the aperture of the second limiting hole 231. When the aperture of the first limiting hole 212 is larger than the aperture of the second limiting hole 231, it is not limited that the hole shape of the first limiting hole 212 is the same as that of the second limiting hole 231. For example, the first limiting hole 212 may be an oval hole and the second limiting hole 231 may be a round hole, and the contour of the round hole is located within the contour of the oval hole; or the first limiting hole 212 and the second limiting hole 231 may both be round holes, and the contour of the second limiting hole 231 is located within the contour of the first limiting hole 212.

[0079] The limiting member 22 is respectively inserted into the first limiting hole 212 and the second limiting hole 231. By inserting different first limiting holes 212 and second limiting holes 231, the adjusting beam can be limited to different lengths. Exemplarily, the limiting member 22 may be a pin column inserted into the first limiting hole 212 and the second limiting hole 231. For the convenience of obtaining materials, the pin column may also be replaced by a bolt (the outer diameter of the bolt is smaller than the apertures of the first limiting hole 212 and the second limiting hole 231 and is not threadedly connected to the first limiting hole 212 and the second limiting hole 231).

[0080] In the technical solution of the above embodiment, by providing the first limiting hole 212 and the second limiting hole 231, and inserting the limiting member 22 into the first limiting hole 212 and the second limiting hole 231, the adjusting beam can have the adjusting function of multiple different lengths.

[0081] In some embodiments of the present application, the aperture of the first limiting hole 212 is larger than the aperture of the second limiting hole 231, the second limiting hole 231 is a threaded hole, and the second limiting hole 231 is threadedly connected to the limiting member 22.

[0082] The limiting member 22 is processed with an external thread, and the external thread is threadedly connected to the second limiting hole 231.

[0083] In the technical solution of the above embodiment, the limiting member 22 passes through the first limiting hole 212 and is threadedly connected to the second limiting hole 231, which can improve the connection reliability of the limiting member 22 while limiting.

[0084] In some embodiments of the present application, the aperture of the first limiting hole 212 is smaller than that of the second limiting hole 231. The first limiting hole 212 is a threaded hole, and the first limiting hole 212 is threadedly connected to the limiting member 22.

[0085] The limiting member 22 is machined with an external thread, and the external thread is threadedly connected to the first limiting hole 212.

[0086] In the technical solution of the above embodiment, the limiting member 22 is threadedly connected to the first limiting hole 212 and inserted into the second limiting hole 231, which can also improve the connection reliability of the limiting member 22. Optionally, a nut can also be threadedly connected to the limiting member 22. When the limiting member 22 is threadedly connected to the first limiting hole 212, the nut can be screwed to abut against the main beam 21 to prevent the limiting member 22 from loosening.

[0087] In some embodiments of the present application, a position mark 232 is provided on the secondary beam 23, and an indicating portion is provided on the main beam 21. The position mark 232 cooperates with the indicating portion to indicate the size of the adjustable beam.

[0088] The position mark 232 can be coated on the surface of the secondary beam 23 or engraved on the surface of the secondary beam 23. The indicating portion can be the end face of the main beam 21.

[0089] In the technical solution of the above embodiment, by providing the position mark 232 and the indicating portion, it is convenient to adjust the length of the adjustable beam, enabling the user to quickly adjust it to a length suitable for the size of the sealing cover 3.

[0090] In some embodiments of the present application, a first limiting hole 212 is provided on the main beam 21. The first limiting hole 212 is a threaded hole. The limiting member 22 is provided with a threaded portion, and the threaded portion is threadedly connected to the threaded hole. The threaded portion is provided with an abutting end, and the abutting end abuts against the secondary beam 23 to limit the telescopic movement of the secondary beam 23.

[0091] The limiting member 22 is threadedly connected to the first limiting hole 212, and by pressing the surface of the secondary beam 23 with the abutting end, the sliding of the secondary beam 23 in the main beam 21 can be hindered, thereby providing a limiting function.

[0092] In the technical solution of the above embodiment, the limiting member 22 is threadedly connected to the first limiting hole 212 and abuts against the secondary beam 23 through the abutting end. Furthermore, the adjustable beam can be adjusted to any length under certain conditions (the secondary beam 23 does not come out of the main beam 21), enriching the length options of the adjustable beam.

[0093] In some embodiments of the present application, a sliding groove 211 is provided on the main beam 21. The secondary beam 23 is located in the sliding groove 211 and is in sliding fit with the sliding groove 211; perpendicular to the telescopic direction of the adjustable beam, the sliding groove 211 at least penetrates a part of the surface of the main beam 21.

[0094] The chute 211 can create one opening or multiple openings on the surface of the main beam 21.

[0095] In the technical solution of the above embodiment, the chute 211 penetrates through a part of the surface of the main beam 21. Firstly, it can reduce the sliding resistance of the auxiliary beam 23 within the main beam 21. Secondly, it is convenient for the milling process of the chute 211.

[0096] In some embodiments of the present application, a chute 211 is provided on the main beam 21, and the auxiliary beam 23 is located within the chute 211 and is in sliding fit with the chute 211. A first guiding portion is provided within the chute 211, and a second guiding portion is provided on the auxiliary beam 23, and the first guiding portion is in contact with the second guiding portion.

[0097] The first guiding portion can be a guide rail, and the guide rail is installed within the chute 211. The second guiding portion can be a slider, and the slider is in sliding fit with the guide rail, and the guide rail provides guidance for the sliding of the slider. The first guiding portion can be a slider, and the slider is installed within the chute 211. The second guiding portion can be a guide rail, and the guide rail is installed on the auxiliary beam 23 and is arranged parallel to the auxiliary beam 23, and the guide rail slides along the slider.

[0098] In the technical solution of the above embodiment, the main beam 21 and the auxiliary beam 23 are in sliding fit through the first guiding portion and the second guiding portion, and the contact area can be only at the joint of the first guiding portion and the second guiding portion, thereby reducing the resistance when adjusting the length of the adjusting beam.

[0099] In some embodiments of the present application, the bearing portion 11 includes a bearing pad 111 and a fixing arm 112; the bearing pad 111 is used to contact the bearing object; a fixing member is provided on the fixing arm 112, and the fixing member is used to fasten the bearing object; along the first direction Z, a plurality of bearing portions 11 are located on a plane perpendicular to the first direction Z.

[0100] The bearing pad 111 can be made of a soft and deformable material. For example, it can be made of rubber, that is, the bearing pad 111 can be a rubber pad. Of course, the bearing pad 111 can also be made of polyurethane pad, nylon pad, etc. The fixing arm 112 can be a plate extending in the first direction Z, and holes can be provided on the plate, and fixing members (such as bolts) are inserted through the holes, and the bearing object is fixed by the fixing members (for example, by screwing the bolt onto the sealing cover 3 to fix the sealing cover 3).

[0101] In the technical solution of the above embodiment, the bearing portion 11 contacts the bearing object through the bearing pad 111. By selecting a soft material for the bearing pad 111, it can provide support and shock absorption for the bearing object. The bearing portion 11 provides fixation for the sealing cover 3 through the fixing arm 112, which can prevent the sealing cover 3 from shaking on the transportation device and avoid the risk of the sealing cover 3 falling off.

[0102] In some embodiments of the present application, along the first direction Z, the plurality of supporting portions 11 are located on a plurality of planes perpendicular to the first direction Z.

[0103] Along the first direction Z, the supporting portion 11 may be multi-layered, with each layer having four supporting portions 11 .

[0104] In the technical solution of the above embodiment, multiple layers of carrying parts 11 are provided along the first direction Z to carry the sealing covers 3 , so that one transport device can carry multiple sealing covers 3 at the same time, thereby improving efficiency.

[0105] In some embodiments of the present application, the supporting member 1 is a rectangular rod, and a weight-reducing hole 13 is provided on the supporting member 1; along the first direction Z and / or the second direction Y, the adjusting beam is installed in the weight-reducing hole 13.

[0106] There may be one or more weight-reducing holes 13 on the bearing member, and the weight-reducing holes 13 may or may not pass through the bearing member 1. The adjusting beam is installed in the weight-reducing hole 13, and the adjusting beam and the weight-reducing hole 13 may be connected by snapping, or the adjusting beam may be inserted into the weight-reducing hole 13 and fastened by welding, bolting, or the like.

[0107] In the technical solution of the above embodiment, the weight-reducing holes 13 provided on the carrier 1 can reduce the overall weight of the transport device. The adjusting beam is installed in the weight-reducing holes 13, which can provide a certain support for the adjusting beam, not only fully utilizing the space but also improving the connection strength.

[0108] The following describes the transport device of the present application in detail according to a specific embodiment:

[0109] like Figure 1 As shown, the bearing members 1 are four rectangular rods, which are provided with a plurality of weight-reducing holes 13. The main beam 21 and the auxiliary beam 23 are also rectangular rods. The bearing members 1 are the main load-bearing structure of the transport device, and have sufficient strength and rigidity to withstand the pressure of the sealing cover 3 and its additional weight during transportation, ensuring that the transport device is not deformed or damaged under heavy load. The end of the bearing member 1 close to the ground contacts the ground through the moving part 12. The moving part 12 is a caster, which plays the role of movement and transportation. The end of the bearing member 1 facing away from the ground is provided with a bearing part 11. The four bearing members 1 are arranged in parallel, and the four bearing members 1 are connected in the second direction Y and the third direction X. The four lines enclose a square.

[0110] In the first direction Z, there are two adjusting members 2, one is arranged above and the other is arranged below, and the two adjusting members 2 form two-layer rectangular frames. In each rectangular frame, there are four adjusting beams, and a total of 8 adjusting beams can improve the connection strength of the transportation device. In each adjusting member 2, all the adjusting beams are symmetrically distributed about the center, which can reduce the resistance during length adjustment. Each adjusting beam includes a main beam 21, a secondary beam 23, and one or more limiting members 22. Both the main beam 21 and the secondary beam 23 are processed from rectangular rods. A chute 211 penetrating one side surface of the main beam 21 is processed on the main beam 21, and a plurality of first limiting holes 212 are processed. The first limiting holes 212 are oblong holes. A plurality of second limiting holes 231 are processed on the secondary beam 23, and the second limiting holes 231 are threaded holes. The limiting members 22 are bolts (gaskets, spring washers or nuts can be arranged on the bolts to improve the reliability during fastening). The adjusting beam forms an adjustable structure through the sliding fit of the main beam 21 and the secondary beam 23, and plays roles of connection, stability, size adjustment and transverse load bearing in the transportation device. An indicating portion is provided on the main beam 21, and the indicating portion is the end face of the main beam 21. A position mark 232 is provided on the secondary beam 23. The position mark 232 can be a text label indicating the model or size range of the seal cover 3 that can be transported at this position, which is convenient for the operator to quickly identify and adjust.

[0111] During use, as Figure 2 shown, place the seal cover 3 on the four bearing pads 111, insert a fixing member (bolt) through the fixing arm 112, and tighten the fixing member on the seal cover 3, thereby the seal cover 3 can be fastened to the transportation device. Push and pull the transportation device to transport the seal cover 3. At the same time, the transportation device can also be used as a storage rack for the seal cover 3.

[0112] The transportation device provided in this embodiment has a simple design and convenient operation. The secondary beam 23 can be slid and fastened in the first limiting holes 212 and the second limiting holes 231 by the limiting members 22. The size can be adjusted through the adjusting member 2 to achieve wide compatibility and efficient transportation of seal covers 3 with different shapes and sizes, greatly improving work efficiency and flexibility, overcoming the limitations of related technologies, significantly enhancing the flexibility and space utilization rate of the production site, reducing production costs at the same time, and providing strong technical support for the optimization and upgrading of the semiconductor equipment production line. It has the characteristics of strong adaptability, high space utilization rate, low cost and simple operation.

[0113] The above are only specific embodiments of the present application. Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the systems, modules, and units described above can refer to the corresponding processes in the foregoing method embodiments, and will not be elaborated herein. It should be understood that the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should be covered within the protection scope of the present application.

Claims

1. A transportation device, characterized in that, Comprising: A plurality of carriers, which are arranged at intervals. One end of each carrier is provided with a moving member, and each carrier is provided with a carrying portion. The plurality of moving members are used to drive the carriers to move, and the plurality of carrying portions are used to cooperate to carry objects; An adjusting member, including a plurality of adjusting beams. Each adjusting beam is connected between two of the carriers and is used to adjust the interval between the connected carriers.

2. The transport device according to claim 1, characterized in that, The adjusting beam includes a main beam, a secondary beam and a limiting member; The main beam is installed on one of the carriers, the secondary beam is telescopically arranged in the main beam and is installed on another carrier; The limiting member is installed between the main beam and the secondary beam and is used to limit the secondary beam.

3. The transport device according to claim 2, wherein, There are four carriers, and the four carriers are all parallel to the first direction; In the second direction and the third direction, the adjusting beams are connected between adjacent two of the carriers; The second direction and the third direction are respectively perpendicular to the first direction.

4. The transport device according to claim 3, wherein, The adjusting beam arranged in the second direction is parallel to the second direction; The adjusting beam arranged in the third direction is parallel to the third direction.

5. The transport device according to claim 4, characterized in that, Along the first direction, the adjusting beams parallel to the second direction and the adjusting beams parallel to the third direction are staggeredly installed on the carriers.

6. The transport device according to claim 3, wherein When projected along the first direction, the main beam of each adjusting beam is adjacent to the secondary beam of the adjacent adjusting beam.

7. The transport device according to claim 6, characterized in that Along the first direction, there are a plurality of the adjusting members, and the plurality of adjusting members are arranged in parallel; When projected along the first direction, the main beams and the secondary beams of adjacent adjusting members are overlapped.

8. The transport device according to claim 2, characterized in that, The main beam is provided with a first limiting hole, the secondary beam is provided with a second limiting hole, and the limiting member is respectively inserted into the first limiting hole and the second limiting hole. The first limiting hole and / or the second limiting hole are multiple.

9. The transport device according to claim 8, characterized in that, The aperture of the first limiting hole is larger than the aperture of the second limiting hole. The second limiting hole is a threaded hole, and the second limiting hole is threadedly connected to the limiting member; or The aperture of the first limiting hole is smaller than the aperture of the second limiting hole. The first limiting hole is a threaded hole, and the first limiting hole is threadedly connected to the limiting member.

10. The transport device according to claim 8, characterized in that, The secondary beam is provided with a position mark, and the main beam is provided with an indicating portion. The position mark cooperates with the indicating portion to indicate the size of the adjusting beam.

11. The transport device according to claim 2, characterized in that, The main beam is provided with a first limiting hole, the first limiting hole is a threaded hole, the limiting member is provided with a threaded portion, the threaded portion is threadedly connected to the threaded hole, and the threaded portion is provided with an abutting end. The abutting end abuts against the secondary beam to limit the telescopic movement of the secondary beam.

12. The transport device according to claim 2, wherein, The main beam is provided with a sliding groove, the secondary beam is located in the sliding groove and is slidably matched with the sliding groove; Perpendicular to the telescopic direction of the adjusting beam, the sliding groove at least penetrates a part of the surface of the main beam; and / or The sliding groove is provided with a first guiding portion, and the secondary beam is provided with a second guiding portion. The first guiding portion is attached to the second guiding portion.

13. The transport device according to claim 3, characterized in that The carrying portion includes a carrying pad and a fixing arm; The carrying pad is used to contact the carried object; The fixing arm is provided with a fixing member, and the fixing member is used to fasten the carried object; Along the first direction, a plurality of the bearing portions are located on a plane perpendicular to the first direction; or Along the first direction, a plurality of the bearing portions are located on a plurality of planes perpendicular to the first direction.

14. The transport device according to claim 3, characterized in that, The bearing member is a rectangular rod, and weight-reducing holes are provided on the bearing member; Along the first direction and / or the second direction, the adjusting beam is installed in the weight-reducing holes.

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