Sucker assembly and feeding and discharging device

Abstract

The utility model provides a suction cup assembly and a feeding and discharging device, the suction cup assembly comprises a base, the base is provided with at least two pivoting parts, the pivoting parts are oppositely distributed at intervals along a first direction, and the pivoting parts extend along a second direction; each pivoting part is correspondingly connected with one sucking disc module, and each sucking disc module can pivot by a preset angle around the axis of the corresponding pivoting part; and the driving module is installed on the base, and the conveying end of the driving module is in transmission connection with each suction cup module so as to drive each suction cup module to pivot. According to the sucking disc assembly, the function that the plurality of sucking disc modules can pivot around the axes of the corresponding pivoting parts is achieved, meanwhile, the height consistency of the plurality of sucking disc modules can be guaranteed when the plurality of sucking disc modules adsorb silicon wafers, the plurality of rows of silicon wafers can be placed into a graphite boat at the same time, and the plurality of rows of silicon wafers can be taken out of the graphite boat at the same time. And the loading and unloading efficiency of the silicon wafers can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer loading and unloading, and more specifically, to a suction cup assembly and a loading and unloading device including the suction cup assembly. Background Art

[0002] In related technologies, as a carrier tool for silicon wafers, a graphite boat is usually designed to place silicon wafers obliquely to optimize electrical contact. However, the multi-row suction cups on the traditional suction cup assembly cannot independently adjust the angle. When adjusting the overall angle, there will be a height difference among the multi-row suction cups, which is not conducive to loading and unloading multi-row silicon wafers and results in low efficiency. Summary of the Utility Model

[0003] The utility model provides a new technical solution for a suction cup assembly, which can at least solve the problem of low loading and unloading efficiency of the existing suction cup assembly.

[0004] The utility model also provides a loading and unloading device including the above suction cup assembly.

[0005] According to a first aspect of the utility model, there is provided a suction cup assembly, including: a base provided with at least two pivot parts spaced relatively along a first direction, the pivot parts extending along a second direction; a suction cup module, each pivot part is correspondingly connected with a suction cup module, and the suction cup module can pivot a predetermined angle around the axis of its corresponding pivot part; a driving module, the driving module is installed on the base, and the conveying end of the driving module is in transmission connection with each suction cup module to drive each suction cup module to pivot.

[0006] Optionally, the driving module includes: a driving unit provided on the base; a transmission unit, a first part of the transmission unit is connected with the driving unit, a second part of the transmission unit is connected with each suction cup module, and the transmission unit is adapted to transmit the driving force of the driving unit to the suction cup module.

[0007] Optionally, the suction cup module is provided with a transmission part, the transmission part is provided with a first pivot shaft extending along the second direction, and the transmission unit includes: a transmission member, the transmission part is pivotally connected to the transmission member through the first pivot shaft, and the connection line of the axes of the two first pivot shafts is parallel and equal to the connection line of the axes of the corresponding two pivot parts; a sliding member, the sliding member is movably arranged on the base along the first direction, the transmission member is movably connected to the sliding member along a third direction, and the driving unit is adapted to drive the sliding member to move along the first direction.

[0008] Optionally, a sliding portion is provided on a side of the transmission member close to the sliding member, a sliding groove extending in a third direction is provided on a side of the sliding member close to the transmission member, and the sliding portion is movably disposed in the sliding groove in the third direction.

[0009] Optionally, the sliding member is disposed on a side of the base away from the suction cup module, and an opening adapted for the sliding portion to pass through is provided on a side of the sliding groove away from the base.

[0010] Optionally, the driving unit includes: a lead screw extending in the first direction, the lead screw being rotatably disposed on the base about its own axis; a slider sleeved on the lead screw, the slider being threadedly connected to the lead screw and connected to the sliding member; and a motor disposed on the base, an output end of the motor being connected to one end of the lead screw to drive the lead screw to rotate.

[0011] Optionally, the transmission member and the sliding member are disposed on a side of the base facing away from the suction cup module, and a through groove adapted for the transmission portion to pass through is provided on the base.

[0012] Optionally, the driving module includes: a plurality of driving units, the number of the driving units being adapted to the number of the suction cup modules, and each driving unit independently driving the suction cup module to pivot.

[0013] Optionally, the suction cup module includes: a connecting seat, the transmission portion being disposed on the connecting seat; and a plurality of suction cup monomers spaced apart along the second direction, the plurality of suction cup monomers being disposed on the connecting seat.

[0014] According to a second aspect of the present invention, there is provided a loading and unloading device including the suction cup assembly according to any one of the above.

[0015] According to the suction cup assembly of the present invention, by providing a plurality of pivoting portions on the base and making each pivoting portion correspondingly connected to a suction cup module, the function that a plurality of suction cup modules can pivot around the axes of their corresponding pivoting portions is realized. At the same time, the height consistency of a plurality of suction cup modules during silicon wafer adsorption can be ensured, which is beneficial to placing multiple rows of silicon wafers into the graphite boat together and can also take out multiple rows of silicon wafers from the graphite boat together, effectively improving the loading and unloading efficiency of the silicon wafers. Moreover, the driving module can drive the pivoting of a plurality of suction cup modules together, which is beneficial to the switching of the suction cup modules between different angles.

[0016] Other features and advantages of the present invention will become clear through the following detailed description of the exemplary embodiments of the present invention with reference to the drawings. Description of the Drawings

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0018] Figure 1 is a perspective view of a suction cup assembly according to an embodiment of the present invention;

[0019] Figure 2 is a top view of a suction cup assembly according to an embodiment of the present invention;

[0020] Figure 3 This is a right side view of a suction cup assembly according to an embodiment of the present invention;

[0021] Figure 4 yes Figure 3 Sectional view at the midline AA.

[0022] Reference numerals

[0023] 100. Suction cup assembly;

[0024] 10. Base; 11. Through slot; 12. Fixing plate; 13. Pivot portion;

[0025] 20. Suction cup module; 21. Suction cup unit; 22. Connecting seat; 221. Transmission unit; 221a. First pivot;

[0026] 30. Drive module; 31. Drive unit; 311. Screw rod; 312. Slider; 313. Motor; 32. Transmission unit; 321. Transmission member; 321a. Sliding part; 322. Sliding member; 322a. Slide groove. DETAILED DESCRIPTION

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention.

[0028] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0029] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0030] In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0031] It should be noted that like reference numerals and letters refer to like items in the following drawings, and thus, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings.

[0032] First, the suction cup assembly 100 according to an embodiment of the present invention will be specifically described below with reference to the drawings.

[0033] As Figures 1 to 4 shown, the suction cup assembly 100 according to an embodiment of the present invention includes: a base 10, a suction cup module 20, and a driving module 30.

[0034] Specifically, the base 10 is provided with at least two pivot portions 13, the pivot portions 13 are spaced apart from each other in a first direction, the pivot portions 13 extend in a second direction, each pivot portion 13 is correspondingly connected to a suction cup module 20, the suction cup module 20 can pivot a predetermined angle around the axis of its corresponding pivot portion 13, the driving module 30 is mounted on the base 10, and the output end of the driving module 30 is in transmission connection with each suction cup module 20 to drive each suction cup module 20 to pivot.

[0035] In other words, as Figures 1 to 4 shown, the suction cup assembly 100 according to an embodiment of the present invention mainly includes a base 10, a suction cup module 20, and a driving module 30. Among them, the base 10 is provided with a plurality of pivot portions 13, the plurality of pivot portions are spaced apart in a first direction (for example, the width direction of the base), each pivot portion 13 extends in a second direction, the number of suction cup modules 20 corresponds to the number of pivot portions 13, so that each pivot portion 13 can be correspondingly connected to a suction cup module 20, and the suction cup module 20 on each pivot portion 13 pivots a predetermined angle around the axis of its corresponding pivot portion 13. Thus, when the pivot angles are the same, the consistency of the height of each suction cup module 20 can be ensured. The driving module 30 can be mounted on the base 10, and the output end of the driving module 30 is in transmission connection with each suction cup module 20 together, so that each suction cup module 20 can be driven by the driving module 30 to pivot a predetermined angle around the axis of its corresponding pivot portion 13, for example, 5 degrees, 10 degrees, 15 degrees, 20 degrees, etc. The specific angle can be determined according to actual needs, which is beneficial to quickly adjusting the angle of the suction cup module 20.

[0036] Thus, according to the suction cup assembly 100 provided by this embodiment, by providing a plurality of pivot parts 13 on the base 10 and connecting each pivot part 13 to a corresponding suction cup module 20, the function that a plurality of suction cup modules 20 can pivot around the axes of their respective corresponding pivot parts 13 is realized. At the same time, the height consistency of the plurality of suction cup modules 20 when adsorbing silicon wafers can be ensured, which is beneficial to placing multiple rows of silicon wafers into the graphite boat together and can also take out multiple rows of silicon wafers from the graphite boat together, effectively improving the loading and unloading efficiency of the silicon wafers. Moreover, through the driving module 30, a plurality of suction cup modules 20 can be driven to pivot together, which is beneficial to the suction cup modules 20 to switch between different angles.

[0037] In some embodiments of the present invention, the driving module 30 includes: a driving unit 31 and a transmission unit 32. The driving unit 31 is provided on the base 10. The first part of the transmission unit 32 is connected to the driving unit 31, and the second part of the transmission unit 32 is connected to each suction cup module 20. The transmission unit 32 is adapted to transmit the driving force of the driving unit 31 to the suction cup module 20.

[0038] That is to say, as Figures 1 to 3 shown, the driving module 30 mainly includes a driving unit 31 and a transmission unit 32. Among them, the driving unit 31 can be installed on one side of the base 10. The transmission unit 32 has a first part and a second part, and there is a driving force transmission path between the first part and the second part. The first part can be connected to the output end of the driving unit 31, and the second part can be connected to each suction cup module 20 on the base 10. Thus, through the transmission unit 32, the driving force output by the driving module 30 can be transmitted to each suction cup module 20, so that the driving unit 31 can drive each suction cup module 20 to rotate around the axis of the corresponding pivot part 13, and the consistency of the angles of each suction cup module 20 can be ensured.

[0039] According to an embodiment of the present invention, the suction cup module 20 is provided with a transmission part 221. The transmission part 221 is provided with a first pivot 221a extending in the second direction. The transmission unit 32 includes: a transmission member 321 and a sliding member 322. The transmission part 221 is pivotally connected to the transmission member 321 through the first pivot 221a. The connection line of the axes of the two first pivots 221a is parallel and equal to the connection line of the axes of the corresponding two pivot parts 13. The sliding member 322 is movably provided on the base 10 along the first direction. The transmission member 321 is movably connected to the sliding member 322 along the third direction. The driving unit 31 is adapted to drive the sliding member 322 to move along the first direction.

[0040] Specifically, as Figures 1 to 3As shown, each suction cup module 20 is provided with a transmission part 221, which is formed into a plate-like structure. The transmission part 221 is provided with a first pivot 221a extending along the second direction. The transmission unit 32 mainly includes a transmission member 321 and a sliding member 322, wherein the transmission member 321 is the first part of the transmission unit 32, and the transmission member 321 is formed into a plate body extending along the first direction. Each transmission part 221 is pivotally connected to the transmission member 321 around the axis of the first pivot 221a through its own first pivot 221a. The connection method between the first pivot 221a and the transmission member 321 includes but is not limited to the following situations:

[0041] Case 1: When the first pivot 221a is rotatable relative to the transmission portion 221 about its own axis, the first pivot 221a can be rotatably connected or fixedly connected to the transmission member 321;

[0042] Case 2: When the first pivot 221 a is fixed relative to the transmission portion 221 , the first pivot 221 a is rotatably connected to the transmission member 321 around its own axis.

[0043] In this embodiment, if Figures 1 to 4 As shown, the line connecting the axes of adjacent first pivots 221a (i.e., the line segment representing the distance between the axes of adjacent first pivots 221a) and the line connecting the axes of adjacent pivoting portions 13 (i.e., the line segment representing the distance between the axes of adjacent pivoting portions 13) are parallel and equal, so that two adjacent suction cup modules 20, the base 10, and the transmission member 321 form a parallelogram structure. The sliding member 322 of the transmission unit 32 is movably connected to one side of the base 10 along a first direction, and the transmission member 321 is movably connected to one side of the sliding member 322 along a third direction (e.g., the thickness direction of the base 10).

[0044] The sliding member 322 is the second part of the transmission unit 32. The output end of the driving unit 31 is connected to the sliding member 322, so that the sliding member 322 can be driven to move along the first direction through the driving unit 31. When the sliding member 322 moves along the first direction, it can drive the transmission member 321 to move along the first direction, and the transmission member 321 moves along the third direction relative to the sliding member 322. When the transmission member 321 moves along the first direction, it can drive the transmission part 221 to rotate around the corresponding pivot part 13, so that the angles of multiple suction cup modules 20 can be synchronously adjusted.

[0045] Further, the base 10 has a first side and a second side that are oppositely arranged in its thickness direction. The suction cup module 20 is installed on the first side of the base 10, and both the transmission member 321 and the sliding member 322 are installed on the second side of the base 10. The base 10 is provided with a through groove 11 extending along its thickness direction. The number and position of the through groove 11 correspond to those of the transmission portion 221. The transmission portion 221 is formed as a plate-like structure. The first end of the transmission portion 221 is fixed to the suction cup module 20, and the second end of the transmission portion 221 passes through the through groove 11 and is pivotally connected to the transmission member 321.

[0046] In some embodiments of the present utility model, the first side of the base 10 is provided with a connecting portion, and the connecting portion is adapted to be drivingly connected to the loading and unloading device.

[0047] In some alternative examples of the present utility model, a sliding portion 321a is provided on the side of the transmission member 321 close to the sliding member 322, and a sliding groove 322a extending in a third direction is provided on the side of the sliding member 322 close to the transmission member 321. The sliding portion 321a is movably arranged in the sliding groove 322a along the third direction.

[0048] That is to say, as Figure 1 and Figure 2 shown, a sliding portion 321a is provided on the side of the transmission member 321 close to the sliding member 322. The sliding portion 321a can be a roller structure extending in a second direction. The sliding portion 321a can be connected to the transmission member 321 by bolts. A sliding groove 322a adapted to the sliding portion 321a is provided on the side of the sliding member 322 close to the transmission member 321. The sliding groove 322a extends in the third direction, so that the sliding portion 321a can be movably arranged in the sliding groove 322a along the third direction, realizing the connection between the transmission member 321 and the sliding member 322. At the same time, the stability of the force transmission between the transmission member 321 and the sliding member 322 can be ensured, and the structure is simple and convenient for production and assembly.

[0049] According to some embodiments of the present utility model, the sliding member 322 is arranged on the side of the base 10 away from the suction cup module 20, and an opening adapted for the sliding portion 321a to pass through is provided on the side of the sliding groove 322a away from the base 10.

[0050] In this embodiment, an opening is provided at the end of the sliding groove 322a away from the base 10, so that the sliding portion 321a can be installed in the sliding groove 322a from this opening, which is beneficial to the production and assembly of the suction cup assembly 100.

[0051] According to one embodiment of the present invention, the driving unit 31 includes: a screw rod 311, a slider 312 and a motor 313. The screw rod 311 extends along a first direction, and the screw rod 311 is rotatably arranged on the base 10 around its own axis. The slider 312 is sleeved on the screw rod 311. The slider 312 is threadedly connected to the screw rod 311, and the slider 312 is connected to the sliding member 322. The motor 313 is arranged on the base 10, and the output end of the motor 313 is connected to one end of the screw rod 311 to drive the screw rod 311 to rotate.

[0052] In other words, if Figure 2 As shown, the driving unit 31 according to the embodiment of the present invention mainly includes a screw rod 311, a slider 312 and a motor 313. Specifically, the axis of the screw rod 311 is parallel to the first direction, and one side of the base 10 is provided with two connecting plates spaced apart along the first direction. The screw rod 311 passes through the two connecting plates and is rotatably connected thereto. The slider 312 is sleeved on the screw rod 311 and the two are threadedly connected, and the slider 312 is fixedly connected to the sliding member 322. The motor 313 is fixedly connected to the base 10, and the output end of the motor 313 is fixedly connected to one end of the screw rod 311 through a coupling, so that the motor 313 can drive the screw rod 311 to rotate. When the screw rod 311 rotates, the slider 312 moves on the screw rod 311 along the first direction, thereby driving the sliding member 322 to move along the first direction, and then driving each suction cup module 20 to pivot.

[0053] In this embodiment, the drive unit 31 is formed by the screw rod 311, the slider 312 and the motor 313, which can make the pivoting action of the suction cup module 20 more precise and controllable, which is conducive to adjusting the suction cup module 20 to an accurate angle and effectively improving the reliability of the suction cup assembly 100.

[0054] In some optional examples of the present invention, the driving unit 31 is a telescopic rod, such as a cylinder or other structure.

[0055] In some embodiments of the present invention, the driving module 30 includes: a plurality of driving units 31 , the number of the driving units 31 matches the number of the suction cup modules 20 , and each driving unit 31 independently drives the suction cup module 20 to pivot.

[0056] That is to say, the driving module 30 may include multiple driving units 31, and the multiple driving units 31 are all installed on the base 10. The number and position of the driving units 31 correspond to the suction cup modules 20, and the multiple driving units 31 are respectively connected to the corresponding suction cup modules 20 in a transmission manner, so that each driving unit 31 can independently drive the suction cup module 20 to pivot, thereby realizing independent control of the suction cup module 20 and effectively improving the flexibility and adaptability of the suction cup assembly 100.

[0057] In some alternative examples of the present utility model, the suction cup module 20 includes: a connection seat 22 and a plurality of suction cup monomers 21. A transmission part 221 is provided on the connection seat 22. The plurality of suction cup monomers 21 are spaced apart along the second direction and are provided on the connection seat 22.

[0058] Specifically, as Figure 1 shown, the suction cup module 20 mainly includes a connection seat 22 and a plurality of suction cup monomers 21. A transmission part 221 is fixedly connected to one side of the connection seat 22 close to the base 10. The suction cup monomer 21 is formed into a sheet-like structure, and the thickness direction of the suction cup monomer 21 is the same as the second direction. One side of the suction cup monomer 21 in its own thickness direction is adapted to adsorb materials (for example, silicon wafers). The plurality of suction cup monomers 21 are fixedly spaced apart along the second direction on the side of the connection seat 22 away from the base 10.

[0059] In this example, by providing a plurality of suction cup monomers 21, the suction cup module 20 can adsorb a plurality of silicon wafers simultaneously, which can effectively improve the loading and unloading efficiency of the silicon wafers.

[0060] It should be noted that the suction cup monomer 21 is a conventional structure, and those skilled in the art can select it according to actual needs, which will not be elaborated in this embodiment.

[0061] According to an embodiment of the present utility model, the pivoting part 13 is a second pivot shaft. The connection seat 22 is provided with two connecting plates distributed along the second direction. Wherein, the second pivot shaft is fixedly connected to the two connecting plates, and both ends of the second pivot shaft are rotatably provided on the base 10 around its own axis; or, the second pivot shaft is rotatably connected to the two connecting plates around its own axis, and both ends of the second pivot shaft are connected to the base 10.

[0062] That is to say, as Figure 1 shown, the pivoting part 13 can be formed into a second pivot shaft extending along the second direction. The connection seat 22 is provided with two connecting plates distributed along the second direction. The connection relationship between the second pivot shaft and the base 10 includes the following situations:

[0063] Situation 1: The second pivot shaft passes through the two connecting plates and is fixedly connected to them. A fixing plate 12 distributed along the second direction is fixedly connected to one side of the base 10 close to the suction cup module 20. Both ends of the second pivot shaft are respectively rotatably connected to the corresponding fixing plate 12.

[0064] Situation 2: The second pivot shaft passes through the two connecting plates and is rotatably connected to them. A fixing plate 12 distributed along the second direction is fixedly connected to one side of the base 10 close to the suction cup module 20. Both ends of the second pivot shaft are respectively fixedly connected or rotatably connected to the corresponding fixing plate 12.

[0065] In some alternative examples of the present utility model, the transmission part 221 is arranged at one end of one of the connecting plates away from the connecting seat 22, so as to improve the integration degree of the suction cup assembly 100.

[0066] The embodiment of the present utility model further provides a loading and unloading device, which includes the suction cup assembly 100 described in any of the above embodiments. Since the suction cup assembly 100 according to the embodiment of the present utility model has the above technical effects, the loading and unloading device according to the embodiment of the present utility model also has corresponding technical effects, which will not be elaborated in this embodiment.

[0067] Although some specific embodiments of the present utility model have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present utility model. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present utility model. The scope of the present utility model is defined by the appended claims.

Claims

1. A suction cup assembly, characterized in that, Comprising: A base, the base being provided with at least two pivoting parts, the pivoting parts being relatively spaced apart along a first direction, and the pivoting parts extending along a second direction; A suction cup module, each of the pivoting parts being correspondingly connected to a suction cup module, and the suction cup module being pivotable by a predetermined angle about the axis of its corresponding pivoting part; A driving module, the driving module being mounted on the base, and the output end of the driving module being in transmission connection with each suction cup module to drive each suction cup module to pivot.

2. The suction cup assembly according to claim 1, wherein, The driving module includes: A driving unit, the driving unit being provided on the base; A transmission unit, a first part of the transmission unit being connected to the driving unit, a second part of the transmission unit being connected to each suction cup module, and the transmission unit being adapted to transmit the driving force of the driving unit to the suction cup module.

3. The suction cup assembly according to claim 2, wherein The suction cup module is provided with a transmission part, the transmission part being provided with a first pivot shaft extending along the second direction, and the transmission unit includes: A transmission member, the transmission part being pivotally connected to the transmission member through the first pivot shaft, and the connection line of the axes of the two first pivot shafts being parallel and equal to the connection line of the axes of the corresponding two pivoting parts; A sliding member, the sliding member being movably provided on the base along the first direction, the transmission member being movably connected to the sliding member along a third direction, and the driving unit being adapted to drive the sliding member to move along the first direction.

4. The suction cup assembly according to claim 3, wherein One side of the transmission member close to the sliding member is provided with a sliding part, one side of the sliding member close to the transmission member is provided with a chute extending along the third direction, and the sliding part is movably provided in the chute along the third direction.

5. The suction cup assembly according to claim 4, characterized in that, The sliding member is provided on a side of the base away from the suction cup module, and an opening adapted for the sliding part to pass through is provided on a side of the chute away from the base.

6. The suction cup assembly according to claim 3, wherein, The driving unit includes: A lead screw, the lead screw extending along the first direction, and the lead screw being rotatably provided on the base about its own axis; A slider, the slider being sleeved on the lead screw, the slider being in threaded connection with the lead screw, and the slider being connected to the sliding member; A motor, the motor being provided on the base, and the output end of the motor being connected to one end of the lead screw to drive the lead screw to rotate.

7. The suction cup assembly according to claim 3, characterized in that, The transmission member and the sliding member are provided on a side of the base facing away from the suction cup module, and the base is provided with a through groove adapted for the transmission part to pass through.

8. The suction cup assembly according to claim 1, wherein, The driving module includes: A plurality of driving units, the number of the driving units being adapted to the number of the suction cup modules, and each driving unit independently driving the suction cup module to pivot.

9. The suction cup assembly according to claim 3, characterized in that, The suction cup module includes: A connecting seat, the transmission part being provided on the connecting seat; A plurality of suction cup monomers, the plurality of suction cup monomers being spaced apart along the second direction, and the plurality of suction cup monomers being provided on the connecting seat.

10. A loading and unloading device, characterized in that, Including the suction cup assembly according to any one of claims 1 to 9.

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