Single-sided coating equipment

Abstract

The utility model relates to single-sided coating equipment which comprises a feeding cavity, a coating cavity and a discharging cavity which are sequentially connected from left to right, a first roller transmission line and a second roller transmission line are respectively arranged in the feeding cavity, the coating cavity and the discharging cavity, and the first roller transmission line and the second roller transmission line are used for transmitting carriers for bearing substrates. And a bidirectional sputter coating cathode mechanism for coating the substrates on the first roller transmission line and the second roller transmission line is arranged between the first roller transmission line and the second roller transmission line of the coating cavity. Heating devices for heating a substrate are arranged in the feeding cavity, the coating cavity and the discharging cavity, and cold trap devices for pumping out condensable steam are arranged in the feeding cavity and the coating cavity. The single-sided coating equipment not only improves the production efficiency, but also reduces the occupied space and the coating cost.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to single-sided coating equipment. Background Art

[0002] Traditional coating equipment generally includes a feeding chamber, a coating chamber and a discharging chamber. A carrier drives a substrate to flow into the feeding chamber for vacuum pumping, and then transports it to the coating chamber. A unidirectional coating cathode mechanism in the coating chamber coats the substrate on one side unidirectionally. The coated substrate flows into the discharging chamber with the carrier, and the discharging chamber performs buffering and vacuum pumping on the substrate. This coating equipment occupies a large area and has low production efficiency, and cannot meet the production needs of society. Content of the Utility Model

[0003] The technical problem to be solved by the utility model is to provide a single-sided coating equipment, which not only improves production efficiency, but also reduces the occupied space and coating cost.

[0004] The technical solution adopted by the utility model to solve its technical problem is: a single-sided coating equipment, including a feeding chamber, a coating chamber and a discharging chamber connected in sequence from left to right. First roller transmission lines and second roller transmission lines are respectively arranged in the feeding chamber, the coating chamber and the discharging chamber. The first roller transmission lines and the second roller transmission lines are used to transport the carriers carrying the substrates. A plurality of bidirectional sputtering coating cathode mechanisms for coating the substrates on the first roller transmission lines and the second roller transmission lines are arranged between the first roller transmission line and the second roller transmission line in the coating chamber.

[0005] Heating devices for heating the substrates are arranged in the feeding chamber and the coating chamber, and cold trap devices for extracting condensable vapors are arranged in the feeding chamber and the coating chamber.

[0006] In one embodiment, one end of the first roller transmission line in the feeding chamber of the single-sided coating equipment corresponds to one end of the first roller transmission line in the coating chamber, and the other end of the first roller transmission line in the coating chamber corresponds to the first roller transmission line in the discharging chamber. One end of the second roller transmission line in the feeding chamber corresponds to one end of the second roller transmission line in the coating chamber, and the other end of the second roller transmission line in the coating chamber corresponds to the second roller transmission line in the discharging chamber.

[0007] In one embodiment, the internal space height of the feeding chamber of the single-sided coating device is less than that of the coating chamber. The spacing distance between the first roller conveyor line and the second roller conveyor line in the feeding chamber is less than that in the coating chamber. A first carrier translation mechanism is provided between the second roller conveyor line in the feeding chamber and the second roller conveyor line in the coating chamber. One end of the first roller conveyor line in the feeding chamber corresponds to that of the first roller conveyor line in the coating chamber. The internal space height of the discharging chamber of the single-sided coating device is less than that of the coating chamber. The spacing distance between the first roller conveyor line and the second roller conveyor line in the discharging chamber is less than that in the coating chamber. A second carrier translation mechanism is provided between one end of the first roller conveyor line in the discharging chamber and the first roller conveyor line in the coating chamber. The second roller conveyor line in the discharging chamber corresponds to the second roller conveyor line in the coating chamber.

[0008] In one embodiment, the feeding chamber of the single-sided coating device includes a first feeding chamber and a second feeding chamber, and the first feeding chamber and the second feeding chamber are respectively communicated with the coating chamber. The discharging chamber includes a first discharging chamber and a second discharging chamber, and the first discharging chamber and the second discharging chamber are respectively connected and communicated with the coating chamber. The first roller conveyor line is respectively located in the first feeding chamber, the coating chamber and the first discharging chamber and corresponds one by one. The second roller conveyor line is respectively located in the second feeding chamber, the coating chamber and the second discharging chamber and corresponds one by one.

[0009] In one embodiment, the feeding chamber of the single-sided coating device sequentially includes a film feeding chamber, a first transition chamber and a first buffer chamber from left to right.

[0010] In one embodiment, the discharging chamber of the single-sided coating device sequentially includes a second buffer chamber, a second transition chamber and a film discharging chamber from left to right.

[0011] The beneficial effects of the present application are as follows:

[0012] The present application provides a single-sided coating device. The coating device simultaneously transports two carriers carrying substrates by respectively arranging a first roller conveyor line and a second roller conveyor line in the feeding chamber, the coating chamber and the discharging chamber, and also performs a single-sided coating operation on the substrates on the first roller conveyor line and the second roller conveyor line by arranging a bidirectional sputtering coating cathode mechanism in the coating chamber. The coating device greatly improves the coating efficiency and can also meet various coating requirements.

[0013] The single-sided coating device also adopts a heating device to heat the substrate to an appropriate temperature, thereby improving the fusion efficiency during substrate coating.

[0014] The single-sided coating equipment also adopts a cold trap device to capture and remove condensable vapor in the feeding chamber and the coating chamber, improving the vacuum pumping efficiency. Description of the Drawings

[0015] Figure 1 A side view of the first embodiment of the single-sided coating equipment according to an embodiment of the present application;

[0016] Figure 2 A side view of the second embodiment of the single-sided coating equipment according to an embodiment of the present application;

[0017] Figure 3 A schematic diagram of the second embodiment of the single-sided coating equipment according to an embodiment of the present application;

[0018] Figure 4 A top view of the third embodiment of the single-sided coating equipment according to an embodiment of the present application;

[0019] Wherein:

[0020] 1. Feeding chamber; 2. Coating chamber; 3. Discharging chamber; 4. First roller conveyor line; 5. Second roller conveyor line; 6. Bidirectional sputtering coating cathode mechanism; 7. Heating device; 8. Cold trap device; 9. First carrier translation mechanism; 10. Second carrier translation mechanism; 11. First feeding chamber; 12. Second feeding chamber; 13. Loading chamber; 14. First transition chamber; 15. First buffer chamber; 31. First discharging chamber; 32. Second discharging chamber; 33. Second buffer chamber; 34. Second transition chamber; 35. Unloading chamber. Detailed Description of the Embodiments

[0021] To make the above objects, features, and advantages of the present utility model more apparent and understandable, the following detailed description of the specific embodiments of the present utility model will be given with reference to the accompanying drawings.

[0022] As Figure 1 shown, an embodiment of the present application provides a single-sided coating equipment, including a feeding chamber 1, a coating chamber 2, and a discharging chamber 3 connected in sequence from left to right. The feeding chamber 1, the coating chamber 2, and the discharging chamber 3 are respectively provided with a first roller conveyor line 4 and a second roller conveyor line 5. The first roller conveyor line 4 and the second roller conveyor line 5 are used to convey carriers carrying substrates. Between the first roller conveyor line 4 and the second roller conveyor line 5 in the coating chamber 2, there are a plurality of bidirectional sputtering coating cathode mechanisms 6 for coating the substrates on the first roller conveyor line 4 and the second roller conveyor line 5.

[0023] The feeding chamber 1 and the coating chamber 2 are provided with a heating device 7 for heating the substrates, and the feeding chamber 1 and the coating chamber 2 are provided with a cold trap device 8 for extracting condensable vapor.

[0024] Specifically, the material inlet chamber 1 sequentially includes a sheet feeding chamber 13, a first transition chamber 14, and a first buffer chamber 15 from left to right, and the material outlet chamber 3 sequentially includes a second buffer chamber 33, a second transition chamber 34, and a sheet discharging chamber 35 from left to right. The first roller transmission line 4 and the second roller transmission line 5 in the coating chamber 2 are respectively located above and below the bidirectional sputtering coating cathode mechanism 6. A plurality of substrates to be coated are placed in a carrier. The carrier sequentially enters the sheet feeding chamber 13, the first transition chamber 14, and the first buffer chamber 15 through the first roller transmission line 4 and the second roller transmission line 5 for vacuum pumping, transition, and buffering processes, and then is conveyed into the coating chamber 2 through the first roller transmission line 4 and the second roller transmission line 5. The bidirectional sputtering coating cathode mechanism 6 simultaneously performs single-sided coating operations on the substrates on the first roller transmission line 4 and the second roller transmission line 5. The coated substrates are sequentially moved to the second buffer chamber 33, the second transition chamber 34, and the sheet discharging chamber 35 with the carrier for buffering, transition, and vacuum breaking processes. During the coating period, the heating devices 7 in the material inlet chamber 1 and the coating chamber 2 heat the substrates on the carrier to a suitable temperature to accelerate the coating efficiency of the substrates. The cold trap devices 8 in the material inlet chamber 1 and the coating chamber 2 capture and pump out the condensable vapor in the chambers, improving the vacuum pumping efficiency. Among them, the bidirectional sputtering coating cathode mechanism 6, the heating device 7, and the cold trap device 8 are all prior arts. Four cold trap devices 8 are respectively installed between the vacuum containers and the vacuum pumps of the sheet feeding chamber 13, the first transition chamber 14, the first buffer chamber 15, and the coating chamber 2. The pumped gas is cooled and captured in a condensation manner, improving the pumping efficiency. Four heating devices 7 are respectively installed at the bottoms of the sheet feeding chamber 13, the first transition chamber 14, the first buffer chamber 15, and the coating chamber 2. The four heating devices 7 respectively heat the substrates on the carriers on the first roller transmission line 4 and the second roller transmission line 5. The bidirectional sputtering coating cathode mechanism 6 can refer to the bidirectional coating cathode mechanism in the patent document number "CN118086852B".

[0025] In the above structure, the bidirectional sputtering coating cathode mechanism 6 is arranged in the coating chamber 2 to simultaneously perform single-sided coating on the substrates on the first roller transmission line 4 and the second roller transmission line 5. This single-sided coating equipment greatly improves the coating efficiency of the substrates, and also effectively reduces the input cost and the floor area of the equipment. This single-sided coating equipment uses the heating device 7 to heat the substrates to a suitable temperature, improving the coating fusion speed of the substrates, thereby improving the coating efficiency. This single-sided coating equipment uses the cold trap device 8 to capture and pump out the condensable vapor in the material inlet chamber 1 and the coating chamber 2, improving the vacuum pumping efficiency.

[0026] Such as Figure 1As shown, in one of the embodiments, one end of the first roller conveyor line 4 in the loading chamber 1 of the single-sided coating equipment corresponds to one end of the first roller conveyor line 4 in the coating chamber 2, and the other end of the first roller conveyor line 4 in the coating chamber 2 corresponds to the first roller conveyor line 4 in the unloading chamber 3. One end of the second roller conveyor line 5 in the loading chamber 1 corresponds to one end of the second roller conveyor line 5 in the coating chamber 2, and the other end of the second roller conveyor line 5 in the coating chamber 2 corresponds to the second roller conveyor line 5 in the unloading chamber 3.

[0027] Specifically, the single-sided coating equipment is a horizontal coating production line. A plurality of substrates to be coated are horizontally placed in a carrier. The carrier flows into the loading chamber 1 through the first roller conveyor line 4 and the second roller conveyor line 5 for vacuum pumping, transition, and buffering, and then flows into the coating chamber 2 through the first roller conveyor line 4 and the second roller conveyor line 5. The bidirectional sputtering coating cathode mechanism 6 is located in the middle of the first roller conveyor line 4 and the second roller conveyor line 5. The bidirectional sputtering coating cathode mechanism 6 in the coating chamber 2 simultaneously performs single-sided coating on the substrates on the first roller conveyor line 4 and the second roller conveyor line 5. After the coating is completed, it flows into the unloading chamber 3 through the first roller conveyor line 4 and the second roller conveyor line 5 for buffering, transition, vacuum breaking, etc., and finally exits the equipment to complete the coating process.

[0028] In the above structure, the carrier and the product are driven to enter and exit in a double-in and double-out manner through the first roller conveyor line 4 and the second roller conveyor line 5, so that the bidirectional sputtering coating cathode mechanism 6 in the coating chamber 2 simultaneously performs single-sided coating operations on the products on the first roller conveyor line 4 and the second roller conveyor line 5. This setting greatly improves the coating efficiency of the products.

[0029] Such as Figure 2 and Figure 3As shown, in one embodiment, the height of the internal space of the feeding chamber 1 of the single-sided coating device is less than the height of the internal space of the coating chamber 2. The spacing distance between the first roller conveyor line 4 and the second roller conveyor line 5 in the feeding chamber 1 is less than the spacing distance between the first roller conveyor line 4 and the second roller conveyor line 5 in the coating chamber 2. A first carrier translation mechanism 9 is provided between the second roller conveyor line 5 in the feeding chamber 1 and the second roller conveyor line 5 in the coating chamber 2. One end of the first roller conveyor line 4 in the feeding chamber 1 corresponds to one end of the first roller conveyor line 4 in the coating chamber 2. The height of the internal space of the discharging chamber 3 is less than the height of the internal space of the coating chamber 2. The spacing distance between the first roller conveyor line 4 and the second roller conveyor line 5 in the discharging chamber 3 is less than the spacing distance between the first roller conveyor line 4 and the second roller conveyor line 5 in the coating chamber 2. A second carrier translation mechanism 10 is provided between the first roller conveyor line 4 in the discharging chamber 3 and the other end of the first roller conveyor line 4 in the coating chamber 2. The second roller conveyor line 5 in the discharging chamber 3 corresponds to the second roller conveyor line 5 in the coating chamber 2.

[0030] Specifically, the single-sided coating device is a horizontal coating production line. The height of the internal space of the feeding chamber 1 is less than the height of the internal space of the coating chamber 2, so that the first roller conveyor line 4 in the feeding chamber 1 corresponds to the first roller conveyor line 4 in the coating chamber 2. The second roller conveyor line 5 in the feeding chamber 1 is higher than the second roller conveyor line 5 in the coating chamber 2. The first carrier translation mechanism 9 is installed in the coating chamber 2 and is located between the second roller conveyor line 5 in the feeding chamber 1 and the second roller conveyor line 5 in the coating chamber 2. The height of the internal space of the discharging chamber 3 is less than the height of the internal space of the coating chamber 2, so that the first roller conveyor line 4 in the coating chamber 2 is higher than the first roller conveyor line 4 in the discharging chamber 3. The second carrier translation mechanism 10 is installed in the coating chamber 2 and is located between the first roller conveyor line 4 in the coating chamber 2 and the first roller conveyor line 4 in the discharging chamber 3. The second roller conveyor line 5 corresponds to the second roller conveyor line 5 in the discharging chamber 3.

[0031] Multiple substrates are horizontally placed on a carrier and moved into the feeding chamber 1 along with the first roller conveyor line 4 and the second roller conveyor line 5 for vacuum pumping. Then, the first roller conveyor line 4 drives the carrier and the substrates to be transferred onto the first roller conveyor line 4 within the coating chamber 2. The second roller conveyor line 5 transfers the carrier onto the first carrier translation mechanism 9. The first carrier translation mechanism 9 drives the carrier and the substrates to move downward and be transferred onto the second roller conveyor line 5 within the coating chamber 2. The bidirectional sputtering coating cathode mechanism 6 within the coating chamber 2 simultaneously performs single-sided coating on the substrates of the first roller conveyor line 4 and the second roller conveyor line 5. After the coating is completed, the first roller conveyor line 4 drives the carrier and the substrates to move onto the second carrier translation mechanism 10. The second carrier translation mechanism 10 drives the carrier to drive the substrates to move downward and be transferred onto the first roller conveyor line 4 of the discharging chamber 3. The second roller conveyor line 5 drives the carrier and the substrates to move onto the second roller conveyor line 5 of the discharging chamber 3. The first roller conveyor line 4 and the second roller conveyor line 5 drive the carrier to drive the substrates to pass through the discharging chamber 3 and out of the equipment, completing the coating process. Among them, the first carrier translation mechanism 9 and the second carrier translation mechanism 10 both belong to the prior art, and reference can be made to the upper-layer translation mechanism and the lower-layer translation mechanism in the patent document number "CN118086852B".

[0032] In the above structure, by reducing the volumes of the feeding chamber 1 and the discharging chamber 3, not only is the occupied space saved, but also the vacuum pumping rate is increased, thereby shortening the overall coating time and improving the production efficiency.

[0033] As Figure 4 shown, in one embodiment, the feeding chamber 1 of the single-sided coating equipment includes a first feeding chamber 11 and a second feeding chamber 12. The first feeding chamber 11 and the second feeding chamber 12 are respectively communicated with the coating chamber 2. The discharging chamber 3 includes a first discharging chamber 31 and a second discharging chamber 32. The first discharging chamber 31 and the second discharging chamber 32 are respectively connected and communicated with the coating chamber 2. The first roller conveyor line 4 is respectively located within the first feeding chamber 11, the coating chamber 2, and the first discharging chamber 31 and corresponds one by one. The second roller conveyor line 5 is respectively located within the second feeding chamber 12, the coating chamber 2, and the second discharging chamber 32 and corresponds one by one.

[0034] Specifically, the single-sided coating equipment is a vertical coating production line. Multiple substrates are vertically placed in a carrier. The carrier flows into the first feeding chamber 11 and the second feeding chamber 12 along the first roller conveyor line 4 and the second roller conveyor line 5 respectively. The first feeding chamber 11 evacuates, transitions, and buffers the substrates on the first roller conveyor line 4. The second feeding chamber 12 evacuates, transitions, and buffers the substrates on the second roller conveyor line 5. The substrates on the first roller conveyor line 4 flow onto the first roller conveyor line 4 in the coating chamber 2, and the substrates on the second roller conveyor line 5 flow onto the second roller conveyor line 5 in the coating chamber 2. The substrates on the first roller conveyor line 4 and the substrates on the second roller conveyor line 5 are respectively located on the left and right sides of the bidirectional sputtering coating cathode mechanism 6 in the coating chamber 2. The bidirectional sputtering coating cathode mechanism 6 in the coating chamber 2 simultaneously performs single-sided coating on the substrates on the first roller conveyor line 4 and the second roller conveyor line 5. After coating is completed, the substrates flow into the first discharging chamber 31 and the second discharging chamber 32 along the first roller conveyor line 4 and the second roller conveyor line 5 respectively for buffering, transitioning, and vacuum-breaking operations, and finally are sent out of the equipment to complete the coating process.

[0035] In the above structure, by providing the independently operating and non-interfering first feeding chamber 11 and second feeding chamber 12 to evacuate, transition, and buffer the substrates on the first roller conveyor line 4 and the second roller conveyor line 5 respectively. The provided first feeding chamber 11 and second feeding chamber 12 are not only small in volume and occupy a small area, but also have high vacuum evacuation efficiency, thus improving the production efficiency of the equipment. By providing the independently operating and non-interfering first discharging chamber 31 and second discharging chamber 32 to buffer, transition, and perform vacuum-breaking treatment on the substrates on the first roller conveyor line 4 and the second roller conveyor line 5 respectively. The provided first discharging chamber 31 and second discharging chamber 32 are not only small in volume and occupy a small area, but also have high vacuum evacuation efficiency. This setting is small in volume, improves the vacuum evacuation rate, shortens the production time, and improves the production efficiency.

[0036] As Figure 1 shown, in one embodiment, the feeding chamber 1 of the single-sided coating equipment sequentially includes a sheet feeding chamber 13, a first transition chamber 14, and a first buffer chamber 15 from left to right. This setting facilitates evacuating, transitioning, and buffering the substrates entering the feeding chamber 1.

[0037] As Figure 1 shown, in one embodiment, the discharging chamber 3 of the single-sided coating equipment sequentially includes a second buffer chamber 33, a second transition chamber 34, and a sheet discharging chamber 35 from left to right. This setting facilitates evacuating, transitioning, and buffering the substrates. This setting facilitates buffering, transitioning, and vacuum-breaking of the substrates after coating is completed.

[0038] The above-described embodiments merely represent several implementation manners of the present utility model. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all fall within the protection scope of the present utility model. Therefore, the protection scope of the present utility model patent shall be subject to the appended claims.

Claims

1. Single-sided coating equipment, characterized in that, It includes a feeding chamber (1), a coating chamber (2), and a discharging chamber (3) connected in sequence from left to right. A first roller conveyor line (4) and a second roller conveyor line (5) are respectively arranged in the feeding chamber (1), the coating chamber (2), and the discharging chamber (3). The first roller conveyor line (4) and the second roller conveyor line (5) are used to convey the carriers carrying the substrates. A number of bidirectional sputtering coating cathode mechanisms (6) for coating the substrates on the first roller conveyor line (4) and the second roller conveyor line (5) are arranged between the first roller conveyor line (4) and the second roller conveyor line (5) in the coating chamber (2). Heating devices (7) for heating the substrates are arranged in the feeding chamber (1) and the coating chamber (2). Cold trap devices (8) for extracting condensable vapors are arranged in the feeding chamber (1) and the coating chamber (2).

2. The single-sided coating device according to claim 1, characterized in that One end of the first roller conveyor line (4) in the feeding chamber (1) corresponds to one end of the first roller conveyor line (4) in the coating chamber (2), and the other end of the first roller conveyor line (4) in the coating chamber (2) corresponds to the first roller conveyor line (4) in the discharging chamber (3). One end of the second roller conveyor line (5) in the feeding chamber (1) corresponds to one end of the second roller conveyor line (5) in the coating chamber (2), and the other end of the second roller conveyor line (5) in the coating chamber (2) corresponds to the second roller conveyor line (5) in the discharging chamber (3).

3. The single-sided coating device according to claim 1, characterized in that, The height of the internal space of the cavity of the feeding chamber (1) is less than the height of the internal space of the cavity of the coating chamber (2). The spacing distance between the first roller conveyor line (4) and the second roller conveyor line (5) in the feeding chamber (1) is less than the spacing distance between the first roller conveyor line (4) and the second roller conveyor line (5) in the coating chamber (2). A first carrier translation mechanism (9) is arranged between the second roller conveyor line (5) in the feeding chamber (1) and the second roller conveyor line (5) in the coating chamber (2). One end of the first roller conveyor line (4) in the feeding chamber (1) corresponds to one end of the first roller conveyor line (4) in the coating chamber (2). The height of the internal space of the cavity of the discharging chamber (3) is less than the height of the internal space of the cavity of the coating chamber (2). The spacing distance between the first roller conveyor line (4) and the second roller conveyor line ( 4. The single-sided coating equipment according to claim 1, characterized in that, The feeding chamber (1) includes a first feeding chamber (11) and a second feeding chamber (12), the first feeding chamber (11) and the second feeding chamber (12) are respectively communicated with the coating chamber (2), the discharging chamber (3) includes a first discharging chamber (31) and a second discharging chamber (32), the first discharging chamber (31) and the second discharging chamber (32) are respectively connected and communicated with the coating chamber (2), the first roller conveyor line (4) is respectively located in the first feeding chamber (11), the coating chamber (2) and the first discharging chamber (31) and corresponds one by one, and the second roller conveyor line (5) is respectively located in the second feeding chamber (12), the coating chamber (2) and the second discharging chamber (32) and corresponds one by one.

5. The single-sided coating device according to claim 1 or claim 4, characterized in that, The feeding chamber (1) sequentially includes a film loading chamber (13), a first transition chamber (14) and a first buffer chamber (15) from left to right.

6. The single-sided coating device according to claim 1 or claim 4, characterized in that, The discharging chamber (3) sequentially includes a second buffer chamber (33), a second transition chamber (34) and a film unloading chamber (35) from left to right.

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