Vacuum coating device for target material processing
By designing installation grooves and positioning components on the target base, the meshing of gears and internal tooth rings can achieve rapid central positioning and protective fixation of the target, which solves the problem that the target is not easy to center positioning and improves the accuracy and quality of the coating.
Patent Information
- Application Number
- CN202422487569.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-15
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-10-15
AI Technical Summary
The existing target materials are not easily placed in the center of the target base during installation, which affects the coating effect, especially in high-precision coating application scenarios to reduce the coating quality of the target materials.
A vacuum coating device for target processing is designed, and the target base is equipped with a mounting groove and positioning assembly, including a gear, an inner tooth ring and a positioning ring. The rapid central positioning of the target is achieved through the meshing of the gear and the inner tooth ring, and the protective fixation of the target is achieved through the cooperation of the pad ring and the positioning circle.
The rapid center positioning and protective fixation of the target material are achieved, the accuracy and quality of the coating are improved, and the surface wear of the target material is avoided.
Smart Images
Figure CN223176184U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of vacuum coating, and particularly relates to a vacuum coating device for target processing. Background Art
[0002] A coating target is a sputtering source that forms various functional thin films on a substrate by magnetron sputtering, multi-arc ion plating or other types of coating systems under appropriate process conditions. As a vacuum coating technology, the ion sputtering coating technology is to emit high-energy particles from an ion source to bombard the surface of the target. After the atoms and molecules on the target surface exchange kinetic energy with the incident high-energy particles, they splash out from the target surface and are redeposited and condensed on the substrate to form a thin film. Currently, the target is usually manually installed during installation. The existing target base only has a storage space and does not have the function of quickly positioning the target. It is not easy to place the target at the center position of the target base, which will affect the coating effect in application scenarios that require high-precision coating, thereby reducing the quality of target coating. Summary of the Utility Model
[0003] The purpose of the utility model is to provide a vacuum coating device for target processing to solve the problems existing in the background art.
[0004] To achieve the above technical purpose, the technical scheme adopted by the utility model is as follows:
[0005] A vacuum coating device for target processing includes a target base and a target. An installation groove is opened at the upper end of the target base, the target base is assembled inside the installation groove, a positioning component is assembled on the upper side of the target base, and a fixing component is assembled on the upper side of the target base;
[0006] The positioning component includes gears. Four circumferentially symmetric rotation grooves are opened on the upper side of the target base, and all four rotation grooves are communicated with the installation groove. The gears are rotatably assembled inside all four rotation grooves. A strip-shaped positioning block is fixedly assembled on one side of the gear. An annular groove is opened on the upper side of the target base, and all four rotation grooves are communicated with the annular groove. An internal gear ring is rotatably and sealingly assembled in the annular groove, and all four gears are meshed with the internal gear ring;
[0007] The fixing component includes a positioning ring. An external thread is provided on the lower side of the positioning ring, and an internal thread that is rotationally matched with the external thread is provided on the upper side of the installation groove. The positioning ring is rotationally threaded and assembled in the installation groove.
[0008] Preferably, a rotating ring is fixedly assembled on the outer side of the internal gear ring, and anti-slip lines are provided on the outer side of the rotating ring.
[0009] Preferably, a gasket ring is slidably assembled up and down inside the installation groove, a positioning member is provided between the gasket ring and the target base, and the gasket ring is assembled between the target and the positioning ring.
[0010] Preferably, two symmetrically distributed notches are provided at the upper end of the target base, both of the two notches communicate with the installation groove, two installation blocks are fixedly provided on the side of the gasket ring, and the lower side of the installation block is assembled inside the notch.
[0011] Preferably, an elastic sheet is fixedly provided at the upper end of the installation block, a positioning hole is provided on the elastic sheet, and a positioning circular block slidably matched with the positioning hole is fixedly provided at the upper end of the target base.
[0012] Preferably, a contact ring is fixedly provided at the lower end of the positioning ring.
[0013] Benefits achieved by the present utility model: During the installation process of the gasket ring, since a positioning circular block slidably matched with the positioning hole is fixedly provided at the upper end of the target base, the gasket ring is positioned by the positioning circular block, so that the gasket ring is kept at the central position of the installation groove, and the target can be protected by the gasket ring to avoid surface wear of the target; when assembling the target, since the four gears are meshed with the internal gear ring, during the rotation of the rotating ring, the four gears and the strip-shaped positioning blocks can be driven to rotate simultaneously, and the four strip-shaped positioning blocks rotate synchronously to perform central positioning on the target in the installation groove, realizing rapid central positioning of the target. Description of the Drawings
[0014] The present utility model can be further illustrated by the non-limiting embodiments given in the drawings.
[0015] Figure 1 is a schematic structural diagram of a vacuum coating device for target processing according to the present utility model;
[0016] Figure 2 is an exploded schematic structural diagram of a vacuum coating device for target processing according to the present utility model;
[0017] Figure 3 is Figure 2 an enlarged schematic diagram of part A in
[0018] Figure 4 is Figure 2 an enlarged schematic diagram of part B in
[0019] Figure 5 is a schematic sectional structural diagram of a vacuum coating device for target processing according to the present utility model;
[0020] Figure 6 is Figure 5 an enlarged schematic diagram of part C in
[0021] The descriptions of the main component symbols are as follows:
[0022] Target base 1, target 2, installation groove 11, internal thread 111, gear 12, rotation groove 121, strip-shaped positioning block 122, annular groove 123, internal gear ring 124, positioning ring 13, external thread 131, rotating ring 14, cushion ring 15, notch 151, installation block 152, elastic piece 153, positioning hole 154, positioning round block 155, contact ring 16. Specific implementation manners
[0023] In order to enable those skilled in the art to better understand the present utility model, the technical solutions of the present utility model will be further described below with reference to the accompanying drawings and embodiments.
[0024] As Figure 1 shown, a vacuum coating device for target processing of the present utility model includes a target base 1 and a target 2. An installation groove 11 is opened at the upper end of the target base 1. The target base 1 is assembled inside the installation groove 11. A positioning component is assembled on the upper side of the target base 1, and a fixing component is assembled on the upper side of the target base 1;
[0025] As Figures 5-6 shown, the positioning component includes a gear 12. Four circumferentially symmetric rotation grooves 121 are opened on the upper side of the target base 1. The four rotation grooves 121 are all communicated with the installation groove 11. Gears 12 are rotatably assembled inside the four rotation grooves 121. A strip-shaped positioning block 122 is fixedly assembled on one side of the gear 12. An annular groove 123 is opened on the upper side of the target base 1. The four rotation grooves 121 are all communicated with the annular groove 123. An internal gear ring 124 is hermetically and rotatably assembled in the annular groove 123. The four gears 12 are all meshed with the internal gear ring 124. A rotating ring 14 is fixedly assembled on the outer side of the internal gear ring 124. Anti-slip patterns are provided on the outer side of the rotating ring 14. By rotating the rotating ring 14, the four gears 12 can be driven to rotate simultaneously, so that the four strip-shaped positioning blocks 122 rotate into the installation groove 11, thereby centering the target;
[0026] As Figure 2 shown, the fixing component includes a positioning ring 13. An external thread 131 is provided on the lower side of the positioning ring 13. An internal thread 111 that is threadedly rotationally matched with the external thread 131 is provided on the upper side of the installation groove 11. The positioning ring 13 is threadedly rotationally assembled in the installation groove 11. By rotating the positioning ring 13, the target can be fixed. A contact ring 16 is fixedly provided at the lower end of the positioning ring 13. The contact ring 16 can make the threaded rotation of the positioning ring 13 smooth and avoid the collision of the bottom threads;
[0027] As Figures 3-4As shown, a gasket ring 15 is slidably assembled up and down inside the installation groove 11. A positioning member is provided between the gasket ring 15 and the target base 1. The gasket ring 15 is assembled between the target 2 and the positioning ring 13. Two notch openings 151 symmetrically distributed in a circular pattern are formed at the upper end of the target base 1. Both of the two notch openings 151 are communicated with the installation groove 11. Two installation blocks 152 are fixedly provided on the side of the gasket ring 15. The lower sides of the installation blocks 152 are assembled inside the notch openings 151. Elastic pieces 153 are fixedly provided at the upper ends of the installation blocks 152. Positioning holes 154 are formed in the elastic pieces 153. A positioning circular block 155 that is slidably matched with the positioning holes 154 is fixedly provided at the upper end of the target base 1. The gasket ring 15 is positioned by the positioning circular block 155, so that the gasket ring 15 is kept at the central position of the installation groove 11. The target 2 can be protected by the gasket ring 15 to avoid wear on the surface of the target 2;
[0028] When an operator installs the target, the target 2 is placed inside the installation groove 11, and then the rotating ring 14 is rotated. Since the four gears 12 are meshed with the internal gear ring 124, the four gears 12 and the strip-shaped positioning blocks 122 can be driven to rotate simultaneously during the rotation of the rotating ring 14. The four strip-shaped positioning blocks 122 rotate simultaneously and synchronously to perform central positioning on the target 2 in the installation groove 11. Then the operator can slide and install the gasket ring 15 to prevent the positioning ring 13 from wearing the target 2 during rotation. When installing the gasket ring 15, the gasket ring 15 can be quickly positioned through the positioning holes 154 and the positioning circular block 155. Finally, the positioning ring 13 can be rotated so that the positioning ring 13 is fixedly assembled inside the installation groove 11, thereby realizing the quick fixing and central alignment of the target 2.
[0029] The above embodiments only exemplarily illustrate the principles and effects of the present invention, rather than limiting the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present invention should still be covered by the claims of the present invention.
Claims
1. A vacuum coating device for target processing, comprising a target base and a target, characterized in that: An installation groove is formed at the upper end of the target base, the target base is assembled inside the installation groove, a positioning component is assembled on the upper side of the target base, and a fixing component is assembled on the upper side of the target base; The positioning component includes gears. Four rotation grooves that are symmetrically distributed in a circle are formed on the upper side of the target base. All four rotation grooves communicate with the installation groove. The gears are rotatably assembled inside all four rotation grooves. A strip-shaped positioning block is fixedly assembled on one side of the gear. A ring groove is formed on the upper side of the target base. All four rotation grooves communicate with the ring groove. An internal gear ring is rotatably assembled in the ring groove in a sealed manner. All four gears are meshed with the internal gear ring; The fixing component includes a positioning ring. An external thread is provided on the lower side of the positioning ring, and an internal thread that is rotationally matched with the external thread is provided on the upper side of the installation groove. The positioning ring is rotationally assembled in the installation groove by threading; 2. The vacuum coating device for target processing according to claim 1, characterized in that: A rotating ring is fixedly assembled on the outer side of the internal gear ring, and anti-slip patterns are provided on the outer side of the rotating ring; 3. A vacuum coating device for target processing according to claim 1, characterized in that: A cushion ring is slidably assembled up and down inside the installation groove. A positioning member is provided between the cushion ring and the target base. The cushion ring is assembled between the target and the positioning ring; 4. A vacuum coating device for target processing according to claim 3, characterized in that: Two notch openings that are symmetrically distributed in a circle are formed at the upper end of the target base. Both notch openings communicate with the installation groove. Two installation blocks are fixedly provided on the side of the cushion ring. The lower side of the installation block is assembled inside the notch opening; 5. The vacuum coating device for target processing according to claim 4, characterized in that: An elastic piece is fixedly provided at the upper end of the installation block. A positioning hole is formed in the elastic piece. A positioning circular block that is slidably matched with the positioning hole is fixedly provided at the upper end of the target base; 6. The vacuum coating device for target processing according to claim 1, characterized in that: A contact ring is fixedly provided at the lower end of the positioning ring;