Target material replacement auxiliary device and coating equipment

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to a target material replacement auxiliary device and coating equipment, and aims to solve the problems that a target material can be replaced only when the whole coating equipment is shut down, the shut-down time is long, the idle time of the equipment is increased, and the production efficiency is low. In the target material replacement auxiliary device, the third opening can be communicated with the process chamber, the shielding piece can open or seal the third opening, the multiple target material replacement auxiliary devices can be arranged in the multiple first openings of the coating equipment, and when the target material corresponding to at least one target material replacement auxiliary device needs to be replaced, the shielding piece can shield the third opening or seal the third opening. The shielding piece of at least another target material replacement auxiliary device can open the corresponding third opening, so that the target material corresponding to at least another target material replacement auxiliary device can continue to be subjected to the coating process, the production time delayed by target material replacement is shortened, the steps are simple, the production takt can be accelerated, and the production efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technologies, and particularly to an auxiliary device for target replacement and a coating device. Background Art

[0002] In the current coating process, especially in the field of vacuum coating technology, the replacement of the target is a key link. Specifically, the coating technology deposits the coating material on the surface of the substrate through physical or chemical methods to form a thin film with specific physical, chemical, or mechanical properties. However, during the coating process, the target, as the source of the coating material, gradually wears out as the coating progresses.

[0003] However, this link is often accompanied by a significant decrease in production efficiency. After the target is exhausted in traditional coating equipment, the equipment must be shut down for target replacement operations. This process not only takes a long time but also increases the idle time of the equipment, seriously affecting production efficiency. Summary of the Utility Model

[0004] In view of this, embodiments of this application provide an auxiliary device for target replacement and a coating device to solve the problems that the target can only be replaced when the whole machine is shut down, the shutdown time is long, the idle time of the equipment is increased, and the production efficiency is low.

[0005] In a first aspect, an embodiment of this application provides an auxiliary device for target replacement, which is applied to a coating device. The coating device includes a process chamber body, the process chamber body has a process chamber and a plurality of first openings, the first openings can communicate the process chamber with the outside, and a plurality of auxiliary devices for target replacement can be arranged on the process chamber body. The auxiliary device for target replacement includes: a separator, which can be arranged on the process chamber body and has a second opening, a first accommodation space, and a third opening. The first accommodation space can communicate with the outside through the second opening, and the first accommodation space can communicate with the process chamber through the third opening; a target mounting member, which is supported by the separator and is detachable relative to the separator. The side of the target mounting member facing the third opening is used to arrange the target so that the target is located in the first accommodation space; a shielding member, which is arranged on the separator, and the shielding member is movable relative to the separator to open or close the third opening; wherein, the separator and the shielding member can seal the first openings.

[0006] In combination with the first aspect, in some implementation manners of the first aspect, the shielding member is slidably connected to the separator, and the shielding member can rotate around the separator around a rotation axis; wherein, the two ends of the shielding member are arranged opposite to each other along the rotation axis, and at least one end of the shielding member is rotatably connected to the separator around the rotation axis.

[0007] In combination with the first aspect, in some implementations of the first aspect, the shape of the shielding member includes an arc. The shielding member includes: a first arc-shaped sub-door, rotatably connected to the isolation member around a rotation axis and slidably connected to the isolation member; a second arc-shaped sub-door, disposed opposite to the first arc-shaped sub-door, rotatably connected to the isolation member around the rotation axis and slidably connected to the isolation member, so as to respectively realize the opening and sealing of the third opening through the opening and closing of the first arc-shaped sub-door and the second arc-shaped sub-door.

[0008] In combination with the first aspect, in some implementations of the first aspect, one side of the first arc-shaped sub-door facing the second arc-shaped sub-door has a first groove, and one side of the second arc-shaped sub-door facing the first arc-shaped sub-door has a first protrusion. When the first arc-shaped sub-door and the second arc-shaped sub-door are closed, the first protrusion is sealingly connected to the first groove; and / or, one side of the first arc-shaped sub-door facing the second arc-shaped sub-door has a second protrusion, and one side of the second arc-shaped sub-door facing the first arc-shaped sub-door has a second groove. When the first arc-shaped sub-door and the second arc-shaped sub-door are closed, the second protrusion is sealingly connected to the second groove.

[0009] In combination with the first aspect, in some implementations of the first aspect, the isolation member further has a first through hole, and the center line of the first through hole is collinear with the rotation axis; the first arc-shaped sub-door includes: a first arc-shaped door portion, the cross-section of the first arc-shaped door portion being arc-shaped; and at least one first connecting portion, connected to the first arc-shaped door portion; wherein, the target replacement auxiliary device further includes: a first connecting shaft, rotatably connected to the isolation member, sealing the first through hole, connected to the first connecting portion, and configured to drive the first arc-shaped sub-door to rotate; and / or, the isolation member further has a second through hole, and the center line of the second through hole is collinear with the rotation axis; the second arc-shaped sub-door includes: a second arc-shaped door portion, the cross-section of the second arc-shaped door portion being arc-shaped; and at least one second connecting portion, connected to the second arc-shaped door portion; wherein, the target replacement auxiliary device further includes: a second connecting shaft, rotatably connected to the isolation member, sealing the second through hole, connected to the second connecting portion, and configured to drive the second arc-shaped sub-door to rotate.

[0010] In combination with the first aspect, in some implementations of the first aspect, the target replacement auxiliary device further includes: a first driving connecting member, the first driving connecting member being connected to the first connecting shaft and configured to drive the first connecting shaft to rotate.

[0011] In connection with the first aspect, in certain implementations of the first aspect, the spacer includes: two end plates that are oppositely arranged along the extending direction of the rotation axis; a first side plate that connects the two end plates; a second side plate that is oppositely arranged relative to the first side plate in a direction perpendicular to the extending direction of the rotation axis and connects the two end plates, wherein the two end plates, the first side plate, and the second side plate enclose a first accommodation space and form a second opening and a third opening; wherein, when the second arc-shaped sub-door includes a second arc-shaped door portion and at least one second connecting portion, the first side plate has a second accommodation space for accommodating the first arc-shaped door portion; and / or, when the second arc-shaped sub-door includes a second arc-shaped door portion and at least one second connecting portion, the second side plate has a third accommodation space for accommodating the second arc-shaped door portion.

[0012] In connection with the first aspect, in certain implementations of the first aspect, when the first side plate has a second accommodation space, the first side plate includes: a first inner layer plate; a first outer layer plate that is spaced apart from the first inner layer plate; a third connecting portion that connects the first inner layer plate and the first outer layer plate and forms the second accommodation space with the first inner layer plate and the first outer layer plate; wherein the inner side wall of the first arc-shaped door portion is in contact with and slidably connected to the first inner layer plate; and / or, the outer side wall of the first arc-shaped door portion is in contact with and slidably connected to the first outer layer plate.

[0013] In connection with the first aspect, in certain implementations of the first aspect, the cross-sectional shape of the second accommodation space includes an arc.

[0014] In connection with the first aspect, in certain implementations of the first aspect, the second side plate has a third accommodation space, and the second side plate includes: a second inner layer plate; a second outer layer plate that is spaced apart from the second inner layer plate; a fourth connecting portion that connects the second inner layer plate and the second outer layer plate and forms the third accommodation space with the second inner layer plate and the second outer layer plate; wherein the target replacement auxiliary device further includes: two fifth connecting portions that are oppositely arranged along the extending direction of the rotation axis, each fifth connecting portion connects the first outer layer plate and the second outer layer plate, and the two fifth connecting portions and the first outer layer plate and the second outer layer plate enclose the third opening; wherein the outer side wall of the first arc-shaped door portion is in contact with and slidably connected to the first outer layer plate and the fifth connecting portion, and the outer side wall of the second arc-shaped door portion is in contact with and slidably connected to the second outer layer plate and the fifth connecting portion.

[0015] In connection with the first aspect, in certain implementations of the first aspect, the target replacement auxiliary device further includes: a carrier that is disposed on the spacer and carries the target mounting member; wherein the target mounting member is detachably connected to the carrier, and the side of the carrier facing the spacer conforms to the side of the spacer facing the carrier.

[0016] Second aspect, an embodiment of the present application provides a coating device, including: a process chamber having a process cavity and a plurality of first openings, the first openings being capable of communicating the process cavity with the outside; a plurality of target replacement assisting devices mentioned in any one of the first aspects, disposed on the process chamber and capable of respectively sealing the first openings for assisting in replacing the targets.

[0017] In the target replacement assisting device provided in this embodiment, the spacer supports the target mounting member, and the mounting member is detachable so as to replace the target disposed on the target mounting member. The third opening can communicate with the process cavity, and the arc-shaped door can open or seal the third opening. A plurality of target replacement assisting devices can be disposed at the plurality of first openings of the coating device. When the target corresponding to at least one target replacement assisting device needs to be replaced, the arc-shaped door of at least another target replacement assisting device can open the corresponding third opening, so that the target corresponding to at least another target replacement assisting device can continue the coating process, thereby shortening the production time delayed due to target replacement. The steps are simple, the production beat can be accelerated, and the production efficiency can be improved. Moreover, during the replacement process, the coating device does not need to be shut down as a whole, ensuring the continuity of process conditions and improving the stability of product quality.

[0018] In addition, during the replacement process, the spacer and the arc-shaped door can seal the first opening, which can avoid the overflow of substances in the process cavity and prevent external impurities from contaminating the process cavity and interfering with the coating process. When the process cavity is a vacuum cavity, the target replacement assisting device can also avoid breaking the vacuum of the process cavity, which can further accelerate the production beat, improve the production efficiency, and improve the continuity of process conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] By describing the embodiments of the present application in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present application will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present application, and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application, and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0020] Figure 1 The figure shows a schematic structural diagram of a target replacement assisting device provided by an embodiment of the present application.

[0021] Figure 2 The figure shows an exploded view of a target replacement assisting device provided by an embodiment of the present application.

[0022] Figure 3 The figure shows provided by an embodiment of the present application Figure 1 A cross-sectional view of the target replacement assisting device shown along line A-A.

[0023] Figure 4Explosion diagram of the target replacement auxiliary device provided by another embodiment of the present application is shown.

[0024] Figure 5 Shown is provided by one embodiment of the present application Figure 4 Schematic cross-sectional structure diagram of the target replacement auxiliary device shown along line B-B.

[0025] Figure 6 Schematic structure diagram of the application scenario applicable to the coating equipment provided by one embodiment of the present application is shown.

[0026] Figure 7 Schematic structure diagram of the application scenario applicable to the coating equipment provided by another embodiment of the present application is shown.

[0027] Figure 8 Schematic structure diagram of the carrier provided by one embodiment of the present application is shown.

[0028] Reference numerals:

[0029] 1. Coating equipment; 10. Target replacement auxiliary device; 11. Spacer; 110. Second opening; 111. First accommodation space; 112. Third opening; 113. First through hole; 114. Third seal; 115. End plate; 116. First side plate; 1160. Second accommodation space; 1161. First inner layer plate; 1162. First outer layer plate; 1163. Third connecting portion; 117. Second side plate; 1170. Third accommodation space; 1171. Second inner layer plate; 1172. Second outer layer plate; 1173. Fourth connecting portion; 12. Target mounting member; 13. Shielding member; 130. First arc-shaped sub-door; 1300. First groove; 1301. First arc-shaped door portion; 1302. First connecting portion; 1303. Third through hole; 131. Second arc-shaped sub-door; 1310. First protrusion; 1311. Second arc-shaped door portion; 1312. Second connecting portion; 1313. Fourth through hole; 14. First ventilation hole; 15. First connecting shaft; 16. Second connecting shaft; 17. First driving connecting member; 170. First gear; 18. Second driving connecting member; 180. Second gear; 19. Fifth connecting portion; 20. Process cavity; 21. Process chamber; 22. First opening; 30. Target; 40. Carrier; 400. Second seal; 401. Limit groove; 41. Transportation assembly; 42. Carrier plate; 43. Sixth connecting portion; L1. Central axis; L2. Rotation axis; α. Opening angle; X. Transportation direction. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0031] After the target material of traditional coating equipment is exhausted, it is necessary to stop the machine for target material replacement operations. This process not only takes a long time but also increases the idle time of the equipment, seriously affecting production efficiency. In addition, in the initial stage of using the newly replaced target material, the process conditions when the equipment restarts production cannot immediately reach the process conditions before target material replacement or are different from the process conditions before target material replacement, affecting process stability. This may lead to fluctuations in product quality, such as uneven film thickness, composition deviation, etc.

[0032] Figure 1 The following shows a schematic structural diagram of a target material replacement auxiliary device provided by an embodiment of the present application. Figure 2 The following shows an exploded view of a target material replacement auxiliary device provided by an embodiment of the present application. Figure 3 The following shows a [target material replacement auxiliary device] provided by an embodiment of the present application Figure 1 The following shows a schematic cross-sectional structural diagram of the target material replacement auxiliary device shown along line A-A. Figure 4 The following shows an exploded view of a target material replacement auxiliary device provided by another embodiment of the present application. Figure 5 The following shows a [target material replacement auxiliary device] provided by an embodiment of the present application Figure 4 The following shows a schematic cross-sectional structural diagram of the target material replacement auxiliary device shown along line B-B. Figure 6 The following shows a schematic structural diagram of an application scenario of a target material replacement auxiliary device applicable to coating equipment provided by an embodiment of the present application. Figure 7 The following shows a schematic structural diagram of an application scenario of a target material replacement auxiliary device applicable to coating equipment provided by another embodiment of the present application. As Figures 1 to 7 As shown, the target material replacement auxiliary device 10 is applied to the coating equipment 1. The coating equipment 1 includes a process cavity 20. The process cavity 20 has a process chamber 21 and a plurality of first openings 22. The first openings 22 can communicate the process chamber 21 with the outside. A plurality of target material replacement auxiliary devices 10 can be arranged in the process cavity 20.

[0033] Exemplarily, the coating device 1 can be any device capable of coating an object. Exemplarily, the coating device 1 can include a vapor deposition device. For example, the coating device 1 can include a Physical Vapor Deposition (PVD) device. For example, the coating device 1 can include a magnetron sputtering PVD device. Specifically, the coating device 1 is used to coat the workpiece to be coated. The workpiece to be coated can include components or raw materials for forming a photovoltaic module. For example, the workpiece to be coated can be a silicon wafer, a solar cell, a wafer, etc. The coating device 1 can also be used to prepare a perovskite layer, an electron transport layer, a hole transport layer, a packaging layer, and a transparent electrode of a perovskite photovoltaic cell. The coating device 1 can also be used to prepare a tandem cell.

[0034] Exemplarily, a plurality of first openings 22 are configured to be located above the workpiece to be coated, so that the target 30 is located above the workpiece to be coated.

[0035] The target replacement assisting device 10 includes: a separator 11, a target mounting member 12, and a shielding member 13. The separator 11 can be disposed in the process chamber 20 and has a second opening 110, a first accommodation space 111, and a third opening 112. The first accommodation space 111 can communicate with the outside through the second opening 110, and the first accommodation space 111 can communicate with the process chamber 21 through the third opening 112. The target mounting member 12 is supported by the separator 11 and is detachable relative to the separator 11. The side of the target mounting member 12 facing the third opening 112 is used to dispose the target 30, so that the target 30 is located in the first accommodation space 111. The shielding member 13 is disposed on the separator 11. The shielding member 13 is movable relative to the separator 11 to open or seal the third opening 112. The separator 11 and the shielding member 13 can seal the first opening 22.

[0036] Exemplarily, the shape of the separator 11 can be a frame shape or a tubular shape. Exemplarily, the separator 11 can be sealingly connected to the process chamber 20. For example, the separator 11 is sealingly connected to the outer edge of the cavity forming the first opening 22. Exemplarily, a third seal 114 is provided between the separator 11 and the process chamber 20 to improve the sealing performance between the separator 11 and the process chamber 20. Exemplarily, the second opening 110 faces the outside. The third opening 112 faces the process chamber 21 and is configured to face the workpiece to be coated. Exemplarily, the second opening 110 and the third opening 112 can be oppositely disposed.

[0037] Exemplarily, the target mounting member 12 is disposed on the spacer 11 and is detachably connected to the spacer 11. When it is necessary to replace the target 30 on the target mounting member 12, the target mounting member 12 can be detached from the spacer 11. Exemplarily, the target mounting member 12 can seal the second opening 110. Exemplarily, one side of the target mounting member 12 facing the third opening 112 can be connected to at least one target 30. As Figure 3 shown, one side of the target mounting member 12 facing the third opening 112 is connected to two targets 30, and the two targets 30 can simultaneously perform a coating process on the workpiece to be coated.

[0038] Exemplarily, the shielding member 13 is hinged to the spacer 11, and the shielding member 13 can rotate about the central axis of the hinge rotation shaft to open or seal the third opening 112. Exemplarily, the shielding member 13 can translate relative to the spacer 11 to open or seal the third opening 112. For example, a third driving assembly (not shown in the figure) is provided on the spacer 11, and the third driving assembly drives the shielding member 13 to move tangentially along the third opening 112 to open or seal the third opening 112.

[0039] Exemplarily, referring to Figure 6 and Figure 7 , a plurality of target replacement assisting devices 10 can be applied to the coating apparatus 1. Each target replacement assisting device 10 can seal one first opening 22. The target replacement assisting devices 10 can correspond to the first openings 22 one by one.

[0040] Exemplarily, when at least one of the used targets 30 corresponding to the plurality of target replacement assisting devices 10 needs to be replaced, the shielding member 13 of the target replacement assisting device 10 seals the corresponding third opening 112 to prevent the substances in the process chamber 21 from overflowing, prevent external impurities from contaminating the process chamber 21, and interfere with the coating process, and the shielding member 13 of at least another target replacement assisting device 10 having an unused target 30 opens the third opening 112 of this target replacement assisting device 10, so that the unused target 20 can perform a coating process on the workpiece to be coated.

[0041] Furthermore, during the replacement process of the target 30, the shielding member 13 of at least one target replacement assisting device 10 corresponding to the used target 30 can continuously seal the corresponding third opening 112 to prevent the substances in the process chamber 21 from overflowing, prevent external impurities from contaminating the process chamber 21, and interfere with the coating process.

[0042] In some embodiments, the coating apparatus 1 may further include a vacuum coating apparatus. The process chamber 21 can be a vacuum chamber during the process. Exemplarily, the target mount 12 can seal the second opening 110. The coating apparatus 1 has a plurality of first vent holes 14. Each first vent hole 14 can communicate with a first accommodation space 111.

[0043] Reference Figure 6 and Figure 7 , when at least one of the used targets 30 corresponding to the plurality of target replacement assisting devices 10 needs to be replaced, the shielding member 13 of the target replacement assisting device 10 seals the corresponding third opening 112, so that the process chamber 21 can still maintain a vacuum state, and the first accommodation space 111 corresponding to the target replacement assisting device 10 forms a sealed space. Air is released into the sealed space through the first vent hole 14 to make the air pressure in the sealed space equal to the external air pressure. After the air pressure in the sealed space is equal to the external air pressure, the target mount 12 is removed to replace the used target 30 on the target replacement assisting device 10. And, when the used target 30 corresponding to at least one of the above target replacement assisting devices 10 needs to be replaced, the shielding member 13 of at least another target replacement assisting device 10 having an unused target 30 opens the third opening 112 of this target replacement assisting device 10, so that the unused target 20 can perform a coating process on the workpiece to be coated.

[0044] Furthermore, during the replacement process of the target 30, the shielding member 13 can still seal the third opening 112, so that the process chamber 21 can maintain a vacuum state and the process conditions can continue to be maintained. Exemplarily, after the target mount 12 of the target replacement assisting device 10 originally having a used target 30 is replaced with an unused target 30, the target mount 12 is disposed on the spacer 11, and the target mount 12 seals the second opening 110 to make the first accommodation space 111 form a sealed space. Then, the sealed space can be evacuated through the first vent hole 14 to make the air pressure in the sealed space equal to the air pressure in the process chamber 21. When the unused target 30 of this target replacement assisting device 10 needs to perform a coating on the workpiece to be coated, the shielding member 13 opens the corresponding third opening 112 so that the unused target 2 can perform a coating on the workpiece to be coated.

[0045] The target replacement auxiliary device 10 provided in this embodiment has a spacer 11 that supports a target mounting member 12. The mounting member 12 is detachable to facilitate the replacement of the target 30 provided on the target mounting member 12. The third opening 112 can communicate with the process chamber 21. The shielding member 13 can open or seal the third opening 112. Multiple target replacement auxiliary devices 10 can be provided at multiple first openings 22 of the coating device 1. When the target 30 corresponding to at least one target replacement auxiliary device 10 needs to be replaced, the shielding member 13 of at least another target replacement auxiliary device 10 can open the corresponding third opening 112, so that the target 30 corresponding to at least another target replacement auxiliary device 10 can continue the coating process, thereby shortening the production time wasted due to target replacement 30. The steps are simple, the production rhythm can be accelerated, and the production efficiency can be improved. Moreover, during the replacement process, the coating device 1 does not need to be shut down as a whole, which ensures the continuity of process conditions and improves the stability of product quality.

[0046] In addition, during the replacement process, the spacer 11 and the shielding member 13 can seal the first opening 22, which can prevent the substances in the process chamber 21 from overflowing and prevent external impurities from contaminating the process chamber 21 and interfering with the coating process. When the process chamber 21 is a vacuum chamber, the target replacement auxiliary device 10 can also prevent the process chamber 21 from being broken into vacuum, which can further accelerate the production rhythm, improve the production efficiency, and improve the continuity of process conditions.

[0047] In some embodiments, as Figure 4 shown, the target replacement auxiliary device 10 has a first vent hole 14. The first vent hole 14 communicates with the first accommodation space 111. The first vent hole 14 is configured to evacuate or vent the sealed space formed by the corresponding first accommodation space 111.

[0048] Exemplarily, the first vent hole 14 can be provided on the spacer 11, or on the target mounting member 12, or on the shielding member 13.

[0049] Exemplarily, the coating device 1 further includes a vacuum pump assembly (not shown in the figure). The vacuum pump assembly is configured to evacuate or vent the sealed space through the first vent hole 14. The vacuum pump assembly can include a vacuum pump and a ventilation pipeline. The vacuum pump is connected to the first vent hole 14 through the ventilation pipeline.

[0050] Exemplarily, the target replacement assisting device 10 further includes an electrical control component (not shown in the figure) and a gas supply component. The electrical control component and the gas supply component can be arranged on the target mounting member 12. The electrical control component can be used for controlling and monitoring signals, power, current, voltage, air flow, etc. during the coating process. The electrical control component can serve as the cathode of the target 30. The gas supply component can be used for inputting process gas into the process chamber 21 during the coating process, so that the target 30 can be fully and uniformly glow-discharged. Exemplarily, the coating device 1 further includes a gas distribution component (not shown in the figure). The gas distribution component is communicated with the gas supply component and is configured to distribute the process gas introduced into the gas supply component. The gas distribution component can be detachably connected to the target mounting member 12.

[0051] Exemplarily, the gas supply component has a second ventilation hole for ventilating the process chamber 21. The second ventilation hole can form the first ventilation hole 14. Such a setting can use the second ventilation hole to evacuate and fill the sealed space, and can avoid additionally arranging ventilation holes.

[0052] The target replacement assisting device 10 provided in this embodiment has the first ventilation hole 14. The first ventilation hole 14 is communicated with the first accommodation space 111 and is used for evacuating or filling the sealed space. Such a setting facilitates the target replacement assisting device 10 to be applicable to a vacuum coating device and is beneficial to simplifying the structure of the coating device 1.

[0053] In some embodiments, referring to Figures 1 to 7 , the shielding member 13 is slidably connected to the isolation member 11, and the shielding member 13 can rotate around the isolation member 11 around the rotation axis L2. The two ends of the shielding member 13 are oppositely arranged along the rotation axis L2. At least one end of the shielding member 13 is rotatably connected to the isolation member 11 around the rotation axis L2. Since the shielding member 13 opens or closes the third opening 112 by rotating and sliding around the isolation member 11 rather than moving laterally, it is beneficial to reduce the installation space and working space occupied by the target replacement assisting device 10 and reduce the floor area of the coating device 1.

[0054] Exemplarily, the side wall of the shielding member 13 is slidably connected to the isolation member 11. Further, the side of the isolation member 11 provided with the third opening 112 is slidably connected to the side wall of the shielding member 13. Exemplarily, the shape of the side of the isolation member 11 provided with the third opening 112 is adapted to the side wall of the shielding member 13 facing the isolation member 11. This enables the shielding member 13 to be slidably connected to the side of the isolation member 11 provided with the third opening 112, which is beneficial to increasing the sliding contact area between the isolation member 11 and the shielding member 13 and increasing the sealing performance when the shielding member 13 seals the third opening 112.

[0055] Exemplarily, the side walls of the shielding member 13 connect the two ends of the shielding member 13. Exemplarily, the shape of the side walls of the shielding member 13 includes a cylindrical shape. The side of the spacer 11 where the third opening 112 is provided may also include a cylindrical shape. Exemplarily, the central axis of the side walls of the shielding member 13 may be used as the central axis L1 of the shielding member 13. The central axis L1 of the shielding member 13 is collinear with the rotation axis L2. Such an arrangement enables the shielding member 13 to rotate around its own central axis L1, facilitating the sliding of the shielding member 13 around the spacer 11. Exemplarily, the side walls of the shielding member 13 may be located on the side of the shielding member 13 close to the target mounting member 12, or may be located on the side of the shielding member 13 away from the target mounting member 12.

[0056] In some embodiments, the shape of the shielding member 13 includes an arc. Since the arc-shaped shielding member 13 is realized by rotating and sliding around the spacer 11, rather than the movement or rotation of a flat plate, it is beneficial to further reduce the installation space and working space occupied by the target replacement auxiliary device 10, and reduce the floor area of the coating device 1.

[0057] In some embodiments, the shape of the surface of the shielding member 13 facing the spacer 11 may include a spherical shape. The side of the spacer 11 where the third opening 112 is provided may also be spherical.

[0058] In some embodiments, a first driving assembly may be provided on the process chamber 20 to drive the shielding member 13 to rotate around the spacer 11 and slide relative to the spacer 11. For example, the process chamber 20 is provided with an arc-shaped chute, the end of the shielding member 13 is arranged in the arc-shaped chute, and an arc-shaped rack is further arranged at the end of the shielding member 13. The first driving member includes a third gear and a motor for driving the third gear to rotate. The third gear meshes with the arc-shaped rack, so as to drive the shielding member 13 to rotate around the spacer 11 through the rotation of the third gear.

[0059] In some embodiments, as Figures 2 to 7 shown, the shielding member 13 includes: a first arc-shaped sub-door 130 and a second arc-shaped sub-door 131. The first arc-shaped sub-door 130 is rotatably connected to the spacer 11 around the rotation axis L2 and is slidably connected to the spacer 11. The second arc-shaped sub-door 131 is disposed opposite to the first arc-shaped sub-door 130, is rotatably connected to the spacer 11 around the rotation axis L2 and is slidably connected to the spacer 11, so as to respectively realize the opening and sealing of the third opening 112 through the opening and closing of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131.

[0060] Specifically, the opening of the third opening 112 is achieved by the opening of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131, and the sealing of the third opening 112 is achieved by the closing of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131. Exemplarily, the first arc-shaped sub-door 130 rotates around a first rotation direction, and the second arc-shaped sub-door 131 rotates around a second rotation direction opposite to the first rotation direction to open the third opening 112. The rotation axis L2 is perpendicular to the first rotation direction and the second rotation direction.

[0061] Exemplarily, the side wall of the first arc-shaped sub-door 130 is slidably connected to the separator 11, and the side wall of the second arc-shaped sub-door 131 is also slidably connected to the separator 11. Exemplarily, the shape of the side wall of the first arc-shaped sub-door 130 may include a cylindrical shape, and the shape of the side wall of the second arc-shaped sub-door 131 may include a cylindrical shape. Exemplarily, the side wall of the first arc-shaped sub-door 130 may be located on the side of the first arc-shaped sub-door 130 close to the target mounting member 12 or on the side of the first arc-shaped sub-door 130 away from the target mounting member 12. Exemplarily, the side wall of the second arc-shaped sub-door 131 may be located on the side of the second arc-shaped sub-door 131 close to the target mounting member 12 or on the side of the second arc-shaped sub-door 131 away from the target mounting member 12.

[0062] For the target replacement assisting device 10 provided in this embodiment, the opening and closing of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 respectively achieve the opening and sealing of the third opening 112, so that the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 can open towards opposite sides instead of rotating and sliding towards one side to open the third opening 112, which can further reduce the working space occupied by the target replacement assisting device 10.

[0063] In some embodiments, as Figure 3 and Figure 5 shown, the side of the first arc-shaped sub-door 130 facing the second arc-shaped sub-door 131 has a first groove 1300, and the side of the second arc-shaped sub-door 131 facing the first arc-shaped sub-door 130 has a first protrusion 1310. When the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are closed, the first protrusion 1310 is sealingly connected to the first groove 1300. By providing the first groove 1300 and the first protrusion 1310, it is beneficial to improve the sealing performance of the third opening 112 when the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are closed.

[0064] Exemplarily, the shape of the first protrusion 1310 is adapted to the shape of the first groove 1300. This is beneficial to further improve the sealing performance of the third opening 112 when the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are closed. Exemplarily, the first protrusion 1310 extends along the extension direction of the central axis L1. The first groove 1300 extends along the extension direction of the central axis L1.

[0065] In another embodiment, one side of the first arc-shaped sub-door 130 facing the second arc-shaped sub-door 131 has a second protrusion (not shown in the figure), and one side of the second arc-shaped sub-door 131 facing the first arc-shaped sub-door 130 has a second groove (not shown in the figure). When the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are closed, the second protrusion and the second groove are hermetically connected. By providing the second groove and the second protrusion, it is beneficial to improve the sealing performance of the third opening 112 when the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are closed.

[0066] Exemplarily, the shape of the second protrusion is adapted to the shape of the second groove. Exemplarily, the second protrusion extends along the extension direction of the central axis L1. The second groove extends along the extension direction of the central axis L1.

[0067] In some embodiments, as Figures 2 to 5 shown, the spacer 11 further has a first through hole 113. The center line of the first through hole 113 is collinear with the rotation axis L2.

[0068] The first arc-shaped sub-door 130 includes: a first arc-shaped door portion 1301 and at least one first connecting portion 1302. The cross-section of the first arc-shaped door portion 1301 is arc-shaped. At least one first connecting portion 1302 is connected to the first arc-shaped door portion 1301.

[0069] The target replacement assisting device 10 further includes: a first connecting shaft 15. The first connecting shaft 15 is rotatably connected to the spacer 11, seals the first through hole 113, is connected to the first connecting portion 1302, and is configured to drive the first arc-shaped sub-door 130 to rotate.

[0070] Specifically, the first connecting portion 1302 is rotatably connected to the spacer 11 through the first connecting shaft 15. In some embodiments, the side wall of the first arc-shaped door portion 1301 is slidably connected to the spacer 11. In other embodiments, the side wall of the first arc-shaped door portion 1301 and the first connecting portion 1302 are slidably connected to the spacer 11.

[0071] Exemplarily, the separator 11 is sealingly connected to the process chamber 20, and the first through hole 113 is provided on the side of the separator 11 facing the outside. Such a setting enables the first connecting shaft 15 to be provided on the side of the separator 11 facing the outside, avoiding the first connecting shaft 15 being arranged in the process chamber 21, which is beneficial to simplifying the structure of the coating device 1 and facilitating the rotation of the first connecting shaft 15.

[0072] Exemplarily, as Figure 2 shown, the first connecting portion 1302 has a third through hole 1303. The center line of the third through hole 1303 is collinear with the rotation axis L2. The first connecting shaft 15 penetrates into the third through hole 1303 and is connected to the first connecting portion 1302. Exemplarily, the first connecting shaft 15 is in interference connection with the third through hole 1303.

[0073] In the target replacement assisting device 10 provided in this embodiment, the first arc-shaped sub-door 130 includes a first arc-shaped door portion 1301 and at least one first connecting portion 1302. The first connecting shaft 15 is rotatably connected to the separator 11 and connected to the first connecting portion 1302 to drive the first arc-shaped sub-door 130 to rotate. The structure of the first arc-shaped sub-door 130 is simple, and the first connecting shaft 15 is provided to drive the first arc-shaped sub-door 130 to move.

[0074] In some embodiments, as Figures 2 to 5 shown, the separator 11 further has a second through hole (not shown in the figure). The center line of the second through hole is collinear with the rotation axis L2.

[0075] The second arc-shaped sub-door 131 includes: a second arc-shaped door portion 1311 and at least one second connecting portion 1312. The cross-section of the second arc-shaped door portion 1311 is arc-shaped. At least one second connecting portion 1312 is connected to the second arc-shaped door portion 1311.

[0076] The target replacement assisting device 10 further includes: a second connecting shaft 16. The second connecting shaft 16 is rotatably connected to the separator 11, seals the second through hole, is connected to the second connecting portion 1312, and is configured to drive the second arc-shaped sub-door 131 to rotate.

[0077] Specifically, the second connecting portion 1312 is rotatably connected to the separator 11 through the second connecting shaft 16. Exemplarily, the third opening 112 is opened and sealed by the opening and closing of the first arc-shaped door portion 1301 and the second arc-shaped door portion 1311. In some embodiments, the side wall of the second arc-shaped door portion 1311 is slidably connected to the separator 11. In other embodiments, both the side wall of the second arc-shaped door portion 1311 and the second connecting portion 1312 are slidably connected to the separator 11.

[0078] Exemplarily, the first through hole 113 and the second through hole are disposed opposite to each other. Exemplarily, the separator 11 is sealingly connected to the process chamber 20, and the second through hole is disposed on the side of the separator 11 facing the outside. Such an arrangement enables the second connecting shaft 16 to be disposed on the side of the separator 11 facing the outside, avoiding the second connecting shaft 16 being disposed in the process chamber 21, which is beneficial to simplifying the structure of the coating apparatus 1 and facilitating the rotation of the second connecting shaft 16.

[0079] Exemplarily, as Figure 2 shown, the second connecting portion 1312 has a fourth through hole 1313. The central axis of the fourth through hole 1313 is collinear with the rotation axis L2. The second connecting shaft 16 penetrates into the fourth through hole 1313 and is connected to the second connecting portion 1312. Exemplarily, the second connecting shaft 16 is in interference connection with the fourth through hole 1313.

[0080] Exemplarily, the first arc-shaped sub-door 130 includes a first arc-shaped door portion 1301 and at least two first connecting portions 1302. At least one first connecting portion 1302 is connected to the first connecting shaft 15, and at least another first connecting portion 1302 is rotatably connected to the second connecting shaft 16. Such an arrangement enables the first arc-shaped door portion 1301 to be better supported and more stable during movement, which is beneficial to reducing the jitter and inclination of the first arc-shaped door portion 1301, and enables the first arc-shaped door portion 1301 to be designed with a larger area or weight.

[0081] Exemplarily, the second arc-shaped sub-door 131 includes a second arc-shaped door portion 1311 and at least two second connecting portions 1312. At least one second connecting portion 1312 is connected to the second connecting shaft 16, and at least another second connecting portion 1312 is rotatably connected to the first connecting shaft 15.

[0082] For the target replacement assisting device 10 provided in this embodiment, the second arc-shaped sub-door 131 includes a second arc-shaped door portion 1311 and at least one second connecting portion 1312. The second connecting shaft 16 is rotatably connected to the separator 11 and is connected to the second connecting portion 1312 to drive the second arc-shaped sub-door 131 to rotate. The structure of the second arc-shaped sub-door 131 is simple, and the second connecting shaft 16 is provided to facilitate the driving of the second arc-shaped sub-door 131.

[0083] In some embodiments, as Figure 2As shown, the target replacement auxiliary device 10 further includes: a first driving connection member 17. The first driving connection member 17 is connected to the first connecting shaft 15 and is configured to drive the first connecting shaft 15 to rotate. Exemplarily, the first driving connection member 17 may include a first gear 170. Driving the first connecting shaft 15 to rotate through the first gear 170 facilitates accurately controlling the rotation angle of the first connecting shaft 15, so that the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are accurately opened and closed. Exemplarily, the first driving connection member 17 is disposed at an end of the first connecting shaft 15 away from the isolation member 11. This facilitates driving the first driving connection member 17 to rotate. Exemplarily, the first driving connection member 17 may further include a sprocket, a pulley, etc.

[0084] In some embodiments, as Figure 2 As shown, the target replacement auxiliary device 10 further includes: a second driving connection member 18. The second driving connection member 18 is connected to the second connecting shaft 16 and is configured to drive the second connecting shaft 16 to rotate. Exemplarily, the second driving connection member 18 may include a second gear 180. Driving the second connecting shaft 16 to rotate through the second gear 180 facilitates accurately controlling the rotation angle of the second connecting shaft 16, so that the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are accurately opened and closed. Exemplarily, the second driving connection member 18 is disposed at an end of the second connecting shaft 16 away from the isolation member 11. This facilitates driving the second driving connection member 18 to rotate. Exemplarily, the second driving connection member 18 may further include a sprocket, a pulley, etc.

[0085] In some embodiments, the target replacement auxiliary device 10 further includes a second driving assembly (not shown in the figure). The second driving assembly is disposed on the isolation member 11 and is connected to the shielding member 13, and is used to drive the shielding member 13 to rotate around the rotation axis L2, so that the shielding member 13 slides to open or seal the third opening 112.

[0086] Exemplarily, the second driving assembly is configured to drive the first driving connection member 17 and / or the second driving connection member 18 to rotate. Exemplarily, the second driving assembly may include one or a combination of more than one of the following driving structures: a conveyor belt, a gear set, a sprocket chain, a lead screw guide rail, a cylinder, a motor, and a crank slider. The structure of the second driving assembly is not specifically limited in this embodiment.

[0087] In some embodiments, as Figure 3 and Figure 5As shown, the separator 11 includes a second accommodation space 1160 and a third accommodation space 1170 which are oppositely arranged. The second accommodation space 1160 is used to accommodate at least part of the first arc-shaped sub-door 130. The third accommodation space 1170 is used to accommodate at least part of the second arc-shaped sub-door 131. When the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are opened, the entire first arc-shaped sub-door 130 or a part of the first arc-shaped sub-door 130 is accommodated by the second accommodation space 1160, and the entire second arc-shaped sub-door 131 or a part of the second arc-shaped sub-door 131 is accommodated by the third accommodation space 1170, so as to prevent the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 from being contaminated by target particles, which affects the sealing performance of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 for the third opening 112, and extends the service life of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131.

[0088] In some embodiments, as Figure 3 and Figure 5 shown, the separator 11 includes: two end plates 115, a first side plate 116 and a second side plate 117. The two end plates 115 are oppositely arranged along the extending direction of the rotation axis L2. The first side plate 116 connects the two end plates 115. The second side plate 117 is oppositely arranged with the first side plate 116 in a direction perpendicular to the extending direction of the rotation axis L2, and connects the two end plates 115. The two end plates 115, the first side plate 116 and the second side plate 117 enclose a first accommodation space 111, and form a second opening 110 and a third opening 112.

[0089] Exemplarily, the first through hole 113 and the second through hole are respectively arranged on the end plate 115.

[0090] In some embodiments, as Figure 3 and Figure 5 shown, in the case where the first arc-shaped sub-door 130 includes a first arc-shaped door part 1301 and at least one first connecting part 1302, the first side plate 116 has a second accommodation space 1160, and the second accommodation space 1160 is used to accommodate the first arc-shaped door part 1301. By providing the second accommodation space 1160, it is possible to prevent the first arc-shaped door part 1301 from being contaminated by target particles, which affects the sealing performance of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 for the third opening 112, and extends the service life of the first arc-shaped sub-door 130.

[0091] Exemplarily, when the first arc-shaped sub-door 130 is opened, the first arc-shaped door part 1301 is located in the second accommodation space 1160.

[0092] In some embodiments, as Figure 3 and Figure 5As shown, when the second arc-shaped sub-door 131 includes a second arc-shaped door portion 1311 and at least one second connecting portion 1312, the second side plate 117 has a third accommodation space 1170 for accommodating the second arc-shaped door portion 1311. Exemplarily, when the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are opened, the second arc-shaped door portion 1311 is located in the third accommodation space 1170. By providing the third accommodation space 1170, it is possible to prevent the second arc-shaped door portion 1311 from being contaminated by target particles, which may affect the sealing performance of the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 for the third opening 112, and extend the service life of the second arc-shaped sub-door 131.

[0093] In some embodiments, as Figure 3 and Figure 5 shown, when the first side plate 116 has a second accommodation space 1160, the first side plate 116 includes: a first inner layer plate 1161, a first outer layer plate 1162, and a third connecting portion 1163. The first outer layer plate 1162 is spaced apart from the first inner layer plate 1161. The third connecting portion 1163 connects the first inner layer plate 1161 and the first outer layer plate 1162 and forms the second accommodation space 1160 with the first inner layer plate 1161 and the first outer layer plate 1162. By providing the first inner layer plate 1161, it is possible to prevent the target 30 from directly sputtering onto the inner sidewall of the first arc-shaped door portion 1301 and the edge for contacting the second arc-shaped door portion 1311 during operation. By providing the first outer layer plate 1162, it is possible to prevent target particles from being deposited around the outer sidewall of the first arc-shaped door portion 1301.

[0094] Exemplarily, both the first outer layer plate 1162 and the third connecting portion 1163 are connected to the two end plates 115. The shapes of the first inner layer plate 1161 and the first outer layer plate 1162 may be the same or different. Exemplarily, the second accommodation space 1160 can also accommodate at least one first connecting portion 1302. Exemplarily, the second accommodation space 1160 and the first accommodation space 111 may be connected or unconnected.

[0095] In some embodiments, the inner sidewall of the first arc-shaped door portion 1301 is attached to and slidably connected to the first inner layer plate 1161. Exemplarily, a first seal is provided between the inner sidewall of the first arc-shaped door portion 1301 and the first inner layer plate 1161. The first seal may be a vacuum sealant or a sealant film coating. The sealant film coating may be formed of an elastic polymer material.

[0096] In some other embodiments, the outer sidewall of the first arc-shaped door portion 1301 is attached to the first outer layer plate 1162 and is slidably connected to the first outer layer plate 1162. Exemplarily, the above-mentioned first sealing member may also be provided between the outer sidewall of the first arc-shaped door portion 1301 and the first outer layer plate 1162.

[0097] By attaching the sidewall of the first arc-shaped door portion 1301 to the first inner layer plate 1161 or the first outer layer plate 1162, the sliding contact area between the first arc-shaped sub-door 130 and the separator 11 is increased, enhancing the sealing performance when the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 seal the third opening 112.

[0098] In some embodiments, the cross-sectional shape of the second accommodation space 1160 includes an arc. Such a setting is beneficial for reducing the volume of the second accommodation space 1160, reserving more space for the target 30 installed on the target mounting member 12.

[0099] In some embodiments, such as Figure 3 and Figure 5 as shown, the second side plate 117 has a third accommodation space 1170. The second side plate 117 includes: a second inner layer plate 1171, a second outer layer plate 1172, and a fourth connecting portion 1173. The second outer layer plate 1172 is spaced apart from the second inner layer plate 1171. The fourth connecting portion 1173 connects the second inner layer plate 1171 and the second outer layer plate 1172 and forms the third accommodation space 1170 with the second inner layer plate 1171 and the second outer layer plate 1172.

[0100] Exemplarily, both the second outer layer plate 1172 and the fourth connecting portion 1173 are connected to the two end plates 115. The shapes of the second inner layer plate 1171 and the second outer layer plate 1172 may be the same or different. Exemplarily, the third accommodation space 1170 can also accommodate at least one second connecting portion 1312. Exemplarily, the third accommodation space 1170 and the first accommodation space 111 may be connected or unconnected.

[0101] In some embodiments, the inner sidewall of the second arc-shaped door portion 1311 is attached to the second inner layer plate 1171 and is slidably connected to the second inner layer plate 1171. Exemplarily, the above-mentioned first sealing member is provided between the inner sidewall of the second arc-shaped door portion 13,11 and the second inner layer plate 1171.

[0102] In some other embodiments, the outer sidewall of the second arc-shaped door portion 1311 is attached to the second outer layer plate 1172 and is slidably connected to the second outer layer plate,1172. Exemplarily, the above-mentioned first sealing member may also be provided between the outer sidewall of the second arc-shaped door portion 1311 and the second outer layer plate 1172.

[0103] In some embodiments, such as Figure 3 andFigure 5 As shown, the target replacement auxiliary device 10 further includes: two fifth connection parts 19. The two fifth connection parts 19 are oppositely arranged along the extension direction of the rotation axis L2. Each fifth connection part 19 is connected to the first outer layer plate 1162 and the second outer layer plate 1172. The two fifth connection parts 19 and the first outer layer plate 1162 and the second outer layer plate 1172 enclose a third opening 112. The outer side wall of the first arc-shaped door part 1301 is attached to and slidably connected to the first outer layer plate 1162 and the fifth connection part 19. The outer side wall of the second arc-shaped door part 1311 is attached to and slidably connected to the second outer layer plate 1172 and the fifth connection part 19. With such an arrangement, the opening and sealing of the third opening 112 can be realized by the opening and closing of the first arc-shaped door part 1301 and the second arc-shaped door part 1311, which is beneficial to simplifying the structures of the first inner layer plate 1161 and the second inner layer plate 1171 and reducing the manufacturing difficulty and cost of the target replacement auxiliary device 10.

[0104] In some embodiments, as Figure 3 and Figure 5 shown, the target replacement auxiliary device 10 further includes: two sixth connection parts 43. The two sixth connection parts 43 are oppositely arranged along the extension direction of the rotation axis L2. Each sixth connection part 43 is connected to the first inner layer plate 1161 and the second inner layer plate 1171. With such an arrangement, the area where the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 are blocked can be increased, further preventing the first arc-shaped sub-door 130 and the second arc-shaped sub-door 131 from being contaminated by target particles.

[0105] In some embodiments, referring to Figure 7 , the range of the opening angle α after the first arc-shaped door part 1301 and the second arc-shaped door part 1311 are opened can be greater than 0° and less than or equal to 250°. Referring to Figure X, the opening angle α after the first arc-shaped door part 1301 and the second arc-shaped door part 1311 are opened is 125°.

[0106] Figure 8 Shown is a schematic structural diagram of a carrier provided by an embodiment of the present application. As Figure 8 shown, the target replacement auxiliary device 10 further includes: a carrier 40. The carrier 40 is arranged on the separator 11 and carries the target mounting member 12. The target mounting member 12 is detachably connected to the carrier 40. The side of the carrier 40 facing the separator 11 conforms to the side of the separator 11 facing the carrier 40.

[0107] Since the shielding member 13 is movable relative to the spacer member 11, the shape of the spacer member 11 on the side facing the target mounting member 12 may be relatively special. For example, the shielding member 13 can rotate around the spacer member 11 and is slidably connected to the spacer member 11. The shape of the spacer member 11 on the side facing the target mounting member 12 includes an arc. By providing the carrier member 40 for carrying, it is convenient for the target mounting member 12 to be carried, which is beneficial to simplifying the structure of the spacer member 11.

[0108] Exemplarily, the target mounting member 12 is hermetically connected to the carrier member 40. The carrier member 40 and the target mounting member 12 can seal the second opening 110. Exemplarily, the carrier member 40 can be tightly connected to the target mounting member 12 by a plurality of screws to achieve the hermetic connection between the two. Exemplarily, the carrier member 40 is detachably connected to the spacer member 11. When the target 30 needs to be replaced, the carrier member 40 and the target mounting member 12 can be removed together.

[0109] Exemplarily, the carrier member 40 is hermetically connected to the spacer member 11. Exemplarily, a second seal 400 is provided between the carrier member 40 and the spacer member 11 to improve the sealing performance of the hermetic connection between the carrier member 40 and the spacer member 11.

[0110] Exemplarily, the side of the carrier member 40 facing the target mounting member 12 has a limit groove 401 to limit the position of the target mounting member 12. When the target 30 needs to be replaced, the target mounting member 12 can be disassembled from the carrier member 40.

[0111] The embodiments of the target replacement assisting device 10 of the present application have been described in detail above. Next, the embodiments of the coating device 1 of the present application will be described in detail. It should be understood that the description of the embodiments of the target replacement assisting device 10 corresponds to the description of the embodiments of the coating device 1. Therefore, the parts not described in detail can be referred to the previous embodiments of the target replacement assisting device 10.

[0112] As Figure 5 and Figure 6 shown, the coating device 1 includes: a process chamber 20 and a plurality of target replacement assisting devices 10 mentioned in any of the above embodiments. The process chamber 20 has a process cavity 21 and a plurality of first openings 22. The first openings 22 can communicate the process cavity 21 with the outside. A plurality of target replacement assisting devices 10 are arranged in the process chamber and can respectively seal the first openings 22 for assisting in replacing the target 30.

[0113] Exemplarily, the coating apparatus 1 may have a plurality of process chambers 21. Each process chamber 21 may communicate with the outside through at least two first openings 22. Such a setting enables at least two target replacement auxiliary devices 10 to be correspondingly provided for each process chamber 21. Exemplarily, the target replacement auxiliary devices 10 corresponding to the same process chamber 21 are used to mount targets 30 of the same material. Exemplarily, the targets mounted by the target replacement auxiliary devices 10 corresponding to different process chambers 21 may be different.

[0114] Exemplarily, the coating apparatus 1 further includes a transport assembly 41 and a carrier plate 42. The transport assembly 41 is used to transport the workpiece to be coated along the transport direction X. The carrier plate 42 is used to carry the workpiece to be coated. Exemplarily, the plurality of first openings 22 are arranged along the transport direction X.

[0115] In the coating apparatus 1 provided in this embodiment, the separator 11 supports the target mounting member 12, and the mounting member 12 is detachable so as to replace the target 30 provided on the target mounting member 12. The third opening 112 can communicate with the process chamber 21, and the shielding member 13 can open or seal the third opening 112. The plurality of target replacement auxiliary devices 10 can be arranged at the plurality of first openings 22 of the coating apparatus 1. When the target 30 corresponding to at least one target replacement auxiliary device 10 needs to be replaced, the shielding member 13 of at least another target replacement auxiliary device 10 can open the corresponding third opening 112, so that the target 30 corresponding to at least another target replacement auxiliary device 10 can continue the coating process, thereby shortening the production time wasted due to replacing the target 30. The steps are simple, the production beat can be accelerated, and the production efficiency can be improved. Moreover, during the replacement process, the coating apparatus 1 does not need to stop the whole machine, which ensures the continuity of the process conditions and improves the stability of the product quality.

[0116] In addition, since the separator 11 and the shielding member 13 can seal the first opening 22 during the replacement process, it can prevent the substances in the process chamber 21 from overflowing and prevent external impurities from contaminating the process chamber 21 and interfering with the coating process. When the process chamber 21 is a vacuum chamber, the target replacement auxiliary device 10 can also prevent the process chamber 21 from being broken into vacuum, which can further accelerate the production beat, improve the production efficiency, and improve the continuity of the process conditions.

[0117] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0118] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and are not intended to require or imply that the connection, arrangement, and configuration must be carried out in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "provided with", "having", etc. are open-ended terms, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used herein refer to the phrase "and / or", and can be used interchangeably with it, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to", and can be used interchangeably with it.

[0119] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0120] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0121] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. An auxiliary device for target replacement, characterized in that Applied to a coating device, the coating device includes a process chamber, the process chamber having a process cavity and a plurality of first openings, the first openings being capable of communicating the process cavity with the outside, and a plurality of the target replacement auxiliary devices being capable of being disposed in the process chamber, the target replacement auxiliary device including: A separator, capable of being disposed in the process chamber, and having a second opening, a first accommodation space, and a third opening, the first accommodation space being capable of communicating with the outside through the second opening, and the first accommodation space being capable of communicating with the process cavity through the third opening; A target mounting member, supported by the separator and detachable relative to the separator, a side of the target mounting member facing the third opening being for disposing a target such that the target is located in the first accommodation space; A shielding member, disposed on the separator, the shielding member being movable relative to the separator to open or close the third opening; Wherein, the separator and the shielding member are capable of sealing the first opening.

2. The auxiliary device for target replacement according to claim 1, wherein The shielding member is slidably connected to the separator, and the shielding member is capable of rotating around the separator around a rotation axis; Wherein, two ends of the shielding member are oppositely disposed along the rotation axis, and at least one end of the shielding member is rotatably connected to the separator around the rotation axis.

3. The auxiliary device for target replacement according to claim 2, characterized in that, The shape of the shielding member includes an arc, and the shielding member includes: A first arc-shaped sub-door, rotatably connected to the separator around the rotation axis and slidably connected to the separator; A second arc-shaped sub-door, disposed opposite to the first arc-shaped sub-door, rotatably connected to the separator around the rotation axis and slidably connected to the separator, so as to respectively open and seal the third opening through the opening and closing of the first arc-shaped sub-door and the second arc-shaped sub-door.

4. The auxiliary device for target replacement according to claim 3, wherein A first groove is provided on a side of the first arc-shaped sub-door facing the second arc-shaped sub-door, and a first protrusion is provided on a side of the second arc-shaped sub-door facing the first arc-shaped sub-door. In the case where the first arc-shaped sub-door and the second arc-shaped sub-door are closed, the first protrusion is hermetically connected to the first groove; And / or A second protrusion is provided on a side of the first arc-shaped sub-door facing the second arc-shaped sub-door, and a second groove is provided on a side of the second arc-shaped sub-door facing the first arc-shaped sub-door. In the case where the first arc-shaped sub-door and the second arc-shaped sub-door are closed, the second protrusion is hermetically connected to the second groove.

5. The target replacement auxiliary device according to claim 3, wherein The separator further has a first through hole, a center line of the first through hole being collinear with the rotation axis, and the first arc-shaped sub-door includes: a first arc-shaped door portion, a cross section of the first arc-shaped door portion being arc-shaped; and at least one first connecting portion, connected to the first arc-shaped door portion; wherein, the target replacement auxiliary device further includes: a first connecting shaft, rotatably connected to the separator, sealing the first through hole, connected to the first connecting portion, and configured to drive the first arc-shaped sub-door to rotate; And / or The spacer further has a second through hole, the center line of the second through hole is collinear with the rotation axis, and the second arc-shaped sub-door includes: a second arc-shaped door portion, the cross-section of the second arc-shaped door portion being arc-shaped; and at least one second connecting portion connected to the second arc-shaped door portion; wherein, the target replacement assisting device further includes: a second connecting shaft rotatably connected to the spacer, sealing the second through hole, connected to the second connecting portion, and configured to drive the second arc-shaped sub-door to rotate.

6. The auxiliary device for target replacement according to claim 5, characterized in that, Further included is: a first driving connecting member connected to the first connecting shaft and configured to drive the first connecting shaft to rotate.

7. The auxiliary device for target replacement according to claim 5, wherein, The spacer includes: two end plates oppositely arranged along the extending direction of the rotation axis; a first side plate connecting the two end plates; a second side plate oppositely arranged relative to the first side plate in a direction perpendicular to the extending direction of the rotation axis and connecting the two end plates, wherein the two end plates, the first side plate and the second side plate enclose the first accommodation space and form the second opening and the third opening; Wherein, when the second arc-shaped sub-door includes the second arc-shaped door portion and at least one of the second connecting portions, the first side plate has a second accommodation space for accommodating the first arc-shaped door portion; and / or, when the second arc-shaped sub-door includes the second arc-shaped door portion and at least one of the second connecting portions, the second side plate has a third accommodation space for accommodating the second arc-shaped door portion.

8. The auxiliary device for target replacement according to claim 7, characterized in that, When the first side plate has the second accommodation space, the first side plate includes: a first inner layer plate; a first outer layer plate spaced apart from the first inner layer plate; a third connecting portion connecting the first inner layer plate and the first outer layer plate and forming the second accommodation space with the first inner layer plate and the first outer layer plate; Wherein, the inner side wall of the first arc-shaped door portion is in contact with and slidably connected to the first inner layer plate; and / or, the outer side wall of the first arc-shaped door portion is in contact with and slidably connected to the first outer layer plate.

9. The auxiliary device for target replacement according to claim 8, wherein, The cross-sectional shape of the second accommodation space includes an arc.

10. The auxiliary device for target replacement according to claim 8, wherein, The second side plate has the third accommodation space, and the second side plate includes: a second inner layer plate; a second outer layer plate spaced apart from the second inner layer plate; a fourth connecting portion connecting the second inner layer plate and the second outer layer plate and forming the third accommodation space with the second inner layer plate and the second outer layer plate; Wherein, the target replacement assisting device further includes: two fifth connecting portions oppositely arranged along the extending direction of the rotation axis, each of the fifth connecting portions connecting the first outer layer plate and the second outer layer plate, and the two fifth connecting portions and the first outer layer plate and the second outer layer plate enclose the third opening; Wherein, the outer side wall of the first arc-shaped door portion is attached to and slidably connected with the first outer layer plate and the fifth connecting portion, and the outer side wall of the second arc-shaped door portion is attached to and slidably connected with the second outer layer plate and the fifth connecting portion.

11. The auxiliary device for target replacement according to any one of claims 1 to 10, characterized in that, Further comprising: a carrier member disposed on the isolation member and carrying the target mounting member; Wherein, the target mounting member is detachably connected to the carrier member, and one side of the carrier member facing the isolation member conforms to one side of the isolation member facing the carrier member.

12. A coating device, characterized in that, Comprising: a process chamber having a process cavity and a plurality of first openings capable of communicating the process cavity with the outside; a plurality of the target replacement assisting devices according to any one of the above claims 1-11, disposed on the process chamber and capable of respectively sealing the first openings for assisting in replacing the target.

Images