Target material rack for maintenance of rotating target material

Abstract

The utility model relates to the technical field of target material frames, in particular to a target material frame for maintenance of a rotating target material, which comprises a maintenance seat, a telescopic frame is mounted on the upper end face of the maintenance seat, the telescopic frame is vertically fixed on the maintenance seat, a horizontal bracket is mounted at the head of the telescopic frame, a plurality of auxiliary rolling frames are mounted in the horizontal bracket, and the auxiliary rolling frames are fixed on the maintenance seat. The auxiliary rolling frame and the horizontal bracket are clamped and fixed, a lifting frame is installed at the lower end of the horizontal bracket in a sliding mode, and the horizontal bracket is further provided with an electric cylinder for driving the lifting frame to ascend and descend. The telescopic frame is fixedly installed on the maintenance seat, it is guaranteed that the use height of the horizontal bracket can be changed by adjusting the length of the telescopic frame during use, different use requirements of maintenance are easily met, meanwhile, the auxiliary rolling frame is fixedly installed on the horizontal bracket, it is guaranteed that a rotating target material is stably placed, and the maintenance efficiency is improved. And the target material of the rotating target can be assisted to rotate stably through the pin rollers in the using process.

Description

Technical Field

[0001] The utility model relates to the technical field of target racks, in particular to a target rack for maintaining a rotating target. Background Art

[0002] The rotating target, also known as the magnetron sputtering rotating cylindrical cathode target, has been widely used in the industrial production of large-area functional films. It is based on magnetron sputtering technology. Its emergence just meets the requirements of industrial preparation of large-area high-quality functional films. The rotating target requires maintenance when not in use. After removing the rotating target from the magnetron sputtering equipment, it needs to be placed on a bracket for maintenance operations.

[0003] The existing Chinese patent with publication number CN208485947U discloses a target rack for maintaining a rotating target, including two parallel bracket units, each bracket unit includes two vertical support columns, the bottom of the two support columns are respectively provided with a support seat, a support beam is erected between the tops of the two support columns, the support beam and the two support columns form a "冂" shape, the top of the support beam is provided with a target support seat, and the top of the target support seat is provided with a supporting groove; the supporting grooves of the two bracket units correspond to each other, forming a supporting fit for the rotating target.

[0004] Regarding the above-mentioned related technologies, it is found that the existing rotating target maintenance target rack needs to place the target on the rack when in use, so it needs to be rotated and adjusted during maintenance, which is not only laborious to rotate, but also easy to scratch the surface of the target. Utility Model Content

[0005] The utility model solves the problems in the related art and provides a target material rack for maintaining a rotating target material.

[0006] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0007] A target material rack for maintaining a rotating target material comprises a maintenance seat, the upper end surface of the maintenance seat is equipped with a telescopic frame, the telescopic frame is vertically fixed on the maintenance seat, the head of the telescopic frame is equipped with a horizontal bracket, a plurality of auxiliary rollers are installed in the horizontal bracket, the auxiliary rollers are fixed with the horizontal bracket, a lifting frame is slidably installed on the lower end of the horizontal bracket, and the horizontal bracket is also equipped with an electric cylinder for driving the lifting frame to rise and fall, and a limiting slider is fixedly installed on the head of the lifting frame, and the limiting slider passes through the middle of the auxiliary roller.

[0008] As a preferred solution, the maintenance seat includes a seat plate and a side frame, and storage grooves are opened on both sides of the seat plate. The side frame is installed in the storage groove, and one end of the side frame is rotatably connected to the seat plate.

[0009] As a preferred solution, the telescopic frame includes a positioning vertical shell and a sliding rod. The positioning vertical shell is fixedly installed on the upper end surface of the seat plate. The sliding rod is slidably installed in the positioning vertical shell, and a locking bolt for locking the positioning vertical shell is installed on the side surface of the sliding rod.

[0010] As a preferred solution, an arc-shaped groove is formed on the upper end surface of the horizontal bracket, and a clamping groove for installing the auxiliary roller frame is also formed on the horizontal bracket. A through groove for the lifting frame to pass through is also formed on the lower end surface of the horizontal bracket.

[0011] As a preferred solution, the auxiliary roller frame includes an arc-shaped frame and rollers. The rollers are evenly installed in the arc-shaped frame, and the rollers are rotatably connected to the arc-shaped frame.

[0012] As a preferred solution, the lifting frame includes a frame plate and support columns. The frame plate is fixedly installed at the output end of the electric cylinder. The support columns are evenly installed on the upper end surface of the frame plate, and the support columns are fixedly connected to the frame plate.

[0013] As a preferred solution, the limit slider includes an anti-slip plate and a sleeve. The sleeve is fixedly installed on the lower end surface of the anti-slip plate, and the sleeve is sleeved and fixed on the head of the support column.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows: By fixedly installing a telescopic frame on the maintenance seat in this application, it is ensured that the use height of the horizontal bracket can be changed by adjusting the length of the telescopic frame during use, which is easy to meet different use requirements for maintenance. At the same time, by fixedly installing an auxiliary roller frame on the horizontal bracket, it is ensured that the rotary target target is stably placed, and the rollers can also assist the rotary target target to rotate stably during use, making it easy for the operator to perform rotation adjustment. At the same time, through the settings of the electric cylinder, the lifting frame and the limit slider, it is ensured that the rotary target target is limited, which can prevent the rotary target target from rotating during the maintenance process and increase the stability of the maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the overall structural schematic diagram of the present utility model;

[0016] Figure 2 is Figure 1 the front view of the device shown;

[0017] Figure 3 is Figure 1 the three-dimensional view of the device shown without the auxiliary roller frame and the limit slider installed;

[0018] Figure 4 is the three-dimensional view of the cooperation between the auxiliary roller frame and the limit slider of the present utility model;

[0019] Figure 5 is Figure 4Front view of the device shown

[0020] In the figure: 1, maintenance seat; 11, seat board; 111, storage groove; 12, side frame; 2, telescopic frame; 21, positioning vertical shell; 22, sliding rod; 221, locking bolt; 3, horizontal bracket; 31, arc groove; 32, engaging groove; 33, through groove; 4, auxiliary roller frame; 41, arc frame; 42, roller; 5, lifting frame; 51, frame board; 52, support column; 6, electric cylinder; 7, limit slider; 71, anti-slip plate; 72, sleeve. Detailed implementation manners

[0021] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. The description of at least one exemplary embodiment is actually only illustrative and in no way restrictive of the present utility model and its application or use. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0022] It should be noted that the terms used herein are only for describing the specific implementation manners and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless otherwise clearly specified in the context, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "comprise" are used in this specification, they indicate the presence of the described features, steps, operations, devices, components and / or their combinations.

[0023] Unless otherwise specifically stated, the relative arrangements, numerical expressions and values of the components and steps set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be understood that for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods and devices should be regarded as part of the authorized specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0024] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description. Without contrary explanation, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the protection scope of the present utility model; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0025] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "upper...", etc. can be used here to describe the spatial positional relationship between a device or feature shown in the drawings and other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation other than the orientation described in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned as "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0026] In addition, it should be noted that using words such as "first", "second", etc. to limit components is only for the convenience of distinguishing the corresponding components. Without additional statement, the above words have no special meaning. Therefore, it cannot be understood as a limitation on the protection scope of the present utility model.

[0027] Refer to Figure 1 、 Figure 2 and Figure 3As shown, a target rack for maintaining a rotating target includes a maintenance base 1. An expansion frame 2 is installed on the upper end surface of the maintenance base 1. The expansion frame 2 is vertically fixed on the maintenance base 1. A horizontal bracket 3 is installed at the head of the expansion frame 2. A number of auxiliary roller frames 4 are installed in the horizontal bracket 3. The auxiliary roller frames 4 are snap-fitted and fixed with the horizontal bracket 3. A lifting frame 5 is slidably installed at the lower end of the horizontal bracket 3. And an electric cylinder 6 for driving the lifting frame 5 to lift is also installed on the horizontal bracket 3. A limit slider 7 is fixedly installed at the head of the lifting frame 5. The limit slider 7 passes through the middle of the auxiliary roller frame 4. By setting the maintenance base 1 to stably install the expansion frame 2, and then using the expansion frame 2 to support and install the horizontal bracket 3, it is convenient to change the use height of the horizontal bracket 3 by adjusting the length of the expansion frame 2 during use. At the same time, by installing a number of auxiliary roller frames 4 in the horizontal bracket 3, the rotating target can be stably placed by the auxiliary roller frames 4 during use. When the rotating target is placed, it is convenient to rotate and adjust the rotating target during maintenance. At the same time, by setting the lifting frame 5 and the limit slider 7, when the rotating target does not need to rotate, the electric cylinder 6 can be used to lift the limit slider 7, and the limit slider 7 is used to support the surface of the rotating target to achieve the purpose of locking it. The maintenance base 1 includes a base plate 11 and side frames 12. Receiving grooves 111 are opened on both sides of the base plate 11. The side frames 12 are installed in the receiving grooves 111, and one end of the side frame 12 is rotatably connected to the base plate 11. By setting the structure of the maintenance base 1, the side frames 12 are arranged on the base plate 11 during use, so that it is convenient to turn out the side frames 12 during use to ensure that the maintenance base 1 can be stably placed on the ground, and when not in use, the side frames 12 can be received in the receiving grooves 111.

[0028] Referring to Figure 2 and Figure 3 As shown, the expansion frame 2 includes a positioning vertical shell 21 and a sliding rod 22. The positioning vertical shell 21 is fixedly installed on the upper end surface of the base plate 11. The sliding rod 22 is slidably installed in the positioning vertical shell 21, and a locking bolt 221 for locking the positioning vertical shell 21 is installed on the side surface of the sliding rod 22. By setting the structure of the expansion frame 2, it is ensured that the sliding rod 22 can be installed through the positioning vertical shell 21 during use, and it is easy to adjust the use height by sliding the position of the sliding rod 22 in the positioning vertical shell 21 during use. After adjusting the height, the sliding rod 22 can be locked by rotating the locking bolt 221.

[0029] Referring to Figure 3As shown, an arc-shaped groove 31 is formed on the upper end surface of the horizontal bracket 3, and a clamping groove 32 for installing the auxiliary roller frame 4 is also formed on the horizontal bracket 3. A through groove 33 for the lifting frame 5 to pass through is further formed on the lower end surface of the horizontal bracket 3. The stable installation of the auxiliary roller frame 4 is ensured by the settings of the arc-shaped groove 31 and the clamping groove 32, while the through groove 33 facilitates the support and limit slider 7 to pass through the lifting frame 5.

[0030] Referring to Figure 4 and Figure 5 As shown, the auxiliary roller frame 4 includes an arc-shaped frame 41 and rollers 42. The rollers 42 are evenly installed in the arc-shaped frame 41 and are rotatably connected to the arc-shaped frame 41. The structural settings of the auxiliary roller frame 4 ensure that the rollers 42 can be installed through the arc-shaped frame 41 during use. In this way, when the rotary target is placed in the arc-shaped frame 41, it can be supported by the rollers 42, which facilitates better rotation and adjustment of the rotary target.

[0031] Referring to Figure 2 、 Figure 4 and Figure 5 As shown, the lifting frame 5 includes a frame plate 51 and support columns 52. The frame plate 51 is fixedly installed at the output end of the electric cylinder 6. The support columns 52 are evenly installed on the upper end surface of the frame plate 51 and are fixedly connected to the frame plate 51. The structural settings of the lifting frame 5 ensure that the support columns 52 can be installed through the frame plate 51 during use. In this way, all the support columns 52 can be driven to lift synchronously by the frame plate 51 during use, and then the limit slider 7 can be driven by the support columns 52 to better limit and support the rotary target. The limit slider 7 includes an anti-slip plate 71 and a sleeve 72. The sleeve 72 is fixedly installed on the lower end surface of the anti-slip plate 71 and is sleeved and fixed on the head of the support column 52. The structural settings of the limit slider 7 ensure that the anti-slip plate 71 can be sleeved and fixed on the head of the support column 52 through the sleeve 72 during use. In this way, the anti-slip plate 71 can be driven by the support column 52 to support on the surface of the rotary target during use, and the rotation of the rotary target can be prevented by the friction between the two during maintenance.

[0032] In this embodiment, during actual use, first turn out the side frames from both sides of the seat plate and then stably place them on the ground. Then adjust the length of the telescopic frame to change the height of the horizontal bracket and the auxiliary roller frame. After adjusting the height, fix it by turning the locking bolt. Finally, after connecting the power supply to the electric cylinder, it can be used normally. Place the rotary target on the auxiliary roller frame and then start the electric cylinder to support the limit slider on the rotary target, so that the rotary target can be maintained and repaired. When it is necessary to rotate and adjust the rotary target, start the electric cylinder to lower the limit slider, so that the rotary target can be easily rotated and adjusted on the rollers.

[0033] The above is the preferred embodiment of the present utility model. Those skilled in the art to which the present utility model pertains can also make changes and modifications to the above embodiment. Therefore, the present utility model is not limited to the above specific embodiments, and any obvious improvements, substitutions or variations made by those skilled in the art based on the present utility model all fall within the protection scope of the present utility model.

Claims

1. A target rack for maintaining a rotating target, comprising a maintenance base (1), characterized in that: A telescopic frame (2) is installed on the upper end surface of the maintenance base (1). The telescopic frame (2) is vertically fixed on the maintenance base (1). A horizontal bracket (3) is installed at the head of the telescopic frame (2). A number of auxiliary roller frames (4) are installed in the horizontal bracket (3). The auxiliary roller frames (4) are snap-fitted and fixed to the horizontal bracket (3). A lifting frame (5) is slidably installed at the lower end of the horizontal bracket (3), and an electric cylinder (6) for driving the lifting frame (5) to lift is also installed on the horizontal bracket (3). A limit slider (7) is fixedly installed at the head of the lifting frame (5). The limit slider (7) passes through the middle of the auxiliary roller frame (4).

2. The target rack for maintaining a rotating target target according to claim 1, characterized in that: The maintenance base (1) includes a seat plate (11) and side frames (12). Receiving grooves (111) are formed on both sides of the seat plate (11). The side frames (12) are installed in the receiving grooves (111), and one end of the side frame (12) is rotatably connected to the seat plate (11).

3. The target holder for maintaining a rotating target according to claim 2, characterized in that: The telescopic frame (2) includes a positioning vertical shell (21) and a sliding rod (22). The positioning vertical shell (21) is fixedly installed on the upper end surface of the seat plate (11). The sliding rod (22) is slidably installed in the positioning vertical shell (21), and a locking bolt (221) for locking the positioning vertical shell (21) is installed on the side surface of the sliding rod (22).

4. A target rack for maintaining a rotating target target, according to claim 3, characterized in that: An arc-shaped groove (31) is formed on the upper end surface of the horizontal bracket (3), and a snap-fitting groove (32) for installing the auxiliary roller frame (4) is also formed on the horizontal bracket (3). A through groove (33) for the lifting frame (5) to pass through is formed on the lower end surface of the horizontal bracket (3).

5. A target holder for maintaining a rotating target target, according to claim 4, characterized in that: The auxiliary roller frame (4) includes an arc-shaped frame (41) and roller columns (42). The roller columns (42) are evenly installed in the arc-shaped frame (41), and the roller columns (42) are rotatably connected to the arc-shaped frame (41).

6. The target rack for maintaining a rotating target target according to claim 5, characterized in that: The lifting frame (5) includes a frame plate (51) and support columns (52). The frame plate (51) is fixedly installed at the output end of the electric cylinder (6). The support columns (52) are evenly installed on the upper end surface of the frame plate (51), and the support columns (52) are fixedly connected to the frame plate (51).

7. The target rack for maintaining a rotating target according to claim 6, characterized in that: The limit slider (7) includes an anti-slip plate (71) and a sleeve (72). The sleeve (72) is fixedly installed on the lower end surface of the anti-slip plate (71), and the sleeve (72) is sleeved and fixed on the head of the support column (52).

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