Bubbling tank and vapor deposition system

Abstract

The utility model belongs to the technical field of film material growth, and discloses a bubbling tank and a vapor deposition system, the bubbling tank comprises a tank body, a gas inlet pipe, a gas outlet pipe and a heating body, the gas inlet pipe is inserted into the bottom of the tank body from the top of the tank body, and the gas inlet pipe in the tank body is in a spiral disc column shape; a plurality of air outlets are formed in the pipe wall of the spiral air inlet pipe on the lowermost layer at intervals and face the bottom of the tank body; the gas outlet pipe is inserted from the top of the tank body; the heating body is arranged on the outer side of the tank body to keep the interior of the tank body at a preset temperature; the vapor deposition system comprises a reaction cavity and the bubbling tank, wherein the gas outlet pipe is communicated with the reaction cavity; the gas inlet pipe is in a spiral disc column shape, the path of carrier gas entering the tank body can be prolonged, the carrier gas is fully preheated in the tank body, large temperature fluctuation caused when the carrier gas enters a precursor is avoided, the gas outlets are circumferentially dispersed, the path of the carrier gas is increased, the diffusivity of the carrier gas is better, and the deposition rate and the deposition quality are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film material growth, in particular to a bubbling tank and a chemical vapor deposition system. Background Art

[0002] Common precursors for chemical vapor deposition include, but are not limited to, trichlorosilane and methyltrichlorosilane, which are stored, transported, and supplemented in liquid form and enter the reaction chamber in gaseous form for process reactions.

[0003] Currently, the precursors used in the bubbler are in liquid form at room temperature. It is necessary to heat the precursors in the bubbler to convert the liquid into gas, increase the vapor pressure of the liquid precursor, and increase the concentration of the gaseous precursor. The carrier gas enters the liquid precursor through the inlet pipe of the bubbler to form bubbles, and the bubbles gradually absorb the vapor of the liquid precursor. The carrier gas carries these vapors and flows out through the gas outlet pipe and enters the reaction chamber for reaction.

[0004] However, when injecting the carrier gas into the existing bubbler, the diffusion effect is often poor due to uneven diffusion of the carrier gas; and since the carrier gas is not fully preheated, the temperature of the carrier gas affects the temperature of the gaseous precursor. Based on this, when the gaseous precursor enters the reaction chamber to participate in the deposition reaction, it will affect the deposition rate and deposition quality. Summary of the Utility Model

[0005] One of the purposes of the utility model is to provide a bubbling tank to improve the diffusion effect of the carrier gas and fully preheat the carrier gas.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A bubbling tank, which includes a tank body. The bubbling tank further includes:

[0008] An inlet pipe, which is inserted from the top of the tank body to the bottom of the tank body. The inlet pipe located inside the tank body is in a spiral column shape; a plurality of air outlet holes are spacedly arranged on the pipe wall of the inlet pipe at the lowest layer of the spiral, and the air outlet holes face the bottom of the tank body;

[0009] An outlet pipe, which is inserted from the top of the tank body to communicate with the tank body;

[0010] A heating element, which is arranged outside the tank body to adjust the temperature inside the tank body.

[0011] In some embodiments, the bubbling tank further includes a flow equalizing plate, on which a plurality of flow equalizing holes are formed. The flow equalizing plate is disposed inside the tank body to divide the tank body into upper and lower parts; the port of the air outlet pipe communicating with the inside of the tank body is located above the flow equalizing plate, and the air inlet pipe passes through the flow equalizing plate so that the air outlet is located below the flow equalizing plate.

[0012] In some embodiments, a plurality of the flow equalizing plates are spaced along the height direction of the tank body.

[0013] In some embodiments, the inner top of the tank body is a hemispherical concave surface.

[0014] In some embodiments, the port of the air outlet pipe communicating with the inside of the tank body is located at the center of the inner top of the tank body.

[0015] In some embodiments, the bubbling tank further includes a drain pipe and a liquid supplement pipe. The drain pipe is inserted into the tank body from the bottom of the tank body, and the liquid supplement pipe is inserted into the tank body from the top of the tank body.

[0016] In some embodiments, the inner bottom of the tank body is a hemispherical concave surface.

[0017] In some embodiments, the heating body includes one of a heating ring pipe, a heating jacket or a heating barrel.

[0018] In some embodiments, the bubbling tank further includes a liquid level gauge, and the liquid level gauge is disposed inside the tank body.

[0019] There is also provided a chemical vapor deposition system, which includes a reaction chamber and the bubbling tank as described above, and the air outlet pipe communicates with the reaction chamber.

[0020] Advantages of the present utility model:

[0021] The air inlet pipe located inside the tank body is in a spiral column shape, so that the path of the carrier gas entering the tank body can be lengthened, and the time of the carrier gas in the tank body can be extended. Therefore, when heated by the heating body, the carrier gas can be fully preheated in the tank body, so that when the carrier gas enters the precursor, a large temperature fluctuation will not be caused; and a plurality of air outlets located at the bottom layer of the spiral face the bottom of the tank body, so that the air outlets are circumferentially dispersed and the path of the carrier gas is increased, making the diffusibility of the carrier gas better. Description of the Drawings

[0022] Figure 1 is a schematic diagram of the bubbling tank in an embodiment of the present utility model;

[0023] Figure 2 is Figure 1 the enlarged view of part A in

[0024] Figure 3It is a schematic diagram of the flow equalizing plate in the embodiment of the present utility model;

[0025] Figure 4 It is a schematic diagram of the carrier gas being dispersed and redistributed by the flow equalizing plate in the embodiment of the present utility model.

[0026] In the figure:

[0027] 1. Tank body; 2. Inlet pipe; 21. Outlet; 3. Outlet pipe; 4. Flow equalizing plate; 41. Flow equalizing holes; 5. Drain pipe; 6. Liquid supplement pipe; 7. Liquid level gauge; 8. Connecting pipeline; 81. First pipe; 82. Second pipe; 83. Third pipe; 84. Connecting pipe; 85. First valve; 86. Second valve; 87. Third valve; 88. Fourth valve. Specific embodiments

[0028] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the sake of description, only the parts related to the present utility model rather than all the structures are shown in the drawings.

[0029] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0030] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above the", and "on the" of the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is at a higher horizontal height than the second feature. The first feature being "below", "below the", and "under the" of the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature is at a lower horizontal height than the second feature.

[0031] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings. They are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0032] As Figures 1 to 4 shown, the present utility model provides a bubbling tank, which includes a tank body 1, an inlet pipe 2, an outlet pipe 3, and a heating body. The inlet pipe 2 is inserted from the top of the tank body 1 to the bottom of the tank body 1, and the inlet pipe 2 located inside the tank body 1 is in a spiral column shape; a plurality of air outlet holes 21 are spacedly opened on the pipe wall of the inlet pipe 2 at the lowermost layer of the spiral, and the air outlet holes 21 face the bottom of the tank body 1; the outlet pipe 3 is inserted from the top of the tank body 1 to communicate the inside and outside of the tank body 1; the heating body is arranged outside the tank body 1 to adjust the temperature inside the tank body 1.

[0033] The inlet pipe 2 located inside the tank body 1 is in a spiral column shape, so that the path of the carrier gas entering the tank body 1 can be lengthened, and the time of the carrier gas staying in the tank body 1 can be extended. Thus, when heated by the heating body, the carrier gas can be fully preheated in the tank body 1, so that when the carrier gas enters the precursor, there will be no large temperature fluctuations; and a plurality of air outlet holes 21 at the lowermost layer of the spiral face the bottom of the tank body 1, so that the air outlet holes 21 are circumferentially dispersed and the path of the carrier gas is increased, making the diffusibility of the carrier gas better.

[0034] As Figure 1 、 Figure 3 and Figure 4 shown, when the carrier gas rises while carrying the precursor vapor, it is still in a relatively chaotic state and is prone to form turbulence or other vortex forms, further resulting in poor uniformity. In order to improve the uniformity of the carrier gas flowing out of the outlet pipe 3, in some embodiments, the bubbling tank further includes a flow homogenizing plate 4. A plurality of flow homogenizing holes 41 are evenly opened on the flow homogenizing plate 4. The flow homogenizing plate 4 is arranged inside the tank body 1 to divide the tank body 1 into upper and lower parts. The connection manner between the flow homogenizing plate 4 and the tank body 1 is not specifically limited. It can be a detachable connection manner such as clamping, or a fixed connection manner such as welding. The port of the outlet pipe 3 communicating with the inside of the tank body 1 is located above the flow homogenizing plate 4, and the inlet pipe 2 passes through the flow homogenizing plate 4, so that the air outlet holes 21 are located below the flow homogenizing plate 4; thus, when the carrier gas rises while carrying the precursor vapor and passes through the flow homogenizing plate 4, the flow homogenizing holes 41 will disperse and redistribute the carrier gas, weakening the local vortex, and making the flow of the carrier gas tend to be in a laminar state, thereby ensuring uniformity. Further, in order to further improve the uniformity, a plurality of flow homogenizing plates 4 are arranged at intervals along the height direction of the tank body 1. The specific number is not limited, as long as it is ensured that the lowermost flow homogenizing plate 4 is located above the air outlet holes 21.

[0035] As Figure 1 shown, since the outlet pipe 3 is inserted into the top of the tank body 1 to connect the inside and outside of the tank body 1, the carrier gas needs to be discharged from the top of the tank body 1. In some embodiments, the inner top of the tank body 1 is a hemispherical concave surface, and after passing through the flow equalizing plate 4, it will converge along the inner wall of the tank body 1 towards the inner top of the tank body 1. Compared with the conventional flat-top tank body 1 structure, the gas flow will be smoother. Further, in order to enable the carrier gas to be discharged smoothly from the outlet pipe 3, the port of the outlet pipe 3 communicating with the inside of the tank body 1 is located at the center of the inner top of the tank body 1, that is, after the carrier gas converges at the inner top of the tank body 1, it can be directly discharged from the outlet pipe 3.

[0036] Continuing as Figure 1 shown, in some embodiments, the bubbling tank further includes a drain pipe 5 and a liquid supplement pipe 6. The drain pipe 5 is inserted into the tank body 1 from the bottom of the tank body 1, so that when the bubbling tank stops operating for some reason or the liquid precursor in the tank body 1 is contaminated by the injected gas, it can be discharged through the drain pipe 5. Further, the inner bottom of the tank body 1 is a hemispherical concave surface, so that the contaminated liquid precursor can be more easily collected, thus facilitating discharge. Even further, the port of the drain pipe 5 communicating with the inside of the tank body 1 is located at the center of the inner bottom of the tank body 1 to be more conducive to discharging as soon as possible. And the liquid supplement pipe 6 is inserted into the tank body 1 from the top of the tank body 1, so that the liquid precursor can be supplemented into the tank body 1 through the liquid supplement pipe 6.

[0037] It should be noted here that when installing the inlet pipe 2, the outlet pipe 3 and the liquid supplement pipe 6, corresponding holes are opened at the top of the tank body 1, and the inlet pipe 2, the outlet pipe 3 and the liquid supplement pipe 6 are all inserted into the tank body 1 through the corresponding holes, and then the inlet pipe 2, the outlet pipe 3 and the liquid supplement pipe 6 are welded to the tank body 1.

[0038] In some embodiments, the heating body (not shown in the figure) is one of a heating ring pipe, a heating jacket or a heating cylinder. When using a heating ring pipe, the heating ring pipe can be wound around the outer wall of the tank body 1 to circulate water or oil in the heating ring pipe for heat exchange; the heating jacket includes a heating belt and a heat preservation sleeve, and when using a heating jacket, the heating belt is directly sleeved on the outer wall of the tank body 1 and a heat preservation sleeve is sleeved on the outside of it to perform direct heating; when using a heating barrel, the tank body 1 is directly placed in the heating barrel for heating. It should be noted that the heating ring pipe, the heating jacket and the heating cylinder are all prior arts, and the specific structures will not be elaborated.

[0039] In some embodiments, the bubbling tank further includes a liquid level gauge 7. The liquid level gauge 7 is arranged inside the tank body 1 to monitor the liquid level height inside the tank body 1, and the type of the liquid level gauge 7 is not specifically limited. Exemplarily, the liquid level gauge 7 can adopt a liquid level sensor, and the liquid level sensor is connected to an external control system or an alarm device to monitor the liquid level in real time.

[0040] Continuing as Figure 1As shown, in some embodiments, the bubbling tank further includes a connecting pipeline 8, so as to connect an external reaction chamber, a liquid source, and a gas source through the connecting pipeline 8; specifically, the connecting pipeline 8 includes a first pipe 81, a second pipe 82, and a third pipe 83. The first pipe 81 is connected to the intake pipe 2 and the gas source, the second pipe 82 is connected to the outlet pipe 3 and the reaction cavity, the third pipe 83 is connected to the liquid supply pipe 6 and the liquid source. A connecting pipe 84 connecting the two is further provided between the first pipe 81 and the second pipe 82. A first valve 85 is provided on the first pipe 81, a second valve 86 is provided on the second pipe 82, a third valve 87 is provided on the third pipe 83, and a fourth valve 88 is provided on the connecting pipe 84. It can be understood that a drain valve (not shown) can also be provided on the drain pipe 5. When it is necessary to discharge the waste gas in the second pipe 82 connected to the bubbling tank, the first valve 85 and the second valve 86 can be closed, and the fourth valve 88 can be opened. At this time, the gas supplied by the gas source will enter from the first pipe 81 and be discharged from the second pipe 82, thereby discharging the waste gas in the second pipe 82; when it is necessary to discharge the waste liquid in the bubbling tank, the first valve 85 and the third valve 87 can be closed, and the second valve 86, the fourth valve 88, and the drain valve can be opened. At this time, the gas supplied by the gas source enters the tank body 1 from the outlet pipe 3 through the connecting pipe 84, and the waste liquid is pressed out of the tank body 1. It can be understood that the first valve 85, the second valve 86, the third valve 87, and the fourth valve 88 can be manual valves or automatic valves.

[0041] The present invention also provides a chemical vapor deposition system, which includes a reaction cavity and the above-mentioned bubbling tank, and the outlet pipe 3 is communicated with the reaction cavity. Thus, the intake pipe 2 in the above-mentioned tank body 1 is in a spiral column shape, which can make the path of the carrier gas entering the tank body 1 longer, so that the carrier gas is fully preheated in the tank body 1, avoiding large temperature fluctuations when the carrier gas enters the precursor, and the gas outlet 21 is circumferentially dispersed and increases the path of the carrier gas, making the diffusivity of the carrier gas better, and ensuring the deposition rate and deposition quality.

[0042] Obviously, the above-mentioned embodiments of the present invention are only examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. Bubble tank, comprising a tank body (1), characterized in that, The bubble column further includes: An intake pipe (2), which is inserted from the top of the tank body (1) to the bottom of the tank body (1). The intake pipe (2) located inside the tank body (1) is in a spiral column shape; a plurality of air outlet holes (21) are spacedly arranged on the pipe wall of the intake pipe (2) at the lowermost layer of the spiral, and the air outlet holes (21) face the bottom of the tank body (1); An outlet pipe (3), which is inserted from the top of the tank body (1) to communicate the inside and outside of the tank body (1); A heating body, which is arranged outside the tank body (1) to adjust the temperature inside the tank body (1).

2. The bubbling tank according to claim 1, characterized in that, The bubble column further includes a flow equalizing plate (4). A plurality of flow equalizing holes (41) are formed in the flow equalizing plate (4). The flow equalizing plate (4) is arranged inside the tank body (1) to divide the tank body (1) into upper and lower parts; the port of the outlet pipe (3) communicating with the inside of the tank body (1) is located above the flow equalizing plate (4), and the intake pipe (2) passes through the flow equalizing plate (4) so that the air outlet holes (21) are located below the flow equalizing plate (4).

3. The bubble column according to claim 2, wherein A plurality of the flow equalizing plates (4) are spacedly arranged along the height direction of the tank body (1).

4. The bubbling tank according to claim 1, wherein The inner top of the tank body (1) is a hemispherical concave surface.

5. The bubble column according to claim 4, characterized in that, The port of the outlet pipe (3) communicating with the inside of the tank body (1) is located at the center of the inner top of the tank body (1).

6. The bubble column according to claim 1, characterized in that, The bubble column further includes a drain pipe (5) and a liquid supplement pipe (6). The drain pipe (5) is inserted into the tank body (1) from the bottom of the tank body (1), and the liquid supplement pipe (6) is inserted into the tank body (1) from the top of the tank body (1).

7. The bubbling tank according to claim 6, characterized in that, The inner bottom of the tank body (1) is a hemispherical concave surface.

8. The bubbling tank according to claim 7, characterized in that, The heating body includes one of a heating ring pipe, a heating jacket or a heating barrel.

9. The bubble column according to claim 1, wherein The bubble column further includes a liquid level gauge (7), which is arranged inside the tank body (1).

10. A vapor deposition system comprising a reaction chamber, characterized in that, It further includes the bubble column according to any one of claims 1-9, and the outlet pipe (3) communicates with the reaction chamber.

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