Spray head device for PECVD (plasma enhanced chemical vapor deposition) manufacturing

Abstract

The utility model discloses a spray head device for PECVD (Plasma Enhanced Chemical Vapor Deposition) manufacturing, which comprises a transfer box, the upper end of the transfer box is connected with an inlet pipe, the side wall of the transfer box is provided with a circular groove, the bottom end of the transfer box is provided with an outlet hole, the circular groove is internally and movably connected with a rotating mechanism, the rotating mechanism is internally provided with a spray head mechanism, and the spray head mechanism is provided with a spray head. Limiting mechanisms are arranged on the rotating mechanism and the transfer box, the spray head mechanism comprises outer rings and spray head pipes, the inner walls of the multiple outer rings are connected with the spray head pipes, and the diameters of the multiple spray head pipes are gradually decreased step by step; the outer ring threads are screwed into the outer side wall of the through pipe, the top ends of the spray head pipes are inserted into the inner side of the through pipe, raw materials enter the transfer box from the inlet pipe, then flow to the through pipe from the outlet holes and are sprayed out of the spray head pipes, the rotating disc is rotated, the rotating disc can drive the through pipe to rotate, the through pipe provided with the spray head pipes with different diameters can be aligned to the outlet holes, and therefore the spraying effect is improved. Therefore, the effect of conveniently calling the nozzle pipes with different diameters for spraying is achieved.

Description

Technical Field

[0001] The utility model relates to the field of manufacturing equipment, in particular to a spray head device for PECVD manufacturing. Background Technique

[0002] PCVED generally refers to plasma enhanced chemical vapor deposition, which is a method for preparing semiconductor thin film materials and other material thin films by using glow discharge in a deposition chamber to ionize it and then carrying out chemical reaction deposition on a substrate. It enhances the activity of chemical vapor reaction substances through plasma activation, improves the surface reaction rate, and significantly reduces the thin film deposition temperature through high-energy ions.

[0003] Under the action of plasma, the gas is dissociated in the chamber to form a strong reaction substance containing gas molecules, high-energy ions, electrons, active radicals and other particles. On the deposition surface, there are not only ordinary thermal chemical reactions, but also complex plasma chemical reactions. The deposited film grows into a film under the combined action of these two chemical reactions. The methods for exciting glow discharge mainly include: radio frequency excitation, DC high voltage excitation, pulse excitation and microwave excitation.

[0004] Chemical vapor deposition is to decompose gas into plasma by radio frequency, and evenly distribute it on the wafer substrate through a gas distribution plate and a spray head. After chemical reaction, a core layer with the required refractive index and thickness is obtained. When the PECVD deposition equipment sprays onto the wafer substrate through the spray head, generally a spray head with the same diameter is installed for spraying. When it is necessary to replace the spray head with a different diameter, it is also necessary to disassemble and reinstall the spray head with a different diameter, which is time-consuming and laborious. Therefore, a spray head device for PECVD manufacturing is needed, which can adjust and use multiple spray heads with different diameters to facilitate spraying raw materials onto the wafer substrate. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a spray head device for PECVD manufacturing to overcome the defect that multiple spray heads with different diameters cannot be adjusted and used.

[0006] The technical solution to achieve the above purpose is: a spray head device for PECVD manufacturing, including a transfer box, an inlet pipe is connected to the upper end of the transfer box, a circular groove is opened on the side wall of the transfer box, an outlet hole is opened at the bottom end of the transfer box, a rotating mechanism is movably connected in the circular groove, a spray head mechanism is arranged in the rotating mechanism, and a limiting mechanism is arranged on the rotating mechanism and the transfer box;

[0007] The spray head mechanism includes an outer ring and a spray head pipe. The inner walls of a plurality of the outer rings are all connected with spray head pipes, the diameters of the plurality of spray head pipes gradually decrease, and the side wall of the spray head pipe penetrates through the bottom end of the outer ring.

[0008] Preferably, the rotating mechanism includes a turntable, a rotating ring and a through pipe. The side wall of the circular groove is movably connected with the turntable, and the bottom end of the turntable is connected and communicated with a plurality of through pipes.

[0009] Preferably, the shape of the through pipe is an inverted frustum of a cone. The top end of the spray head pipe is movably inserted into the through pipe, and the inner side wall of the outer ring is threadedly connected with the outer side wall of the through pipe.

[0010] Preferably, a sealing patch is arranged at the connection between the side wall of the through pipe and the spray head pipe.

[0011] Preferably, the limiting mechanism includes a connecting block, a limiting hole, a supporting block and a screw. A plurality of connecting blocks are connected to the outer side wall of the turntable. The connecting block is provided with a limiting hole. The side wall of the middle transfer box is connected with a supporting block, and the side wall of the supporting block is threadedly connected with a screw.

[0012] Preferably, the side wall of the screw can penetrate through the supporting block.

[0013] Preferably, the supporting blocks are aligned with the outlet holes, and the connecting blocks are distributed in a matching manner with the through pipes.

[0014] Preferably, the outlet hole is located directly below the inlet pipe.

[0015] The beneficial effects of the present utility model are as follows: Thread the outer ring into the outer side wall of the through pipe, and insert the top end of the spray head pipe into the inner side of the through pipe. The raw material enters the middle transfer box from the inlet pipe, then flows from the outlet hole to the through pipe, and then sprays out from the spray head pipe. Rotate the turntable, and the turntable can drive the through pipe to rotate, so that the through pipe equipped with spray head pipes of different diameters can be aligned with the outlet hole, thereby realizing the effect of conveniently calling spray head pipes of different diameters for spraying. Then screw down the spray head pipe so that the bottom end of the spray head pipe is located below the bottom ends of other spray head pipes, avoiding interference of other spray head pipes with the spraying of this spray head pipe. Use the limiting mechanism to limit the turntable, so as to ensure the stable alignment of the through pipe and the outlet hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a three-dimensional structural schematic diagram of the present utility model;

[0017] Figure 2 is a bottom structural schematic diagram of the present utility model;

[0018] Figure 3 is an exploded structural schematic diagram of the present utility model;

[0019] Figure 4 is a sectional structural schematic diagram of the present utility model;

[0020] Figure 5 is Figure 4 an enlarged structural schematic diagram at A in

[0021] Reference numerals in the drawings:

[0022] 1. Transfer box; 2. Inlet pipe; 3. Circular groove; 4. Outlet hole; 5. Rotating mechanism; 501. Turntable; 502. Rotating ring; 503. Through pipe; 6. Sprinkler mechanism; 601. Outer ring; 602. Sprinkler pipe; 7. Limiting mechanism; 701. Connecting block; 702. Limiting hole; 703. Support block; 704. Screw. Detailed implementation manners

[0023] The technical solutions of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0024] The present utility model will be further described below in conjunction with the accompanying drawings.

[0025] Refer to the attached Figures 1-5 As shown in the figure, a sprinkler device for PECVD production includes a transfer box 1. It is characterized in that an inlet pipe 2 is connected to the upper end of the transfer box 1, an outlet hole 4 is located directly below the inlet pipe 2, a circular groove 3 is provided on the side wall of the transfer box 1, an outlet hole 4 is provided at the bottom end of the transfer box 1, a rotating mechanism 5 is movably connected in the circular groove 3, a sprinkler mechanism 6 is arranged in the rotating mechanism 5, and a limiting mechanism 7 is provided on the rotating mechanism 5 and the transfer box 1;

[0026] The sprinkler mechanism 6 includes an outer ring 601 and a sprinkler pipe 602. The inner walls of a plurality of outer rings 601 are all connected with a sprinkler pipe 602. The diameters of the plurality of sprinkler pipes 602 gradually decrease. The side wall of the sprinkler pipe 602 penetrates through the bottom end of the outer ring 601. The rotating mechanism 5 includes a turntable 501, a rotating ring 502 and a through pipe 503. The side wall of the circular groove 3 is movably connected with a turntable 501. A plurality of through pipes 503 are connected and communicated with the bottom end of the turntable 501. The shape of the through pipe 503 is an inverted frustum of a cone. The top end of the sprinkler pipe 602 is movably inserted into the through pipe 503. The inner side wall of the outer ring 601 is threadedly connected with the outer side wall of the through pipe 503. A sealing sticker is provided at the connection between the side wall of the through pipe 503 and the sprinkler pipe 602.

[0027] Screw the outer ring 601 with threads into the outer side wall of the through pipe 503, and insert the top end of the spray head pipe 602 into the inside of the through pipe 503. The raw material enters the transfer box 1 from the inlet pipe 2, then flows from the outlet hole 4 to the through pipe 503, and then sprays out from the spray head pipe 602. Rotate the turntable 501. The turntable 501 can drive the through pipe 503 to rotate, so that the through pipe 503 equipped with spray head pipes 602 of different diameters can be aligned with the outlet hole 4, thus realizing the effect of conveniently calling spray head pipes 602 of different diameters for spraying. Then screw down the spray head pipe 602 so that the bottom end of the spray head pipe 602 is below the bottom ends of other spray head pipes 602 to prevent other spray head pipes 602 from interfering with the spraying of this spray head pipe 602. Use the limiting mechanism 7 to limit the turntable 501, so as to ensure the stable alignment of the through pipe 503 and the outlet hole 4.

[0028] Refer to the attached Figures 1-4 , the limiting mechanism 7 includes a connecting block 701, a limiting hole 702, a supporting block 703 and a screw 704. A plurality of connecting blocks 701 are connected to the outer side wall of the turntable 501. A limiting hole 702 is opened on the connecting block 701. A supporting block 703 is connected to the side wall of the transfer box 1. The side wall of the supporting block 703 is threadedly connected with a screw 704. The side wall of the screw 704 can penetrate through the supporting block 703. The supporting block 7 is aligned with the outlet hole 4, and the connecting block 701 is distributed in a matching manner with the through pipe 503.

[0029] After the rotation of the turntable 501 stops, the connecting block 701 and the supporting block 703 are aligned. Rotate the screw 704 so that the screw 704 is screwed down into the limiting hole 702, thereby fixing the screw 704 and the connecting block 701 together, and then realizing the limiting effect of the turntable 501.

[0030] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A showerhead device for PECVD production, comprising a transfer box (1), characterized in that, The upper end of the transfer box (1) is connected with an inlet pipe (2). A circular groove (3) is formed in the side wall of the transfer box (1). An outlet hole (4) is formed in the bottom end of the transfer box (1). A rotating mechanism (5) is movably connected in the circular groove (3). A spray head mechanism (6) is arranged in the rotating mechanism (5). A limiting mechanism (7) is arranged on the rotating mechanism (5) and the transfer box (1). The spray head mechanism (6) includes an outer ring (601) and a spray head pipe (602). The inner walls of a plurality of the outer rings (601) are all connected with the spray head pipe (602). The diameters of the plurality of spray head pipes (602) decrease step by step. The side wall of the spray head pipe (602) penetrates through the bottom end of the outer ring (601).

2. The showerhead device for PECVD fabrication according to claim 1, wherein The rotating mechanism (5) includes a turntable (501), a rotating ring (502) and a through pipe (503). The side wall of the circular groove (3) is movably connected with the turntable (501). The bottom end of the turntable (501) is connected and communicated with a plurality of through pipes (503).

3. The showerhead device for PECVD fabrication according to claim 2, wherein The shape of the through pipe (503) is an inverted frustum of a cone. The top end of the spray head pipe (602) is movably inserted into the through pipe (503). The inner side wall of the outer ring (601) is in threaded connection with the outer side wall of the through pipe (503).

4. The showerhead device for PECVD fabrication according to claim 3, wherein, A sealing sticker is arranged at the connection between the side wall of the through pipe (503) and the spray head pipe (602).

5. The showerhead device for PECVD fabrication according to claim 2, wherein The limiting mechanism (7) includes a connecting block (701), a limiting hole (702), a supporting block (703) and a screw rod (704). A plurality of connecting blocks (701) are connected to the outer side wall of the turntable (501). Limiting holes (702) are formed in the connecting blocks (701). A supporting block (703) is connected to the side wall of the transfer box (1). A screw rod (704) is in threaded connection with the side wall of the supporting block (703).

6. The showerhead device for PECVD fabrication according to claim 5, wherein, The side wall of the screw rod (704) can penetrate through the supporting block (703).

7. The showerhead device for PECVD fabrication according to claim 5, wherein The supporting block (703) and the outlet hole (4) are distributed in alignment. The connecting block (701) and the through pipe (503) are distributed in matching.

8. A showerhead device for PECVD production according to claim 1, characterized in that, The outlet hole (4) is located directly below the inlet pipe (2).

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