Flow uniformizing cover, deposition equipment and mounting jig

Abstract

The utility model belongs to the technical field of semiconductor or photovoltaic material processing, and particularly discloses a flow uniformizing cover which comprises a first cover body and a second cover body which are detachably connected. An air uniformizing cavity is defined between the first cover body and the second cover body, and the first cover body and / or the second cover body are / is provided with vent holes for communicating the air uniformizing cavity with the outside; the first cover body and / or the second cover body are / is further provided with a supporting piece, one end of the supporting piece is connected with one of the second cover body and the first cover body, and the other end of the supporting piece extends towards the other one of the second cover body and the first cover body. The flow uniformizing cover can clean internal accumulated silicon in time and is long in service life.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor or photovoltaic material processing, in particular to a flow equalizing cover, a deposition device and a mounting fixture. Background Art

[0002] CVD (Chemical Vapor Deposition) is a process in which gaseous or vaporous substances undergo chemical reactions on the surface of a silicon wafer to form solid deposits. The CVD technology has been widely used in semiconductor or photovoltaic material processing technologies.

[0003] During the deposition process of CVD, in order to make the gas flow in the cavity more uniform, a flow equalizing cover is arranged in the reaction chamber of the vertical furnace, and in the CVD process, the generated silicon-based thin film will not only adhere to the silicon wafer, but also adhere to the surfaces of all components in the reaction chamber, which results in the silicon accumulation in the flow equalizing cover being unable to be cleaned and the short service life of the flow equalizing cover. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a flow equalizing cover and a deposition device to solve the problems that the silicon accumulation in the flow equalizing cover cannot be cleaned and the service life of the flow equalizing cover is short.

[0005] To achieve the above object, an embodiment of the utility model discloses a flow equalizing cover, which includes a first cover body and a second cover body, and the second cover body is detachably connected to the first cover body; at least one of the first cover body and the second cover body is a groove-shaped structure to cooperate with each other to form a gas equalizing cavity, and an air vent communicating the gas equalizing cavity and the outside is opened on the first cover body and / or the second cover body, and the air vent includes an air inlet hole and an air outlet hole; a support member is further arranged in the gas equalizing cavity, one end of the support member is connected to one of the second cover body and the first cover body, and the other end of the support member extends towards the other of the second cover body and the first cover body.

[0006] In one embodiment, a fixed sleeve corresponding to the air inlet hole one by one is further arranged on the first cover body where the air inlet hole is located or the second cover body where the air inlet hole is located, the fixed sleeve communicates with the gas equalizing cavity through the air inlet hole, and the fixed sleeve is used for fixing an air inlet pipe.

[0007] In one embodiment, both the air inlet hole and the air outlet hole are located on the first cover body; or, both the air inlet hole and the air outlet hole are located on the second cover body.

[0008] In one embodiment, the air inlet hole is located on the outer edge of the first cover body or the second cover body.

[0009] In one embodiment, the first cover body and the second cover body are in plug-in fit.

[0010] In one embodiment, the first cover is in a groove structure, the second cover is in a plate structure, an annular slot or an annular boss is provided on the second cover, and the first cover is inserted into the slot or sleeved on the boss.

[0011] In one embodiment, the support member is disposed on the first cover, and the height of the support member is the same as the groove depth of the first cover.

[0012] In one embodiment, the flow equalizing cover further includes a plugging member for plugging at least part of the air outlet holes.

[0013] For the above purpose, an embodiment of the present invention further discloses a deposition device, including a vertical furnace and the flow equalizing cover in any of the above embodiments. The flow equalizing cover is disposed in the vertical furnace and at least part of the ventilation holes face the bottom wall of the vertical furnace.

[0014] An embodiment of the present invention further discloses a mounting fixture for mounting the flow equalizing cover with the air inlet holes and the air outlet holes on the same side in the above embodiment. The mounting fixture includes a support rod and a support plate. The support plate is disposed at one end of the support rod, and opposite ends of the support plate can respectively abut against the two fixed sleeves to apply a rotational force to the flow equalizing cover through the fixed sleeves.

[0015] Advantages of the flow equalizing cover and the deposition device in the embodiments of the present invention: The flow equalizing cover includes a first cover and a second cover that are detachably connected. When a relatively large amount of silicon accumulates in the air equalizing cavity formed by the enclosure of the first cover and the second cover, the first cover and the second cover can be separated for cleaning, which improves the service life of the flow equalizing cover; moreover, the support members provided on the first cover and / or the second cover can support the first cover and the second cover, reducing the possibility of the flow equalizing cover collapsing. Description of the Drawings

[0016] Figure 1 is a schematic structural view of the flow equalizing cover in an embodiment of the present invention;

[0017] Figure 2 is Figure 1 a cross-sectional view taken along line A-A in

[0018] Figure 3 is an exploded structural view of the flow equalizing cover in an embodiment of the present invention;

[0019] Figure 4 is a side view of the second cover in an embodiment of the present invention;

[0020] Figure 5 is an assembly view of the first cover and the second cover in another embodiment of the present invention;

[0021] Figure 6 It is a usage diagram of the installation fixture in the embodiment of the present utility model.

[0022] In the figure:

[0023] 1. First cover; 11. Support member; 2. Second cover; 21. Vent hole; 21a. Air outlet hole; 21b. Air inlet hole; 22. Fixed sleeve; 23. Boss; 24. Slot; 3. Sealing member;

[0024] 4. Installation fixture; 41. Support rod; 42. Support plate. Detailed implementation manners

[0025] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only parts related to the present utility model are shown in the drawings, rather than all structures.

[0026] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0027] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above and over", and "on the top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below and under", and "under the bottom of" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0028] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings. They are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0029] As Figures 1 to 5 shown, in an embodiment of the present utility model, a uniform flow cover is proposed, which includes a first cover body 1 and a second cover body 2. The second cover body 2 is detachably connected to the first cover body 1, and a uniform air cavity is defined between the first cover body 1 and the second cover body 2. An air vent 21 communicating the uniform air cavity and the outside is provided on the first cover body 1 and / or the second cover body 2. A support member 11 is further provided in the uniform air cavity. One end of the support member 11 is connected to one of the second cover body 2 and the first cover body 1, and the other end extends towards the other of the second cover body 2 and the first cover body 1. It can be understood that the outside refers to outside the uniform air cavity. For example, when the uniform flow cover is installed in a vertical furnace, the outside refers to the inner cavity of the vertical furnace.

[0030] The above-mentioned uniform flow cover uses the detachable first cover body 1 and second cover body 2 to enclose and form a uniform air cavity. When there is a lot of silicon accumulation in the uniform air cavity, the first cover body 1 and the second cover body 2 can be separated for cleaning, which improves the service life of the uniform flow cover; moreover, the support member 11 provided on the first cover body 1 and / or the second cover body 2 can support the first cover body 1 and the second cover body 2, reducing the possibility of the uniform flow cover collapsing.

[0031] Specifically, the air vent 21 includes an air inlet hole 21b and an air outlet hole 21a. The air inlet hole 21b is provided on the outer edge of the first cover body 1 or the second cover body 2 so that the intake pipe connected to the air inlet hole 21b can avoid the substrate. In order to reduce the difficulty of connecting the air inlet hole 21b with the intake pipe providing gas, a fixed sleeve 22 is further provided on the first cover body 1 provided with the air inlet hole 21b or the second cover body 2 provided with the air inlet hole 21b. The fixed sleeve 22 is coaxially arranged with the air inlet hole 21b, and the fixed sleeve 22 communicates with the uniform air cavity through the air inlet hole 21b. The intake pipe can be sleeved on the fixed sleeve 22 to achieve a fixed connection with the uniform flow cover.

[0032] In one embodiment, both the air inlet hole 21b and the air outlet hole 21a are provided on the first cover body 1, or both the air inlet hole 21b and the air outlet hole 21a are provided on the second cover body 2, that is, the air inlet hole 21b and the air outlet hole 21a are provided on the same side of the uniform flow cover, and the gas enters and exits the uniform air cavity from the same side of the uniform flow cover.

[0033] The uniform flow cover is usually installed in the reaction chamber of the vertical furnace and is arranged close to the top wall of the vertical furnace. In order to make the gas flow contact the substrate in the reaction chamber to complete the deposition reaction, the air outlet 21a is arranged downward, and then the air inlet 21b is also arranged downward. The air inlet pipe connected to the air inlet 21b can be inserted from the bottom wall of the vertical furnace with a relatively low temperature to connect with the air inlet 21b. The sealing structure used between the air inlet pipe and the vertical furnace is in an environment with a relatively low temperature and has a long service life. Moreover, the reason why the uniform flow cover fails and cannot be used normally is usually that the air inlet 21b or the air outlet 21a is blocked. Therefore, when the air inlet 21b and the air outlet 21a are both arranged on the same side of the uniform flow cover, only the first cover body 1 or the second cover body 2 where the air inlet 21b and the air outlet 21a are located needs to be replaced, and there is no need to replace the entire uniform flow cover, saving the replacement cost.

[0034] Considering that the first cover body 1 and the second cover body 2 are separately arranged, it is easy to generate a gap between them when they are connected, resulting in air leakage. The first cover body 1 and the second cover body 2 are in plug-in fit.

[0035] In one embodiment, both the first cover body 1 and the second cover body 2 are in a groove-like structure. Then, the cross-sectional area of one of the first cover body 1 and the second cover body 2 is smaller than that of the other to achieve the plug-in fit between them. For example, the cross-sectional area of the first cover body 1 is smaller than that of the second cover body 2, and the outer peripheral contour shape and size of the first cover body 1 are adapted to the inner peripheral contour shape and size of the second cover body 2. When the first cover body 1 and the second cover body 2 are plugged in, the outer peripheral wall of the first cover body 1 is completely attached to the inner peripheral wall of the second cover body 2 to obtain a uniform gas cavity with a better sealing effect.

[0036] In another embodiment, referring to Figures 2 - 4 as shown, the first cover body 1 is in a groove-like structure, and the second cover body 2 is in a plate-like structure. Then, an annular slot 24 or an annular boss 23 is provided on the second cover body 2, and the first cover body 1 can be inserted into the slot 24 or sleeved on the boss 23. It should be noted that the slot 24 or the boss 23 should be as close as possible to the outer edge of the second cover body 2 to form a uniform gas cavity as large as possible. Of course, if the outer edge of the boss 23 is in the same annular plane as the outer edge of the second cover body 2, the second cover body 2 is in a groove-like structure.

[0037] Exemplarily, the cross-sections of both the first cover body 1 and the second cover body 2 are circular. Of course, the cross-sections of the first cover body 1 and the second cover body 2 and the second cover body 2 can also be set to be square or other shapes according to their installation environment.

[0038] In other embodiments, the first cover body 1 and the second cover body 2 can also be connected by means such as bolt connection or snap connection, which will not be elaborated here.

[0039] Based on the setting that the first cover 1 is a groove-shaped structure and the second cover 2 is a plate-shaped structure, the support member 11 is arranged on the first cover 1 to reduce the occupied space of the second cover 2 when the first cover 1 and the second cover 2 are stored separately. Moreover, the height of the support member 11 is the same as the groove depth of the first cover 1, so that one end of the support member 11 away from the first cover 1 abuts against the second cover 2, thereby avoiding relative shaking between the second cover 2 and the first cover 1 and having high stability. The vent hole 21 is arranged on the second cover 2. When the flow equalizing cover is installed in the vertical furnace, the second cover 2 can support the first cover 1 to prevent the first cover 1 from detaching from the second cover 2.

[0040] Specifically, both the first cover 1 and the second cover 2 are made of silicon carbide material to maintain the same coefficient of thermal expansion as the solid deposits (silicon-based thin films) attached to their surfaces, reduce the possibility of stress generation, and further improve the service life of the flow equalizing cover.

[0041] Reference Figure 2 and Figure 3 As shown, the flow equalizing cover further includes a plugging member 3 detachably connected to the air outlet hole 21a, and the plugging member 3 is used to plug the air outlet hole 21a. During actual use, some air outlet holes 21a can be plugged according to process requirements to adjust the air flow diversion situation and make the air flow distribution more uniform.

[0042] In one embodiment, the plugging member 3 includes a T-shaped pin. It should be emphasized that when the plugging member 3 plugs the air outlet hole 21a, the pin cap of the T-shaped pin is located in the air equalizing cavity to prevent the plugging member 3 from falling off and affecting the deposition effect.

[0043] In an embodiment of the present invention, a deposition device is further proposed, which includes a vertical furnace and the flow equalizing cover in any of the above embodiments. A reaction chamber is provided in the vertical furnace, and the flow equalizing cover is installed in the reaction chamber, and at least the vent hole serving as the air outlet hole 21a faces the bottom wall of the vertical furnace, so that the gas in the air equalizing cavity flows towards the substrate.

[0044] Based on the premise that the air inlet hole 21b and the air outlet hole 21a are arranged on the same side, a perforation for the inlet pipe to penetrate into the reaction chamber is provided on the bottom wall of the vertical furnace. It can be understood that in order to ensure the sealing performance of the vertical furnace, a sealing ring is sleeved on the inner wall of the perforation or at the position of the inlet pipe corresponding to the perforation.

[0045] It should be noted that when the flow equalizing cover is installed in the vertical furnace, it is necessary to ensure that the perforation on the bottom wall of the vertical furnace is opposite to the air inlet hole 21b on the flow equalizing cover. Therefore, the angle of the flow equalizing cover needs to be adjusted. If the installer drills into the vertical furnace, it may be dangerous due to lack of oxygen. On this basis, in an embodiment of the present invention, an installation jig 4 is further proposed, reference Figure 6As shown, the installation jig 4 is generally T-shaped as a whole. The installation jig 4 includes a support rod 41 and a support plate 42. The support plate 42 is arranged at one end of the support rod 41 to support the uniform flow cover. And the opposite ends of the support plate 42 can respectively abut against the two fixed sleeves 22 to apply rotational power to the uniform flow cover through the fixed sleeves 22. In this way, when installing the uniform flow cover, the installer can stand under the vertical furnace, hold the support rod 41 with the hand, and extend the support plate 42 into the vertical furnace to lift the uniform flow cover and rotate the uniform flow cover, so that the perforation corresponds to the air inlet hole 21b.

[0046] Specifically, the support plate 42 includes a main body portion and a limiting portion. The main body portion is arranged as a circle coaxially connected to the support rod 41 and plays a main supporting role. There are two limiting portions. The two limiting portions are symmetrically arranged on the outer periphery of the main body portion and extend along the radial direction of the main body portion. The two limiting portions respectively abut against the two fixed sleeves 22 oppositely arranged on the uniform flow cover, so as to drive the uniform flow cover to rotate.

[0047] It can be understood that the length of the support rod 41 is set according to the height of the vertical furnace; or, the support rod 41 adopts a telescopic rod with adjustable length to adapt to vertical furnaces of different heights and save storage space at the same time.

[0048] Obviously, the above-mentioned embodiments of the present invention are only examples for clearly explaining the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. Uniform flow cover, characterized in that, Comprising: A first cover body; A second cover body, detachably connected to the first cover body; An air equalizing cavity is defined between the first cover body and the second cover body, and air vent holes communicating the air equalizing cavity with the outside are formed in the first cover body and / or the second cover body; A support member is further arranged in the air equalizing cavity, one end of the support member is connected to one of the second cover body and the first cover body, and the other end of the support member extends towards the other of the second cover body and the first cover body.

2. The flow equalizing cover according to claim 1, characterized in that, The air vent holes include an air inlet hole and an air outlet hole, and a fixing sleeve corresponding to the air inlet hole one by one is further arranged on the first cover body where the air inlet hole is located or the second cover body where the air inlet hole is located. The fixing sleeve communicates with the air equalizing cavity through the air inlet hole, and the fixing sleeve is used for fixing an air inlet pipe.

3. The flow equalizing cover according to claim 2, wherein Both the air inlet hole and the air outlet hole are located on the first cover body; or both the air inlet hole and the air outlet hole are located on the second cover body.

4. The uniform flow cover according to claim 1, wherein The air vent holes include an air inlet hole and an air outlet hole, and the air inlet hole is located on the outer edge of the first cover body or the second cover body.

5. The uniform flow cover according to claim 1, characterized in that, The first cover body and the second cover body are in plug-in fit.

6. The flow equalizing cover according to claim 5, wherein The first cover body is in a groove-like structure, the second cover body is in a plate-like structure, and an annular slot or an annular boss is arranged on the second cover body, and the first cover body is inserted into the slot or sleeved on the boss.

7. The flow equalizing cover according to claim 6, characterized in that, The support member is arranged on the first cover body, and the height of the support member is the same as the groove depth of the first cover body.

8. The uniform flow cover according to any one of claims 2-4, characterized in that, The uniform flow cover further includes a plugging member for plugging at least part of the air outlet holes.

9. A deposition apparatus, characterized in that, Comprising a vertical furnace and the uniform flow cover according to any one of claims 1-8, the uniform flow cover is arranged in the vertical furnace, and at least part of the air vent holes face the bottom wall of the vertical furnace.

10. Mounting fixture for mounting the flow equalizing cover described in claim 3, characterized in that, The installation jig includes a support rod and a support plate. The support plate is arranged at one end of the support rod, and opposite ends of the support plate can respectively abut against two of the fixing sleeves to apply a rotational force to the uniform flow cover through the fixing sleeves.

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