Rotary alternate supporting tool for chemical vapor deposition

Abstract

The utility model relates to the technical field of vapor phase growth methods, in particular to a rotary alternate supporting tool for chemical vapor deposition, and aims to solve the problems that a supporting point is formed on the surface of a workpiece in a supporting mode in the prior art, airflow of the supporting point cannot reach the supporting point, and the phenomenon of unsmooth airflow around the supporting point exists. In the chemical vapor deposition process, a workpiece can be rotated in the chemical vapor deposition process, when a liftable supporting seat descends to the bottom, the workpiece is supported by a fixed supporting seat, and when the liftable supporting seat ascends to the top, the workpiece is supported by the fixed supporting seat, so that the workpiece is supported by the fixed supporting seat. The workpiece is supported by the group of supporting seats, so that two groups of supporting points are alternately switched while the workpiece rotates, the deposition effect of the supporting points and the vicinity of the supporting points is ensured, and the problem of one-time full-coverage film coating on the surface of the workpiece is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vapor growth methods, and in particular to a rotating and alternating support tooling for chemical vapor deposition. Background Art

[0002] Chemical vapor deposition is a vapor growth method for preparing materials. Generally, the vapor of a vapor-phase precursor or a metal compound (such as chloride, alkoxide, hydroxy compound, etc.) is introduced into a reaction chamber where a substrate is placed. The reactants chemically react in the gaseous state to generate product molecules or atoms, and are deposited on a pre-heated substrate to form a solid substance, thereby obtaining a solid material.

[0003] The shape of the substrate workpiece is usually flat, disc-shaped, cylindrical, etc.

[0004] The existing support method will form support points on the surface of the workpiece. The gas flow cannot reach the support points, and there will be a phenomenon of poor gas flow around the support points, resulting in problems with the coating quality near the support points of the workpiece. The support points cannot be coated, and secondary deposition is required. The film formation uniformity is poor, the efficiency is low, and the production cost is high. Summary of the Utility Model

[0005] In order to solve the problems that the existing support method will form support points on the surface of the workpiece, the gas flow cannot reach the support points, there will be a phenomenon of poor gas flow around the support points, resulting in problems with the coating quality near the support points of the workpiece, the support points cannot be coated, secondary deposition is required, the film formation uniformity is poor, the efficiency is low, and the production cost is high, the present application provides a rotating and alternating support tooling for chemical vapor deposition, and the specific scheme is as follows.

[0006] A rotating and alternating support tooling for chemical vapor deposition includes a driving member. An elevating rotating frame and a fixed rotating frame are arranged on the driving member. Both the elevating rotating frame and the fixed rotating frame are driven by the driving member to rotate. Supports are arranged on both the elevating rotating frame and the fixed rotating frame. The supports are used to abut against the workpiece. The length of the support on the elevating rotating frame is less than that of the support on the fixed rotating frame. A jacking member for jacking up the elevating rotating frame is also arranged on the driving member.

[0007] By adopting the above technical solution, the supports on the lifting and rotating frame and the fixed rotating frame can both support the workpiece. The lifting and rotating frame can move up and down under the action of the jacking member to support the workpiece. Since the support points of the two rotating frames are different, when the workpiece is jacked up under the movement of the lifting and rotating frame, it can change the support point from the support point of the fixed rotating frame to the lifting and rotating frame. When the workpiece is lowered, the support point can be changed to the fixed rotating frame. The support points on the workpiece can be changed back and forth, and the support point can be switched while rotating, which can make the air flow near the support point of the workpiece more uniform and reduce the situation of difficult film coating and poor film coating quality.

[0008] Optionally, an inner support rod is provided on the driving member corresponding to the lifting and rotating frame, and an outer support rod is provided on the driving member corresponding to the fixed rotating frame. The outer support rod is sleeved outside the inner support rod, and the inner support rod is in transmission connection with the outer support rod. The top of the inner support rod is connected with the lifting and rotating frame through a conical surface fit, and the top of the outer support rod is also connected with the fixed rotating frame through a straight surface fit.

[0009] By adopting the above technical solution, an inner support rod and an outer support rod in transmission connection are provided on the driving member. The inner support rod can rotate synchronously with the outer support rod. The inner support rod and the outer support rod can rotate synchronously, and only the up and down movement of the inner support rod can switch the support point. Since the inner support rod and the outer support rod move synchronously, the support points on the two rotating frames always correspond, reducing the situation where too many support points affect film coating.

[0010] Optionally, key grooves are provided on both the inner support rod and the outer support rod, and graphite keys are arranged in the key grooves. The graphite keys penetrate through the key grooves of the inner support rod and the outer support rod.

[0011] By adopting the above technical solution, the cooperation between the graphite key and the key groove can stably achieve transmission connection and improve the stability of the connection.

[0012] Optionally, a plurality of shelf plates are provided on the fixed rotating frame. The shelf plates are arranged at equal intervals along the circumferential direction of the fixed rotating frame. The support seat is provided with a card slot corresponding to the shape of the shelf plate for the shelf plate to extend into. The support seat is detachably connected to the shelf plate through bolts and blind nuts.

[0013] By adopting the above technical solution, a plurality of shelf plates arranged at equal intervals along the circumferential direction of the fixed rotating frame can stably support the workpiece, and the support seat can be detachably connected to the shelf plate, and the position of the support seat can be changed according to the size and shape of the workpiece, thereby improving versatility.

[0014] Optionally, a top plate is provided on the support seat. The top of the top plate is in line contact with the workpiece. The length of the top plate on the lifting and rotating frame is less than the length of the top plate on the fixed rotating frame.

[0015] By adopting the above technical solution and providing a top plate on the support that is in line contact with the workpiece, the influence of the support point on the deposition effect can be minimized.

[0016] Optionally, the driving member includes a magnetic fluid, an inner shaft and an outer shaft are arranged in the magnetic fluid, the outer shaft is sleeved on the outside of the inner shaft, the inner shaft is transmission-connected to the inner support rod, the outer shaft is transmission-connected to the outer support rod, the outer shaft is rotationally connected to the magnetic fluid, and the lifting member is used to lift the inner shaft.

[0017] By adopting the above technical solution, the magnetic fluid is a relatively tight sealing device, which can seal the inner shaft and the outer shaft relatively tightly, and can reduce the situation where air leakage affects the rotation of the inner shaft and the outer shaft.

[0018] Optionally, a speed regulating motor is further included, a pulley is fixedly provided on the outer shaft, a transmission belt is provided between the pulley and the rotating shaft of the speed regulating motor, and the transmission belt is used to drive the outer shaft to rotate.

[0019] By adopting the above technical solution, the speed regulating motor can adjust the motor speed more accurately, thereby controlling the rotation speed of the workpiece.

[0020] Optionally, graphite paper is arranged between the inner support rod and the outer support rod, and a sealing cover for covering the graphite paper is also provided on the driving member. The inner shaft and the outer shaft are guided by an oil-free sleeve, and a bellows for sealing the inner shaft and the outer shaft is also provided on the driving member.

[0021] By adopting the above technical solution, the graphite paper cooperates with the sealing cover to reduce the reaction and deposition between the raw material gas entering the inner support rod and the outer support rod, and reduce the situation where the inner support rod and the outer support rod are stuck.

[0022] Optionally, the lifting member includes an electric push rod, a bellows extends out from the bottom of the inner shaft and a flange push rod is provided corresponding to the electric push rod, the flange push rod includes a flange plate and a rod body, the rod body is provided on both sides of the flange plate, the flange plate and the inner shaft are detachably connected, and pull ears are provided on the two rod bodies, and a screw is detachably connected to the pull ears, and the screw and the electric push rod are also detachably connected.

[0023] By adopting the above technical solution, the electric push rod can drive the flange push rod to move, and the flange push rod then drives the inner shaft to move, thereby realizing the regular up and down movement of the lifting and rotating frame, thereby realizing the replacement of the contact point.

[0024] Optionally, a double-row deep groove ball bearing is fixed to the lower end of the magnetic fluid inner shaft, and the flange plate of the flange push rod is detachably connected to the double-row deep groove ball bearing.

[0025] By adopting the above technical solution, the double-row deep groove ball bearing can rotate circumferentially and also bear axial force, improving the stability of the inner shaft movement and extending the service life.

[0026] In summary, the present application has at least the following beneficial effects:

[0027] The present application solves the problems in the prior art that the support method will form support points on the surface of the workpiece, the air flow at the support points cannot reach, there will be a phenomenon of poor air flow around the support points, resulting in problems with the coating quality near the support points of the workpiece, the support points cannot be coated, secondary deposition is required, the film forming uniformity is poor, the efficiency is low, and the production cost is high. The present application can rotate the supported workpiece to ensure the deposition uniformity in the circumferential direction, and the support of the workpiece adopts line contact support, which can reduce the contact area of the workpiece, reduce the influence of the air flow at the support points of the workpiece, and during the deposition process, the lifting and rotating frame can move up and down, alternately supporting the workpiece with the fixed rotating frame, and the workpiece can rotate while switching the support points, which can make the air flow near the support points more uniform and reduce the situation that it is difficult to coat the film or the coating quality is poor due to the air flow compensation at the support points. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a perspective view of this embodiment.

[0029] Figure 2 is a sectional view of this embodiment.

[0030] DESCRIPTION OF THE REFERENCE NUMERALS:

[0031] 1. Driving member; 11. Inner support rod; 12. Outer support rod; 121. Keyway; 122. Graphite paper; 13. Graphite key; 14. Magnetic fluid; 141. Inner shaft; 142. Outer shaft; 143. Belt pulley; 144. Double-row deep groove ball bearing; 15. Sealing cover; 16. Bellows;

[0032] 2. Lifting and rotating frame; 21. Support; 211. Card slot; 212. Top plate;

[0033] 3. Fixed rotating frame; 31. Frame plate;

[0034] 4. Speed regulating motor; 41. Transmission belt;

[0035] 5. Lifting member; 51. Electric push rod;

[0036] 6. Flange push rod; 61. Flange; 62. Rod body; 621. Pulling ear; 622. Screw rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] The following further details the present application through specific embodiments in conjunction with the accompanying drawings.

[0038] A rotary alternating support tooling for chemical vapor deposition, as Figure 1 and Figure 2 shown, includes a driving member 1. An elevating rotary frame 2 and a fixed rotary frame 3 are arranged on the driving member 1. Both the elevating rotary frame 2 and the fixed rotary frame 3 are driven by the driving member 1 to rotate. Supports 21 are arranged on both the elevating rotary frame 2 and the fixed rotary frame 3. The supports 21 are used to abut against the workpiece. The length of the support 21 on the elevating rotary frame 2 is less than that of the support 21 on the fixed rotary frame 3. A jacking member 5 for jacking up the elevating rotary frame 2 is also arranged on the driving member 1. During specific implementation, the support 21 can support the workpiece. When the elevating rotary frame 2 does not rise, the fixed rotary frame 3 supports the workpiece. When the elevating rotary frame 2 rises, the elevating rotary frame 2 can jack up the workpiece. At this time, the fixed rotary frame 3 no longer supports the workpiece. At this time, the elevating rotary frame 2 can support the workpiece, so as to realize the replacement of the support points. The two groups of support points support alternately, and the airflow near the support points can be more uniform.

[0039] As Figure 1 and Figure 2 shown, an inner support rod 11 is arranged on the driving member 1 corresponding to the elevating rotary frame 2, and an outer support rod 12 is arranged on the driving member 1 corresponding to the fixed rotary frame 3. The outer support rod 12 is sleeved outside the inner support rod 11, and the outer support rod 12 and the inner support rod 11 can rotate without interference and friction. The inner support rod 11 and the outer support rod 12 are in transmission connection. The top of the inner support rod 11 is connected with the elevating rotary frame 2 through a conical surface fit, and the top of the outer support rod 12 is also connected with the fixed rotary frame 3 through a straight surface fit. During specific implementation, key grooves 121 are formed on both the inner support rod 11 and the outer support rod 12. A graphite key 13 is arranged in the key groove 121. The graphite key 13 penetrates through the key grooves 121 of the inner support rod 11 and the outer support rod 12. The graphite key 13 can transmit the inner support rod 11 and the outer support rod 12 to each other, and the elevating rotary frame 2 and the fixed rotary frame 3 can rotate synchronously, reducing the generation of more support points.

[0040] As Figure 1 and Figure 2As shown, the fixed rotating frame 3 is provided with multiple frame plates 31, which are spaced evenly around the fixed rotating frame 3. The support 21 has slots 211 corresponding to the shape of the frame plates 31, into which the frame plates 31 extend. The support 21 is detachably connected to the frame plates 31 via bolts and blind nuts. A top plate 212 is provided on the support 21, and the top of the top plate 212 is in line contact with the workpiece. The top plate 212 on the lifting rotating frame 2 is shorter than that on the fixed rotating frame 3. In specific implementation, three frame plates 31 are provided on the support 21. The frame plates 31 can be extended into the card slot 211, and then the support 21 can be fixed on the frame plates 31 by bolts and blind nuts. When the size of the workpiece changes, the position of the support 21 can be changed according to the size of the workpiece, thereby improving versatility. The top of the top plate 212 of the support 21 is blade-shaped or arc-shaped, so that the top plate 212 can be in linear contact with the workpiece, minimizing the influence of the support point on the deposition effect.

[0041] like Figure 1 and Figure 2 As shown, the driving member 1 includes a magnetic fluid 14, in which an inner shaft 141 and an outer shaft 142 are provided. The outer shaft 142 is sleeved on the outside of the inner shaft 141. The inner shaft 141 is transmission-connected to the inner support rod 11, and the outer shaft 142 is transmission-connected to the outer support rod 12. The outer shaft 142 is rotationally connected to the magnetic fluid 14, and the lifting member 5 is used to lift the inner shaft 141. In a specific implementation, the magnetic fluid 14 seal is a sealing device with good sealing performance. The inner shaft 141 and the outer shaft 142 are rotationally connected in the magnetic fluid 14. The inner shaft 141 is hollow and can be filled with cold water for cooling, reducing the impact of thermal expansion on the tooling. The inner shaft 141 can be rotatably connected to a joint, and water can be passed through the joint. Since the joint is rotatably connected, it will not affect the rotation of the inner shaft 141.

[0042] like Figure 1 and Figure 2As shown in the figure, it further includes a speed-regulating motor 4. A pulley 143 is fixedly arranged on the outer shaft 142. A transmission belt 41 is arranged between the pulley 143 and the rotating shaft of the speed-regulating motor 4. The transmission belt 41 is used to drive the outer shaft 142 to rotate. A graphite paper 122 is arranged between the inner support rod 11 and the outer support rod 12. A sealing cover 15 for pressing the graphite paper 122 is further arranged on the driving member 1. The sealing cover 15 is fixedly connected with the magnetic fluid 14. The inner shaft 141 and the outer shaft 142 are guided by an oil-free bushing. A corrugated pipe 16 for sealing the inner shaft 141 and the outer shaft 142 is further arranged on the driving member 1. During specific implementation, the components above the magnetic fluid 14 are all made of graphite material, which can further improve the stability, reduce the situation of changes caused by reactions, and improve the stability. The speed-regulating motor 4 can drive the outer shaft 142 to move through the transmission belt 41, and the outer shaft 142 can drive the inner shaft 141 to move. The cooperation of the graphite paper 122 and the sealing cover 15 can reduce the situation that the raw material gas leaks into the space between the inner support rod 11 and the outer support rod 12, resulting in reaction deposition and jamming.

[0043] As Figure 1 and Figure 2 shown in the figure, the jacking member 5 includes an electric push rod 51. The bottom of the inner shaft 141 extends out of the corrugated pipe 16 and a flange push rod 6 is correspondingly arranged for the electric push rod 51. The flange push rod 6 includes a flange plate 61 and a rod body 62. The rod body 62 is arranged on both sides of the flange plate 61. The flange plate 61 is detachably connected with the inner shaft 141. Pulling ears 621 are arranged on the two rod bodies 62. A screw rod 622 is detachably connected to the pulling ears 621. The screw rod 622 is also detachably connected with the electric push rod 51. A double-row deep groove ball bearing 144 is fixed at the lower end of the inner shaft 141 of the magnetic fluid 14. The flange plate 61 of the flange push rod 6 is detachably connected to the double-row deep groove ball bearing 144. During specific implementation, the corrugated pipe 16 can improve the sealing performance of the magnetic fluid 14. The inner and outer rings of the double-row deep groove ball bearing 144 can rotate circumferentially and can also bear axial forces.

[0044] Working principle: During the deposition process, the lifting support frame makes regular lifting movements under the push of the electric push rod 51. The two groups of support points support alternately. The workpiece rotates while switching the support points, which can make the airflow near the support points more uniform, and solve the problems that the support points cannot be coated and the coating quality near the support points is poor.

[0045] The above are the preferred embodiments of this application. The protection scope of this application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of this application should be covered within the protection scope of this application.

Claims

1. A rotating and alternating support tooling for chemical vapor deposition, characterized in that: It includes a driving member (1), on which a lifting and rotating frame (2) and a fixed rotating frame (3) are provided. Both the lifting and rotating frame (2) and the fixed rotating frame (3) are driven to rotate by the driving member (1). Supports (21) are provided on both the lifting and rotating frame (2) and the fixed rotating frame (3), and the supports (21) are used to abut against the workpiece. The length of the support (21) on the lifting and rotating frame (2) is less than that of the support (21) on the fixed rotating frame (3). A jacking member (5) for jacking up the lifting and rotating frame (2) is also provided on the driving member (1).

2. The rotating and alternating support tooling for chemical vapor deposition according to claim 1, characterized in that: An inner support rod (11) is provided on the driving member (1) corresponding to the lifting and rotating frame (2), and an outer support rod (12) is provided on the driving member (1) corresponding to the fixed rotating frame (3). The outer support rod (12) is sleeved outside the inner support rod (11), and the inner support rod (11) is in transmission connection with the outer support rod (12). The top of the inner support rod (11) is connected with the lifting and rotating frame (2) by conical surface fit, and the top of the outer support rod (12) is also connected with the fixed rotating frame (3) by straight surface fit.

3. The rotary alternating support fixture for chemical vapor deposition according to claim 2, characterized in that: Key grooves (121) are formed on both the inner support rod (11) and the outer support rod (12), and a graphite key (13) is arranged in the key grooves (121). The graphite key (13) penetrates through the key grooves (121) of the inner support rod (11) and the outer support rod (12).

4. The rotary alternating support fixture for chemical vapor deposition according to claim 1, characterized in that: A plurality of shelf plates (31) are provided on the fixed rotating frame (3), and the shelf plates (31) are arranged at equal circumferential intervals along the fixed rotating frame (3). The support (21) is provided with a clamping groove (211) corresponding to the shape of the shelf plate (31), and the shelf plate (31) extends into the clamping groove (211). The support (21) is detachably connected with the shelf plate (31) by bolts and blind nuts.

5. A rotary alternating support tooling for chemical vapor deposition according to claim 1, characterized in that: A top plate (212) is provided on the support (21), and there is a line contact between the top of the top plate (212) and the workpiece. The length of the top plate (212) on the lifting and rotating frame (2) is less than that of the top plate (212) on the fixed rotating frame (3).

6. The rotary alternating support tooling for chemical vapor deposition according to claim 3, wherein: The driving member (1) includes a magnetorheological fluid (14), in which an inner shaft (141) and an outer shaft (142) are arranged. The outer shaft (142) is sleeved outside the inner shaft (141). The inner shaft (141) is in transmission connection with the inner support rod (11), and the outer shaft (142) is in transmission connection with the outer support rod (12). The outer shaft (142) is rotationally connected with the magnetorheological fluid (14), and the jacking member (5) is used to jack up the inner shaft (141).

7. A rotary alternating support tooling for chemical vapor deposition according to claim 6, characterized in that: It also includes a speed-regulating motor (4). A belt pulley (143) is fixedly arranged on the outer shaft (142), and a transmission belt (41) is arranged between the belt pulley (143) and the rotating shaft of the speed-regulating motor (4). The transmission belt (41) is used to drive the outer shaft (142) to rotate.

8. The rotary alternating support fixture for chemical vapor deposition according to claim 6, characterized in that: A graphite paper (122) is provided between the inner support rod (11) and the outer support rod (12), and a sealing cover (15) for pressing the graphite paper (122) is further provided on the driving member (1). The inner shaft (141) and the outer shaft (142) are guided by a oil-free bushing, and a bellows (16) for sealing the inner shaft (141) and the outer shaft (142) is further provided on the driving member (1).

9. The rotating and alternating support tooling for chemical vapor deposition according to claim 8, wherein: The jacking member (5) includes an electric push rod (51). The bottom of the inner shaft (141) extends out of the bellows (16) and a flange push rod (6) is correspondingly arranged for the electric push rod (51). The flange push rod (6) includes a flange plate (61) and a rod body (62). The rod body (62) is arranged on both sides of the flange plate (61). The flange plate (61) is detachably connected to the inner shaft (141). Pulling ears (621) are arranged on the two rod bodies (62), and a screw rod (622) is detachably connected to the pulling ears (621). The screw rod (622) is also detachably connected to the electric push rod (51).

10. A rotary alternating support tooling for chemical vapor deposition according to claim 9, characterized in that: A double-row deep groove ball bearing (144) is fixed at the lower end of the inner shaft (141) of the magnetorheological fluid (14), and the flange plate (61) of the flange push rod (6) is detachably connected to the double-row deep groove ball bearing (144).

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