Water cooling screen and single crystal furnace

Abstract

The utility model discloses a water-cooling screen and a single crystal furnace, and the water-cooling screen comprises a water-cooling screen body which comprises an inner side wall and an outer side wall, a containing cavity is formed between the inner side wall and the outer side wall, and the containing cavity is divided into an upper cavity body and a lower cavity body; the magnet device is arranged in the lower cavity; wherein the lower flange comprises a bottom inner ring waterway and a bottom outer ring waterway; an upper-layer water path is formed in the upper cavity, a first pipeline isolated from the upper-layer water path is arranged in the upper cavity, a magnet inner ring water path is arranged in the magnet inner cavity, a second pipeline isolated from the magnet inner ring water path is arranged in the magnet inner cavity, and the bottom outer ring water path is further communicated with the lower end of the magnet inner ring water path; a magnet outer ring water path and a third pipeline isolated from the magnet outer ring water path are arranged in the magnet outer cavity; the upper end of the magnet outer ring waterway is communicated with the lower end of the upper waterway. According to the water cooling screen, the cooling effect of the magnet in the water cooling screen is improved, and the situation that the magnet is demagnetized at high temperature and bubbles in a water path cannot be discharged is avoided.

Description

Technical Field

[0001] The present application relates to a single crystal furnace, and particularly to a water-cooled screen and a single crystal furnace. Background Art

[0002] The water-cooled screen (also known as the water-cooled hot screen) is an important part of the single crystal furnace. This device is installed inside the single crystal furnace, and circulating cooling water passes through the device. The crystallization latent heat of the crystal rod is carried away by the cooling water, which accelerates the crystal growth rate, improves the equipment production capacity, reduces energy consumption, and reduces production costs. With the rapid development of N-type solar cells, especially the rapid development of Tunnel Oxide Passivating Contact (TOPCon) cells, the demand for N-type silicon wafers has increased significantly. And N-type silicon wafers have very high requirements for crystal quality and oxygen and carbon content, such as higher minority carrier lifetime and lower oxygen content, etc.

[0003] Currently, a relatively effective method for controlling the oxygen content in the crystal is to introduce an external magnetic field on the single crystal furnace. For example, a magnet is arranged inside the water-cooled screen. The Lorentz force generated by the magnetic field can effectively suppress the convection of the melt during the growth of Czochralski single crystal silicon, stabilize the temperature of the solid-liquid interface, and thus reduce the oxygen content in the crystal. However, the existing water-cooled screen provided with a magnet has the following problems: the cooling and temperature reduction effect of the magnet is poor, resulting in high-temperature demagnetization of the magnet; the air bubbles in the water channel inside the water-cooled screen cannot be discharged; the magnet is directly in contact with the cooling water, resulting in corrosion of the magnet by the cooling water, etc. Utility Model Content

[0004] The purpose of the present application is to propose a water-cooled screen and a single crystal furnace, which can prevent the magnet from contacting the cooling water, avoid corrosion of the magnet by the cooling water, and improve the cooling and temperature reduction effect of the magnet inside the water-cooled screen, ensure the normal working temperature of the magnet, and avoid high-temperature demagnetization of the magnet and the inability to discharge air bubbles in the water channel, etc.

[0005] In order to solve at least one of the above technical problems, the technical solution of the present application is as follows:

[0006] According to the first aspect of the present application, there is provided a water-cooled screen and a single crystal furnace, including: a water-cooled screen body, the water-cooled screen body is formed as a cylinder with both ends penetrating, including an inner side wall and an outer side wall, a receiving cavity is formed between the inner side wall and the outer side wall, the top of the outer side wall and the top of the inner side wall are hermetically connected by an upper flange, the bottom of the inner side wall and the bottom of the outer side wall are hermetically connected by a lower flange, a water inlet and a water outlet are arranged at the upper end of the inner side wall, and the receiving cavity is divided into an upper cavity and a lower cavity; a magnet device, the magnet device is arranged in the lower cavity, and includes an annular sealed cavity for placing the magnet, a magnet inner cavity located inside the sealed cavity near the central axis of the water-cooled screen body, and a magnet outer cavity located outside the sealed cavity away from the central axis of the water-cooled screen body.

[0007] Among them, the lower flange includes a bottom inner ring waterway close to the central axis of the water-cooled screen body and a bottom outer ring waterway arranged outside the bottom inner ring waterway and isolated from the bottom inner ring waterway; among them, an upper waterway is formed in the upper cavity and a first pipeline extending longitudinally and isolated from the upper waterway is arranged. A magnetic inner ring waterway is arranged in the magnetic inner cavity and a second pipeline extending longitudinally and isolated from the magnetic inner ring waterway is arranged. The upper end of the first pipeline is communicated with the water inlet, the lower end of the first pipeline is communicated with the upper end of the second pipeline, the lower end of the second pipeline is communicated with the bottom inner ring waterway of the lower flange, and the bottom inner ring waterway is also communicated with the lower end of the magnetic inner ring waterway; among them, a magnetic outer ring waterway is arranged in the magnetic outer cavity and a third pipeline extending longitudinally and isolated from the magnetic outer ring waterway is arranged. The upper end of the third pipeline is communicated with the upper end of the magnetic inner ring waterway, the lower end of the third pipeline is communicated with the bottom outer ring waterway of the lower flange, and the bottom outer ring waterway is also communicated with the lower end of the magnetic outer ring waterway; among them, the upper end of the magnetic outer ring waterway is communicated with the lower end of the upper waterway in the upper cavity; among them, the upper end of the upper waterway is communicated with the water outlet.

[0008] In a possible implementation of the above first aspect, a first annular partition plate and a second annular partition plate are formed between the inner side wall and the outer side wall of the water-cooled screen body. The second annular partition plate connects the bottom of the inner side wall and the bottom of the outer side wall. The first annular partition plate is located between the second annular partition plate and the upper flange, so that the space between the upper flange, the first annular partition plate, the inner side wall and the outer side wall forms an upper cavity, and the space between the first annular partition plate, the second annular partition plate, the inner side wall and the outer side wall forms a lower cavity.

[0009] In a possible implementation of the above first aspect, a plurality of first annular guide plates are sequentially arranged at intervals from bottom to top in the upper cavity. One side of the plurality of first annular guide plates close to the central axis of the water-cooled screen body is connected to the inner side wall, and one side of the plurality of first annular guide plates far from the central axis of the water-cooled screen body is connected to the outer side wall. The plurality of first annular guide plates divide the upper cavity into multiple first diversion channels arranged vertically. The two adjacent first diversion channels above and below are communicated with each other to form an upper waterway. The first pipeline separates each layer of the first diversion channels. The two adjacent first diversion channels above and below, the bottom first diversion channel and the upper end of the magnetic outer ring waterway are all communicated through a first through hole. The two adjacent first through holes are respectively located on both sides of the first pipeline.

[0010] In a possible implementation of the first aspect above, the water inlet and the water outlet are symmetrically arranged on both sides of the water-cooling screen body, and a third partition is provided in the first guide channel of the top layer to divide the first guide channel of the top layer into a first part and a second part isolated from each other. The first part is connected with the water outlet and is connected with the adjacent first guide channel below through the first opening, and the end of the second part close to the first pipeline is connected with the adjacent first guide channel below through the second opening, and the end of the second part close to the third partition is connected with the adjacent first guide channel below through the third opening.

[0011] In a possible implementation of the first aspect above, the lower flange is arranged below the second annular dividing plate and is provided with a first annular groove and a second annular groove isolated from each other inside. The second annular groove is arranged around the outside of the first annular groove. The first annular groove cooperates with the second annular dividing plate to form an inner ring water channel at the bottom, and the second annular groove cooperates with the second annular dividing plate to form an outer ring water channel at the bottom.

[0012] In a possible implementation of the first aspect above, a first partition is provided in the first annular groove, and the first partition separates the bottom inner ring water channel along the radial direction of the first annular groove, the connecting port between the second pipeline and the bottom inner ring water channel is close to one side of the first partition, and the connecting port between the bottom inner ring water channel and the inner ring water channel of the magnet is close to the other side of the first partition, and a second partition is provided in the second annular groove, and the second partition separates the bottom outer ring water channel along the radial direction of the second annular groove, the connecting port between the third pipeline and the bottom outer ring water channel is close to one side of the second partition, and the connecting port between the bottom outer ring water channel and the outer ring water channel of the magnet is close to the other side of the second partition.

[0013] In a possible implementation of the first aspect above, a first longitudinal dividing wall extending downward from the first annular dividing plate to the second annular dividing plate is provided in the lower cavity. The first longitudinal dividing wall is cylindrical and is located between the inner wall and the outer wall. The space between the first longitudinal dividing wall, the outer wall, the first annular dividing plate and the second annular dividing plate forms the outer cavity of the magnet.

[0014] In a possible implementation of the first aspect described above, a plurality of second annular flow guiding plates are sequentially arranged at intervals from bottom to top in the cavity formed among the first longitudinal partition wall, the inner side wall, the first annular partition plate, and the second annular partition plate. One side of each of the plurality of second annular flow guiding plates close to the central axis of the water-cooled screen body is connected to the inner side wall, and second longitudinal partition walls are respectively formed between two adjacent second annular flow guiding plates in the vertical direction and between the lowermost second annular flow guiding plate and the second annular partition plate. Each second longitudinal partition wall is spaced apart from the first longitudinal partition wall in the radial direction of the water-cooled screen body, so that the space among the first longitudinal partition wall, the plurality of second longitudinal partition walls, the uppermost second annular flow guiding plate, and the second annular partition plate forms a sealed cavity of the magnet device, and the space in the cavity formed among the first longitudinal partition wall, the inner side wall, the first annular partition plate, and the second annular partition plate, excluding the sealed cavity, forms an inner cavity of the magnet.

[0015] In a possible implementation of the first aspect described above, the plurality of second annular flow guiding plates divide the inner cavity of the magnet into multiple second flow guiding channels arranged vertically. Two adjacent second flow guiding channels in the vertical direction communicate with each other to form an inner ring water path of the magnet. The second pipeline separates each layer of the second flow guiding channels. Two adjacent second flow guiding channels in the vertical direction, the lowermost second flow guiding channel, and the bottom inner ring water path are respectively communicated through fourth ports. Two adjacent fourth ports are respectively located on both sides of the second pipeline. The uppermost second flow guiding channel is communicated with the top of the third pipeline through a fifth port, where the fourth port and the fifth port for the uppermost second flow guiding channel to communicate with the second flow guiding channel adjacent below are respectively located on both sides of the second pipeline.

[0016] In a possible implementation of the first aspect described above, a plurality of third annular flow guiding plates are sequentially arranged at intervals from bottom to top in the outer cavity of the magnet. One side of each of the plurality of third annular flow guiding plates close to the central axis of the water-cooled screen body is connected to the first longitudinal partition wall, and one side of each of the plurality of third annular flow guiding plates away from the central axis of the water-cooled screen body is connected to the outer side wall. The plurality of third annular flow guiding plates divide the outer cavity of the magnet into multiple third flow guiding channels arranged vertically. Two adjacent third flow guiding channels in the vertical direction communicate with each other to form an outer ring water path of the magnet. The third pipeline separates each layer of the third flow guiding channels. Two adjacent third flow guiding channels in the vertical direction, the lowermost third flow guiding channel, and the bottom outer ring water path are respectively communicated through sixth ports. Two adjacent sixth ports are respectively located on both sides of the third pipeline. The uppermost third flow guiding channel is communicated with the lowermost first flow guiding channel of the upper water path through a first port.

[0017] In a possible implementation of the above first aspect, the first through-hole is a through-hole formed on the first annular flow guide plate and / or the first annular partition plate, the second through-hole and the third through-hole are through-holes formed on the first annular flow guide plate; the fourth through-hole is a through-hole formed on the second annular flow guide plate and / or the second annular partition plate; the fifth through-hole is a through-hole formed on the first longitudinal partition wall; the sixth through-hole is a through-hole formed on the third annular flow guide plate.

[0018] According to a second aspect of the present application, there is provided a single crystal furnace including the above water-cooled screen.

[0019] At least one of the above technical solutions of the present application has the following beneficial effects:

[0020] According to the water-cooled screen of the present application, the magnet device is arranged in the lower cavity of the accommodation cavity of the water-cooled screen body. A magnet is arranged in the sealed cavity of the magnet device. The upper water circuit, the inner ring water circuit of the magnet, the outer ring water circuit of the magnet, the bottom inner ring water circuit and the bottom outer ring water circuit surround the sealed cavity of the magnet device. The circulating cooling water first enters the bottom inner ring water circuit through the first pipeline and the second pipeline in sequence from the water inlet, then enters the lower end of the inner ring water circuit of the magnet from the bottom inner ring water circuit, then enters the upper end of the third pipeline from the upper end of the inner ring water circuit of the magnet, then enters the bottom outer ring water circuit through the third pipeline, then enters the lower end of the outer ring water circuit of the magnet from the bottom outer ring water circuit, then enters the lower end of the upper water circuit from the upper end of the outer ring water circuit of the magnet, and then flows out through the water outlet from the upper end of the upper water circuit. The cooling water flowing out of the water outlet is recycled into the water inlet after passing through the cooling water supply device. Thus, on the one hand, the magnet is built-in in the sealed cavity of the magnet device, and the upper water circuit, the inner ring water circuit of the magnet, the outer ring water circuit of the magnet, the bottom inner ring water circuit and the bottom outer ring water circuit surround the sealed cavity of the magnet device, which can not only prevent the magnet from contacting with the cooling water and avoid the magnet being corroded by the cooling water, but also improve the cooling effect of the magnet in the water-cooled screen, ensure the normal working temperature of the magnet, avoid the magnet being demagnetized at high temperature, etc. The cooling water first enters the inner ring water circuit of the magnet, which is also convenient for better taking away the latent heat of crystallization of the crystal rod, accelerating the crystal growth rate, improving the equipment production capacity, reducing the energy consumption and production cost, and being able to better meet the production requirements of N-type silicon wafers; on the other hand, the cooling water in the upper water circuit, the inner ring water circuit of the magnet and the outer ring water circuit of the magnet is circulated and conveyed from bottom to top, avoiding the air bubbles in the water circuit being unable to be discharged, the cooling water can flow unobstructed, with a large flow rate, uniform cooling and good cooling effect, ensuring the longitudinal temperature gradient of the crystal rod, and further improving the crystal growth rate.

[0021] In addition, in the technical solution of the present application, unless otherwise specifically stated, the present technical solution can be implemented by adopting conventional means in the art. Description of the Drawings

[0022] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 Cross-sectional view of a water-cooled screen according to an embodiment of the present application;

[0024] Figure 2 Axonometric sectional view of the water-cooled screen removing the inner wall according to an embodiment of the present application;

[0025] Figure 3 Structural schematic diagram of the inner wall according to an embodiment of the present application;

[0026] Figure 4 Structural schematic diagram of the inner wall and the upper waterway according to an embodiment of the present application;

[0027] Figure 5 Structural schematic diagram of the inner wall and the upper waterway according to an embodiment of the present application;

[0028] Figure 6 Side view of the inner wall and the upper waterway according to an embodiment of the present application;

[0029] Figure 7 Side view of the inner wall and the upper waterway according to an embodiment of the present application;

[0030] Figure 8 Structural schematic diagram of the lower flange according to an embodiment of the present application;

[0031] Figure 9 Partial cross-sectional view of the lower flange according to an embodiment of the present application;

[0032] Figure 10 Partial cross-sectional view of the upper flange according to an embodiment of the present application;

[0033] Figure 11 Structural schematic diagram of the magnet device according to an embodiment of the present application;

[0034] Figure 12 Structural schematic diagram of the magnet device according to an embodiment of the present application.

[0035] Explanation of the reference numerals in the drawings:

[0036] Water-cooled screen body 100; inner side wall 101; outer side wall 102; water inlet 103; water outlet 104; water inlet pipe 105; water outlet pipe 106; first annular partition plate 107; second annular partition plate 108;

[0037] Magnet device 200; sealing cavity 201; first longitudinal partition wall 202; second longitudinal partition wall 203;

[0038] Inner ring water path of magnet 300; second pipeline 301; second annular guide plate 302, second guide channel 303; fourth through port 304; fifth through port 305;

[0039] Outer ring water path of magnet 400; third pipeline 401; third annular guide plate 402; third guide channel 403; sixth through port 404; [[ID=X]] [[ID=X]]

[0040] Upper layer water path 500; first pipeline 501; first annular guide plate 502; first guide channel 503; first through port 504; second through port 505; third through port 506; third partition plate 507; first part 508; second part 509;

[0041] Bottom outer ring water path 600;

[0042] Bottom inner ring water path 700;

[0043] Upper flange 800; first connection groove 801; second connection groove 802;

[0044] Lower flange 900; first annular groove 901; second annular groove 902; first partition plate 903; second partition plate 904. Detailed implementation manners

[0045] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are some but not all of the embodiments of the present application, and are only used to explain the present application, rather than to limit the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application.

[0046] It should be noted that the tags ,

[0037] , ,

[0038] , ,

[0039] , ,

[0040] , ,

[0041] , ,

[0042] , ,

[0043] , ,

[0044] , , ,

[0045] , ,

[0046] are likely specific identifiers in a particular context and are not translated as they are likely to have a specific meaning within that system or document. I've left them as they are in the translation. If there's more context available about these tags, a more informed translation might be possible for them. Also, the two lines with just and

[0040] were marked as "X" in the translation as they seemed to be incomplete or placeholder-like in the original and without further context, no better translation could be provided.In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inner", "outer", "both ends", "both sides", "bottom", "top", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application. In addition, terms such as "first", "second", "superior", "inferior", "main", "secondary", etc. are only used for descriptive purposes and can simply be used to more clearly distinguish different components, rather than indicating or implying relative importance.

[0047] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled" shall be construed broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0048] See Figures 1 to 12 As shown, schematically shown is a water-cooled screen provided according to an embodiment of the present application, including a water-cooled screen body 100 and a magnet device 200.

[0049] Among them, the water-cooled screen body 100 is formed as a cylinder with both ends penetrating. An accommodation cavity (not shown) is formed inside the side wall of the water-cooled screen body 100. The accommodation cavity surrounds the water-cooled screen body 100. An inlet 103 and an outlet 104 are provided at the upper end of the water-cooled screen body 100. The water-cooled screen body 100 includes an outer side wall 102 and an inner side wall 101. The top of the inner side wall 101 is connected to the top of the outer side wall 102, and the bottom of the inner side wall 101 is connected to the bottom of the outer side wall 102. The inner side wall 101 and the outer side wall 102 can be connected by welding, and an accommodation cavity is formed between the inner side wall 101 and the outer side wall 102. Specifically, the top of the outer side wall 102 and the top of the inner side wall 101 are hermetically connected by an upper flange 800, and the bottom of the inner side wall 101 and the bottom of the outer side wall 102 are hermetically connected by a lower flange 900. The inlet 103 and the outlet 104 are provided at the upper end of the inner side wall 101. The accommodation cavity is divided into an upper cavity (not shown) and a lower cavity (not shown). Both the upper flange 800 and the lower flange 900 are annular.

[0050] The magnet device 200 is arranged in the lower cavity. The magnet device 200 includes an annular sealed cavity 201 for accommodating a magnet (not shown), a magnet inner cavity (not shown) located on the inner side of the sealed cavity close to the central axis of the water-cooled screen body 100, and a magnet outer cavity (not shown) located on the outer side of the sealed cavity away from the central axis of the water-cooled screen body 100. Among them, the lower flange 900 includes a bottom inner ring water passage 700 close to the central axis of the water-cooled screen body 100 and a bottom outer ring water passage 600 arranged on the periphery of the bottom inner ring water passage 700 and isolated from the bottom inner ring water passage 700. An upper layer water passage 500 is formed in the upper cavity and a first pipeline 501 extending longitudinally and isolated from the upper layer water passage 500 is provided. A magnet inner ring water passage 300 is provided in the magnet inner cavity and a second pipeline 301 extending longitudinally and isolated from the magnet inner ring water passage 300 is provided. The upper end of the first pipeline 501 is communicated with the water inlet 103, the lower end of the first pipeline 501 is communicated with the upper end of the second pipeline 301, the lower end of the second pipeline 301 is communicated with the bottom inner ring water passage 700 of the lower flange 900, and the bottom inner ring water passage 700 is also communicated with the lower end of the magnet inner ring water passage 300. A magnet outer ring water passage 400 is provided in the magnet outer cavity and a third pipeline 401 extending longitudinally and isolated from the magnet outer ring water passage 400 is provided. The upper end of the third pipeline 401 is communicated with the upper end of the magnet inner ring water passage 300, the lower end of the third pipeline 401 is communicated with the bottom outer ring water passage 600 of the lower flange 900, the bottom outer ring water passage 600 is also communicated with the lower end of the magnet outer ring water passage 400, the upper end of the magnet outer ring water passage 400 is communicated with the lower end of the upper layer water passage 500 in the upper cavity, and the upper end of the upper layer water passage 500 is communicated with the water outlet 104.

[0051] Exemplarily, taking Figure 1 as a reference, the inner side wall 101, the outer side wall 102, the upper layer water passage 500, the bottom inner ring water passage 700, the bottom outer ring water passage 600, the sealed cavity 201, the magnet outer ring water passage 400 and the magnet inner ring water passage 300 are respectively coaxial with the water-cooled screen body 100, and the first pipeline 501, the second pipeline 301 and the third pipeline 401 all extend from top to bottom. The magnet in the sealed cavity 201 is annular and coaxial with the sealed cavity 201. The annular magnet is also called a magnetic ring. For example, the magnet can be a sintered neodymium iron boron permanent magnet, and the magnet can also be made of other magnetic materials in the prior art.

[0052] That is to say, the magnet device 200 is arranged in the lower cavity of the accommodation cavity of the water-cooled screen body 100. A magnet is arranged in the sealing cavity 201 of the magnet device 200. The upper water circuit 500, the inner-ring water circuit 300 of the magnet, the outer-ring water circuit 400 of the magnet, the inner-ring water circuit 700 at the bottom, and the outer-ring water circuit 600 at the bottom surround the sealing cavity 201 of the magnet device 200. The water inlet 103 on the water-cooled screen body 100 is connected to the output port of the corresponding cooling water supply device through a pipeline, and the water outlet 104 on the water-cooled screen body 100 is connected to the input port of the cooling water supply device through a pipeline. The circulating cooling water first enters the inner-ring water circuit 700 at the bottom through the first pipeline 501 and the second pipeline 301 in sequence from the water inlet 103, then enters the lower end of the inner-ring water circuit 300 of the magnet from the inner-ring water circuit 700 at the bottom, then enters the upper end of the third pipeline 401 from the upper end of the inner-ring water circuit 300 of the magnet, then enters the outer-ring water circuit 600 at the bottom through the third pipeline 401, then enters the lower end of the outer-ring water circuit 400 of the magnet from the outer-ring water circuit 600 at the bottom, then enters the lower end of the upper water circuit 500 from the upper end of the outer-ring water circuit 400 of the magnet, and then flows out through the water outlet 104 from the upper end of the upper water circuit 500. The cooling water flowing out from the water outlet 104 is recycled into the water inlet 103 after passing through the cooling water supply device, so as to provide circulating cooling water for the water-cooled screen.

[0053] Thus, for the water-cooled screen of the present application, on the one hand, the magnet is built into the sealing cavity 201 of the magnet device 200, and the upper water circuit 500, the inner-ring water circuit 300 of the magnet, the outer-ring water circuit 400 of the magnet, the inner-ring water circuit 700 at the bottom, and the outer-ring water circuit 600 at the bottom surround the sealing cavity 201 of the magnet device 200. It can not only prevent the magnet from contacting with the cooling water, avoid the magnet being corroded by the cooling water, better provide a magnetic field for crystal pulling, improve the service life, etc., but also improve the cooling effect of the magnet in the water-cooled screen, ensure the normal working temperature of the magnet, avoid the magnet being demagnetized at high temperature, etc. The cooling water first enters the inner-ring water circuit 300 of the magnet, which is also convenient for better taking away the latent heat of crystallization of the crystal rod, accelerating the crystal growth rate, improving the equipment production capacity, reducing the energy consumption and production cost, and being able to better meet the production requirements of N-type silicon wafers; on the other hand, by setting the first pipeline 501, the second pipeline 301, the third pipeline 401, the inner-ring water circuit 700 at the bottom, and the outer-ring water circuit 600 at the bottom, the cooling water in the upper water circuit 500, the inner-ring water circuit 300 of the magnet, and the outer-ring water circuit 400 of the magnet is circulated and transported from bottom to top, avoiding the air bubbles in the water circuit being unable to be discharged, the cooling water can flow unobstructed, with a large flow rate, uniform cooling, and good cooling effect, ensuring the longitudinal temperature gradient of the crystal rod, and further improving the crystal growth rate.

[0054] In some embodiments, such as Figure 1As shown, a first annular partition plate 107 and a second annular partition plate 108 are formed between the inner side wall 101 and the outer side wall 102 of the water-cooled screen body 100. The second annular partition plate 108 connects the bottom of the inner side wall 101 and the bottom of the outer side wall 102. The first annular partition plate 107 is located between the second annular partition plate 108 and the upper flange 800, so that the space between the upper flange 800, the first annular partition plate 107, the inner side wall 101 and the outer side wall 102 forms an upper cavity, and the space between the first annular partition plate 107, the second annular partition plate 108, the inner side wall 101 and the outer side wall 102 forms a lower cavity. Thus, the accommodation cavity is divided into an upper cavity and a lower cavity by the first annular partition plate 107 and the second annular partition plate 108, which is more convenient for processing and manufacturing, etc.

[0055] In some embodiments, as Figures 4 to 7 shown, a plurality of first annular flow guide plates 502 are sequentially arranged at intervals from bottom to top in the upper water circuit 500. One side of the plurality of first annular flow guide plates 502 close to the central axis of the water-cooled screen body 100 is connected to the inner side wall 101, and the side of the plurality of first annular flow guide plates 502 far from the central axis of the water-cooled screen body 100 is connected to the outer side wall 102. The plurality of first annular flow guide plates 502 divide the upper cavity into multiple first flow guide channels 503 arranged vertically. The first pipeline 501 separates each of the first flow guide channels 503, and two adjacent first flow guide channels 503 above and below communicate with each other to form the upper water circuit 500. Two adjacent first flow guide channels 503 above and below, the upper end of the outer ring water circuit 400 of the magnet and the first flow guide channel 503 at the bottom layer are all communicated through the first through port 504. Two adjacent first through ports 504 are respectively located on both sides of the first pipeline 501. Specifically, each of the first annular flow guide plates 502 is arranged horizontally and coaxial with the water-cooled screen body 100. The inner ring of each of the first annular flow guide plates 502 can be welded to the inner side wall 101, and then the inner side wall 101 and the outer side wall 102 are welded, so that the outer ring of each of the first annular flow guide plates 502 tightly abuts against the outer side wall 102.

[0056] That is to say, the upper water path 500 includes multiple layers of first diversion channels 503 arranged vertically and connected in sequence. The bottom first diversion channel 503 is connected to the outer magnet water path 400, and the top first diversion channel 503 is connected to the water outlet 104. The cooling water can only enter the first pipeline 501 from the water inlet 103 and cannot directly enter each first diversion channel 503 of the upper water path 500. The cooling water in the outer magnet water path 400 first enters the bottom first diversion channel 503 through the first through port 504. The first pipeline 501 separates each first diversion channel 503. After the cooling water circulates around the first diversion channel 503, it enters the first diversion channel 503 of the upper layer. The cooling water is sequentially transported upward layer by layer. Thus, on the one hand, it can ensure that the cooling water in the upper water path 500 is transported layer by layer from bottom to top, avoiding the inability to discharge the air bubbles in the water path, enabling the cooling water to flow smoothly, with a large flow rate, uniform cooling, ensuring the longitudinal temperature gradient of the ingot, and improving the crystal growth rate; on the other hand, it ensures that the cooling water can surround each first diversion channel 503, achieving a better cooling effect.

[0057] In some embodiments, the water inlet 103 and the water outlet 104 are symmetrically arranged on both sides of the water-cooling screen body 100. A third partition 507 is provided in the top first diversion channel 503 to divide the top first diversion channel 503 into a first part 508 and a second part 509 that are isolated from each other. The first part 507 is connected to the water outlet 104 and is connected to the adjacent lower first diversion channel 503 through the first through port �04. One end of the second part 509 close to the first pipeline 501 is connected to the adjacent lower first diversion channel 503 through the second through port 505, and one end of the second part 509 close to the third partition 507 is connected to the adjacent lower first diversion channel 503 through the third through port 506. Among them, the number of the first diversion channels 503 and the first annular diversion plates 502 is determined according to specific conditions such as the size of the water-cooling screen, Figures 4 to 7 Taking it as a reference, three first diversion channels 503 are arranged vertically and connected in sequence. Each first diversion channel 503 is annular, and the upper water path 500 is generally in a "zigzag" structure.

[0058] That is to say, the water inlet 103 and the water outlet 104 are symmetrically arranged on both sides of the water-cooled screen body 100. For the first guide channel 503 on the top layer, after the cooling water enters the first part 508 of the first guide channel 503 on the top layer from the first opening 504, the cooling water flows along the first part 508 and flows out from the water outlet 104; after the cooling water enters the second part 509 of the first guide channel 503 on the top layer from the second opening 505, the cooling water flows along the second part 509 to the third partition 507. Under the blocking effect of the third partition 507, the cooling water enters the adjacent first guide channel 503 below from the third opening 506, thereby ensuring that it can completely surround the first guide channel 503 on the top layer. Therefore, on the one hand, it can ensure that the cooling water in the upper water channel 500 is transported layer by layer from bottom to top, avoiding the bubbles in the water channel from being unable to be discharged. The cooling water can flow unobstructed, with a large flow rate and uniform cooling, thereby ensuring the longitudinal temperature gradient of the crystal rod and improving the crystal growth rate; on the other hand, it can ensure that the cooling water can surround each first guide channel 503, and the cooling effect is better.

[0059] In some embodiments, as Figures 1 to 2 As shown in Figures 8-9, 11-12, the lower flange 900 is disposed below the second annular dividing plate 108 and is internally provided with a first annular groove 901 and a second annular groove 902 that are isolated from each other. The second annular groove 902 is disposed around the outside of the first annular groove 901. The first annular groove 901 cooperates with the second annular dividing plate 108 to form the bottom inner annular waterway 700, and the second annular groove 902 cooperates with the second annular dividing plate 108 to form the bottom outer annular waterway 600. A first baffle 903 is further disposed within the first annular groove 901 and is used to separate the bottom inner annular waterway 700 along the radial direction of the first annular groove 901. A second baffle 904 is further disposed within the second annular groove 902 and is used to separate the bottom outer annular waterway 600 along the radial direction of the second annular groove 902. The connecting port between the second pipeline 301 and the bottom inner ring water channel 700 is close to one side of the first partition 903, the connecting port between the bottom inner ring water channel 700 and the magnet inner ring water channel 300 is close to the other side of the first partition 903, the connecting port between the third pipeline 401 and the bottom outer ring water channel 600 is close to one side of the second partition 904, and the connecting port between the bottom outer ring water channel 600 and the magnet outer ring water channel 400 is close to the other side of the second partition 904.

[0060] That is to say, the bottom inner ring waterway 700 and the bottom outer ring waterway 600 cover the lower part of the sealed cavity 201 of the magnet device 200. The cooling water first enters the bottom inner ring waterway 700 through the water inlet 103, the first pipeline 501 and the second pipeline 301 in sequence. After the cooling water circulates around the bottom inner ring waterway 700, it enters the lower end of the inner ring waterway 300 of the magnet. The cooling water enters the upper end of the third pipeline 401 from the upper end of the inner ring waterway 300 of the magnet, and then enters the bottom outer ring waterway 600 from the lower end of the third pipeline 401. After the cooling water circulates around the bottom outer ring waterway 600, it enters the lower end of the outer ring waterway 400 of the magnet, and then enters the lower end of the upper layer waterway 500 from the upper end of the outer ring waterway 400 of the magnet, and then flows out through the water outlet 104 from the upper end of the upper layer waterway 500. Thus, by providing the first annular groove 901 and the second annular groove 902 on the lower flange 900, and respectively providing partitions in the bottom inner ring waterway 700 and the bottom outer ring waterway 600, it is not only convenient for the cooling water to more fully circulate around the bottom inner ring waterway 700 and the bottom outer ring waterway 600, ensuring better cooling of the magnet device 200, but also more convenient for the cooling water to enter from the bottom of the inner ring waterway 300 of the magnet and the bottom of the outer ring waterway 400 of the magnet respectively, with the cooling water being more unobstructed and having a larger flow rate, etc. In addition, the cross-section of the lower flange 900 in the vertical direction can be roughly in a "V" shape, making it more convenient to set the bottom outer ring waterway 600 and the bottom inner ring waterway 700, etc.

[0061] In some embodiments, as Figure 10 shown, a first connection groove 801 that mates with the inner side wall 101 is provided on the inner side of the upper flange 800, and a second connection groove 802 that mates with the outer side wall 102 is provided on the outer side of the upper flange 800. That is to say, the top of the inner side wall 101 is connected to the first connection groove 801 of the upper flange 800, and the top of the outer side wall 102 is connected to the second connection groove 802 of the upper flange 800, so that the connection is more tight and the structure is more stable. For example, the upper flange 800 can be welded to the inner side wall 101 and the outer side wall 102, and V-shaped welding grooves can be respectively formed between the top of the inner side wall 101 and the side wall of the first connection groove 801 and between the top of the outer side wall 102 and the side wall of the second connection groove 802, so as to ensure more reliable welding, etc.

[0062] In some embodiments, as Figure 1 shown, the lower flange 900 can be welded to the inner side wall 101 and the outer side wall 102, and V-shaped welding grooves can be respectively formed at the joints of the lower flange 900 with the inner side wall 101 and the outer side wall 102. Thus, the operation is more convenient, etc.

[0063] In some embodiments, a first longitudinal partition wall 202 extending downward from the first annular partition plate 107 to the second annular partition plate 108 is disposed in the lower cavity. The first longitudinal partition wall 202 is cylindrical and located between the inner sidewall 101 and the outer sidewall 102. The space among the first longitudinal partition wall 202, the outer sidewall 102, the first annular partition plate 107, and the second annular partition plate 108 forms an outer cavity of the magnet. With Figure 1 reference, the first longitudinal partition wall 202 extends in the vertical direction. Thus, the structure is simple, convenient for processing and manufacturing, and the cost is reduced, etc.

[0064] In some embodiments, as Figure 11 shown, a plurality of second annular guide plates 302 are sequentially and spaced apart from bottom to top in the cavity formed among the first longitudinal partition wall 202, the inner sidewall 101, the first annular partition plate 107, and the second annular partition plate 108. One side of each of the plurality of second annular guide plates 302 close to the central axis of the water-cooling screen body 100 is connected to the inner sidewall 101, and second longitudinal partition walls 203 are respectively formed between two adjacent second annular guide plates 302 in the vertical direction and between the lowermost second annular guide plate 302 and the second annular partition plate 108. Each second longitudinal partition wall 203 is spaced apart from the first longitudinal partition wall 202 in the radial direction of the water-cooling screen body 100, so that the space among the first longitudinal partition wall 202, the plurality of second longitudinal partition walls 203, the uppermost second annular guide plate 302, and the second annular partition plate 108 forms a sealed cavity 201 of the magnet device 200, and the space in the cavity formed among the first longitudinal partition wall 202, the inner sidewall 101, the first annular partition plate 107, and the second annular partition plate 108 excluding the sealed cavity 201 forms an inner cavity of the magnet. Thus, the structure is simple, convenient for processing and manufacturing, the cost is reduced, and each second longitudinal partition wall 203 is spaced apart from the first longitudinal partition wall 202 in the radial direction of the water-cooling screen body 100, which is convenient for the cooling water in the inner ring water path 300 of the magnet to be better transported from bottom to top, etc.

[0065] In some embodiments, a plurality of second annular flow guiding plates 302 divide the inner cavity of the magnet into multiple layers of second flow guiding channels 303 arranged vertically. Two adjacent second flow guiding channels 303 above and below communicate with each other to form an inner ring water path 300 of the magnet. The second pipeline 301 separates each layer of the second flow guiding channels 303. Two adjacent second flow guiding channels 303 above and below, the bottom inner ring water path 700 and the second flow guiding channel 303 at the bottom layer are respectively communicated through a fourth port 304. Two adjacent fourth ports 304 are respectively located on both sides of the second pipeline 301. The second flow guiding channel 303 at the top layer is communicated with the top of the adjacent lower third pipeline 401 through a fifth port 305, wherein the fourth port 304 and the fifth port 305 of the second flow guiding channel 303 at the top layer and the adjacent lower second flow guiding channel 303 are respectively located on both sides of the second pipeline 301. The number of the second flow guiding channels 303 and the second annular flow guiding plates 302 is determined according to specific conditions such as the size of the water-cooled screen, so as to Figures 4 to 7 For reference, six second flow guiding channels 303 are arranged vertically and communicated in sequence. Each second flow guiding channel 303 is annular, and the inner ring water path 300 of the magnet is equivalent to a zigzag structure as a whole.

[0066] That is to say, the cooling water in the bottom inner ring water path 700 enters the second flow guiding channel 303 at the bottom layer through the fourth port 304, surrounds the second flow guiding channel 303 at the bottom layer and then enters the second flow guiding channel 303 at the upper layer. The cooling water is sequentially transported upward layer by layer. After the cooling water surrounds the second flow guiding channel 303 at the top layer for one circle, it enters the top of the third pipeline 401 through the fifth port 305, and then enters the bottom outer ring water path 600 through the third pipeline 401. Thereby, not only can it ensure that the cooling water better surrounds each second flow guiding channel 303 and the cooling effect is better, but also it can ensure that the cooling water in the inner ring water path 300 of the magnet is transported layer by layer from bottom to top, avoiding the air bubbles in the water path from being unable to be discharged. The cooling water can flow unobstructedly, with a large flow rate and uniform cooling, ensuring the longitudinal temperature gradient of the ingot and improving the crystal growth rate.

[0067] In some embodiments, such as Figure 12As shown in the figure, a plurality of third annular flow guiding plates 402 are sequentially arranged at intervals from bottom to top in the outer magnetic cavity. One side of the plurality of third annular flow guiding plates 402 close to the central axis of the water cooling screen body 100 is connected to the first longitudinal partition wall 202, and the other side of the plurality of third annular flow guiding plates 402 far from the central axis of the water cooling screen body 100 is connected to the outer side wall 102. The plurality of third annular flow guiding plates 402 divide the outer magnetic cavity into multiple layers of third flow guiding channels 403 arranged vertically. The third pipelines 401 separate each of the third flow guiding channels 403. Two adjacent third flow guiding channels 403 vertically, the bottom outer ring water path 600 and the bottom layer of the third flow guiding channel 403 are respectively communicated through the sixth through holes 404. Two adjacent sixth through holes 404 vertically are respectively located on both sides of the third pipeline 401. The top layer of the third flow guiding channel 403 is communicated with the first flow guiding channel 503 at the bottom layer of the upper layer water path 500 through the first through hole 504. The number of the third flow guiding channels 403 and the third annular flow guiding plates 402 is determined according to specific conditions such as the size of the water cooling screen, so as to Figures 4 to 7 For reference, five third flow guiding channels 403 are arranged vertically and communicated in sequence. Each of the third flow guiding channels 403 is annular. The outer magnetic ring water path 400 is generally equivalent to a zigzag structure.

[0068] That is to say, the cooling water in the bottom outer ring water path 600 enters the bottom layer of the third flow guiding channel 403 through the sixth through hole 404, surrounds the bottom layer of the third flow guiding channel 403 and then enters the upper layer of the third flow guiding channel 403. The cooling water is sequentially conveyed upward layer by layer. After the cooling water surrounds the top layer of the third flow guiding channel 403 for one circle, it enters the bottom of the upper layer water path 500 through the sixth through hole 404. Thereby, not only can it ensure that the cooling water better surrounds each of the third flow guiding channels 403 and the cooling effect is better, but also it can ensure that the cooling water in the outer magnetic ring water path 400 is conveyed layer by layer from bottom to top, avoiding the air bubbles in the water path from being unable to be discharged. The cooling water can flow unimpeded, with a large flow rate and uniform cooling, ensuring the longitudinal temperature gradient of the crystal bar and improving the crystal growth rate.

[0069] In some embodiments, the first through hole 504 is a through hole formed on the first annular flow guiding plate 502 and / or the first annular partition plate 107. The second through hole 505 and the third through hole 506 are through holes formed on the first annular flow guiding plate 502. The fourth through hole 304 is a through hole formed on the second annular flow guiding plate 302 and / or the second annular partition plate 108. The fifth through hole 305 is a through hole formed on the first longitudinal partition wall 202. The sixth through hole 404 is a through hole formed on the third annular flow guiding plate 402. Thereby, the structure is simpler, the processing and manufacturing are more convenient, and the cost is reduced, etc.

[0070] In some embodiments, such as Figures 1 to 7As shown, the water inlet 103 and the water outlet 104 are arranged on the inner side wall 101. The water inlet 103 is connected with a water inlet pipe 105, and the water outlet 104 is connected with a water outlet pipe 106. Among them, the water inlet pipe 105 and the water outlet pipe 106 are usually distributed on both sides of the inner side wall 101, and the tops of the water inlet pipe 105 and the water outlet pipe 106 can respectively extend above the water-cooled screen body 100. Thus, the occupied space is small, and it is also convenient to connect with the cooling water supply device, etc.

[0071] According to an embodiment of the present application, a single crystal furnace is further provided, including the above-mentioned water-cooled screen. Among them, the single crystal furnace further includes a furnace body, a heater, a crucible and other conventional components, which will not be elaborated here.

[0072] Thus, the single crystal furnace of the present application adopts the above-mentioned water-cooled screen, which can not only prevent the magnet from contacting with the cooling water, avoid the magnet being corroded by the cooling water, better provide a magnetic field for crystal pulling, improve the service life, etc., but also improve the cooling effect of the magnet in the water-cooled screen, ensure the normal working temperature of the magnet, avoid the magnet being demagnetized at high temperature, etc. The cooling water first enters the inner ring water path 300 of the magnet, and it is also convenient to better take away the latent heat of crystallization of the crystal rod, accelerate the crystal growth rate, improve the equipment production capacity, reduce the energy consumption and production cost, can better meet the production requirements of N-type silicon wafers, and can also avoid the bubbles in the water path from not being discharged. The cooling water can flow unobstructed, with a large flow rate, uniform cooling, good cooling effect, and ensure the longitudinal temperature gradient of the crystal rod.

[0073] The cooling water first passes through the water inlet pipe 105 in sequence to enter the water inlet 103. The water inlet 103 is communicated with the first pipeline 501. The first pipeline 501 is communicated with the second pipeline 301. The lower end of the second pipeline 501 is communicated with the bottom inner ring waterway 700 of the lower flange 900. After the cooling water enters the water inlet 103, it enters the bottom inner ring waterway 700 through the first pipeline 501 and the second pipeline 301. After the cooling water circulates around the bottom inner ring waterway 700, it enters the second diversion channel 303 at the bottom layer of the inner ring waterway 300 of the magnet through the fourth through port 304, and then flows from bottom to top along the multi-layer second diversion channel 303 to the second diversion channel 303 at the top layer. The second diversion channel 303 at the top layer is communicated with the third pipeline 401 through the fifth through port 305. The cooling water finally enters the third pipeline 401 from the second diversion channel 303 at the top layer through the fifth through port 305. The lower end of the third pipeline 401 is communicated with the bottom outer ring waterway 600 of the lower flange 900. Then the cooling water enters the bottom outer ring waterway 600 from the lower end of the third pipeline 401. After the cooling water circulates around the bottom outer ring waterway 600, it flows from bottom to top through the sixth through port 404 to the third diversion channel 403 at the top layer. The third diversion channel 403 at the top layer is communicated with the first diversion channel 503 at the bottom layer of the upper waterway through the first through port 504. The cooling water finally enters the first diversion channel 503 at the bottom layer of the upper waterway from the third diversion channel 403 at the top layer through the first through port 504, and then flows from bottom to top along the multi-layer first diversion channel 503 of the upper waterway 500 to the first diversion channel 503 at the top layer. After the cooling water enters the first part 508 of the first diversion channel 503 at the top layer from the first through port 504, it flows along the first part 508 and flows out from the water outlet 104; after the cooling water enters the second part 509 of the first diversion channel 503 at the top layer from the second through port 505, the cooling water flows to the third partition plate 507 along the second part 509. Under the blocking action of the third partition plate 507, the cooling water enters the first diversion channel 503 in the adjacent lower part through the third through port 506, and enters the first part 508 of the first diversion channel 503 at the top layer through the first through port 504, then flows along the first part 508 and flows out from the water outlet 104. After entering the water outlet 104, it is discharged through the water outlet pipe 106 to form a cooling water cycle.

[0074] Based on the above embodiments of the present application, in the case of no clear negation or conflict, the technical features of one embodiment can be beneficially combined with one or more other embodiments.

[0075] The above are only some embodiments of the present application, which are only used to illustrate the technical solutions of the present application and are not intended to limit it. It should be understood that those of ordinary skill in the art can make improvements or substitutions based on the above description without departing from the creative concept of the present application, and all such improvements and substitutions should fall within the protection scope of the appended claims of the present application. In this case, all details can be replaced by equivalent elements, and the materials, shapes, and dimensions can also be arbitrary.

Claims

1. A water-cooled screen for a single crystal furnace, characterized in that Comprising: A water-cooled screen body, the water-cooled screen body being formed as a cylinder with both ends penetrating, including an inner sidewall and an outer sidewall, an accommodation cavity being formed between the inner sidewall and the outer sidewall, the top of the outer sidewall being hermetically connected to the top of the inner sidewall through an upper flange, the bottom of the inner sidewall being hermetically connected to the bottom of the outer sidewall through a lower flange, a water inlet and a water outlet being provided at the upper end of the inner sidewall, and the accommodation cavity being divided into an upper cavity and a lower cavity; A magnet device, the magnet device being arranged in the lower cavity and including an annular sealed cavity for accommodating a magnet, a magnet inner cavity located inside the sealed cavity close to the central axis of the water-cooled screen body, and a magnet outer cavity located outside the sealed cavity away from the central axis of the water-cooled screen body; Wherein, the lower flange includes a bottom inner ring waterway close to the central axis of the water-cooled screen body and a bottom outer ring waterway arranged outside the bottom inner ring waterway and isolated from the bottom inner ring waterway; Wherein, an upper layer waterway is formed in the upper cavity and a first pipeline extending longitudinally and isolated from the upper layer waterway is provided, a magnet inner ring waterway is provided in the magnet inner cavity and a second pipeline extending longitudinally and isolated from the magnet inner ring waterway is provided, the upper end of the first pipeline is communicated with the water inlet, the lower end of the first pipeline is communicated with the upper end of the second pipeline, the lower end of the second pipeline is communicated with the bottom inner ring waterway of the lower flange, and the bottom inner ring waterway is also communicated with the lower end of the magnet inner ring waterway; Wherein, a magnet outer ring waterway is provided in the magnet outer cavity and a third pipeline extending longitudinally and isolated from the magnet outer ring waterway is provided, the upper end of the third pipeline is communicated with the upper end of the magnet inner ring waterway, the lower end of the third pipeline is communicated with the bottom outer ring waterway of the lower flange, and the bottom outer ring waterway is also communicated with the lower end of the magnet outer ring waterway; Wherein, the upper end of the magnet outer ring waterway is communicated with the lower end of the upper layer waterway in the upper cavity; Wherein, the upper end of the upper layer waterway is communicated with the water outlet.

2. The water-cooled screen according to claim 1, characterized in that, A first annular partition plate and a second annular partition plate are formed between the inner sidewall and the outer sidewall of the water-cooled screen body, the second annular partition plate connects the bottom of the inner sidewall and the bottom of the outer sidewall, and the first annular partition plate is located between the second annular partition plate and the upper flange, so that the space between the upper flange, the first annular partition plate, the inner sidewall and the outer sidewall forms the upper cavity, and the space between the first annular partition plate, the second annular partition plate, the inner sidewall and the outer sidewall forms the lower cavity.

3. The water-cooled screen according to claim 2, wherein A plurality of first annular flow guiding plates are sequentially arranged at intervals from bottom to top in the upper cavity, one side of the plurality of first annular flow guiding plates close to the central axis of the water-cooled screen body is connected to the inner sidewall, and one side of the plurality of first annular flow guiding plates away from the central axis of the water-cooled screen body is connected to the outer sidewall. A plurality of the first annular flow guiding plates divide the upper cavity into multiple first flow guiding channels arranged vertically, and two adjacent first flow guiding channels above and below communicate with each other to form the upper water path. The first pipeline separates each layer of the first flow guiding channels. Two adjacent first flow guiding channels above and below, and the upper end of the first flow guiding channel at the bottom are all communicated with the upper end of the outer ring water path of the magnet through a first through port, and two adjacent first through ports are respectively located on both sides of the first pipeline.

4. The water-cooled screen according to claim 3, characterized in that, The water inlet and the water outlet are symmetrically arranged on both sides of the water cooling screen body. A third partition plate is arranged in the first flow guiding channel at the top layer to divide the first flow guiding channel at the top layer into a first part and a second part that are isolated from each other. The first part is communicated with the water outlet and is communicated with the adjacent first flow guiding channel below through the first through port. One end of the second part close to the first pipeline is communicated with the adjacent first flow guiding channel below through a second through port, and one end of the second part close to the third partition plate is communicated with the adjacent first flow guiding channel below through a third through port.

5. The water-cooled screen according to claim 4, characterized in that, The lower flange is arranged below the second annular dividing plate and internally has a first annular groove and a second annular groove that are isolated from each other. The second annular groove is arranged around the outside of the first annular groove. The first annular groove and the second annular dividing plate cooperate to form the bottom inner ring water path, and the second annular groove and the second annular dividing plate cooperate to form the bottom outer ring water path.

6. The water-cooled screen according to claim 5, characterized in that, A first partition plate is arranged in the first annular groove. The first partition plate divides the bottom inner ring water path along the radial direction of the first annular groove. The communication port of the second pipeline with the bottom inner ring water path is close to one side of the first partition plate, and the communication port of the bottom inner ring water path with the inner ring water path of the magnet is close to the other side of the first partition plate. A second partition plate is arranged in the second annular groove. The second partition plate divides the bottom outer ring water path along the radial direction of the second annular groove. The communication port of the third pipeline with the bottom outer ring water path is close to one side of the second partition plate, and the communication port of the bottom outer ring water path with the outer ring water path of the magnet is close to the other side of the second partition plate.

7. The water-cooled screen according to claim 6, wherein A first longitudinal dividing wall extending downward from the first annular dividing plate to the second annular dividing plate is arranged in the lower cavity. The first longitudinal dividing wall is cylindrical and is located between the inner side wall and the outer side wall. The space between the first longitudinal dividing wall, the outer side wall, the first annular dividing plate and the second annular dividing plate forms the outer cavity of the magnet.

8. The water-cooled screen according to claim 7, characterized in that, A plurality of second annular flow guiding plates are sequentially arranged at intervals from bottom to top in the cavity formed among the first longitudinal partition wall, the inner side wall, the first annular partition plate and the second annular partition plate. One side of each of the plurality of second annular flow guiding plates close to the central axis of the water-cooling screen body is connected to the inner side wall, and second longitudinal partition walls are respectively formed between two adjacent second annular flow guiding plates in the vertical direction and between the bottommost second annular flow guiding plate and the second annular partition plate. Each of the second longitudinal partition walls is spaced apart from the first longitudinal partition wall in the radial direction of the water-cooling screen body, so that a space among the first longitudinal partition wall, the plurality of second longitudinal partition walls, the topmost second annular flow guiding plate and the second annular partition plate forms the sealing cavity of the magnet device, and a space in the cavity formed among the first longitudinal partition wall, the inner side wall, the first annular partition plate and the second annular partition plate except for the sealing cavity forms the inner cavity of the magnet.

9. The water-cooled screen according to claim 8, characterized in that, The plurality of second annular flow guiding plates divide the inner cavity of the magnet into multiple second flow guiding channels arranged vertically. Two adjacent second flow guiding channels in the vertical direction communicate with each other to form the inner ring water path of the magnet. The second pipeline respectively partitions each layer of the second flow guiding channels. Two adjacent second flow guiding channels in the vertical direction and the bottommost second flow guiding channel communicate with the bottom inner ring water path through fourth through ports respectively. Two adjacent fourth through ports are respectively located on both sides of the second pipeline. The topmost second flow guiding channel communicates with the top of the third pipeline through a fifth through port, wherein the fourth through port through which the topmost second flow guiding channel communicates with the second flow guiding channel adjacent below and the fifth through port are respectively located on both sides of the second pipeline.

10. The water-cooled screen according to claim 9, characterized in that, A plurality of third annular flow guiding plates are sequentially arranged at intervals from bottom to top in the outer cavity of the magnet. One side of each of the plurality of third annular flow guiding plates close to the central axis of the water-cooling screen body is connected to the first longitudinal partition wall, and one side of each of the plurality of third annular flow guiding plates far from the central axis of the water-cooling screen body is connected to the outer side wall. The plurality of third annular flow guiding plates divide the outer cavity of the magnet into multiple third flow guiding channels arranged vertically. Two adjacent third flow guiding channels in the vertical direction communicate with each other to form the outer ring water path of the magnet. The third pipeline respectively partitions each layer of the third flow guiding channels. Two adjacent third flow guiding channels in the vertical direction and the bottommost third flow guiding channel communicate with the bottom outer ring water path through sixth through ports respectively. Two adjacent sixth through ports are respectively located on both sides of the third pipeline. The topmost third flow guiding channel communicates with the bottommost first flow guiding channel of the upper water path through the first through port.

11. The water-cooled screen according to claim 10, wherein, The first through port is a through hole formed in the first annular flow guiding plate and / or the first annular partition plate. The second through port and the third through port are through holes formed in the first annular flow guiding plate. The fourth through port is a through hole formed in the second annular flow guiding plate and / or the second annular partition plate. The fifth through port is a through hole formed in the first longitudinal partition wall; The sixth through port is a through hole formed in the third annular flow guide plate.

12. A single crystal furnace, characterized in that, It includes the water-cooled screen according to any one of claims 1 to 11 above.

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