Detection jig
Calculating the light intensity or distance through the light sensor and signal processor, the contact detection risk in robotic arm position detection is solved, and high-precision and damage-free position confirmation is achieved.
Patent Information
- Application Number
- CN202422523277.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-17
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-10-17
AI Technical Summary
In the prior art, the fingers of the robotic arm are in direct contact with the fixture for position detection, resulting in the risk of deformation and breaking of the fingers of the robotic arm, and the judgment of the naked eye is prone to errors.
The light sensor and signal processor are used to calculate the light intensity or distance by transmitting and receiving optical signals, confirm whether the actual position of the robot arm meets the target position, and avoid direct contact detection.
High-precision, damage-free position detection is achieved, avoiding the risk of finger deformation and breaking of the robotic arm, and eliminating errors in judgment of the naked eye.
Smart Images
Figure CN223179491U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, and more particularly to a detection jig. Background Art
[0002] In most automated devices, especially semiconductor devices, the coordinate calibration operation of the robot arm is involved. The quality of coordinate calibration will directly affect whether the product will suffer mechanical damage during the production process.
[0003] In the related art, the jigs for position detection of the robot arm are mostly contact type, that is, the fingers of the robot arm are in direct contact with the jig. The specific method is to control the movement of the robot arm. When the fingers of the robot arm reach the defined position of the jig and abut against the defined position of the jig, the movement of the robot arm is stopped at this time, and the fitting degree between the fingers of the robot arm and the jig is visually inspected to determine whether the coordinate position is correct.
[0004] However, since the fingers of the robot arm are mostly made of brittle materials (such as ceramic materials), when the fingers of the robot arm reach the defined position and contact the jig, it is inevitable that there will be a certain collision and wear between the fingers of the robot arm and the defined position, and there is a risk of deformation and breakage of the fingers of the robot arm.
[0005] In view of the existence of the above technical problems, the utility model provides a new detection jig. Summary of the Utility Model
[0006] A series of simplified concepts are introduced in the summary of the utility model, which will be further described in detail in the specific implementation section. The summary of the utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.
[0007] In view of the existing problems, the utility model provides a detection jig for detecting the position of a robot arm. The detection jig includes:
[0008] A base;
[0009] An optical sensor disposed on the base for emitting and receiving an optical signal;
[0010] A signal processor communicatively connected to the optical sensor for calculating the light intensity or distance based on the optical signal received by the optical sensor and confirming whether the actual position of the robot arm conforms to the target position according to the light intensity or distance.
[0011] In some embodiments of the present application, the base includes a first base and a second base, and the first base and the second base are spaced apart to define an empty area for the robotic arm to move between the first base and the second base.
[0012] In some embodiments of the present application, the optical sensor includes a transmitter and a receiver. The transmitter is disposed on the first base, the receiver is disposed on the second base, and the transmitter and the receiver are disposed opposite to each other.
[0013] Wherein, the transmitter is used to emit the optical signal, the receiver is used to receive the optical signal, and the signal processor is used to calculate the light intensity according to the received optical signal.
[0014] In some embodiments of the present application, the optical sensor includes a transmitter and a receiver, and the transmitter and the receiver are disposed on the same side of the base.
[0015] Wherein, the transmitter is used to emit the optical signal, the receiver is used to receive the optical signal, and the signal processor is used to calculate the distance according to the received optical signal.
[0016] In some embodiments of the present application, a display is further included. The display is electrically connected to the signal processor and is used to display whether the actual position of the robotic arm conforms to the target position.
[0017] In some embodiments of the present application, an indicator is further included, which is used to indicate whether the actual position of the robotic arm conforms to the target position.
[0018] In some embodiments of the present application, the indicator indicates that the actual position of the robotic arm does not conform to the target position in a first state, and indicates that the actual position of the robotic arm conforms to the target position in a second state.
[0019] In some embodiments of the present application, a chute is further included. The chute is disposed on the base, and the optical sensor is slidably disposed on the chute so that the height of the optical sensor is adjustable.
[0020] In some embodiments of the present application, a height measuring instrument is further included. The height measuring instrument is disposed on the base and is used to measure the height of the optical sensor.
[0021] In some embodiments of the present application, the actual position of the robotic arm includes the height of the robotic arm in the Z-axis direction, and the target position includes a target height.
[0022] The detection fixture of the present utility model can calculate the light intensity or distance based on the light signal received by the optical sensor, and then confirm whether the actual position of the robotic arm conforms to the target position according to the light intensity or distance. It has the advantages of reliability, simple operation, high precision, no damage to the robotic arm and the fixture, etc. It can not only effectively avoid the risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate the errors existing in visual judgment. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] The following drawings of the present utility model are used as a part of the present utility model to understand the present utility model. The embodiments of the present utility model and their descriptions are shown in the drawings to explain the principles of the present utility model.
[0024] In the drawings:
[0025] Figure 1 Shows a schematic structural diagram of the detection fixture of a specific embodiment of the present utility model;
[0026] Figure 2 Shows a front view of the detection fixture of a specific embodiment of the present utility model;
[0027] Figure 3 Shows a top view of the detection fixture of a specific embodiment of the present utility model;
[0028] Figure 4 Shows a left view of the detection fixture of a specific embodiment of the present utility model;
[0029] Figure 5 Shows a circuit diagram of the detection fixture of a specific embodiment of the present utility model;
[0030] Figure 6 Shows a schematic structural diagram of the detection fixture of another specific embodiment of the present utility model.
[0031] In the drawings:
[0032] 111 First base;
[0033] 112 Second base;
[0034] 113 Connecting member;
[0035] 114 Empty area;
[0036] 120 Optical sensor;
[0037] 121 Transmitter;
[0038] 122 Receiver;
[0039] 130 Signal processor;
[0040] 140 Monitor
[0041] 150 External power supply port
[0042] 211 Base
[0043] 221 Transmitter
[0044] 222 Receiver
[0045] 230 Signal processor
[0046] 240 Monitor Detailed implementation mode
[0047] In the following description, a large number of specific details are given to provide a more thorough understanding of the present utility model. However, it is obvious to those skilled in the art that the present utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present utility model, some technical features well known in the art are not described.
[0048] It should be understood that the present utility model can be implemented in different forms and should not be construed as limited to the embodiments presented herein. On the contrary, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of the present utility model to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals throughout the drawings denote the same elements.
[0049] It should be understood that when an element or layer is referred to as "on...", "adjacent to...", "connected to" or "coupled to" another element or layer, it can be directly on, adjacent to, connected or coupled to the other element or layer, or there may be intervening elements or layers. In contrast, when an element is referred to as "directly on...", "directly adjacent to...", "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present utility model, the first element, component, region, layer or part discussed below may be represented as the second element, component, region, layer or part.
[0050] Spatial relationship terms such as "under", "below", "lower", "beneath", "above", "upper", etc. may be used herein for convenience of description to describe the relationship of one element or feature shown in the figure with other elements or features. It should be understood that, in addition to the orientations shown in the figure, the spatial relationship terms are also intended to include different orientations of the device in use and operation. For example, if the device in the attached figure is flipped, then an element or feature described as "under other elements" or "beneath them" or "under it" will be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "beneath" can include both the upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatial descriptors used herein are to be interpreted accordingly.
[0051] The purpose of the terms used herein is only to describe specific embodiments and not to limit the present utility model. When used herein, the singular forms of "a", "an" and "the" are also intended to include the plural forms unless the context clearly dictates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, identify the presence of the stated features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups. When used herein, the term "and / or" includes any and all combinations of the related listed items.
[0052] In the related art, the fixtures for position detection of the robotic arm are mostly contact type, that is, the fingers of the robotic arm are in direct contact with the fixture. The specific approach is to control the movement of the robotic arm. When the fingers of the robotic arm reach the defined position of the fixture and abut against the defined position of the fixture, the movement of the robotic hand is stopped at this time, and the coordinate position is judged by visually checking the degree of fit between the fingers of the robotic arm and the fixture.
[0053] However, since the fingers of the robotic arm are mostly made of brittle materials (such as ceramic materials), during the process when the fingers of the robotic arm reach the defined position and contact the fixture, it is inevitable that there will be a certain collision and wear between the fingers of the robotic arm and the defined position. There are risks such as deformation and breakage of the fingers of the robotic arm, and the visual judgment relies too much on the experience of the operator, and there is a possibility of misjudgment.
[0054] To solve at least one of the above technical problems, the present application provides a detection fixture for detecting the position of a robotic arm. The detection fixture includes: a base; an optical sensor disposed on the base for emitting and receiving an optical signal; and a signal processor communicatively connected to the optical sensor for calculating the light intensity or distance based on the optical signal received by the optical sensor and confirming whether the actual position of the robotic arm conforms to the target position according to the light intensity or distance.
[0055] According to the detection fixture of the present application, the light intensity or distance can be calculated based on the optical signal received by the optical sensor, and then it can be confirmed whether the actual position of the robotic arm conforms to the target position according to the light intensity or distance. It has the advantages of reliability, simple operation, high precision, no damage to the robotic arm and the fixture, etc. It can not only effectively avoid the risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate the mistakes in visual judgment.
[0056] To thoroughly understand the present application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed by the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may have other implementation manners.
[0057] The following refers to Figures 1 to 5 Describe a detection fixture according to an embodiment of the present application. The detection fixture is used for detecting the position of a robotic arm. The detection fixture includes: a base; an optical sensor 120 disposed on the base for emitting and receiving an optical signal; and a signal processor 130 communicatively connected to the optical sensor 120 for calculating the light intensity based on the optical signal received by the optical sensor 120 and confirming whether the actual position of the robotic arm conforms to the target position according to the light intensity.
[0058] Specifically, the optical sensor 120 can emit an optical signal and receive the emitted optical signal. During the movement of the robotic arm of the semiconductor device, the signal processor 130 can perform computational processing on the optical signal received by the optical sensor 120 in real time to obtain the corresponding light intensity. When the light intensity calculated by the signal processor 130 does not fall within the set light intensity range, it indicates that the robotic arm does not block the optical signal emitted by the optical sensor 120, and the optical sensor 120 receives an optical signal with normal intensity. At this time, the actual position of the robotic arm does not match the target position. When the light intensity calculated by the signal processor 130 suddenly drops to within the set light intensity range, it indicates that the robotic arm has moved to block the optical signal emitted by the optical sensor 120, and the optical sensor 120 receives a weakened optical signal. At this time, the actual position of the robotic arm matches the target position. It should be noted that when the detection fixture detects that the actual position of the robotic arm does not match the target position, the coordinate position of the robotic arm can be adjusted manually or automatically until the detection fixture detects that the actual position of the robotic arm matches the target position.
[0059] Based on this, the present application provides a detection fixture capable of performing position detection on a robotic arm. According to the detection fixture of the present application, it is possible to confirm whether the actual position of the robotic arm matches the target position based on the light intensity of the optical signal received by the optical sensor 120. It has the advantages of reliability, simple operation, high precision, and no damage to the robotic arm and the fixture. It can not only effectively avoid risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate errors in visual judgment.
[0060] In addition, when performing position detection on the robotic arm by the optical sensor 120 in this embodiment, it can be position detection in any direction. Taking the position detection of the robotic arm in the Z-axis direction as an example, the robotic arm can move up and down within the empty area 114. When the robotic arm moves up and down to block the optical signal emitted by the optical sensor 120, the light intensity of the optical signal received by the optical sensor 120 suddenly drops. At this time, the height of the robotic arm in the Z-axis direction matches the target height, thereby realizing the position detection of the robotic arm in the Z-axis direction. Of course, the present application does not exclude the possibility of performing other direction detections on the robotic arm, and other direction detections should also be within the protection scope of the present application. For the convenience of description, the following will take the position detection of the robotic arm in the Z-axis direction as an example for elaboration.
[0061] In some embodiments, as Figure 1 shown, the base includes a first base 111 and a second base 112, and the first base 111 and the second base 112 are spaced apart to define an empty area 114 for the robotic arm to move between the first base 111 and the second base 112.
[0062] Among them, the spacing distance between the first base 111 and the second base 112 can be set according to the actual situation, and it is necessary to ensure that the void area 114 formed between the first base 111 and the second base 112 can accommodate the robotic arm of the semiconductor device, so that the robotic arm of the semiconductor device can move freely within the void area 114.
[0063] In addition, the first base 111 and the second base 112 can be constructed into any suitable shape, such as a prism shape (such as a square prism), a cylindrical shape, a frustum shape, etc., and no limitation is imposed thereon.
[0064] In some embodiments, as Figure 1 shown, it further includes: a connecting member 113, the first end of the connecting member 113 is connected to the first base 111, and the second end of the connecting member 113 is connected to the second base 112. By connecting the first base 111 and the second base 112 at both ends of the connecting member 113, a C-shaped structure as Figure 2 shown can be constructed. The C-shaped structure can improve the stability of the first base 111 and the second base 112, and the space surrounded by the C-shaped structure is the void area 114 for the robotic arm to move.
[0065] In some embodiments, as Figure 2 shown, the optical sensor 120 includes a transmitter 121 and a receiver 122. The transmitter 121 is disposed on the first base 111, the receiver 122 is disposed on the second base 112, and the transmitter 121 and the receiver 122 are disposed opposite to each other; wherein, the transmitter 121 is used to emit an optical signal, the receiver 122 is used to receive the optical signal, and the signal processor 130 is used to calculate the light intensity according to the received optical signal.
[0066] Specifically, the transmitter 121 can convert an electrical signal into an optical signal. It receives an electrical signal from a data source (such as devices like a computer, a router, etc.), and converts the electrical signal into an optical signal with a specific wavelength through an internal light-emitting element (usually a laser diode or a light-emitting diode). The receiver 122 can convert an optical signal into an electrical signal. It receives the optical signal from the signal transmitter and converts the optical signal into an electrical signal through a photosensitive element (such as a photodiode).
[0067] When detecting the position of the robotic arm, an optical signal is emitted by the transmitter 121 into the empty area 114, and the receiver 122 receives the optical signal emitted by the transmitter 121. During the movement of the robotic arm of the semiconductor device within the empty area 114, the signal processor 130 can perform computational processing on the optical signal received by the receiver 122 in real time to obtain the corresponding light intensity. When the light intensity calculated by the signal processor 130 does not fall within the set light intensity range, it indicates that the robotic arm does not block the optical signal emitted by the transmitter 121, and the receiver 122 receives an optical signal of normal intensity. At this time, the actual position of the robotic arm does not match the target position; when the light intensity calculated by the signal processor 130 drops suddenly, it indicates that the robotic arm has moved to block the optical signal emitted by the transmitter 121, and the receiver 122 receives a weakened optical signal. At this time, the actual position of the robotic arm matches the target position. Thus, the position of the robotic arm is detected by the transmitter 121 and the receiver 122, which has the advantages of reliability, simple operation, high precision, no damage to the robotic arm and the jig, etc. It can not only effectively avoid the risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate the errors in visual judgment.
[0068] Among them, the transmitter 121 and the receiver 122 can be implemented as an optical fiber signal transmitter and an optical fiber signal receiver. Of course, it can be understood that in addition to being implemented as an optical fiber signal transmitter and an optical fiber signal receiver for light intensity detection, it can also be implemented as any other suitable type of optical sensor 120 for light intensity detection, and this is not limited.
[0069] In some embodiments, a sliding groove is further included. The sliding groove is provided on the base, and the optical sensor 120 is slidably arranged in the sliding groove so that the height of the optical sensor 120 is adjustable.
[0070] Among them, the sliding groove can include a first sliding groove and a second sliding groove. The first sliding groove is provided on the first base 111, and the transmitter 121 is slidably arranged in the first sliding groove so that the height of the transmitter 121 is adjustable; the second sliding groove is provided on the second base 112, and the receiver 122 is slidably arranged in the second sliding groove so that the height of the receiver 122 is adjustable.
[0071] In this embodiment, the height of the optical sensor 120 is adjusted by setting the sliding groove, so that the position of the robotic arm with different target heights to be detected can be detected. For example, by adjusting the optical sensor 120 to the first target height through the sliding groove, the position of the robotic arm that needs to be detected at the first target height can be detected, and by adjusting the optical sensor 120 to the second target height through the sliding groove, the position of the robotic arm that needs to be detected at the second target height can be detected, thereby improving the usage range of the detection jig and making the application scenario more flexible.
[0072] Of course, this application does not exclude other ways to adjust the height of the optical sensor 120, and other height adjustment methods should also be within the protection scope of this application.
[0073] In some embodiments, it further includes a height gauge, which is arranged on the base and used to measure the height of the optical sensor 120.
[0074] Specifically, the height gauge may include a first height gauge and a second height gauge. The first height gauge is arranged on the first base 111 and used to measure the height of the transmitter 121; the second height gauge is arranged on the second base 112 and used to measure the height of the receiver 122. By setting the height gauge, it can be ensured that when the height of the optical sensor 120 is adjusted, the height of the adjusted optical sensor 120 meets the detection requirements.
[0075] Among them, the height gauge can adopt any suitable measuring instrument such as a micrometer or a ten-thousandth micrometer, and no limitation is imposed thereon.
[0076] In some embodiments, as Figure 3 shown, the signal processor 130 can be arranged on the connecting member 113. Among them, the signal processor 130 can be a digital signal processor 130 (DSP), a field programmable gate array (FPGA), an application specific integrated circuit (ASIC), etc., and no limitation is imposed thereon.
[0077] In some embodiments, as Figure 3 shown, it further includes a display 140, and the display 140 is electrically connected to the signal processor 130. The display 140 is used to display whether the actual position of the robotic arm conforms to the target position.
[0078] Among them, the display 140 and the signal processor 130 can be integrated together and jointly arranged on the connecting member 113. Through the display 140, it can be displayed in real time whether the actual position of the robotic arm conforms to the target position. For example, when the actual position of the robotic arm conforms to the target position, "Yes" is displayed, and when the actual position of the robotic arm does not conform to the target position, "No" is displayed. Of course, other texts, images, etc. can also be displayed, and no limitation is imposed thereon.
[0079] In some embodiments, it further includes an indicator, which is used to indicate whether the actual position of the robotic arm conforms to the target position.
[0080] Specifically, the indicator can indicate that the actual position of the robotic arm does not match the target position in the first state, and indicate that the actual position of the robotic arm matches the target position in the second state.
[0081] Among them, the indicator can include an indicator light, an indicator panel, etc., and there is no limitation on this. The first state and the second state can include light and dark states, display and non-display states, different color states, different display content states, etc., and there is no limitation on this either.
[0082] Exemplarily, taking the indicator as an indicator light as an example, when the actual position of the robotic arm matches the target position, the indicator light is on, and when the actual position of the robotic arm does not match the target position, the indicator light is off.
[0083] In this application, the signal processor 130 can only calculate the light intensity of the optical signal received by the optical sensor 120, and the calculated light intensity is displayed through the display 140, so that the user can judge whether the actual position of the robotic arm matches the target position after observing the light intensity displayed on the display 140 with the naked eye, and / or, after the signal processor 130 calculates the light intensity of the optical signal received by the optical sensor 120, it can further judge whether the light intensity of the optical signal received by the optical sensor 120 meets the set light intensity range, and send an instruction to display in the first state to the indicator when it does not meet the set light intensity range, and send an instruction to display in the second state to the indicator when it meets the set light intensity range, so that the user can directly confirm whether the actual position of the robotic arm matches the target position through the state of the indicator.
[0084] In some embodiments, the detection fixture is powered by an internal power supply and / or an external power supply port 150 is provided on the detection fixture.
[0085] Exemplarily, as Figure 4 shown, an external power supply port 150 is provided on the detection fixture, and the detection fixture is powered by connecting to an external power supply through the external power supply port 150. Of course, it is also possible to supply power by an internal power supply in the detection fixture, and there is no limitation on this.
[0086] In some embodiments, the robotic arm of this application is the robotic arm of a semiconductor device. The semiconductor device can include a wafer handling device or any other suitable semiconductor device. Correspondingly, the robotic arm can be the robotic arm of a wafer handling device or the robotic arm of any other suitable semiconductor device.
[0087] The following describes an exemplary operation process for detecting the position of the robotic arm using the detection fixture of this application:
[0088] After the robotic arm of the semiconductor device is horizontally centered at the LP (Load port) position, the detection fixture is placed on it;
[0089] Perform position detection on three parts of the robotic arm (two fingers and the intersection point between the two fingers). The specific detection method is as follows: Use the hand controller to control the movement of the robotic arm in the Z-axis direction and observe the reading value of the optical sensor 120 displayed on the display 140.
[0090] If the reading values of the optical sensor 120 all show a sharp drop during the position detection of the three parts of the robotic arm, it indicates that the height of the robotic arm in the Z-axis direction meets the target height and the detection operation is completed.
[0091] If the reading value of the optical sensor 120 at any location does not meet the set light intensity range during the position detection of the three parts of the robotic arm, it is necessary to verify whether the horizontal detection of the robotic arm is correct. After the horizontal detection is correct, perform position detection on the three parts of the robotic arm again until the detection operation is completed.
[0092] As Figure 5 shown, the present application also provides a circuit design structure of a detection jig. The circuit design structure includes a power supply, a load (i.e., the robotic arm of the semiconductor device), an optical sensor 120, an indicator, a display 140, etc. The circuit design structure adopts an NPN type (or PNP type) output structure. The brown, black, and blue in the figure are used to distinguish different ports. When there is no object blocking between the emitter 121 and the receiver 122, the receiver 122 receives all the light intensity, and the reading of the display 140 does not meet the set light intensity range, indicating that the actual position of the robotic arm does not meet the target position. When there is an object blocking between the emitter 121 and the receiver 122, the reading of the display 140 will decrease. When it decreases to meet the set light intensity range, the indicator will light up indicating that the actual position of the robotic arm meets the target position and the detection operation is completed.
[0093] Next, refer to Figure 6 Describe a detection jig according to another embodiment of the present application. The detection jig is used for position detection of the robotic arm. The detection jig includes: a base 211; an optical sensor disposed on the base 211 for emitting and receiving optical signals; a signal processor 230 communicatively connected to the optical sensor for calculating a distance based on the optical signal received by the optical sensor and confirming whether the actual position of the robotic arm meets the target position according to the distance.
[0094] Specifically, the optical sensor can emit an optical signal and receive the emitted optical signal. The signal processor 230 can calculate the distance between the optical sensor and the object to be measured based on the received optical signal. During the movement of the robotic arm of the semiconductor device, the signal processor 230 can calculate and process the optical signal received by the optical sensor in real time to obtain the corresponding distance. When the distance calculated by the signal processor 230 does not fall within the set distance range, it indicates that the robotic arm does not reflect the optical signal emitted by the optical sensor, and at this time, the actual position of the robotic arm does not conform to the target position. When the calculated distance by the signal processor 230 suddenly drops to within the set distance range, it indicates that the robotic arm has moved to reflect the optical signal emitted by the optical sensor, and at this time, the actual position of the robotic arm conforms to the target position. It should be noted that when the detection fixture detects that the actual position of the robotic arm does not conform to the target position, the coordinate position of the robotic arm can be adjusted manually or automatically until the detection fixture detects that the actual position of the robotic arm conforms to the target position.
[0095] Based on this, the present application provides a detection fixture capable of detecting the position of a robotic arm. According to the detection fixture of the present application, the distance can be calculated based on the optical signal received by the optical sensor, and it can be confirmed whether the actual position of the robotic arm conforms to the target position according to the distance. It has the advantages of reliability, simple operation, high precision, no damage to the robotic arm and the fixture, etc. It can not only effectively avoid the risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate the mistakes caused by visual judgment.
[0096] In some embodiments, as Figure 6 shown, the optical sensor includes a transmitter 221 and a receiver 222. The transmitter 221 and the receiver 222 are arranged on the same side of the base 211. Among them, the transmitter 221 is used to emit an optical signal, the receiver 222 is used to receive the optical signal, and the signal processor 230 is used to calculate the distance based on the received optical signal.
[0097] Specifically, the emitter 221 and the receiver 222 are arranged on the same base 211 and on the same side of the base 211. When detecting the position of the robotic arm, the emitter 221 emits an optical signal, and the receiver 222 receives the optical signal emitted by the emitter 221. During the movement of the robotic arm of the semiconductor device, the signal processor 230 can calculate and process the optical signal received by the receiver 222 in real time to calculate the corresponding distance. When the distance calculated by the signal processor 230 does not fall within the set distance range, it indicates that the robotic arm does not block the optical signal emitted by the emitter 221, and at this time the actual position of the robotic arm does not conform to the target position; when the distance calculated by the signal processor 230 drops suddenly, it indicates that the robotic arm moves to block the optical signal emitted by the emitter 221, and at this time the actual position of the robotic arm conforms to the target position. Thus, the position of the robotic arm is detected by the emitter 221 and the receiver 222, which has the advantages of reliability, simple operation, high precision, no damage to the robotic arm and the jig, etc. It can not only effectively avoid the risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate the mistakes in visual judgment.
[0098] Among them, the emitter 221 and the receiver 222 can be implemented as an optical ranging signal emitter and an optical ranging signal receiver. Of course, it can be understood that in addition to being implemented as an optical ranging signal emitter and an optical ranging signal receiver to achieve distance detection, it can also be implemented as other arbitrary suitable types of optical sensors such as laser sensors to achieve distance detection, and this is not limited.
[0099] In some embodiments, when detecting the position of the robotic arm by the optical sensor, it can be position detection in any direction. Exemplarily, the actual position of the robotic arm includes the height of the robotic arm in the Z-axis direction, and the target position includes the target height.
[0100] In some embodiments, as Figure 6 shown, it further includes a display 240. The display 240 is electrically connected to the signal processor 230, and the display 240 is used to display whether the actual position of the robotic arm conforms to the target position.
[0101] In some embodiments, it further includes an indicator for indicating whether the actual position of the robotic arm conforms to the target position.
[0102] In some embodiments, the indicator indicates that the actual position of the robotic arm does not conform to the target position in a first state, and indicates that the actual position of the robotic arm conforms to the target position in a second state.
[0103] In some embodiments, it further includes a chute. The chute is arranged on the base 211, and the optical sensor is slidably arranged in the chute so that the height of the optical sensor is adjustable.
[0104] In some embodiments, a height gauge is further included. The height gauge is disposed on the base 211 and is used to measure the height of the optical sensor.
[0105] In some embodiments, the robotic arm is a robotic arm of a semiconductor device, and the semiconductor device includes a wafer handling device.
[0106] For other introductions of the detection fixture in this embodiment, reference may be made to the relevant descriptions in the foregoing embodiments, and details will not be elaborated here.
[0107] In summary, according to the detection fixture of the embodiments of the present application, by moving the robotic arm in the empty area, it is possible to confirm whether the actual position of the robotic arm conforms to the target position according to the light intensity of the optical signal received by the optical sensor. It has the advantages of reliability, simple operation, high precision, no damage to the robotic arm and the fixture, etc. It can not only effectively avoid the risks such as deformation and breakage of the fingers of the robotic arm during use, but also eliminate the mistakes in visual judgment.
[0108] Although example embodiments have been described herein with reference to the drawings, it should be understood that the above example embodiments are merely exemplary and are not intended to limit the scope of the present application thereto. Those of ordinary skill in the art can make various changes and modifications therein without departing from the scope and spirit of the present application. All such changes and modifications are intended to be included within the scope of the present application as claimed in the appended claims.
[0109] Similarly, it should be understood that, in order to streamline the present application and assist in understanding one or more of the various aspects of the application, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, the methods of the present application should not be construed as reflecting the intention that the claimed present application requires more features than those expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of the application lies in that the corresponding technical problems can be solved with features less than all the features of a single disclosed embodiment. Therefore, the claims following the specific embodiments are hereby expressly incorporated into the specific embodiments, where each claim itself serves as a separate embodiment of the present application.
[0110] In addition, those skilled in the art will be able to understand that, although some embodiments described herein include certain features included in other embodiments rather than other features, the combination of the features of different embodiments means that it is within the scope of the present application and forms different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.
[0111] It should be noted that the above embodiments are illustrative of the present application rather than restrictive of the present application, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The use of the words first, second, and third, etc. does not denote any order. These words can be interpreted as names.
Claims
1. A detection fixture, characterized in that, The detection fixture is used for position detection of the robotic arm. The detection fixture includes: a base; an optical sensor disposed on the base for emitting and receiving an optical signal; a signal processor communicatively connected to the optical sensor for calculating the light intensity or distance based on the optical signal received by the optical sensor and confirming whether the actual position of the robotic arm conforms to the target position according to the light intensity or the distance.
2. The detection jig according to claim 1, wherein, The base includes a first base and a second base, which are spaced apart, and an empty area for the robotic arm to move is defined between the first base and the second base.
3. The detection fixture according to claim 2, wherein, The optical sensor includes a transmitter and a receiver. The transmitter is disposed on the first base, the receiver is disposed on the second base, and the transmitter and the receiver are oppositely disposed; wherein, the transmitter is used for emitting the optical signal, the receiver is used for receiving the optical signal, and the signal processor is used for calculating the light intensity according to the received optical signal.
4. The detection fixture according to claim 1, wherein, The optical sensor includes a transmitter and a receiver. The transmitter and the receiver are disposed on the same side of the base; wherein, the transmitter is used for emitting the optical signal, the receiver is used for receiving the optical signal, and the signal processor is used for calculating the distance according to the received optical signal.
5. The detection jig according to claim 1, wherein, It further includes a display electrically connected to the signal processor for displaying whether the actual position of the robotic arm conforms to the target position.
6. The detection jig according to claim 1, wherein It further includes an indicator for indicating whether the actual position of the robotic arm conforms to the target position.
7. The detection fixture according to claim 6, wherein, The indicator indicates that the actual position of the robotic arm does not conform to the target position in a first state and indicates that the actual position of the robotic arm conforms to the target position in a second state.
8. The detection jig according to claim 1, wherein, It further includes a sliding groove disposed on the base, and the optical sensor is slidably disposed in the sliding groove so that the height of the optical sensor is adjustable.
9. The detection jig according to claim 8, wherein, It further includes a height measuring instrument disposed on the base for measuring the height of the optical sensor.
10. The detection jig according to claim 1, characterized in that, The actual position of the robotic arm includes the height of the robotic arm in the Z-axis direction, and the target position includes a target height.