Mask plate transfer device capable of removing dust

Abstract

The utility model discloses a mask plate transfer device capable of removing dust. The mask plate transfer device comprises a movable base, a storage box and a dust removal piece, the storage box is arranged on the movable base, an inlet end is arranged on one side face of the storage box, a lifting door is arranged at the inlet end, and a supporting limiting piece is arranged in the storage box and used for supporting and limiting a mask plate. The dust removal part is arranged on the storage box and located at the inlet end, and when the mask plate passes through the inlet end, the dust removal part is used for conducting dust removal operation on the mask plate. Therefore, the dust removal piece is arranged at the inlet end, so that the mask plate can be subjected to dust removal operation through the dust removal piece as long as the mask plate passes through the inlet end; therefore, in the process of transferring the mask plate, the risk that the mask plate is stained with dust can be reduced, the cleanliness of the mask plate is ensured, and the yield of products can be further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of touch screen production, in particular to a mask plate transfer device capable of removing dust. Background Art

[0002] In the production process of touch screens, the yellow light process is often used. When performing the yellow light process, a mask plate is required to expose the photoresist in the yellow light process of the touch sensing glass, and then a touch sensing pattern of the touch sensing glass is produced through process flows such as developing and acid etching. The cleanliness of the mask plate is closely related to the integrity and absence of the product pattern. Therefore, the cleanliness of the mask plate must be ensured before it enters the exposure chamber.

[0003] In view of the above, a mask plate transfer device capable of removing dust is proposed, so as to reduce the risk of the mask plate being contaminated with dust during the transfer process of the mask plate, ensure the cleanliness of the mask plate, and thus improve the yield rate of the product. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies in the prior art, and provide a mask plate transfer device capable of removing dust, so as to reduce the risk of the mask plate being contaminated with dust during the transfer process of the mask plate, ensure the cleanliness of the mask plate, and thus improve the yield rate of the product.

[0005] The purpose of the utility model is achieved by the following technical solutions:

[0006] A mask plate transfer device capable of removing dust includes: a movable base, a storage box, and a dust removal member; the storage box is arranged on the movable base, and an inlet end is arranged on one side surface of the storage box. A lifting door is arranged on the inlet end, and a support and limiting member is arranged in the storage box for supporting and limiting the mask plate; the dust removal member is arranged on the storage box and is located at the inlet end. When the mask plate passes through the inlet end, the dust removal member is used to perform a dust removal operation on the mask plate.

[0007] In one embodiment, rollers are arranged at the four corner ends of the movable base.

[0008] In one embodiment, a plurality of limiting protrusions are arranged on the top of the movable base. Each of the limiting protrusions surrounds the storage box, and each of the limiting protrusions is respectively used to limit the storage box.

[0009] In one embodiment, there are four limiting protrusions, and the four limiting protrusions are respectively located at the four corner ends of the movable base.

[0010] In one embodiment, the lifting door includes a lifting door body and a lifting driving member. The lifting door body is movably disposed on the storage box, and the lifting driving member is connected to the lifting door body. The lifting driving member is configured to drive the lifting door body to move up and down to close or open the entrance end of the storage box.

[0011] In one embodiment, a sliding groove is provided on the side wall of the storage box facing the lifting door body, and a sliding block is provided on a side surface of the lifting door body facing the storage box. The sliding block is slidably disposed in the sliding groove.

[0012] In one embodiment, the lifting driving member is a lifting cylinder.

[0013] In one embodiment, the support and limiting member includes four limiting support feet. The four limiting support feet are respectively disposed in the storage box, and the four limiting support feet are respectively configured to perform a limiting operation on the four corner regions of the mask plate.

[0014] In one embodiment, the dust removing member is a dust removing ion wind bar.

[0015] In one embodiment, two dust removing ion wind bars are provided, and the two dust removing ion wind bars are respectively located at the top and bottom of the entrance end to perform dust removing operations on the top surface and the bottom surface of the mask plate.

[0016] Compared with the prior art, the present utility model has at least the following advantages:

[0017] The mask plate transfer device capable of dust removal of the present utility model is provided with a movable base, a storage box and a dust removing member; by placing the mask plate in the storage box for storage, it is possible to prevent external dust from falling onto the mask plate, and at the same time, the transfer of the mask plate in the storage box is realized through the movable base; further, a lifting door is provided at the entrance end of the storage box, so that after the mask plate enters and exits, the storage box can be timely closed by the lifting door, thereby further preventing dust from entering the storage box; in addition, by providing a dust removing member at the entrance end, as long as the mask plate passes through the entrance end, the dust removing member can perform a dust removing operation on the mask plate. In this way, during the transfer of the mask plate, the risk of the mask plate being contaminated with dust can be reduced, the cleanliness of the mask plate can be ensured, and the yield of the product can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required to be used in the embodiments will be briefly introduced below.

[0019] Figure 1 It is a schematic structural diagram of a mask plate transfer device capable of dust removal in an embodiment of the present utility model;

[0020] Figure 2 This is a schematic structural view of another perspective of a mask plate transfer device capable of dust removal in an embodiment of the present invention; Detailed implementation manners

[0021] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings.

[0022] Please refer to Figure 1 and Figure 2 As shown, a mask plate 20 transfer device facilitating dust removal includes a movable base 100, a storage box 200 and a dust removal member 300; the storage box 200 is arranged on the movable base 100, and an inlet end is arranged on one side surface of the storage box 200, a lifting door 210 is arranged on the inlet end, and a support and limit member 220 is arranged in the storage box 200, and the support and limit member 220 is used for supporting and limiting the mask plate 20; the dust removal member 300 is arranged on the storage box 200 and is located at the inlet end, and when the mask plate 20 passes through the inlet end, the dust removal member 300 is used for performing a dust removal operation on the mask plate 20.

[0023] It should be noted that taking the conversion of the mask plate 20 from the cleaning device to the exposure chamber as an example, after the mask plate 20 is cleaned, the lifting door 210 on the storage box 200 is opened so that the mask plate 20 can be smoothly transferred from the entrance end of the storage box 200 into the storage box 200 by the cleaning device manipulator. When the mask plate 20 passes through the entrance end, the dust removal member 300 at the entrance end performs a dust removal operation on the mask plate 20 to ensure the cleanliness of the mask plate 20 when it enters the storage box 200. When the mask plate 20 completely enters onto the support and limit member 220 in the storage box 200, the support and limit member 220 supports and limits the mask plate 20 to prevent the mask plate 20 from shaking and being damaged by impact during the transfer process. After the mask plate 20 enters the storage box 200, the lifting door 210 is closed. In this way, it can be ensured that the storage box 200 remains sealed at all times except when the mask plate 20 enters and exits, so as to prevent dust from entering the storage box 200 and contaminating the storage box 200, and further ensure the cleanliness of the mask plate 20. Then, the movable base 100 drives the storage box 200 to move to the exposure chamber. The lifting door 210 is opened again, and the corresponding device manipulator takes out the mask plate 20 in the storage box 200 from the entrance end. At this time, the mask plate 20 passing through the entrance end can be dusted again by the dust removal member 300 at the entrance end. After the mask plate 20 comes out, the lifting door 210 is closed again, so as to ensure the cleanliness inside the storage box 200. In this way, the risk of the mask plate 20 being contaminated by dust can be reduced during the transfer of the mask plate 20, the cleanliness of the mask plate 20 can be ensured, and the yield of the product can be improved. In this embodiment, a top cover 240 is provided on the top of the storage box 200, and the top of the storage box 200 is covered by the top cover 240 to prevent dust from falling in.

[0024] Preferably, rollers 110 are provided at the four corner ends of the movable base 100. In this way, the storage box 200 can be moved to any position by the movable base 100.

[0025] In one embodiment, a plurality of limit bumps 120 are provided on the top of the movable base 100. The limit bumps 120 are arranged around the storage box 200, and each limit bump 120 is respectively used to limit the storage box 200. In this way, through the limit bumps 120, the risks of the storage box 200 shaking or collapsing during the movement process can be avoided. Preferably, there are four limit bumps 120, and the four limit bumps 120 are respectively located at the four corner ends of the movable base 100.

[0026] In one embodiment, the lifting door 210 includes a lifting door body and a lifting driving member. The lifting door body is movably disposed on the storage box 200, and the lifting driving member is connected to the lifting door body. The lifting driving member is configured to drive the lifting door body to perform a lifting motion to close or open the entrance end of the storage box 200. In this way, when it is necessary to open the lifting door body, the lifting driving member drives the lifting door body to move relative to the storage box 200, so that the inside of the storage box 200 communicates with the outside; and when it is necessary to close the lifting door body, the lifting driving member is used again to make the lifting door body return to the position of the original closed state.

[0027] Further, a sliding groove 230 is provided on the side wall of the storage box 200 facing the lifting door body, and a sliding block is provided on one side of the lifting door body facing the storage box 200. The sliding block is slidably disposed in the sliding groove 230. In this way, through the sliding block and the sliding groove 230, the movement guiding and limiting of the lifting door body are realized, so as to ensure the stability of the movement of the lifting door body. Preferably, the lifting driving member is a lifting cylinder. For example, the lifting cylinder can be installed on the storage box 200.

[0028] In one embodiment, the supporting and limiting member 220 includes four limiting support feet 221. The four limiting support feet 221 are respectively disposed in the storage box 200, and the four limiting support feet 221 are respectively used to perform a limiting operation on the four corner areas of the mask plate 20. In this way, the mask plate 20 is limited by the limiting support feet 221, so as to avoid the shaking of the mask plate 20 during the transfer process, and further avoid the problem of the mask plate 20 being damaged by bumping.

[0029] In one embodiment, preferably, the dust removing member 300 is a dust removing ion wind bar. The mask plate 20 is dusted by the dust removing ion wind bar to ensure the cleanliness of the mask plate 20. Preferably, two dust removing ion wind bars are provided, and the two dust removing ion wind bars are respectively located at the top and bottom of the entrance end to dust the top and bottom surfaces of the mask plate 20; and further ensure the cleanliness of the two side surfaces of the mask plate 20.

[0030] The above-described embodiments merely represent several embodiments of the present invention, and the description thereof is relatively specific and detailed, but should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the utility model patent shall be subject to the appended claims.

Claims

1. A mask plate transfer device capable of dust removal, characterized in that, Including: A movable base; A storage box, which is arranged on the movable base, and an inlet end is arranged on one side of the storage box. A lifting door is arranged on the inlet end, and a support and limiting member is arranged in the storage box, and the support and limiting member is used for supporting and limiting the mask plate; And A dust removal member, which is arranged on the storage box and is located at the inlet end. When the mask plate passes through the inlet end, the dust removal member is used for performing a dust removal operation on the mask plate.

2. The mask plate transfer device capable of dust removal according to claim 1, wherein Rollers are arranged at the four corner ends of the movable base.

3. The mask plate transfer device capable of dust removal according to claim 1, characterized in that, A plurality of limiting bumps are arranged on the top of the movable base, and the limiting bumps are arranged around the storage box, and each of the limiting bumps is respectively used for limiting the storage box.

4. The mask plate transfer device capable of dust removal according to claim 3, wherein There are four limiting bumps, and the four limiting bumps are respectively located at the four corner ends of the movable base.

5. The mask plate transfer device capable of dust removal according to claim 1, wherein The lifting door includes a lifting door body and a lifting driving member. The lifting door body is movably arranged on the storage box, and the lifting driving member is connected to the lifting door body. The lifting driving member is used for driving the lifting door body to perform a lifting motion to close or open the inlet end of the storage box.

6. The mask transfer device capable of dust removal according to claim 5, wherein A sliding groove is arranged on the side wall of the storage box facing the lifting door body, and a sliding block is arranged on the side surface of the lifting door body facing the storage box. The sliding block is slidably arranged in the sliding groove.

7. The mask plate transfer device capable of dust removal according to claim 5, characterized in that, The lifting driving member is a lifting cylinder.

8. The mask transfer device capable of dust removal according to claim 1, wherein The support and limiting member includes four limiting support feet, and the four limiting support feet are respectively arranged in the storage box, and the four limiting support feet are respectively used for performing a limiting operation on the four corner areas of the mask plate.

9. The mask transfer device capable of dust removal according to claim 1, wherein The dust removal member is a dust removal ion air bar.

10. The mask plate transfer device capable of dust removal according to claim 9, characterized in that, There are two dust removal ion air bars, and the two dust removal ion air bars are respectively located at the top and bottom of the inlet end to perform a dust removal operation on the top and bottom surfaces of the mask plate.

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