Evaporation boat and evaporation device with same

Abstract

The utility model provides an evaporation boat and an evaporation device with the evaporation boat, and the evaporation boat comprises a main body structure which is provided with a containing groove; the buffer groove is formed in the groove bottom of the accommodating groove; the liquid guide structure is arranged at the bottom of the buffer groove and is used for being in contact with liquid in the buffer groove; wherein at least part of the liquid guide structure is made of a ceramic material. The evaporation boat effectively solves the problem that in the prior art, the service life of the evaporation boat is short.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation boats, in particular to an evaporation boat and an evaporation device having the same. Background Art

[0002] Currently, composite current collectors are widely used due to their advantages over traditional current collectors, including high safety, high energy density, low cost, long life, and strong compatibility. Composite current collectors are made using a PVD (polyvinyl chloride) vapor deposition method, where a metal wire is continuously fed to the surface of an evaporator to melt and evaporate. The melted and evaporated metal wire vapor is deposited on the surface of a film material above the evaporator, forming the composite current collector.

[0003] During the preparation of metal thin films, the melting of the metal wire will form metal droplets that fall into the evaporating vessel. As the metal droplets continue to drip, there will be a phenomenon in which the metal droplets and impurities splash onto the surface of the film material, which will cause defects on the film surface, thereby affecting the performance and service life of the material. At the same time, because the main materials of the evaporating vessel include boron nitride, titanium diboride, and aluminum nitride, the metal liquid will react with the boron nitride in the evaporating vessel to form aluminum nitride, resulting in the relative exposure of the titanium diboride material. As the metal liquid continues to drip, the exposed titanium diboride will be washed to the edge of the evaporating vessel along with the fluctuating metal liquid and other impurities, causing the evaporating vessel to be gradually etched, thereby shortening the service life of the evaporating vessel.

[0004] However, in the prior art, processes are usually adopted to adjust the temperature of the evaporation vessel surface, or to set impurity drainage grooves in the evaporation vessel to improve the phenomenon of metal droplet splashing, while ignoring the problem of shortening the service life of the evaporation vessel. Utility Model Content

[0005] The main purpose of the utility model is to provide an evaporation boat and an evaporation device having the same, so as to solve the problem of short service life of the evaporation boat in the prior art.

[0006] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, an evaporation boat is provided, comprising: a main structure, the main structure being provided with a receiving groove; a cache groove, arranged on the bottom of the receiving groove; a liquid guide structure, arranged on the bottom of the cache groove, for contacting the liquid located in the cache groove; wherein at least a portion of the liquid guide structure is made of ceramic material.

[0007] Furthermore, the liquid-conducting structure is plate-shaped, and an edge of the liquid-conducting structure is adjacent to or in contact with a groove wall of the cache groove.

[0008] Furthermore, the length L1 of the liquid-conducting structure satisfies the following range: 5 mm ≤ L1 ≤ 10 mm, and the thickness T of the liquid-conducting structure satisfies the following range: 1 mm ≤ T ≤ 1.5 mm.

[0009] Furthermore, the evaporation boat also includes: a blocking structure, which is arranged on the bottom of the accommodating groove, and the blocking structure is arranged around the cache groove; there is a preset distance between the edge of the blocking structure and the groove wall of the accommodating groove.

[0010] Furthermore, the blocking structure includes a first side wall and a second side wall that are arranged opposite to each other, the first side wall is located on the side of the blocking structure away from the cache groove, and the first side wall and the bottom of the accommodating groove are arranged perpendicular to each other; and / or, the second side wall is located on the side of the blocking structure close to the cache groove, and the second side wall is arranged at an angle A to the first side wall, and the angle A satisfies: 30°≤A≤50°.

[0011] Furthermore, the height H of the blocking structure satisfies the following range: 0.5 mm ≤ H ≤ 1 mm.

[0012] Furthermore, the height H of the blocking structure and the depth D1 of the accommodating groove satisfy the following relationship: H≤D1≤H+0.3 mm.

[0013] Furthermore, there are multiple blocking structures, and the multiple blocking structures are arranged at intervals along the extension direction of the main structure.

[0014] Furthermore, the bottom of the cache groove is rectangular, and the length L2 of the groove bottom satisfies the range of 5mm≤L2≤10mm, and the depth D2 of the cache groove satisfies the range of 3mm≤D2≤5mm.

[0015] According to another aspect of the present invention, an evaporation device is provided. The evaporation device includes a conveying structure and an evaporation boat. The conveying structure is used to convey the parts to be evaporated to the top of the evaporation boat. The evaporation boat is the evaporation boat mentioned above.

[0016] By applying the technical solution of the present invention, the main structure of the evaporation boat is provided with a receiving groove. The buffer groove is arranged on the bottom of the receiving groove. The liquid guide structure is arranged on the bottom of the buffer groove to be in contact with the liquid located in the buffer groove. At least part of the liquid guide structure is made of ceramic material. In this way, when the metal wire is sent to the evaporation boat for melting and evaporation, the liquid guide structure is arranged in such a way that, on the one hand, the molten metal liquid first drips onto the liquid guide structure, avoiding direct contact between the metal liquid and the evaporation boat, thereby reducing the degree of corrosion of the evaporation boat; on the other hand, the ceramic material improves its wettability with the metal liquid, so that the metal liquid can be better spread, reducing the boiling degree of the metal liquid and also reducing the degree of splashing of the metal liquid. At the same time, the cache groove is set in such a way that, on the one hand, the molten metal needs to fill the cache groove first and then continue to fill the receiving groove, which slows down the movement speed of the molten metal directly to the two ends of the receiving groove, thereby slowing down the erosion speed of the evaporation boat by the molten metal; on the other hand, when the overall current of the evaporation boat is consistent, the cross-sectional area of the cache groove is smaller than that of the receiving groove, thereby increasing the temperature of the cache groove, which is not only beneficial to the evaporation of the molten metal, but also reduces the temperature difference between the position where the molten metal drips and the two ends of the receiving groove, avoiding the erosion of the evaporation boat by the molten metal due to the temperature difference, thereby extending the service life of the evaporation boat, and thus solving the problem of short service life of the evaporation boat in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting part of this application are provided to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are provided to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0018] Figure 1 Shows a perspective view of an embodiment of an evaporation boat according to the present invention;

[0019] Figure 2 Shown Figure 1 A partial enlarged schematic diagram of the evaporation boat in FIG;

[0020] Figure 3 A schematic structural diagram of an embodiment of an evaporation device according to the present utility model is shown;

[0021] Figure 4 Shown Figure 3 A magnified schematic diagram of point A in FIG.

[0022] The above drawings include the following reference numerals:

[0023] 1. Parts to be evaporated; 2. Conveying structure; 201. Driving structure; 202. Wire feeding tube;

[0024] 10. Main structure;

[0025] 20. Accommodating groove;

[0026] 30. Cache groove; 31. Groove bottom;

[0027] 40. Fluid conduction structure;

[0028] 50. Blocking structure; 51. First side wall; 52. Second side wall. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0030] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0031] In the present invention, unless otherwise specified, directional words such as "up" and "down" are generally used with respect to the directions shown in the drawings, or with respect to the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "left" and "right" are generally used with respect to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above directional words are not used to limit the present invention.

[0032] In order to solve the problem of short service life of an evaporation boat in the prior art, the present application provides an evaporation boat and an evaporation device having the same.

[0033] like Figures 1 to 4 As shown, the evaporation boat includes a main structure 10, a buffer recess 30, and a liquid-conducting structure 40. The main structure 10 defines a receiving recess 20. The buffer recess 30 is disposed on the bottom of the receiving recess 20. The liquid-conducting structure 40 is disposed on the bottom 31 of the buffer recess 30 to contact the liquid within the buffer recess 30. At least a portion of the liquid-conducting structure 40 is made of ceramic material.

[0034] Applying the technical solution of this embodiment, the main structure 10 of the evaporation boat is provided with a receiving groove 20. The buffer groove 30 is arranged on the bottom of the receiving groove 20. The liquid-conducting structure 40 is arranged on the bottom 31 of the buffer groove 30, so as to be in contact with the liquid located in the buffer groove 30. At least part of the liquid-conducting structure 40 is made of ceramic material. In this way, when the metal wire is sent to the evaporation boat for melting and evaporation, the liquid-conducting structure 40 is arranged in such a way that, on the one hand, the molten metal liquid first drips onto the liquid-conducting structure 40, avoiding direct contact between the metal liquid and the evaporation boat, thereby reducing the degree of corrosion of the evaporation boat; on the other hand, the ceramic material improves its wettability with the metal liquid, so that the metal liquid can be better spread, reducing the boiling degree of the metal liquid and also reducing the degree of splashing of the metal liquid. At the same time, the arrangement of the buffer groove 30 requires, on the one hand, that the molten metal first fills the buffer groove 30 before continuing to fill the receiving groove 20, slowing down the movement speed of the molten metal directly to the two ends of the receiving groove 20, thereby slowing down the erosion speed of the evaporation boat by the molten metal; on the other hand, when the overall current of the evaporation boat is consistent, the cross-sectional area of the buffer groove 30 is smaller than that of the receiving groove 20, thereby increasing the temperature of the buffer groove 30, which is not only conducive to the evaporation of the molten metal, but also reduces the temperature difference between the metal liquid dripping position and the two ends of the receiving groove 20, avoiding the erosion of the evaporation boat by the molten metal due to the temperature difference, thereby extending the service life of the evaporation boat, and thus solving the problem of short service life of the evaporation boat in the prior art.

[0035] Specifically, as the molten metal continues to melt and evaporate, the temperature of the evaporation boat gradually increases. As the molten metal repeatedly pushes impurities to the ends of the evaporation boat, high-temperature zones form at both ends of the boat. Due to the cooling effect of the molten metal, the temperature at the location where the molten metal drips is lower than at the ends of the evaporation boat. As the molten metal moves from the lower temperature location to the higher temperature zone, its velocity increases, accelerating erosion of the evaporation boat. Therefore, the increased temperature at the buffer groove 30 reduces the temperature difference between the molten metal dripping location and the higher temperature zone, slowing the molten metal's velocity, and thus slowing the erosion of the evaporation boat by the molten metal, thereby extending the service life of the evaporation boat.

[0036] Optionally, the main structure 10 is a rectangular parallelepiped structure, a cube structure, and a polygonal structure.

[0037] In this embodiment, the main structure 10 is a rectangular parallelepiped structure, one end of the main structure 10 is connected to the positive electrode of the power supply, and the other end of the main structure 10 is connected to the negative electrode of the power supply structure.

[0038] Specifically, the accommodating groove 20 has a length, a width, and a depth that are parallel to the edges of the main structure 10 .

[0039] like Figure 3As shown, the Z direction is the depth direction of the accommodating groove 20 .

[0040] In this embodiment, the ceramic material is a hard high-temperature resistant ceramic material.

[0041] Specifically, the liquid-guiding structure 40 is plate-shaped, with its edges adjacent to or in contact with the walls of the buffer groove 30. This arrangement not only improves the ductility of the molten metal, but also enhances the uniformity of its heating within the buffer groove 30 and its evaporation. Furthermore, it simplifies the formation of the liquid-guiding structure 40, making it easier to manufacture and implement, thus reducing the workload for the operator. Furthermore, this arrangement not only enhances the processing flexibility of the liquid-guiding structure 40, but also enhances the installation flexibility of the operator.

[0042] Specifically, the length L1 of the liquid-guiding structure 40 satisfies the following range: 5 mm ≤ L1 ≤ 10 mm, and the thickness T of the liquid-guiding structure 40 satisfies the following range: 1 mm ≤ T ≤ 1.5 mm. This configuration allows for greater flexibility in selecting the length L1 and thickness T of the liquid-guiding structure 40 to accommodate varying working conditions and usage requirements, thereby enhancing processing flexibility for personnel.

[0043] like Figure 3 As shown, the Z direction is the direction of the thickness T of the liquid-conducting structure 40 .

[0044] Optionally, the ceramic material is made of at least one of aluminum nitride and aluminum oxide. This configuration prevents the liquid-conducting structure 40 from reacting with the molten aluminum, preventing reaction between the molten aluminum and the evaporation boat and extending the service life of the evaporation boat. Furthermore, it improves the wettability between the liquid-conducting structure 40 and the molten aluminum, enhancing the spreading effect of the molten aluminum and reducing the boiling point of the molten aluminum.

[0045] like Figures 1 to 3 As shown, the evaporation boat also includes a blocking structure 50. The blocking structure 50 is arranged on the bottom of the receiving groove 20, and the blocking structure 50 is arranged around the buffer groove 30. There is a preset distance between the edge of the blocking structure 50 and the groove wall of the receiving groove 20. In this way, the above arrangement makes it necessary for the molten metal to pass through the blocking structure 50 when it moves to both ends of the receiving groove 20, further slowing down the movement speed of the molten metal and slowing down the erosion speed of the evaporation boat by the molten metal. At the same time, after the molten metal pushes the impurities to move between the blocking structure 50 and the groove wall of the receiving groove 20, the blocking structure 50 can prevent the molten metal from flowing back, thereby reducing the phenomenon of the molten metal pushing the impurities to fluctuate repeatedly, thereby reducing the probability of the molten metal splashing and reducing the number of defects in the metal film.

[0046] like Figure 3As shown, the blocking structure 50 includes a first sidewall 51 and a second sidewall 52 arranged opposite each other. The first sidewall 51 is located on the side of the blocking structure 50 away from the buffer groove 30, and the first sidewall 51 and the bottom of the receiving groove 20 are arranged perpendicular to each other; and / or the second sidewall 52 is located on the side of the blocking structure 50 close to the buffer groove 30, and the second sidewall 52 and the first sidewall 51 are arranged at an angle A, and the angle A satisfies: 30°≤A≤50°. In this way, the blocking structure 50, on the one hand, blocks the backflow of the molten metal through the first sidewall 51, reducing the phenomenon of the molten metal pushing the impurities to fluctuate repeatedly and reducing the probability of molten metal splashing; on the other hand, the second sidewall 52 reduces the movement speed of the molten metal, slowing the flow of the molten metal, and further reducing the probability of molten metal splashing. At the same time, the setting of the angle A allows the molten metal to move smoothly between the blocking structure 50 and the groove wall of the receiving groove 20, avoiding direct collision between the molten metal and the blocking structure 50, thereby reducing the probability of molten metal splashing.

[0047] like Figure 3 As shown, the range of the height H of the blocking structure 50 satisfies: 0.5mm≤H≤1mm. Thus, the above configuration makes the height H of the blocking structure 50 more flexible to adapt to different working conditions and usage requirements, thereby improving the processing flexibility of the staff.

[0048] like Figure 3 As shown, the Z direction is the direction of the height H of the blocking structure 50 .

[0049] Specifically, the height H of the barrier structure 50 and the depth D1 of the receiving groove 20 satisfy the following relationship: H ≤ D1 ≤ H + 0.3 mm. This configuration ensures that the molten metal can flow within the receiving groove 20 and prevents the molten metal from overflowing the evaporation boat if the height H of the barrier structure 50 exceeds the depth D1 of the receiving groove 20, thereby ensuring reliable evaporation of the molten metal.

[0050] Optionally, there are multiple blocking structures 50, which are spaced apart along the extension direction of the main structure 10. In this way, the above arrangement further slows down the movement speed of the molten metal and further slows down the erosion speed of the evaporation boat by the molten metal.

[0051] Optionally, the bottom 31 of the buffer groove 30 is rectangular, and the length L2 of the bottom is within the range of 5 mm ≤ L2 ≤ 10 mm, and the depth D2 of the buffer groove 30 is within the range of 3 mm ≤ D2 ≤ 5 mm. This configuration allows for more flexible selection of the length L2 and depth D2 to accommodate different working conditions and usage requirements, thereby increasing the processing flexibility of the operator.

[0052] In this embodiment, the length L2 and the length L1 satisfy the relationship: L2 = L1, so that the buffer groove 30 matches the liquid guide structure 40, further improving the evaporation effect and extension effect of the metal liquid.

[0053] Optionally, the shape of the bottom 31 of the buffer groove 30 is one of a rectangle, a circle, a cross, and a polygon. In this way, the above arrangement makes the shape of the bottom 31 of the buffer groove 30 more flexible and diverse to adapt to different working conditions and usage requirements, thereby improving the processing flexibility of the staff.

[0054] According to another aspect of the present invention, an evaporation device is provided. The evaporation device includes a conveying structure 2 and an evaporation boat. The conveying structure 2 is used to convey an object to be evaporated 1 to the top of the evaporation boat. The evaporation boat is the evaporation boat described above. Thus, the evaporation device conveys a metal wire to the top of the evaporation boat via the conveying structure 2 to achieve evaporation of the metal wire.

[0055] Optionally, the member to be evaporated 1 is one of aluminum wire and copper wire.

[0056] In this embodiment, the component to be evaporated 1 is aluminum wire. Figure 3 As shown, the conveying structure 2 includes a driving structure 201 and a wire feeding tube 202, and the evaporation device also includes a detection structure and a control structure. The control structure is connected to the driving structure 201, and the driving structure 201 is drivingly connected to the wire feeding tube 202 to drive the wire feeding tube 202 to move.

[0057] The detection structure detects the position of the metal wire and transmits the detection data to the control structure. When the end of the metal wire close to the cache groove 30 moves to the side of the cache groove 30 away from the wire feeding tube 202, the control structure controls the driving structure 201 to drive the wire feeding tube 202 to move in the direction opposite to the Z direction, so that the end of the metal wire close to the cache groove 30 is set above the cache groove 30; when the end of the metal wire close to the cache groove 30 moves to the side of the cache groove 30 close to the wire feeding tube 202, the control structure controls the driving structure 201 to drive the wire feeding tube 202 to move along the Z direction, so that the end of the metal wire close to the cache groove 30 is set above the cache groove 30, thereby ensuring the evaporation reliability of the metal wire.

[0058] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects:

[0059] The main structure of the evaporation boat is provided with a receiving groove. The buffer groove is provided on the bottom of the receiving groove. The liquid guide structure is provided on the bottom of the buffer groove for contacting the liquid in the buffer groove. At least part of the liquid guide structure is made of ceramic material. In this way, when the metal wire is sent to the evaporation boat for melting and evaporation, the liquid guide structure is provided in such a way that, on the one hand, the molten metal liquid first drips onto the liquid guide structure, thereby avoiding direct contact between the metal liquid and the evaporation boat, thereby reducing the degree of corrosion of the evaporation boat; on the other hand, the ceramic material improves its wettability with the metal liquid, so that the metal liquid can spread better, reducing the boiling degree of the metal liquid and also reducing the degree of splashing of the metal liquid. At the same time, the cache groove is set in such a way that, on the one hand, the molten metal needs to fill the cache groove first and then continue to fill the receiving groove, which slows down the movement speed of the molten metal directly to the two ends of the receiving groove, thereby slowing down the erosion speed of the evaporation boat by the molten metal; on the other hand, when the overall current of the evaporation boat is consistent, the cross-sectional area of the cache groove is smaller than that of the receiving groove, thereby increasing the temperature of the cache groove, which is not only beneficial to the evaporation of the molten metal, but also reduces the temperature difference between the position where the molten metal drips and the two ends of the receiving groove, avoiding the erosion of the evaporation boat by the molten metal due to the temperature difference, thereby extending the service life of the evaporation boat, and thus solving the problem of short service life of the evaporation boat in the prior art.

[0060] Obviously, the embodiments described above are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0061] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, tasks, devices, components and / or combinations thereof.

[0062] It should be noted that the terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0063] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An evaporation boat, characterized in that: include: A main body structure (10), wherein the main body structure (10) is provided with an accommodating groove (20); A buffer groove (30) is provided on the bottom of the accommodating groove (20); a liquid guiding structure (40) disposed on the bottom (31) of the cache groove (30) for contacting the liquid in the cache groove (30); Wherein, at least a portion of the liquid-conducting structure (40) is made of ceramic material.

2. The evaporation boat according to claim 1, characterized in that: The liquid-conducting structure (40) is plate-shaped, and the edge of the liquid-conducting structure (40) is adjacent to or in contact with the groove wall of the cache groove (30).

3. The evaporation boat according to claim 2, characterized in that: The length L1 of the liquid-conducting structure (40) satisfies the following range: 5 mm ≤ L1 ≤ 10 mm, and the thickness T of the liquid-conducting structure (40) satisfies the following range: 1 mm ≤ T ≤ 1.5 mm.

4. The evaporation boat according to claim 1, characterized in that: The evaporation boat also includes: A blocking structure (50) is arranged on the bottom of the accommodating groove (20), and the blocking structure (50) is arranged around the buffer groove (30); There is a preset distance between the edge of the blocking structure (50) and the groove wall of the accommodating groove (20).

5. The evaporation boat according to claim 4, characterized in that: The blocking structure (50) comprises a first side wall (51) and a second side wall (52) arranged opposite to each other. The first side wall (51) is located on a side of the blocking structure (50) away from the cache groove (30), and the first side wall (51) and the bottom of the accommodating groove (20) are arranged perpendicular to each other; and / or, The second side wall (52) is located on a side of the blocking structure (50) close to the cache groove (30), and the second side wall (52) is arranged at an angle A with the first side wall (51), and the angle A satisfies: 30°≤A≤50°.

6. The evaporation boat according to claim 4, characterized in that: The value range of the height H of the blocking structure (50) satisfies: 0.5mm≤H≤1mm.

7. The evaporation boat according to claim 4, characterized in that: The height H of the blocking structure (50) and the depth D1 of the accommodating groove (20) satisfy the following relationship: H≤D1≤H+0.3mm.

8. The evaporation boat according to claim 4, characterized in that: There are a plurality of blocking structures (50), and the plurality of blocking structures (50) are arranged at intervals along the extension direction of the main structure (10).

9. The evaporation boat according to claim 1, characterized in that: The bottom (31) of the cache groove (30) is rectangular, and the length L2 of the bottom satisfies the following range: 5mm≤L2≤10mm. The depth D2 of the cache groove (30) satisfies the following range: 3mm≤D2≤5mm.

10. An evaporation device, characterized in that: The evaporation device comprises a conveying structure (2) and an evaporation boat, wherein the conveying structure (2) is used to convey the part to be evaporated (1) to the top of the evaporation boat, and the evaporation boat is the evaporation boat according to any one of claims 1 to 9.

Images