Workpiece loading frame and vacuum treatment equipment

Abstract

The utility model relates to the technical field of vacuum treatment, and particularly discloses a workpiece loading frame and vacuum treatment equipment, the workpiece loading frame comprises a mounting frame, a rotating frame and a mounting jig; a first rotating shaft is rotationally arranged on the mounting frame, is in transmission connection with the mounting part and is provided with a first shaft end part; the rotating frame is connected to the first rotating shaft; a second rotating shaft is rotationally arranged on the rotating frame and is provided with a second shaft end part; the mounting jig is connected to the second rotating shaft; and in the axis direction of the first rotating shaft, the first shaft end part is arranged on the side far away from the mounting part relative to the second shaft end part. According to the utility model, the length of the workpiece loading frame in the axial direction is reduced, the space occupied by the whole workpiece loading frame in the vacuum processing chamber is reduced, and then under the condition of the chamber with limited specification and volume, the space utilization rate and the processing space are improved, the loading capacity of the vacuum processing equipment is improved, and the production cost is reduced. Therefore, the requirement of the terminal on the loading capacity of single equipment is met.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum processing, in particular to a workpiece loading rack and vacuum processing equipment. Background Art

[0002] Vacuum processing equipment is a type of equipment used to perform various processes in a vacuum environment. Its applications range widely, including but not limited to vacuum coating equipment and vacuum etching equipment. Planetary workpiece loaders are a key component of vacuum processing equipment. They typically utilize a gear transmission principle to cause the workpiece to undergo multiple stages of rotation, including orbital and rotational motion. This achieves technical benefits such as uniform vacuum processing and improves workpiece processing efficiency and quality.

[0003] Planetary workpiece loaders often rotate multi-stage rotating disks loaded with workpieces through the transmission of multiple shafts. However, existing vacuum processing equipment equipped with planetary workpiece loaders sometimes fails to meet end-user requirements in terms of loading capacity. To increase vacuum processing capacity, one approach is to enlarge the vacuum processing chamber, but this approach often increases the material and floor space costs of the vacuum processing equipment. Alternatively, if the vacuum processing chamber size remains constant, the loading capacity can be increased by adding planetary disks, but this approach often increases the manufacturing and maintenance costs of the vacuum processing equipment. Utility Model Content

[0004] The purpose of the present utility model is to provide a workpiece loading rack and vacuum processing equipment to solve the problem in the prior art that under chamber conditions with limited specifications and volume, the loading capacity of the vacuum processing equipment is small and cannot meet the terminal's requirements for the loading capacity of a single device.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] In one aspect, the present invention provides a workpiece loading rack that can be mounted on a mounting portion, the workpiece loading rack comprising:

[0007] A mounting frame, wherein a first rotating shaft is rotatably provided on the mounting frame, the first rotating shaft is transmission-connected to the mounting portion, and the first rotating shaft has a first shaft end;

[0008] a rotating frame connected to the first rotating shaft; a second rotating shaft rotatably provided on the rotating frame, the second rotating shaft having a second shaft end; the first rotating shaft being capable of driving the rotating frame to rotate relative to the mounting frame, so that the second rotating shaft rotates relative to the mounting frame around the first rotating shaft; the second rotating shaft being transmission-connected to the mounting frame, and when the second rotating shaft rotates relative to the mounting frame around the first rotating shaft, the driving end of the mounting frame being capable of driving the second rotating shaft to rotate;

[0009] a mounting fixture connected to the second rotating shaft;

[0010] In the axial direction of the first rotating shaft, relative to the second shaft end, the first shaft end is arranged on a side away from the mounting portion.

[0011] As an optional solution for the above-mentioned workpiece loading frame, the mounting frame is recessed toward the side away from the mounting portion to form a first groove, and the first rotating shaft is rotatably arranged at the bottom of the first groove; the first groove is provided with a first channel, and part of the first rotating shaft can pass through the first channel and then be connected to the rotating frame.

[0012] As an optional solution of the above-mentioned workpiece loading frame, the rotating frame is recessed to form a second groove toward a side away from the mounting frame, and a portion of the first rotating shaft is located in the second groove.

[0013] As an optional solution of the above-mentioned workpiece loading frame, a first bearing seat is provided on the mounting frame, the first rotating shaft is rotatably disposed on the first bearing seat, and a portion of the first bearing seat passes through the first channel and is located in the second groove.

[0014] As an optional solution for the above-mentioned workpiece loading frame, the first rotating shaft has a first supporting portion and a first shaft portion, the first shaft portion is rotatably arranged in the first bearing seat, the first supporting portion can abut against the side end of the first bearing seat, and the other end of the first shaft portion away from the first supporting portion is transmission-connected to the mounting portion.

[0015] As an optional solution to the above-mentioned workpiece loading frame, a second bearing seat is provided on the rotating frame, and the second rotating shaft is rotatably arranged on the second bearing seat; the rotating frame is provided with a second channel, and part of the second rotating shaft can pass through the second channel and then be connected to the mounting fixture.

[0016] As an optional solution for the above-mentioned workpiece loading frame, the second rotating shaft has a second supporting portion and a second shaft portion, the second shaft portion is rotatably arranged in the second bearing seat, the second supporting portion can abut against the side end of the second bearing seat, and the other end of the second shaft portion away from the second supporting portion is transmission-connected to the mounting frame.

[0017] As an optional solution for the above-mentioned workpiece loading frame, the outer periphery of the mounting frame is provided with an inner gear ring and / or an outer gear ring, and the second rotating shaft is provided with a transmission gear, and the side of the transmission gear close to the first rotating shaft is meshed and connected to the inner gear ring and / or the side of the transmission gear away from the first rotating shaft is meshed and connected to the outer gear ring.

[0018] As an optional solution to the above-mentioned workpiece loading frame, the mounting jig includes a jig frame and a jig base plate, one side of the jig frame is connected to the second rotating shaft, and an elastic component is provided on the other side of the jig frame away from the second rotating shaft; the jig frame is provided with a card slot, and the jig base plate is provided with a card protrusion, and the elastic component can elastically abut against the jig base plate so that the card protrusion is engaged in the card slot.

[0019] As an optional solution for the above-mentioned workpiece loading frame, the elastic component includes a guide shell, an elastic member and a push pin, the guide shell is arranged on the jig frame; one end of the push pin is movably arranged in the guide shell, and the other end of the push pin can abut against the jig base plate; the elastic member is arranged in the guide shell, and the two ends of the elastic member abut against the jig frame and the push pin respectively.

[0020] On the other hand, the utility model provides a vacuum processing equipment, including the workpiece loading rack as described above, the vacuum processing equipment also including the mounting portion, a revolution disk and a vacuum processing chamber, the revolution disk is arranged in the vacuum processing chamber, the mounting portion is transmission-connected to the revolution disk, and the mounting rack is transmission-connected to the mounting portion.

[0021] The beneficial effects of the utility model are:

[0022] The workpiece loading frame includes a mounting frame, a rotating frame and a mounting fixture. A first rotating shaft is rotatably provided on the mounting frame, and the first rotating shaft is connected to the mounting portion by transmission. The rotating frame is connected to the first rotating shaft, so that the driving end of the mounting portion can drive the first rotating shaft to drive the rotating frame to rotate. A second rotating shaft is rotatably provided on the rotating frame, and the first rotating shaft can drive the rotating frame to rotate relative to the mounting frame, so that the second rotating shaft rotates relative to the mounting frame around the first rotating shaft, and the second rotating shaft is connected to the mounting frame. When the second rotating shaft rotates relative to the mounting frame around the first rotating shaft, the driving end of the mounting frame can drive the second rotating shaft to rotate. At the same time, the mounting fixture is connected to the second rotating shaft, so that when the first rotating shaft drives the rotating frame to rotate, the second rotating shaft can drive the mounting fixture to rotate, so as to adjust the spatial position of the workpiece on the mounting fixture. Among them, the first rotating shaft has a first shaft end, and the second rotating shaft has a second shaft end. In the axial direction of the first rotating shaft, relative to the second shaft end, the first shaft end is arranged on a side away from the mounting portion, so that the second shaft end is located above the first shaft end on the workpiece loading frame as a whole, so that the mounting fixture and the second rotating shaft can be arranged close to one side of the mounting portion, and at the same time, the first rotating shaft is arranged close to the side below the mounting fixture, so that the overall structure of the first rotating shaft, mounting frame, second rotating shaft, rotating frame and mounting fixture is more compact, so as to reduce the overall length of the workpiece loading frame in the axial direction, reduce the space occupied by the workpiece loading frame as a whole in the vacuum processing chamber, and thus improve the space utilization and processing space under the conditions of chambers with limited specifications and volumes, and increase the loading capacity of the vacuum processing equipment, thereby meeting the terminal's requirements for the loading capacity of a single device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A first cross-sectional view of a workpiece loading rack provided by an embodiment of the present utility model;

[0024] Figure 2 A second cross-sectional view of the workpiece loading rack provided by an embodiment of the present utility model;

[0025] Figure 3 A schematic diagram of the structure of the mounting frame provided by an embodiment of the utility model;

[0026] Figure 4 A partial cross-sectional view of the workpiece loading rack provided by an embodiment of the present utility model at the first rotating shaft;

[0027] Figure 5 A partial cross-sectional view of the workpiece loading rack provided by an embodiment of the present utility model at the second rotating shaft;

[0028] Figure 6 A schematic diagram of the structure of a mounting fixture for a mounting frame provided by an embodiment of the present utility model;

[0029] Figure 7A cross-sectional view of a mounting fixture for a mounting frame provided in an embodiment of the present invention.

[0030] In the picture:

[0031] 1. Mounting housing; 11. First rotating shaft; 111. First shaft end; 112. First support portion; 113. First shaft portion; 114. Second transmission bevel gear; 12. First bearing seat; 121. First bearing bracket; 122. First bearing; 13. First locking nut; 14. First anti-loosening snap ring; 2. Mounting bracket; 21. First groove; 211. First channel; 3. Rotating bracket; 31. Second rotating shaft; 311. Second shaft end; 312. Second support portion; 313. Second Shaft; 32. Second groove; 33. Second bearing seat; 34. Second channel; 35. Transmission gear; 36. Second locking nut; 37. Second anti-loosening snap ring; 4. Mounting fixture; 41. Fixture frame; 411. Card groove; 42. Fixture base; 421. Card protrusion; 43. Elastic component; 431. Guide housing; 432. Elastic member; 433. Ejector pin; 5. Mounting portion; 51. Support housing; 511. Intermediate bevel gear; 52. Rotating shaft; 521. First transmission bevel gear. DETAILED DESCRIPTION

[0032] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0033] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific position, be constructed and operated in a specific position, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0034] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0035] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0036] like Figures 1 to 7 As shown, the present invention provides a workpiece loading rack that can be mounted on a mounting portion 5 and is used to adjust the spatial position of the workpiece in a vacuum processing chamber.

[0037] The workpiece loading frame includes a mounting frame 2, a rotating frame 3, and a mounting fixture 4. A first rotating shaft 11 is rotatably mounted on the mounting frame 2. The first rotating shaft 11 is transmission-connected to the mounting portion 5. The rotating frame 3 is connected to the first rotating shaft 11, so that the driving end of the mounting portion 5 can drive the first rotating shaft 11, thereby driving the rotating frame 3 to rotate. Optionally, a mounting housing 1 is provided over the first rotating shaft 11. The mounting housing 1 and the mounting frame 2 can be detachably connected or integrally formed.

[0038] In one embodiment, the mounting portion 5 includes a support housing 51 and a rotating shaft 52 rotatably disposed within the support housing 51. The two ends of the rotating shaft 52 are respectively connected to the public disk and the first rotating shaft 11, so that the public disk can drive the rotating shaft 52 to rotate, and the rotating shaft 52 can drive the first rotating shaft 11 to rotate. In one embodiment, the mounting housing 1 and the support housing 51 are detachably connected via a pin hole or other structure. In one embodiment, a first transmission bevel gear 521 is provided on the rotating shaft 52, an intermediate bevel gear 511 is provided on the support housing 51, and a second transmission bevel gear 114 is provided on the first rotating shaft 11. The first transmission bevel gear 521, the intermediate bevel gear 511, and the second transmission bevel gear 114 are meshed and connected in sequence, so that while the rotating shaft 52 can drive the first rotating shaft 11 to rotate, the workpiece loading frame can also swing relative to the mounting portion 5.

[0039] A second rotating shaft 31 is rotatably provided on the rotating frame 3. The first rotating shaft 11 can drive the rotating frame 3 to rotate relative to the mounting frame 2, so that the second rotating shaft 31 rotates around the first rotating shaft 11 relative to the mounting frame 2, and the second rotating shaft 31 is transmission-connected to the mounting frame 2. When the second rotating shaft 31 rotates around the first rotating shaft 11 relative to the mounting frame 2, the driving end of the mounting frame 2 can drive the second rotating shaft 31 to rotate. At the same time, the mounting fixture 4 is connected to the second rotating shaft 31, so that when the first rotating shaft 11 drives the rotating frame 3 to rotate, the second rotating shaft 31 can drive the mounting fixture 4 to rotate, so as to adjust the spatial position of the workpiece on the mounting fixture 4. Optionally, multiple second rotating shafts 31 and multiple mounting fixtures 4 are provided, and the multiple second rotating shafts 31 and multiple mounting fixtures 4 are provided in a one-to-one correspondence, and the multiple second rotating shafts 31 and multiple mounting fixtures 4 are circumferentially arranged around the outer periphery of the rotating frame 3. Further optionally, an inner ring gear and / or an outer ring gear is provided on the outer periphery of the mounting frame 2, and a transmission gear 35 is provided on the second rotating shaft 31, and the side of the transmission gear 35 close to the first rotating shaft 11 is meshedly connected to the inner ring gear and / or the side of the transmission gear 35 away from the first rotating shaft 11 is meshedly connected to the outer ring gear, thereby realizing the rotation of the second rotating shaft 31 by driving the transmission gear 35 by the inner ring gear and / or driving the transmission gear 35 by the outer ring gear.

[0040] The first rotating shaft 11 has a first shaft end 111, and the second rotating shaft 31 has a second shaft end 311. In the axial direction of the first rotating shaft 11, relative to the second shaft end 311, the first shaft end 111 is arranged on a side away from the mounting portion 5, so that the second shaft end 311 is located above the first shaft end 111 on the workpiece loading frame as a whole, so that the mounting fixture 4 and the second rotating shaft 31 can be arranged close to one side of the mounting portion 5, and at the same time, the first rotating shaft 11 is arranged close to the side below the mounting fixture 4, so that the overall structure of the first rotating shaft 11, the mounting frame 2, the second rotating shaft 31, the rotating frame 3 and the mounting fixture 4 is more compact, so as to shorten the overall length of the workpiece loading frame in the axial direction, reduce the space occupied by the workpiece loading frame as a whole in the vacuum processing chamber, and thereby improve the space utilization and processing space under the conditions of a chamber with limited specifications and volume, and increase the loading capacity of the vacuum processing equipment, thereby meeting the terminal's requirements for the loading capacity of a single device. It can be understood that the first shaft end 111 is provided at the end of the first rotating shaft 11 away from the mounting portion 5 , and the second shaft end 311 is provided at the end of the second rotating shaft 31 away from the mounting portion 5 .

[0041] like Figure 2 and Figure 3As shown, the mounting frame 2 is recessed toward the side away from the mounting portion 5 to form a first groove 21. The first rotating shaft 11 is rotatably disposed at the bottom of the first groove 21. The first groove 21 defines a first channel 211. A portion of the first rotating shaft 11 can pass through the first channel 211 and then connect to the rotating frame 3. As a result, the mounting housing 1 and a portion of the first rotating shaft 11 are located within the first groove 21, while the remaining portion of the first rotating shaft 11 is located between the mounting frame 2 and the rotating frame 3. This allows the mounting housing 1 and the first rotating shaft 11 to be positioned close together toward the side of the mounting fixture 4, thereby reducing the overall axial length of the workpiece loading frame. Optionally, a weight-reducing hole is provided on the mounting frame 2 to reduce the weight of the mounting frame 2. The groove wall of the first groove 21 is connected to a reinforcing rib to enhance the structural strength of the mounting frame 2.

[0042] At the same time, the rotating frame 3 is recessed to form a second groove 32 on the side away from the mounting frame 2. A portion of the first rotating shaft 11 is located within the second groove 32, so that the second groove 32 protrudes toward the side below the mounting fixture 4. This allows portions of the rotating frame 3 and the first rotating shaft 11 to be closer together toward the side of the lower surface of the mounting fixture 4, thereby reducing the overall axial length of the workpiece loading frame. It is understood that the rotating frame 3 can also be provided without the second groove 32, and the rotating frame 3 can be connected to the axial side of the first rotating shaft 11, as long as the driving end of the mounting portion 5 can drive the first rotating shaft 11 to drive the rotating frame 3 to rotate.

[0043] like Figure 2 and Figure 4 As shown, a first bearing seat 12 is provided on the mounting frame 2, the first rotating shaft 11 is rotatably provided on the first bearing seat 12, and part of the first bearing seat 12 passes through the first channel 211 and is located in the second groove 32. Therefore, by providing the first bearing seat 12, the installation and rotation of the first rotating shaft 11 can be facilitated, and part of the first bearing seat 12 is located in the first groove 21, and the other part of the first bearing seat 12 is located in the second groove 32, so as to rationally utilize the space and make the workpiece loading frame as a whole more compact in the axial direction.

[0044] Specifically, the first rotating shaft 11 has a first supporting portion 112 and a first shaft portion 113 that are integrally formed. The first shaft portion 113 is rotatably arranged in the first bearing seat 12. The first supporting portion 112 can abut against the side end of the first bearing seat 12, and the other end of the first shaft portion 113 away from the first supporting portion 112 is transmission-connected to the mounting portion 5, thereby setting the first rotating shaft 11 as an integrated structure. This can avoid the use of a detachable rotating shaft, facilitate the shortening of the length of the first rotating shaft 11, and thereby reduce the overall length of the workpiece loading frame in the axial direction. At the same time, by setting an integrated first rotating shaft 11 and adding the first supporting portion 112, the force applied to the first rotating shaft 11 can also be enhanced. Optionally, the length of the first bearing seat 12 in the axial direction can be reduced, and a first locking nut 13 is provided on the side of the first shaft portion 113 away from the first support portion 112. The first locking nut 13 and the first support portion 112 can be constrained on both sides of the first bearing seat 12 to prevent the first rotating shaft 11 from moving along the axial direction on the first bearing seat 12. A first anti-loosening snap ring 14 is provided between the first locking nut 13 and the first bearing seat 12. The first anti-loosening snap ring 14 is used to reinforce the first locking nut 13 and prevent the first locking nut 13 from loosening. Further optionally, the first bearing seat 12 includes a first bearing frame 121 and a first bearing 122 provided on the first bearing frame. A plurality of first bearings are provided, and the plurality of first bearings 122 are sleeved on the outside of the first rotating shaft 11 along the axial direction. One of the plurality of first bearings 122 is enlarged and abuts against the first support portion 112, thereby cooperating with the first support portion 112 to enhance the force applied to the first rotating shaft 11.

[0045] like Figure 2 and Figure 5 As shown, a second bearing seat 33 is provided on the rotating frame 3, and the second rotating shaft 31 is rotatably provided on the second bearing seat 33. The rotating frame 3 is provided with a second channel 34, and part of the second rotating shaft 31 can pass through the second channel 34 and be connected to the mounting fixture 4. Therefore, by setting the second bearing seat 33, the installation and rotation of the second rotating shaft 31 can be facilitated, and the second bearing seat 33 and part of the second rotating shaft 31 are located between the mounting frame 2 and the rotating frame 3, and the other part of the second rotating shaft 31 is located between the rotating frame 3 and the mounting fixture 4, so as to rationally utilize the space and make the workpiece loading frame as a whole more compact in the axial direction.

[0046] Specifically, the second rotating shaft 31 has a second support portion 312 and a second shaft portion 313 that are integrally formed. The second shaft portion 313 is rotatably arranged in the second bearing seat 33. The second support portion 312 can abut against the side end of the second bearing seat 33, and the other end of the second shaft portion 313 away from the second support portion 312 is transmission-connected to the mounting frame 2, thereby setting the second rotating shaft 31 as an integrated structure, which can avoid the use of a detachable rotating shaft, facilitate the shortening of the length of the second rotating shaft 31, and thereby reduce the overall length of the workpiece loading frame in the axial direction. At the same time, by setting an integrated second rotating shaft 31 and adding the second support portion 312, the force applied to the second rotating shaft 31 can also be enhanced. Optionally, the length of the second bearing seat 33 in the axial direction can be reduced, and a second locking nut 36 is provided on the side of the second shaft portion 313 away from the second support portion 312. The second locking nut 36 can approach the first support portion 112 and press the transmission gear 35 against the second bearing seat 33 to prevent the second rotating shaft 31 from moving along the axial direction on the second bearing seat 33. A second anti-loosening ring 37 is provided between the second locking nut 36 and the transmission gear 35. The second anti-loosening ring 37 is used to reinforce the second locking nut 36 to prevent the second locking nut 36 from loosening.

[0047] like Figure 6 and Figure 7 As shown, the installation jig 4 includes a jig frame 41 and a jig base plate 42. One side of the jig frame 41 is connected to the second rotating shaft 31. The other side of the jig frame 41 away from the second rotating shaft 31 is provided with an elastic component 43. The jig frame 41 is provided with a card slot 411, and the jig base plate 42 is provided with a card protrusion 421. The elastic component 43 can elastically abut the jig base plate 42 so that the card protrusion 421 is engaged in the card slot 411, so that when the jig base plate 42 is disassembled, the jig base plate 42 can be The jig substrate 42 can be moved toward the side of the jig frame 41 by overcoming the elastic pressure of the elastic component 43, so that the locking protrusion 421 is separated from the locking groove 411, thereby realizing the disassembly of the jig substrate 42 and the jig frame 41, and facilitating the installation of the workpiece after the jig substrate 42 is removed. When the jig substrate 42 is being installed, the jig substrate 42 can be elastically pressed by the elastic component 43, so that the locking protrusion 421 is locked in the locking groove 411, thereby completing the installation of the jig substrate 42 and the jig frame 41.

[0048] Specifically, the elastic component 43 includes a guide shell 431, an elastic member 432 and a push pin 433. The guide shell 431 is arranged on the jig frame 41, one end of the push pin 433 is movably arranged in the guide shell 431, and the other end of the push pin 433 can abut the jig substrate 42. The elastic member 432 is arranged in the guide shell 431, and the two ends of the elastic member 432 abut the jig frame 41 and the push pin 433 respectively, so that under the elastic abutment of the elastic member 432, the push pin 433 can always move toward one side of the jig substrate 42 to press the clamping protrusion 421 of the jig substrate 42 into the clamping groove 411 of the jig frame 41. The elastic component 43 has a simple structure and low cost, and can meet the crimping requirements of the jig substrate 42.

[0049] This embodiment also provides a vacuum processing equipment, including the workpiece loading rack as described above, the vacuum processing equipment also including a mounting portion 5, a revolution disk and a vacuum processing chamber, the revolution disk is arranged in the vacuum processing chamber, the mounting portion 5 is transmission-connected to the revolution disk, and the mounting rack 2 is transmission-connected to the mounting portion 5, so that the mounting portion 5 can drive the workpiece loading rack to rotate around the revolution disk. By using the workpiece loading rack as described above, the vacuum processing equipment can reduce the space occupied by the entire workpiece loading rack in the vacuum processing chamber, thereby improving space utilization and processing space under the conditions of a chamber with limited specifications and volume, and increasing the loading capacity of the vacuum processing equipment, thereby meeting the terminal's requirements for the loading capacity of a single device.

[0050] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A workpiece loading rack, capable of being mounted on a mounting portion (5), characterized in that: The workpiece loading frame comprises: A mounting frame (2), wherein a first rotating shaft (11) is rotatably provided on the mounting frame (2), the first rotating shaft (11) is transmission-connected to the mounting portion (5), and the first rotating shaft (11) has a first shaft end (111); A rotating frame (3), wherein the rotating frame (3) is connected to the first rotating shaft (11); a second rotating shaft (31) is rotatably provided on the rotating frame (3), and the second rotating shaft (31) has a second shaft end (311); the first rotating shaft (11) can drive the rotating frame (3) to rotate relative to the mounting frame (2), so that the second rotating shaft (31) rotates relative to the mounting frame (2) around the first rotating shaft (11); the second rotating shaft (31) is transmission-connected to the mounting frame (2), and when the second rotating shaft (31) rotates relative to the mounting frame (2) around the first rotating shaft (11), the driving end of the mounting frame (2) can drive the second rotating shaft (31) to rotate; An installation jig (4), the installation jig (4) being connected to the second rotating shaft (31); In the axial direction of the first rotating shaft (11), relative to the second shaft end (311), the first shaft end (111) is arranged on a side away from the mounting portion (5).

2. The workpiece loading rack according to claim 1, wherein: The mounting frame (2) is recessed toward a side away from the mounting portion (5) to form a first groove (21), and the first rotating shaft (11) is rotatably arranged at the bottom of the first groove (21); the first groove (21) is provided with a first channel (211), and a portion of the first rotating shaft (11) can pass through the first channel (211) and then be connected to the rotating frame (3).

3. The workpiece loading rack according to claim 2, wherein: The rotating frame (3) is recessed toward a side away from the mounting frame (2) to form a second groove (32), and a portion of the first rotating shaft (11) is located in the second groove (32).

4. The workpiece loading rack according to claim 3, characterized in that: A first bearing seat (12) is provided on the mounting frame (2), the first rotating shaft (11) is rotatably disposed on the first bearing seat (12), and a portion of the first bearing seat (12) passes through the first channel (211) and is located in the second groove (32).

5. The workpiece loading rack according to claim 4, characterized in that: The first rotating shaft (11) has a first supporting portion (112) and a first shaft portion (113), the first shaft portion (113) is rotatably arranged in the first bearing seat (12), the first supporting portion (112) can abut against the side end of the first bearing seat (12), and the other end of the first shaft portion (113) away from the first supporting portion (112) is transmission-connected to the mounting portion (5).

6. The workpiece loading stand according to claim 1, wherein: A second bearing seat (33) is provided on the rotating frame (3), and the second rotating shaft (31) is rotatably provided on the second bearing seat (33); a second channel (34) is opened on the rotating frame (3), and a portion of the second rotating shaft (31) can pass through the second channel (34) and then be connected to the mounting fixture (4).

7. The workpiece loading stand according to claim 6, wherein: The second rotating shaft (31) has a second supporting portion (312) and a second shaft portion (313), the second shaft portion (313) is rotatably arranged in the second bearing seat (33), the second supporting portion (312) can abut against the side end of the second bearing seat (33), and the other end of the second shaft portion (313) away from the second supporting portion (312) is transmission-connected to the mounting frame (2).

8. The workpiece loading stand according to claim 1, wherein: The outer periphery of the mounting frame (2) is provided with an inner gear ring and / or an outer gear ring, and the second rotating shaft (31) is provided with a transmission gear (35), and the side of the transmission gear (35) close to the first rotating shaft (11) is meshedly connected to the inner gear ring and / or the side of the transmission gear (35) away from the first rotating shaft (11) is meshedly connected to the outer gear ring.

9. The workpiece loading stand according to any one of claims 1 to 8, characterized in that: The mounting jig (4) comprises a jig frame (41) and a jig base (42); one side of the jig frame (41) is connected to the second rotating shaft (31); the other side of the jig frame (41) facing away from the second rotating shaft (31) is provided with an elastic component (43); the jig frame (41) is provided with a card slot (411); the jig base (42) is provided with a card protrusion (421); the elastic component (43) can elastically abut against the jig base (42) so that the card protrusion (421) is carded in the card slot (411).

10. The workpiece loading stand according to claim 9, wherein: The elastic component (43) includes a guide housing (431), an elastic member (432) and a push pin (433); the guide housing (431) is arranged on the jig frame (41); one end of the push pin (433) is movably arranged in the guide housing (431), and the other end of the push pin (433) can abut against the jig substrate (42); the elastic member (432) is arranged in the guide housing (431), and the two ends of the elastic member (432) respectively abut against the jig frame (41) and the push pin (433).

11. A vacuum processing device, characterized in that: The vacuum processing device comprises a workpiece loading rack as described in any one of claims 1 to 10, wherein the vacuum processing equipment further comprises the mounting portion (5), a revolution disk and a vacuum processing chamber, wherein the revolution disk is arranged in the vacuum processing chamber, the mounting portion (5) is transmission-connected to the revolution disk, and the mounting rack (2) is transmission-connected to the mounting portion (5).

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