Single crystal furnace with good heat retaining property

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace with good heat preservation property, which comprises a single crystal furnace, a heat preservation mechanism is arranged on the inner wall of the single crystal furnace, and the heat preservation mechanism comprises a top heat preservation part and a bottom heat preservation part, the inner cavity is formed in the inner wall of the top heat preservation part; the bottom of the top heat preservation part is fixedly connected with one end of the spiral pipeline. The heat preservation mechanism is arranged, an electric fan is started to forcibly circulate air to move in the whole structure, heat is rapidly exchanged among air at different positions, the phenomenon that local heat is not uniform is avoided, the air flowing path is prolonged through the design of the spiral pipeline, and the heat preservation effect is improved. According to the spiral pipeline, the air can absorb or dissipate heat more sufficiently in the advancing process of the spiral pipeline, heat exchange between the air and surrounding solid materials is increased, and thermal stress caused by uneven temperature in the single crystal growth process is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace with good heat preservation performance. Background Art

[0002] With the continuous development of the world economy, the demand for efficient energy in modernization construction is growing. Photovoltaic power generation, as a green energy and a major energy source for sustainable development of mankind, is increasingly valued by countries around the world and has been vigorously developed. As a basic material for photovoltaic power generation, single crystal silicon wafers have a wide market demand. At present, silicon wafers are mainly N-type, and N-type silicon rods have strict requirements on oxygen content. Because the oxygen content is affected by power, the higher the power of the single crystal furnace, the higher the oxygen content of the silicon rod. Therefore, research on reducing the power of the single crystal furnace not only saves energy consumption, but also reduces the oxygen content of the silicon rod and improves the quality of the silicon rod, which is of great significance.

[0003] Chinese patent CN217026149U discloses a "highly thermally insulating single crystal furnace thermal field insulation cylinder". By improving the original solid insulation cylinder into a hollow design, the heat transfer method between the insulation barrel and the graphite carbon felt is changed from the original heat conduction to heat radiation transfer, achieving a better insulation effect, thereby reducing the heat required for heating the single crystal furnace, reducing the power consumption of the single crystal furnace, and reducing the furnace start-up cost.

[0004] However, if the cavity is closed, the air inside it cannot flow effectively, which limits the generation of natural convection. Heat is transferred on the cavity wall by conduction, but because air is a poor conductor of heat, heat cannot be evenly distributed through convection in a closed cavity. This will lead to temperature differences at different locations in the cavity, resulting in local overheating or cold spots. In a closed cavity, heat is mainly transferred by radiation, but the efficiency of radiation depends on the material properties and surface temperature of the cavity wall. If the temperature of the cavity wall is uneven or the thermal radiation performance of the wall material is not ideal, the heat distribution will also be uneven. Radiation heat transfer is highly directional and cannot diffuse evenly throughout the cavity like convection. Due to uneven temperature, thermal stress will appear during the growth of single crystals, which will cause cracks or dislocations inside the crystal. The overall quality of the crystal will be significantly affected, and the single crystal finally produced may not achieve the required purity and uniformity, affecting the mechanical properties and electrical properties of the material.

[0005] In view of this, we propose a single crystal furnace with good thermal insulation performance. Utility Model Content

[0006] A technical problem to be solved by the present application is that thermal stress will occur during the growth of a single crystal due to uneven temperature.

[0007] To solve the above technical problems, the present invention provides a single crystal furnace with good thermal insulation performance, including a single crystal furnace, wherein a thermal insulation mechanism is provided on the inner wall of the single crystal furnace, and the thermal insulation mechanism includes:

[0008] Top insulation, the top insulation is fixedly connected to the inner wall of the single crystal furnace;

[0009] An internal cavity is provided on the inner wall of the top insulation;

[0010] A spiral pipe, the top of which is insulated and the bottom of which is fixedly connected to one end of the spiral pipe;

[0011] A bottom connecting ring, to which the other end of the spiral pipe is fixedly connected;

[0012] An input fixing sleeve, the bottom of the bottom connecting ring is fixedly connected with the input fixing sleeve;

[0013] A transverse pipe, an outer wall of the input fixing sleeve is fixedly connected to one end of the transverse pipe;

[0014] An output fixing sleeve, to which the other end of the transverse pipe is fixedly connected;

[0015] A rotating ring is rotatably connected to the inner wall of the bottom connecting ring; and

[0016] blades, with the blades fixedly connected to the inner wall of the rotating ring; and

[0017] An electric fan is provided on the inner wall of the input fixed sleeve;

[0018] A protective mechanism is provided on the top of the bottom connecting ring.

[0019] In some embodiments, the protective mechanism includes an inner telescopic tube, one end of the inner telescopic tube is fixedly connected to the top of the bottom connecting ring, the other end of the telescopic tube is fixedly connected to the insulation block, the bottom of the insulation block is fixedly connected to one end of the outer telescopic tube, the other end of the outer telescopic tube is fixedly connected to the top of the bottom connecting ring, the inner wall of the insulation block is fixedly connected to the fixing plate, the outer wall of the fixing plate is fixedly connected to the connecting spring, and the middle part of the connecting spring is fixedly connected to the blocking cylindrical block.

[0020] In some embodiments, two spiral pipes are provided, and the two spiral pipes are arranged in a circular array.

[0021] In some embodiments, an annular cavity is opened on the inner wall of the single crystal furnace, and the top of the output fixing sleeve is fixed to the bottom connecting ring.

[0022] In some embodiments, a plurality of blades are provided, and the blades are installed in a circular array, with the top of the fan facing the bottom of the spiral pipe.

[0023] In some embodiments, the inner telescopic tube is located on the inner wall of the outer telescopic tube, and a through hole is opened on the inner wall of the thermal insulation block.

[0024] In some embodiments, chamfers are provided on both sides of the blocking cylindrical block, and two fixing plates are provided, and the two fixing plates are fixedly connected to both sides of the connecting spring respectively.

[0025] Through the above technical solution, the present application provides a single crystal furnace with good heat preservation performance. It has at least the following beneficial effects:

[0026] (1) The utility model sets up a heat preservation mechanism and turns on the electric fan to force the circulating air to move throughout the structure. Heat is quickly exchanged between the air at different positions, avoiding the phenomenon of local heat unevenness. The design of the spiral pipe extends the air flow path, so that the air can more fully absorb or dissipate heat during the movement of the spiral pipe, increasing the heat exchange between the air and the surrounding solid materials, and avoiding thermal stress during the single crystal growth process due to uneven temperature.

[0027] (2) The utility model is provided with a heat preservation mechanism, and the internal cavity forms a low thermal conductivity gas barrier, which effectively reduces the heat conduction from the high-temperature inner wall to the outside and improves the heat preservation effect.

[0028] (3) The utility model is provided with a protective mechanism. When the air pressure in the bottom connecting ring is too high, the air will enter the inner telescopic tube, causing the inner telescopic tube to extend, thereby preventing the excessive air pressure from damaging the sealed air circulation components. When the air pressure is further increased, the excessive air pressure will drive the blocking cylindrical block to move upward, causing the air pressure to be discharged through the through hole of the insulation block, thereby further protecting the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application:

[0030] Figure 1 It is a structural diagram of the front view disclosed in the embodiment of the present application;

[0031] Figure 2 This is a schematic structural diagram of a cross-section of a single crystal furnace disclosed in an embodiment of the present application;

[0032] Figure 3 This is a schematic structural diagram of the heat preservation mechanism disclosed in the embodiment of the present application;

[0033] Figure 4 This is a schematic structural diagram of the top insulation section disclosed in the embodiment of this application;

[0034] Figure 5 This is a schematic structural diagram of a cross-section of the bottom connecting ring disclosed in an embodiment of the present application;

[0035] Figure 6 A schematic structural diagram of an electric fan disclosed in an embodiment of the present application;

[0036] Figure 7 This is a schematic structural diagram of the cross-section of the inner telescopic tube and the outer telescopic tube disclosed in the embodiment of the present application.

[0037] Description of reference numerals:

[0038] 1. Single crystal furnace; 2. Insulation mechanism; 21. Top insulation; 22. Internal cavity; 23. Spiral pipe; 24. Bottom connecting ring; 25. Input fixing sleeve; 26. Horizontal pipe; 27. Output fixing sleeve; 28. Rotating ring; 29. Blades; 210. Electric fan; 3. Protection mechanism; 31. Inner telescopic tube; 32. Insulation block; 33. Outer telescopic tube; 34. Fixed plate; 35. Connecting spring; 36. Blocking cylindrical block. DETAILED DESCRIPTION

[0039] The following detailed description of the embodiments of the present application is provided in conjunction with the accompanying drawings and examples. The detailed description of the following examples and the accompanying drawings are intended to illustrate the principles of the present application, but are not intended to limit the scope of the present application. The present application may be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but rather includes all technical solutions within the scope of the claims.

[0040] The present application provides these embodiments to make this application thorough and complete, and to fully express the scope of this application to those skilled in the art. It should be noted that: unless otherwise specifically stated, the relative arrangement of parts and steps, the composition of materials, numerical expressions and numerical values set forth in these embodiments should be interpreted as merely exemplary, and not as limiting.

[0041] It should be noted that, in the description of this application, unless otherwise specified, "plurality" means greater than or equal to two; the terms "upper," "lower," "left," "right," "inner," "outer," and the like, indicating directions or positional relationships, are intended solely to facilitate the description of this application and simplify the description, and do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0042] In addition, the terms "first," "second," and similar terms used in this application do not denote any order, quantity, or importance, but are simply used to distinguish different parts. "Perpendicular" does not mean perpendicular in the strict sense, but rather means within the tolerance range. "Parallel" does not mean parallel in the strict sense, but rather means within the tolerance range. "Include" or "comprising" and similar terms mean that the elements preceding the word include the elements listed after the word, and do not exclude the possibility of other elements being included.

[0043] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections or indirect connections through an intermediary. A person of ordinary skill in the art will understand the specific meanings of the above terms in this application depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intervening device between the specific device and the first or second device.

[0044] All terms used in this application have the same meaning as understood by one of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in, for example, common dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and should not be interpreted in an idealized or highly formal sense, unless explicitly defined as such herein.

[0045] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0046] See also Figure 1-Figure 7 As shown, the present invention provides a technical solution: a single crystal furnace with good heat preservation, comprising a single crystal furnace 1, a heat preservation mechanism 2 is provided on the inner wall of the single crystal furnace 1, and the heat preservation mechanism 2 includes:

[0047] Top insulation 21 is fixedly connected to the inner wall of single crystal furnace 1 and defines an internal cavity 22. Since heat conduction is the process by which heat is transferred from a high-temperature zone to a low-temperature zone within a substance through the collision of molecules, atoms, or electrons, solid materials generally have strong thermal conductivity, especially in high-temperature environments. The thickness of the insulation material significantly affects heat conduction. Adding internal cavity 22 to top insulation 21 effectively introduces a gas layer, typically air. Air has a very low thermal conductivity of approximately 0.024 W / m·K, far lower than that of solid materials. Therefore, the internal cavity 22 effectively reduces heat conduction from the high-temperature inner wall to the outside by forming a low-thermal-conductivity gas barrier, thereby improving the thermal insulation effect. The bottom of the top thermal insulation 21 is fixedly connected to one end of the spiral pipe 23, the other end of the spiral pipe 23 is fixedly connected to the bottom connecting ring 24, the bottom of the bottom connecting ring 24 is fixedly connected to the input fixing sleeve 25, the outer wall of the input fixing sleeve 25 is fixedly connected to one end of the transverse pipe 26, the other end of the transverse pipe 26 is fixedly connected to the output fixing sleeve 27, and the inner wall of the bottom connecting ring 24 is rotatably connected to a rotating ring 28; and Blades 29 are fixedly connected to the inner wall of the rotating ring 28; and electric fan 210 is provided on the inner wall of the input fixed sleeve 25; when the electric fan 210 is turned on, the air is blown upwards into the bottom connecting ring 24 and then into the spiral pipe 23 on one side, then into the internal cavity 22, through the spiral pipe 23 on the other side and then into the bottom connecting ring 24, and then through the output fixed sleeve 27 and the transverse pipe 26 back to the input fixed sleeve 25, forming an air circulation, driving the air to circulate within the insulation structure, avoiding the problem of local heat accumulation caused by the static air layer. Static air can easily lead to temperature differences in different areas due to the lack of flow. However, through forced circulation, the air moves throughout the structure, and heat is quickly exchanged between air at different locations, avoiding the phenomenon of local heat unevenness. The design of the spiral pipe 23 extends the air flow path, allowing the air to more fully absorb or dissipate heat during the process of traveling through the spiral pipe 23, increasing the heat exchange between the air and the surrounding solid materials, and achieving the function of heat reflux and insulation for the entire single crystal furnace 1;

[0048] A protection mechanism 3 is provided on the top of the bottom connecting ring 24 .

[0049] In some embodiments, the protective mechanism 3 includes an inner telescopic tube 31. One end of the inner telescopic tube 31 is fixedly connected to the top of the bottom connecting ring 24. The other end of the inner telescopic tube 31 is fixedly connected to an insulating block 32. One end of an outer telescopic tube 33 is fixedly connected to the bottom of the insulating block 32. The other end of the outer telescopic tube 33 is fixedly connected to the top of the bottom connecting ring 24. A fixing plate 34 is fixedly connected to the inner wall of the insulating block 32. A connecting spring 35 is fixedly connected to the outer wall of the fixing plate 34. A blocking cylindrical block 36 is fixedly connected to the middle of the connecting spring 35. When the air pressure within the bottom connecting ring 24 is excessive, it will enter the inner telescopic tube 31, causing it to extend, thus preventing the excessive air pressure from damaging the sealed air circulation components. When the air pressure further increases, the excessive air pressure will drive the blocking cylindrical block 36 upward, allowing the air pressure to be discharged through the through-holes of the insulating block 32, further protecting the device.

[0050] In some embodiments, two spiral pipes 23 are provided, and the two spiral pipes 23 are arranged in a circular array. An annular cavity is opened on the inner wall of the single crystal furnace 1. The top of the output fixing sleeve 27 is fixed to the bottom connecting ring 24. A plurality of blades 29 are provided, and the blades 29 are installed in a circular array. The top of the electric fan 210 is facing the bottom of the spiral pipe 23.

[0051] In some embodiments, the inner telescopic tube 31 is located on the inner wall of the outer telescopic tube 33, a through hole is opened on the inner wall of the insulation block 32, chamfers are opened on both sides of the blocking cylindrical block 36, and two fixing plates 34 are provided. The two fixing plates 34 are respectively fixedly connected to the two sides of the connecting spring 35.

[0052] When a single crystal furnace with good thermal insulation is used, the internal cavity 22 within the top insulation 21 of the utility model is used. Since heat conduction is the process of transferring heat from a high-temperature zone to a low-temperature zone through the collision of molecules, atoms, or electrons within a substance, the thermal conductivity of solid materials is usually strong, especially in high-temperature environments. The thickness of the insulation material has a significant effect on heat conduction. Adding the internal cavity 22 to the top insulation 21 structure actually introduces a gas layer, usually air. The thermal conductivity of air is very low, about 0.024W / m·K, which is much lower than that of solid materials. Therefore, the internal cavity 22 effectively reduces heat conduction from the high-temperature inner wall to the outside world by forming a low-thermal-conductivity gas barrier, thereby improving the insulation effect.

[0053] Then, the electric fan 210 is turned on to drive the air upward, into the bottom connecting ring 24, then into the spiral pipe 23 on one side, then into the internal cavity 22, through the spiral pipe 23 on the other side, and then into the bottom connecting ring 24 again, and then through the output fixed sleeve 27 and the transverse pipe 26 to return to the input fixed sleeve 25, forming an air circulation, driving the air to circulate within the insulation structure, and avoiding the problem of local heat accumulation caused by the static air layer. Static air can easily cause temperature differences in different areas due to the lack of flow. Through forced circulation, the air moves throughout the structure, and heat is quickly exchanged between air in different positions, avoiding the phenomenon of local heat unevenness. The design of the spiral pipe 23 extends the air flow path, allowing the air to more fully absorb or dissipate heat during the process of traveling in the spiral pipe 23, increasing the heat exchange between the air and the surrounding solid materials, and achieving the effect of heat reflux and insulation for the entire single crystal furnace 1. Thermal stress caused by uneven temperature is avoided during the single crystal growth process.

[0054] Since air expands when heated, when the air pressure in the bottom connecting ring 24 is too high, it will enter the inner telescopic tube 31, causing the inner telescopic tube 31 to extend, thereby preventing excessive air pressure from damaging the sealed air circulation components. When the air pressure further increases, the excessive air pressure will drive the blocking cylindrical block 36 to move upward, allowing the air pressure to be discharged through the through-holes of the insulation block 32, thereby further protecting the device.

[0055] So far, the various embodiments of the present application have been described in detail. To avoid obscuring the concept of the present application, some details well known in the art have not been described. Based on the above description, those skilled in the art can fully understand how to implement the technical solutions disclosed herein.

[0056] Although some specific embodiments of the present application have been described in detail through examples, those skilled in the art will understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present application. Those skilled in the art will understand that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present application. In particular, as long as there are no structural conflicts, the various technical features mentioned in the various embodiments may be combined in any manner.

Claims

1. A single crystal furnace with good heat preservation performance, comprising a single crystal furnace (1), characterized in that: A heat preservation mechanism (2) is provided on the inner wall of the single crystal furnace (1), and the heat preservation mechanism (2) comprises: A top heat preservation device (21), wherein the top heat preservation device (21) is fixedly connected to the inner wall of the single crystal furnace (1); An internal cavity (22), wherein the internal cavity (22) is formed on the inner wall of the top heat-insulating member (21); A spiral pipe (23), one end of which is fixedly connected to the bottom of the top insulation (21); A bottom connecting ring (24), the other end of the spiral pipe (23) is fixedly connected to the bottom connecting ring (24); An input fixing sleeve (25), the bottom of the bottom connecting ring (24) is fixedly connected with the input fixing sleeve (25); a transverse pipe (26), wherein the outer wall of the input fixed sleeve (25) is fixedly connected to one end of the transverse pipe (26); an output fixing sleeve (27), the other end of the transverse pipe (26) being fixedly connected to the output fixing sleeve (27); A rotating ring (28) is rotatably connected to the inner wall of the bottom connecting ring (24); and blades (29), the blades (29) being fixedly connected to the inner wall of the rotating ring (28); and An electric fan (210), wherein the inner wall of the input fixing sleeve (25) is provided with the electric fan (210); A protection mechanism (3) is provided on the top of the bottom connecting ring (24).

2. The single crystal furnace with good heat preservation according to claim 1, characterized in that: The protection mechanism (3) comprises an inner telescopic tube (31), one end of the inner telescopic tube (31) is fixedly connected to the top of the bottom connecting ring (24), the other end of the inner telescopic tube (31) is fixedly connected to a heat insulating block (32), the bottom of the heat insulating block (32) is fixedly connected to one end of an outer telescopic tube (33), the other end of the outer telescopic tube (33) is fixedly connected to the top of the bottom connecting ring (24), the inner wall of the heat insulating block (32) is fixedly connected to a fixing plate (34), the outer wall of the fixing plate (34) is fixedly connected to a connecting spring (35), and the middle part of the connecting spring (35) is fixedly connected to a blocking cylindrical block (36).

3. The single crystal furnace with good heat preservation according to claim 1, characterized in that: Two spiral pipes (23) are provided, and the two spiral pipes (23) are arranged in a circular array.

4. The single crystal furnace with good heat preservation according to claim 1, characterized in that: An annular cavity is provided on the inner wall of the single crystal furnace (1), and the top of the output fixing sleeve (27) is fixed to the bottom connecting ring (24).

5. The single crystal furnace with good heat preservation according to claim 1, characterized in that: A plurality of blades (29) are provided, and the blades (29) are installed in a circular array. The top of the electric fan (210) faces the bottom of the spiral pipe (23).

6. The single crystal furnace with good heat preservation according to claim 2, characterized in that: The inner telescopic tube (31) is located on the inner wall of the outer telescopic tube (33), and a through hole is provided on the inner wall of the heat insulation block (32).

7. The single crystal furnace with good heat preservation according to claim 2, characterized in that: Both sides of the blocking cylindrical block (36) are provided with chamfers. Two fixing plates (34) are provided, and the two fixing plates (34) are fixedly connected to both sides of the connecting spring (35) respectively.

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