Feeding system of single crystal furnace

Abstract

The utility model provides a charging system of a single crystal furnace. Solid materials to be added into the single crystal furnace are contained in a barrel body of the charging system; the quantity control device is arranged at the discharge hole of the barrel body and is used for detecting the discharge flow of the solid material in the barrel body; the control device is arranged on the barrel body, is connected with the quantity control device, and controls the action of the quantity control device according to the detection result of the quantity control device, so that the quantity control device adjusts the opening degree of the discharge hole, and further adjusts the feeding flow of the barrel body to the single crystal furnace. The discharge flow of the solid material in the barrel body is detected through the quantity control device, the detection result is sent to the control device, and the control device can control the action of the quantity control device so as to control the opening degree of the discharge port of the barrel body, so that the feeding precision of the feeding system to the single crystal furnace is accurately controlled, and the growth quality and stability of crystals are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a feeding system for a single crystal furnace. Background Art

[0002] In the production process of single crystal furnaces, precise control of the feed rate is crucial to ensuring the quality and stability of crystal growth. Traditional feed barrels often have difficulty achieving precise control, resulting in unstable feed rates and affecting crystal growth. Therefore, how to implement a single crystal furnace feed barrel that can accurately control the feed rate is a problem that needs to be solved. Utility Model Content

[0003] The purpose of the embodiments of the present utility model is to provide a feeding system for a single crystal furnace, so as to solve the problem that the feeding of the single crystal furnace cannot be accurately controlled.

[0004] The embodiment of the present invention adopts the following technical solution: a feeding system for a single crystal furnace, comprising:

[0005] a barrel body for containing solid materials to be added to the single crystal furnace;

[0006] a flow control device, which is arranged at the discharge port of the barrel and is used to detect the discharge flow rate of the solid material in the barrel;

[0007] A control device is provided on the barrel body, the control device is connected to the quantity control device, and controls the action of the quantity control device according to the detection result of the quantity control device, so that the quantity control device adjusts the opening of the discharge port, and further adjusts the feeding flow of the barrel body to the single crystal furnace.

[0008] In some embodiments, a discharge pipe is provided on the side or bottom of the barrel body, one end of the discharge pipe is connected to the barrel body, and the other end of the discharge pipe is connected to the feeding port of the single crystal furnace, and the quantity control device is provided on the discharge pipe.

[0009] In some embodiments, the amount control device includes:

[0010] a flow sensor connected to the control device, the flow sensor being used to detect the flow of solid material flowing out of the barrel through the discharge port and to send a generated detection signal to the control device, wherein the control device generates a control signal according to the detection signal;

[0011] An electric valve is connected to the control device, and is used to receive a control signal from the control device and adjust its own opening according to the control signal, thereby adjusting the opening of the discharge port.

[0012] In some embodiments, the control device includes a processor, which is connected to the flow sensor and the electric valve respectively, and is used to process the detection signal from the flow sensor and send the generated control signal to the electric valve.

[0013] In some embodiments, the control device further includes a memory for storing preset feeding parameters and historical feeding data.

[0014] In some embodiments, the preset feeding parameters include a preset feeding flow rate and a preset feeding total amount;

[0015] The processor is used to compare the real-time discharge flow of the barrel body detected by the flow sensor with the preset feeding flow, and when the difference between the real-time discharge flow and the preset feeding flow is greater than a preset threshold, the processor generates the control signal.

[0016] In some embodiments, the control device also includes a communication unit, which is connected to the processor, the memory and the external device respectively, and the communication unit can interact with the external device to perform data exchange, so that the external device can remotely monitor and operate the control device through the communication unit.

[0017] In some embodiments, the control device further includes a display screen, which is used to display the discharge flow rate of the barrel and the adjustment status of the quantity control device.

[0018] The beneficial effects of the embodiments of the present utility model are:

[0019] The discharge flow rate of the solid material in the barrel is detected by the quantity control device, and the detection result is sent to the control device. The control device can control the action of the quantity control device, and then control the opening of the discharge port of the barrel, and then accurately control the feeding accuracy of the feeding system to the single crystal furnace to ensure the growth quality and stability of the crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0021] Figure 1 This is a structural diagram of the feeding system of the single crystal furnace of the present utility model.

[0022] Figure numerals: 1. barrel body; 2. quantity control device; 21. electromagnetic valve; 22. flow sensor; 3. control device; 31. processor; 32. memory; 33. communication unit. DETAILED DESCRIPTION

[0023] Various aspects and features of the present application are described herein with reference to the accompanying drawings.

[0024] It should be understood that various modifications may be made to the embodiments of the present application. Therefore, the above description should not be considered as limiting, but merely as an example of an embodiment. Other modifications within the scope and spirit of the present application will occur to those skilled in the art.

[0025] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present application and, together with the general description of the present application given above and the detailed description of the embodiments given below, serve to explain the principles of the present application.

[0026] These and other characteristics of the present application will become apparent from the following description of a preferred form of embodiment given as a non-limiting example with reference to the accompanying drawings.

[0027] It should also be understood that although the present application has been described with reference to certain specific examples, those skilled in the art will readily be able to implement many other equivalent forms of the present application.

[0028] The above and other aspects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.

[0029] Specific embodiments of the present application will be described hereinafter with reference to the accompanying drawings; however, it should be understood that the embodiments described are merely examples of the present application and may be implemented in a variety of ways. Familiar and / or repetitive functions and structures are not described in detail to avoid obscuring the present application with unnecessary or redundant details. Therefore, the specific structural and functional details described herein are not intended to be limiting, but rather serve merely as a basis and representative basis for the claims to teach those skilled in the art to variously utilize the present application with substantially any suitable detailed structure.

[0030] This specification may use the phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments," which may all refer to one or more of the same or different embodiments according to the present application.

[0031] In order to solve the problems in the background technology, the utility model provides a feeding system for a single crystal furnace.

[0032] Combine Figure 1 The feeding system of the single crystal furnace includes a barrel 1, a quantity control device 2 and a control device 3.

[0033] Barrel 1 is used to hold the material to be added to the single crystal furnace, which can be solid. Due to the high temperatures and corrosive atmosphere within the single crystal furnace, barrel 1 can be constructed of heat- and corrosion-resistant materials, such as alloys or ceramics, to ensure stable operation in high-temperature environments. The structural design of barrel 1 should take into account factors such as its connection to the single crystal furnace, sealing performance, and discharge methods. Furthermore, to ensure uniform and stable feeding, barrel 1 can be equipped with a discharge mechanism to facilitate control of the discharge flow rate.

[0034] The quantity control device 2 is disposed at the discharge port of the barrel 1. The discharge port can be located on the side of the barrel 1 near the bottom of the barrel 1, or directly on the bottom surface of the barrel 1. The quantity control device 2 is used to detect the discharge flow rate of the solid material in the barrel 1 and transmit the corresponding detection results to the control device 3 in real time. For example, the quantity control device 2 can generate a detection signal representing the material discharge flow rate and transmit the detection signal to the control device 3.

[0035] The control device 3 is disposed on the barrel 1 and is connected to the quantity control device 2 to receive detection results from the quantity control device 2. The control device 3 can control the operation of the quantity control device 2 based on the detection results from the quantity control device 2, so that the quantity control device 2 adjusts the opening of the discharge port, thereby adjusting the feed rate of the barrel 1 to the single crystal furnace. For example, after the control device 3 receives a first detection signal from the quantity control device 2, it compares it with the preset feed rate stored in the control device 3. If the material discharge rate of the barrel 1 indicated by the first detection signal is greater than the preset feed rate, the control device 3 can send a first control signal to the quantity control device 2. After receiving the first control signal, the quantity control device 2 can reduce the opening of the discharge port of the barrel 1 to reduce the discharge rate of the barrel 1. This real-time comparison enables real-time adjustment of the discharge rate of the discharge port of the barrel 1, thereby achieving precise control of the feed rate of the single crystal furnace.

[0036] In the embodiment of the present application, the discharge flow rate of the solid material in the barrel body 1 is detected by the quantity control device 2, and the detection result is sent to the control device 3. The control device 3 can control the action of the quantity control device 2, and then control the opening of the discharge port of the barrel body 1, and then accurately control the feeding accuracy of the feeding system to the single crystal furnace to ensure the growth quality and stability of the crystal.

[0037] In some embodiments, a discharge pipe is provided on the side or bottom of the barrel 1. One end of the discharge pipe communicates with the interior of the barrel 1, and the other end communicates with the feed port of the single crystal furnace. The metering device 2 is disposed on the discharge pipe. The discharge pipe can also be made of high-temperature and corrosion-resistant materials, such as alloys, to ensure stable operation in high-temperature environments. The discharge pipe is sealed to the discharge port of the barrel 1 and the feed port of the single crystal furnace, and sealing methods such as, but not limited to, sealing rings can be used to ensure the dryness of the solid material in the barrel 1.

[0038] In some embodiments, the quantity control device 2 includes a flow sensor 22 and an electric valve.

[0039] The flow sensor 22 is connected to the control device 3. The flow sensor 22 is used to detect the flow rate of solid material flowing out of the barrel body 1 through the discharge port, generate a corresponding detection signal, and transmit the generated detection signal to the control device 3. The control device 3 generates a control signal based on the detection signal. For example, when the control device 3 receives a second detection signal from the flow sensor 22, if the flow rate of the discharge of the barrel body 1 represented by the second detection signal is less than the preset feeding flow rate stored in the control device 3, the control device 3 can generate a second control signal based on the second detection signal.

[0040] The electric valve is connected to the control device 3. The electric valve is used to receive a control signal from the control device 3 and adjust its own opening according to the control signal, thereby adjusting the opening of the discharge port. Continuing with the above embodiment, the control device 3 can send a second control signal to the electric valve. After receiving the second control signal, the electric valve increases the opening of the electric valve so that the solid material in the barrel 1 can flow out at a faster flow rate. Of course, during the process of adjusting the opening of the electric valve, real-time signal transmission is carried out between the flow sensor 22 and the control device 3, and between the control device 3 and the electric valve, so as to achieve real-time and precise control of the feeding flow of the single crystal furnace and ensure the growth quality and stability of the crystal.

[0041] In some embodiments, the control device 3 includes a processor 31, which is connected to the flow sensor 22 and the electric valve respectively, and is used to process the detection signal from the flow sensor 22 and send the generated control signal to the electric valve. The processor 31 here can be a microprocessor 31, and the microprocessor 31 can communicate with the flow sensor 22 to receive the detection signal from the flow sensor 22. The processor 31 can also process the detection signal, for example, compare it with the preset feeding flow rate, etc. The processor 31 can also communicate with the electric valve to send the generated control signal to the electric valve, thereby controlling the action of the electric valve. Here, the communication method can be wireless communication, Bluetooth communication or wired communication. This is only used as an example and does not constitute a limitation on the scope of protection of the claims.

[0042] In some embodiments, the control device 3 also includes a memory 32, which is used to store preset feeding parameters and historical feeding data. The memory 32 can be a read-only memory 32 or a flash memory, etc. The preset feeding parameters include a preset feeding flow rate and a preset total feeding amount. The preset feeding flow rate can be used to compare with the detection result from the quantity control device 2, so that the processor 31 can generate a control signal based on the comparison result. The preset total feeding amount can be used to stop feeding the single crystal furnace when the total discharge amount in the barrel 1 reaches the preset total feeding amount, so as to achieve precise control of the feeding of the single crystal furnace. The historical feeding data can be used for subsequent viewing by the user and as a basis for adjusting the feeding data of the single crystal furnace, providing strong support for process optimization and quality traceability.

[0043] The processor 31 can be used to compare the real-time discharge flow rate of the barrel 1 detected by the flow sensor 22 with the preset feeding flow rate. When the difference between the real-time discharge flow rate and the preset feeding flow rate exceeds a preset threshold, the processor 31 generates a control signal. The preset threshold can be set according to user needs and is set so as not to affect the growth quality and stability of the crystals in the single crystal furnace.

[0044] In some embodiments, the control device 3 further includes a communication unit 33, which is connected to the processor 31, the memory 32 and the external device respectively. The communication unit 33 can exchange data with the external device so that the external device can remotely monitor and operate the control device 3 through the communication unit 33. The communication unit 33 can support a variety of communication protocols, such as wireless communication, Bluetooth, etc., to facilitate data interaction with external devices. In actual applications, the operator first transmits the preset feeding parameters, such as feeding speed, total feeding amount, etc., to the control device 3 through the communication unit 33 through the external device, and stores them in the memory 32. During the feeding process, the control device 3 accurately controls the opening of the electric valve according to the preset parameters and the data monitored in real time by the flow sensor 22, thereby achieving precise control.

[0045] The control device 3 also includes a display screen, which is used to display the discharge flow of the barrel 1 and the adjustment status of the quantity control device 2, so that the user can observe the real-time data, which facilitates production management.

[0046] During operation, the control device 3 first calculates the initial opening of the electric valve based on preset feeding parameters, such as the feeding rate and the total amount of material fed. Then, during the feeding process, the flow sensor 22 monitors the outflow of the material in real time and transmits the data to the microprocessor 31. The microprocessor 31 compares the real-time flow rate with the preset feeding parameters. If the real-time flow rate deviates from the preset value, the opening of the electric valve is adjusted to achieve precise control.

[0047] The above describes in detail several embodiments of the present invention, but the present invention is not limited to these specific embodiments. Those skilled in the art can make various variations and modifications based on the concept of the present invention, and these variations and modifications should fall within the scope of protection claimed by the present invention.

Claims

1. A feeding system for a single crystal furnace, characterized in that: include: a barrel body for containing solid materials to be added to the single crystal furnace; a flow control device, which is arranged at the discharge port of the barrel and is used to detect the discharge flow rate of the solid material in the barrel; A control device is provided on the barrel body, the control device is connected to the quantity control device, and controls the action of the quantity control device according to the detection result of the quantity control device, so that the quantity control device adjusts the opening of the discharge port, and further adjusts the feeding flow of the barrel body to the single crystal furnace.

2. The feeding system of the single crystal furnace according to claim 1, characterized in that: A discharge pipe is provided on the side or bottom of the barrel body, one end of the discharge pipe is connected to the barrel body, and the other end of the discharge pipe is connected to the feeding port of the single crystal furnace, and the quantity control device is provided on the discharge pipe.

3. The feeding system of the single crystal furnace according to claim 1, characterized in that: The quantity control device comprises: a flow sensor connected to the control device, the flow sensor being used to detect the flow of solid material flowing out of the barrel through the discharge port and to send a generated detection signal to the control device, wherein the control device generates a control signal according to the detection signal; An electric valve is connected to the control device, and is used to receive a control signal from the control device and adjust its own opening according to the control signal, thereby adjusting the opening of the discharge port.

4. The feeding system of the single crystal furnace according to claim 3, characterized in that: The control device includes a processor, which is connected to the flow sensor and the electric valve respectively, and is used to process the detection signal from the flow sensor and send the generated control signal to the electric valve.

5. The feeding system of the single crystal furnace according to claim 4, characterized in that: The control device further comprises a memory, which is used to store preset feeding parameters and historical feeding data.

6. The charging system for a single crystal furnace according to claim 5, characterized in that: The preset feeding parameters include a preset feeding flow rate and a preset feeding total amount; The processor is used to compare the real-time discharge flow of the barrel body detected by the flow sensor with the preset feeding flow, and when the difference between the real-time discharge flow and the preset feeding flow is greater than a preset threshold, the processor generates the control signal.

7. The charging system for a single crystal furnace according to claim 5, characterized in that: The control device also includes a communication unit, which is connected to the processor, the memory and the external device respectively. The communication unit and the external device can exchange data so that the external device can remotely monitor and operate the control device through the communication unit.

8. The charging system for a single crystal furnace according to claim 1, characterized in that: The control device also includes a display screen, which is used to display the discharge flow rate of the barrel and the adjustment status of the quantity control device.

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