Position adjusting assembly and probe station

Abstract

The utility model provides a position adjusting assembly and a probe station, the position adjusting assembly comprises at least one adjusting assembly, the adjusting assembly comprises a fixed seat, an adjusting rotation structure, a moving seat and a connecting structure, and the fixed seat is provided with an adjusting mounting hole; the adjusting rotating structure is arranged in the adjusting mounting hole, at least part of the adjusting rotating structure can rotate relative to the fixing base, the adjusting rotating structure comprises a telescopic rod, and part of the adjusting rotating structure stretches out and draws back in the axial direction in the rotating process of the telescopic rod; the connecting structure comprises a first connecting piece and a second connecting piece, the first connecting piece is connected to one end of the telescopic rod in the axial direction, one end of the second connecting piece is connected to the first connecting piece, and the other end of the second connecting piece is connected with the movable base and used for driving the movable base to move in the axial direction. The condition that the probe moving position is not accurate easily caused by the fact that the position adjusting assembly is impacted by external force is effectively avoided, and the accuracy of the probe moving position is improved.

Description

Technical Field

[0001] The present application relates to the technical field of wafer detection, and in particular to a position adjustment component and a probe station. Background Art

[0002] A probe station is a crucial piece of equipment for testing the electrical performance of semiconductor devices. It consists of a precise mechanical structure, high-performance probe tips, and electrical performance testing instruments. During operation, a probe station typically uses probes to test chips on a wafer. Semi-automatic probe stations can adjust the probe position using a manual position adjustment component.

[0003] However, the position adjustment component of the transmission is easily affected by external force, which may cause the probe to move inaccurately, resulting in the risk of misjudgment of the probe test or damage to the chip under test. Utility Model Content

[0004] The present application provides a position adjustment component and a probe station for improving the accuracy of a probe's moving position.

[0005] In a first aspect, the present application provides a position adjustment assembly, the position adjustment assembly comprising at least one set of adjustment assemblies, the adjustment assemblies comprising:

[0006] A fixing seat having an adjustment mounting hole;

[0007] an adjustment rotation structure, the adjustment rotation structure being disposed in the adjustment mounting hole, at least a portion of the adjustment rotation structure being rotatable relative to the fixing seat, the adjustment rotation structure comprising a telescopic rod, the telescopic rod being axially retracted during a portion of the adjustment rotation structure rotating;

[0008] Mobile seat;

[0009] The connecting structure includes a first connecting member and a second connecting member, the first connecting member is axially connected to one end of the telescopic rod, one end of the second connecting member is connected to the first connecting member, and the other end of the second connecting member is connected to the movable seat, which is used to drive the movable seat to move along the axial direction.

[0010] 7. The swiftly and minutely adjusting device for a wood-planer working table as claimed in claim 1, wherein said linking rod and said adjusting base are pivotally connected to each other with a bolt, and said bolt has a round shank to contact with said linking rod. said linking rod has a round shank to contact with said linking rod.

[0011] In an optional embodiment, the first connecting member includes a fixing sleeve having a receiving cavity, the receiving cavity receiving one end of the telescopic rod, and the fixing sleeve is fixedly connected to the one end of the telescopic rod.

[0012] In an optional embodiment, the fixed sleeve includes a fixed portion and a movable portion arranged along the circumferential direction, the first end of the fixed portion is fixedly connected to the first end of the movable portion, a first gap communicating with the receiving cavity is formed between the second end of the fixed portion and the second end of the movable portion, and the movable portion and the movable portion are arranged around the circumference of the telescopic rod;

[0013] The first connecting member further includes a fixing member fixedly connected between the second end of the fixing portion and the second end of the movable portion.

[0014] In an optional embodiment, the outer peripheral portion of the first end of the fixed part and the outer peripheral portion of the first end of the movable part are interconnected as a whole, and a second gap is formed between the inner peripheral portion of the first end of the fixed part and the inner peripheral portion of the second end of the movable part, and the second gap is connected to the accommodating cavity.

[0015] In an optional embodiment, the first connecting member also includes a base plate, which is arranged on the side of the fixed sleeve away from the adjustment mounting hole, and the base plate is arranged at the bottom of the accommodating cavity. A portion of the base plate is interconnected with the fixed portion as a whole, and another portion of the base plate forms a third gap with at least a portion of the movable portion, so that the size of the second gap is adjustable.

[0016] In an optional embodiment, the first connecting member also includes a base plate, which is arranged on the side of the fixed sleeve away from the adjustment mounting hole, and the base plate is arranged at the bottom of the accommodating cavity. The first part of the base plate and the fixed sleeve are interconnected as a whole along the axial direction, and a fourth gap is formed between the second part of the base plate and the fixed sleeve, and the area of the second part of the base plate is larger than the area of the second part of the base plate.

[0017] In an optional embodiment, the first connecting member further comprises a connecting rod, one end of which is interconnected with a side of the base plate away from the fixing sleeve, and the connecting rod extends along the axial direction;

[0018] The second connecting member includes at least one bearing and a connecting seat, the bearing is fixed to the connecting rod, the bearing and the connecting rod are relatively fixed in the axial direction, and the connecting seat has one end fixedly connected to the at least one bearing, and the other end of the connecting seat extends in a direction perpendicular to the axial direction and is fixedly connected to the movable seat;

[0019] The connection structure further includes a limiting nut, which is sleeved on a section of the connection seat away from the bottom plate, and the internal thread of the limiting nut is threadedly connected to the external thread of the connecting rod;

[0020] The fixing seat has a receiving cavity, the connecting structure is arranged in the receiving cavity, and the adjusting assembly also includes an elastic member, one end of the elastic member abuts against the end of the connecting rod away from the bottom plate, and the other end of the elastic member abuts against the bottom wall of the receiving cavity.

[0021] In an optional embodiment, the adjustment rotation structure also includes a fixed rod and a rotating handle, the fixed rod is arranged in the adjustment mounting hole, the fixed rod is fixed relatively to the fixed seat, the rotating handle is arranged on the outer peripheral side of the fixed rod, the rotating handle can rotate relative to the fixed rod, and the rotating handle moves axially relative to the fixed rod during the rotation process; the telescopic rod is arranged through the fixed rod, the telescopic rod is connected to the rotating handle, and the rotation of the rotating handle drives the telescopic rod to extend and retract along the axial direction; a first scale is provided on the fixed rod along the axial direction, and a second scale is provided on the axial direction of the rotating handle, and the minimum range of the first scale is the stroke of movement along the axial direction when the rotating handle rotates one circle.

[0022] In an optional embodiment, at least one set of adjustment components includes a first adjustment component and a second adjustment component, the first adjustment component is arranged along a first direction, the second adjustment component is arranged along a second direction, the second direction is perpendicular to the first direction, the fixed seat of the first adjustment component is the movable seat of the second adjustment component, and the movable seat of the second adjustment component is used to move the probe; or,

[0023] At least one group of adjustment components also includes a first adjustment component, a second adjustment component and a third adjustment component. The first adjustment component is arranged along a first direction, the second adjustment component is arranged along a second direction, the second direction is perpendicular to the first direction, the fixed seat of the first adjustment component is the movable seat of the second adjustment component, the movable seat of the second adjustment component is used to move the probe, the third adjustment component is arranged along a third direction, the third direction is perpendicular to the first direction, the third direction is perpendicular to the second direction, and the movable seat of the third adjustment component is the fixed seat of the second adjustment component.

[0024] In the second aspect, the present application provides a probe station, which includes a probe, a probe arm and the position adjustment component, the probe is connected to one end of the probe arm, the movable seat of the position adjustment component is connected to the other end of the probe arm, and the position adjustment component is used to adjust the position of the probe arm and the probe.

[0025] The present application provides a probe station, which includes a probe, a probe arm and a position adjustment component, wherein the probe is connected to one end of the probe arm, and the movable base of the position adjustment component is connected to the other end of the probe arm. The position adjustment component is used to adjust the position of the probe arm and the probe. The position adjustment component includes at least one set of adjustment components, wherein the position adjustment component includes a fixed base, an adjustment rotation structure, a movable base and a connecting structure, and the fixed base has an adjustment mounting hole; the adjustment rotation structure is provided in the adjustment mounting hole, and at least a portion of the adjustment rotation structure can rotate relative to the fixed base, and the adjustment rotation structure includes a telescopic rod, and the telescopic rod is axially extended and retracted during the rotation of a part of the adjustment rotation structure; the connecting structure includes a first connecting member and a second connecting member, the first connecting member is axially connected to one end of the telescopic rod, one end of the second connecting member is connected to the first connecting member, and the other end of the second connecting member is connected to the movable base, and is used to drive the movable base to move along the axial direction. By designing the movable base to be connected to the adjustment rotation structure, the movable base moves axially with the adjustment rotation structure, effectively avoiding the situation where the position adjustment assembly is easily affected by external force and the probe movement position is inaccurate, thereby improving the accuracy of the probe movement position. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments.

[0027] Figure 1 This is a schematic structural diagram of a probe station provided in an embodiment of the present application;

[0028] Figure 2This is a schematic diagram of the structure of a probe station operating surface provided in an embodiment of the present application;

[0029] Figure 3 This is a schematic structural diagram of a position adjustment assembly, a probe arm, and a probe provided in an embodiment of the present application;

[0030] Figure 4 This is a structural diagram of a first position adjustment assembly provided in an embodiment of the present application;

[0031] Figure 5 1 is a schematic structural diagram of a second position adjustment assembly provided in an embodiment of the present application;

[0032] Figure 6 1 is a schematic structural diagram of a third position adjustment assembly provided in an embodiment of the present application;

[0033] Figure 7 1 is a schematic structural diagram of a fourth position adjustment assembly provided in an embodiment of the present application;

[0034] Figure 8 This is a schematic diagram of the exploded structure of the first position adjustment component provided in an embodiment of the present application;

[0035] Figure 9 1 is a schematic diagram of the exploded structure of the fourth position adjustment component provided in an embodiment of the present application;

[0036] Figure 10 yes Figure 9 A schematic diagram of the partial decomposition structure of the provided regulation component;

[0037] Figure 11 yes Figure 10 A schematic diagram of the breakdown structure of the provided regulation components;

[0038] Figure 12 yes Figure 11 A three-dimensional schematic diagram of a first connecting member of the first type is provided;

[0039] Figure 13 yes Figure 11 A schematic top view of a first connecting member is provided;

[0040] Figure 14 yes Figure 11 A schematic side view of a first connecting member is provided;

[0041] Figure 15 is a three-dimensional schematic diagram of a second first connecting member provided in an embodiment of the present application;

[0042] Figure 16 It is a three-dimensional schematic diagram of the third first connecting member provided in an embodiment of the present application.

[0043] Description of Figure Numbers:

[0044] Probe station 1; position adjustment assembly 10; probe arm 30; probe 20; adjustment assembly 10a; fixed seat 11; adjustment rotation structure 12; movable seat 13; connecting structure 14; adjustment mounting hole 11a; telescopic rod 121; first connecting member 141; second connecting member 142; fixed rod 122; rotating handle 123; fixed sleeve 1411; accommodating chamber 141a; fixed portion 1412; movable portion 1413; first gap 1414; fixed member 1415; second gap 1416; bottom plate 143; third gap 1417; fourth gap 1418; connecting rod 144; bearing 1421; connecting seat 1422; limiting nut 145; accommodating chamber 11b; guide rail assembly 15; first guide rail 151; second guide rail 152; first adjustment assembly 10b; second adjustment assembly 10c; third adjustment assembly 10d. DETAILED DESCRIPTION

[0045] The technical solution of this application will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described in this application are only some embodiments, not all embodiments. Based on the embodiments provided in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this application.

[0046] References to "embodiments" in this application mean that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it necessarily refer to mutually exclusive, independent, or alternative embodiments to other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described in this application may be combined with other embodiments.

[0047] The terms "first," "second," and so on, in the specification and claims of this application and the accompanying drawings are used to distinguish between different objects, not to describe a specific order. Furthermore, the terms "including," "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a component or device comprising one or more parts is not limited to the one or more parts listed, but may optionally include one or more parts that are not listed but are inherent to the illustrated product, or one or more parts that should be present based on the described functionality.

[0048] Please also refer to Figures 1 to 4The present application provides a position adjustment assembly 10. In an optional embodiment, the position adjustment assembly 10 is applied to a probe station 1. The probe station 1 includes a connected probe arm 30 and a probe 20, and the position adjustment assembly 10 is connected to the probe 20 through the probe arm 30. The position adjustment assembly 10 is used to move the probe arm 30 and the probe 20.

[0049] In other embodiments, the position adjustment assembly 10 may be applied to other devices for fine position adjustment.

[0050] Please also refer to Figures 4 to 7 The position adjustment component 10 includes at least one group of adjustment components 10a. The present application does not specifically limit the number of adjustment components 10a.

[0051] See also Figure 7 Optionally, the number of the adjustment component 10a is one, and the adjustment component 10a is used to drive the probe arm 30 and the probe 20 to move along the first direction.

[0052] See also Figure 5 and Figure 6 Alternatively, there are two adjustment assemblies 10a, each capable of driving the probe arm 30 and the probe 20 to move in a first direction and a second direction. The first and second directions are perpendicular. In the following, the first direction is the X direction, and the second direction is the Y direction.

[0053] See also Figure 4 and Figure 8 Alternatively, there are three adjustment components 10a, and the three adjustment components 10a can drive the probe arm 30 and the probe 20 to move along the first direction X, the second direction Y, and the third direction Z. The first direction X, the second direction Y, and the third direction Z are perpendicular to each other.

[0054] The structure of an adjustment component 10a is specifically described below with reference to the accompanying drawings.

[0055] See also Figure 9 The adjustment component 10a includes a fixed seat 11, an adjustment rotation structure 12, a movable seat 13, and a connecting structure 14.

[0056] The fixing base 11 serves as a reference for the adjustment assembly 10 a.

[0057] See also Figure 9 The fixing base 11 has an adjustment mounting hole 11a. In this embodiment, the adjustment assembly 10a is used as an example to move the probe arm 30 and the probe 20 back and forth along the first direction X. The adjustment mounting hole 11a extends along the first direction X.

[0058] The adjusting rotation structure 12 is provided in the adjusting installation hole 11 a. Specifically, the adjusting rotation structure 12 is installed in the adjusting installation hole 11 a.

[0059] See also Figure 9 At least a portion of the adjustable rotating structure 12 is capable of rotating relative to the fixed base 11. The adjustable rotating structure 12 includes a telescopic rod 121. During the rotation of a portion of the adjustable rotating structure 12, the telescopic rod 121 extends and contracts axially. The axial direction is the central axis of the adjustable mounting hole 11a, the central axis of the telescopic rod 121, and the first direction X described above.

[0060] See also Figures 9 to 11 The connecting structure 14 includes a first connecting member 141 and a second connecting member 142 .

[0061] The first connecting member 141 is axially connected to one end of the telescopic rod 121 . The first connecting member 141 moves along the telescopic rod 121 along the first direction X. One end of the second connecting member 142 is connected to the first connecting member 141 , and the other end of the second connecting member 142 is connected to the movable base 13 .

[0062] The fixed seat 11 and the movable seat 13 can be arranged along the third direction Z, with the majority of the adjustable rotating structure 12 and the connecting structure 14 located between the fixed seat 11 and the movable seat 13. The adjustable rotating structure 12 and the connecting structure 14 are sequentially arranged along the first direction X. A portion of the adjustable rotating structure 12 rotates, causing the telescopic rod 121 to extend and retract, thereby driving the connecting structure 14 to move forward or backward along the first direction X, thereby driving the movable seat 13 to move forward or backward along the first direction X, i.e., driving the movable seat 13 to move along the axial direction.

[0063] The present application provides a position adjustment component 10a, which includes at least one group of adjustment components 10a. The adjustment component 10a includes a fixed seat 11, an adjustment rotation structure 12, a movable seat 13 and a connecting structure 14. The fixed seat 11 has an adjustment mounting hole 11a; the adjustment rotation structure 12 is provided in the adjustment mounting hole 11a, and at least a portion of the adjustment rotation structure 12 can rotate relative to the fixed seat 11. The adjustment rotation structure 12 includes a telescopic rod 121, and a portion of the adjustment rotation structure 12 is extended and retracted axially during the rotation process; the connecting structure 14 includes a A connecting member 141 and a second connecting member 142, wherein the first connecting member 141 is axially connected to one end of the telescopic rod 121, one end of the second connecting member 142 is connected to the first connecting member 141, and the other end of the second connecting member 142 is connected to the movable seat 13, for driving the movable seat 13 to move along the axial direction. The above design connects the movable seat 13 to the adjusting rotating structure 12, so that the movable seat 13 moves axially along with the adjusting rotating structure 12, effectively avoiding the situation where the position adjustment component 10a is easily subject to inaccurate probe movement position when subjected to external force impact, thereby improving the accuracy of the probe movement position.

[0064] Optional, see Figures 9 to 11 The adjusting and rotating structure 12 further includes a fixing rod 122 and a rotating handle 123 .

[0065] The fixing rod 122 is disposed within the adjustment mounting hole 11a. Optionally, the fixing rod 122 is fixedly mounted within the adjustment mounting hole 11a of the fixing base 11. Furthermore, the fixing base 11 includes a fixing base body and a fixing base protrusion fixedly connected to the fixing base body. The fixing base body is generally rectangular, and the fixing base protrusion is located on one side of the fixing base body and is suspended in the air. One end of the fixing base protrusion is fixedly connected to a side of the fixing base body near an edge, and this connection method includes but is not limited to screw fixing.

[0066] The fixing rod 122 is fixed relative to the fixing seat 11. Specifically, the fixing rod 122 is fixed relative to the fixing seat 11 via the fixing seat protrusion.

[0067] The rotating handle 123 is disposed on the outer periphery of the fixed rod 122. The telescopic rod 121 is disposed through the fixed rod 122. The telescopic rod 121 is connected to the rotating handle 123. Optionally, the rotating handle 123 has an internal thread, and the telescopic rod 121 has an internal thread, and the internal thread of the rotating handle 123 is threadedly connected to the external thread of the telescopic rod 121. The internal thread of the rotating handle 123 and the external thread of the telescopic rod 121 may be helical threads.

[0068] The rotating handle 123 is rotatable relative to the fixed rod 122. During rotation, the rotating handle 123 moves axially relative to the fixed rod 122. Simultaneously, the rotating handle 123 drives the telescopic rod 121 to extend and retract axially during rotation. Optionally, the rotating handle 123 moves toward a side away from the fixed rod 122 during rotation, and the telescopic rod 121 also moves toward the side of the rotating handle 123. Optionally, the rotating handle 123 moves toward a side closer to the fixed rod 122 during rotation, and the telescopic rod 121 also moves toward the side closer to the rotating handle 123.

[0069] In other words, the rotation of the rotating handle 123 drives the telescopic rod 121 to extend and retract along the axial direction.

[0070] The fixed rod 122 is provided with a first scale along the axial direction. The minimum range of the first scale is the distance traveled along the axial direction when the rotating handle 123 rotates one revolution. A second scale is provided along the axial direction of the rotating handle 123. The maximum range of the second scale for one revolution of the rotating handle 123 is the minimum range of the first scale. The movement of the telescopic rod 121 can be represented by the sum of the readings on the first scale and the readings on the second scale.

[0071] This embodiment is designed to rotate and drive the telescopic rod 121 to extend and retract along the axial direction, so as to drive the subsequent movement of the movable seat 13 and the probe. Furthermore, the structural design of the adjustable rotating structure 12 can also achieve fine-tuning of the position of the movable seat 13 and the probe, and can determine the size of the fine-tuning according to the reading, thereby achieving controllable adjustment size.

[0072] Optional, see Figures 10 to 12 , the first connecting member 141 includes a fixing sleeve 1411 .

[0073] See also Figures 10 to 12 The fixing sleeve 1411 has a receiving cavity 141 a. The opening of the receiving cavity 141 a faces the side where the adjusting rotating structure 12 is located.

[0074] Optionally, the radial size of the receiving cavity 141 a of the fixing sleeve 1411 is adjustable.

[0075] The receiving cavity 141a receives one end of the telescopic rod 121. The fixing sleeve 1411 is fixedly connected to one end of the telescopic rod 121. In other words, one end of the telescopic rod 121 is fixedly disposed in the fixing sleeve 1411. The fixing sleeve 1411 rises and falls as the telescopic rod 121 rises and falls.

[0076] In this embodiment, the first connecting member 141 includes a fixed sleeve 1411 , and one end of the first connecting member 141 is fixed by the fixed sleeve 1411 . The fixed sleeve 1411 is directly or indirectly fixedly connected to the movable seat 13 to drive the movable seat 13 to rise and fall as the rotating structure 12 is adjusted.

[0077] Optional, see Figures 12 to 14 The fixed sleeve 1411 includes a fixed portion 1412 and a movable portion 1413 arranged along the circumference. The fixed portion 1412 and the movable portion 1413 surround and form a receiving cavity 141a. The fixed portion 1412 and the movable portion 1413 can be substantially semi-annular.

[0078] See also Figures 12 to 14 , the first end of the fixed portion 1412 is fixedly connected to the first end of the movable portion 1413. Optionally, the first end of the fixed portion 1412 and the first end of the movable portion 1413 can be interconnected as a whole or fixedly connected by screws or the like.

[0079] See also Figures 12 to 14 A first gap 1414 communicating with the receiving cavity 141 a is formed between the second end of the fixed portion 1412 and the second end of the movable portion 1413 . The fixed portion 1412 and the movable portion 1413 are disposed around the circumference of the telescopic rod 121 .

[0080] See also Figures 12 to 14 The first connecting member 141 further includes a fixing member 1415. The fixing member 1415 is fixedly connected between the second end of the fixing portion 1412 and the second end of the movable portion 1413. The first gap 1414 provides an adjustable space for adjusting the size of the receiving cavity 141a.

[0081] Optionally, the fixing member 1415 includes, but is not limited to, a screw. Screw holes are provided on both the second end of the fixed portion 1412 and the second end of the movable portion 1413. The fixing member 1415 can be used to securely connect the second end of the fixed portion 1412 to the second end of the movable portion 1413, thereby defining the radial dimension of the receiving cavity 141a and securely securing the fixing sleeve 1411 to the outer circumference of the telescopic rod 121.

[0082] In this embodiment, by setting the first end of the fixed portion 1412 and the first end of the movable portion 1413 to be fixed, the second end of the fixed portion 1412 and the second end of the movable portion 1413 are close to each other and form a first gap 1414. The size of the first gap 1414 can be adjusted by the fixing member 1415, and then the radial size of the accommodating cavity 141a can be adjusted, so that the fixed sleeve 1411 is fixedly connected to one end of the telescopic rod 121, so that the fixed sleeve 1411 can adapt to telescopic rods 121 of different sizes.

[0083] Optional, see Figures 12 to 14 The outer periphery of the first end of the fixed portion 1412 and the outer periphery of the first end of the movable portion 1413 are interconnected and integrated. A second gap 1416 is formed between the inner periphery of the first end of the fixed portion 1412 and the inner periphery of the second end of the movable portion 1413. The second gap 1416 is in communication with the receiving cavity 141a.

[0084] Optionally, the first end of the fixed portion 1412 and the first end of the movable portion 1413 are partially connected and partially spaced apart to provide a larger adjustable space within the receiving cavity 141a. For example, the size of the second gap 1416 and the size of the first gap 1414 are both adjustable, allowing the fixed sleeve 1411 to accommodate a wider range of telescopic rods 121 sizes. Furthermore, the adjustable sides of the receiving cavity 141a maintain the shape integrity of the receiving cavity 141a. For example, even when the first gap 1414 and the second gap 1416 are adjusted, the cross-sectional shape of the receiving cavity 141a remains circular. Of course, the shape of the receiving cavity 141a can also be square, triangular, or the like.

[0085] Optionally, the first gap 1414 and the second gap 1416 are symmetrically arranged on both sides of the receiving cavity 141 a. Furthermore, the first gap 1414 and the second gap 1416 are substantially collinear or collinear.

[0086] In the first implementation, see Figures 12 to 14 The first connecting member 141 further includes a bottom plate 143. The bottom plate 143 is disposed on a side of the fixing sleeve 1411 away from the adjustment mounting hole 11a. The bottom plate 143 is disposed at the bottom of the receiving cavity 141a.

[0087] The bottom plate 143 can serve as a connecting plate for subsequent structures or an abutment plate for the telescopic rod 121. In other words, one end of the telescopic rod 121 can abut the bottom plate 143. In other embodiments, the other end of the telescopic rod 121 can be spaced apart from the bottom plate 143.

[0088] A portion of the bottom plate 143 is interconnected with the fixed portion 1412 as a whole, and another portion of the bottom plate 143 and at least a portion of the movable portion 1413 form a third gap in the axial direction. In other words, the bottom plate 143 makes the size of the second gap 1416 adjustable.

[0089] For details, please refer to Figures 12 to 14The bottom end of the movable portion 1413 is spaced apart from the bottom plate 143. The space between the bottom end of the movable portion 1413 and the bottom plate 143 is defined as a third space 1417. If the second end of the movable portion 1413 can be moved toward or away from the second end of the fixed portion 1412, the size of the second space 1416 can be adjusted to clamp telescopic rods 121 of different radial sizes.

[0090] In this embodiment, the entire bottom end of the movable portion 1413 is spaced apart from the bottom plate 143, and the entire bottom end of the fixed portion 1412 can be integrally formed with the bottom plate 143 along the axial direction. Alternatively, a portion of the bottom end of the fixed portion 1412 can be integrally formed with the bottom plate 143 along the axial direction, or another portion of the bottom end of the fixed portion 1412 can be spaced apart from the bottom plate 143 along the axial direction.

[0091] In other words, the fixing sleeve 1411 and the bottom plate 143 can form a cylindrical structure with one end open and the other closed. The cylindrical structure has a circular receiving cavity 141a. A first gap 1414 extending axially is defined on the circumferential sidewall of the cylindrical structure, a second gap 1416 extending axially is defined on the inner sidewall of the cylindrical structure, and a third gap 1417 extending perpendicularly to the axial direction is defined on the outer sidewall of the cylindrical structure.

[0092] In the second implementation, see Figure 15 , the first connecting member 141 also includes a bottom plate 143.

[0093] See also Figure 15 The bottom plate 143 is disposed on the side of the fixing sleeve 1411 facing away from the adjustable mounting hole 11a. The bottom plate 143 is located at the bottom of the receiving cavity 141a. The bottom plate 143 can serve as a connecting plate for subsequent structures or as an abutment plate for the telescopic rod 121. In other words, one end of the telescopic rod 121 can abut the bottom plate 143. In other embodiments, the other end of the telescopic rod 121 can be spaced apart from the bottom plate 143.

[0094] See also Figure 15 The first portion of the bottom plate 143 and the fixing sleeve 1411 are interconnected and integrated along the axial direction. A fourth gap 1418 is formed between the second portion of the bottom plate 143 and the fixing sleeve 1411. The area of the second portion of the bottom plate 143 is larger than the area of the second portion of the bottom plate 143.

[0095] In other words, the fixing sleeve 1411 and the bottom plate 143 can form a cylindrical structure with one end open and the other end closed, wherein the cylindrical structure has a circular receiving cavity 141a and a fourth gap 1418 extending perpendicularly to the axial direction along the outer wall of the cylindrical structure.

[0096] Optional, see Figure 12 、 Figure 14 and Figure 15 The first connecting member 141 further includes a connecting rod 144. One end of the connecting rod 144 is integrally connected to a side of the base plate 143 away from the fixed sleeve 1411. The connecting rod 144 extends along the axial direction. The connecting rod 144 is used to provide a connection position for a subsequent structure connected to the movable seat 13, and can also provide an abutment position for a subsequent elastic member. The connecting rod 144 can also move with the fixed sleeve 1411 and the base plate 143 to drive the movable seat 13 to move.

[0097] In this embodiment, the first portion of the base plate 143 and the fixed sleeve 1411 are designed to be interconnected and integrated along the axial direction. A fourth gap 1418 is formed between the second portion of the base plate 143 and the fixed sleeve 1411. The area of the second portion of the base plate 143 is larger than the area of the second portion of the base plate 143. In this way, the fixed sleeve 1411 and the base plate 143 form a spring structure, and a certain degree of torsional deformation can be formed between the fixed sleeve 1411 and the base plate 143 in the circumferential direction to ensure that the telescopic rods 121 and the connecting rods 144 on the upper and lower sides of the base plate 143 can rotate synchronously even when they are not arranged concentrically. The connection structure 14 provided in this application can reduce the restrictions on the position of the telescopic rod 121. The telescopic rod 121 can be concentric or non-concentric with the connecting rod 144, and the fixed sleeve 1411 can realize the transmission of axial movement and axial rotation between the telescopic rod 121 and the connecting rod 144.

[0098] In the third implementation, see Figure 16 This embodiment is a combination of the structure of the fixed sleeve 1411 and the bottom plate 143 provided in the first embodiment and the structure of the fixed sleeve 1411 and the bottom plate 143 provided in the second embodiment, that is, the third gap 1417 and the fourth gap 1418 in the first embodiment are the same structure. In other words, in this embodiment, the fixed sleeve 1411 and the bottom plate 143 can form a cylindrical structure with one end open and the other end closed. The cylindrical structure has a circular receiving cavity 141a. A first gap 1414 extending in the axial direction is provided on the circumferential side wall of the cylindrical structure, a second gap 1416 extending in the axial direction is provided on the inner side wall of the cylindrical structure, and a third gap 1417 (i.e., the fourth gap 1418) extending perpendicular to the axial direction is provided on the outer side wall of the cylindrical structure.

[0099] In this embodiment, the provision of the third gap 1417 (i.e., the fourth gap 1418) not only allows the second end of the movable portion 1413 to move toward or away from the second end of the fixed portion 1412, thereby making the size of the second gap 1416 adjustable to clamp telescopic rods 121 of different radial dimensions, but also allows the fixed sleeve 1411 and the base plate 143 to form a spring structure, allowing a certain degree of circumferential distortion to form between the fixed sleeve 1411 and the base plate 143, thereby ensuring that the telescopic rods 121 and the connecting rods 144 on the upper and lower sides of the base plate 143 can rotate synchronously even when they are not concentrically arranged. The connection structure 14 provided in this application can reduce the restrictions on the position of the telescopic rod 121. The telescopic rod 121 can be concentric or non-concentric with the connecting rod 144, and the fixed sleeve 1411 can realize the transmission of axial movement and axial rotation between the telescopic rod 121 and the connecting rod 144.

[0100] Optionally, the fixing sleeve 1411 , the base plate 143 , and the connecting rod 144 are integrally formed, that is, they are different parts of the same structural component.

[0101] See also Figure 11 The second connecting member 142 includes at least one bearing 1421 and a connecting seat 1422. The bearing 1421 is fixed to the connecting rod 144. The bearing 1421 and the connecting rod 144 are relatively fixed in the axial direction. Optionally, the number of bearings 1421 is two, and the two bearings 1421 are axially sleeved on the outer side of the connecting rod 144.

[0102] One end of the connecting seat 1422 is fixedly connected to the at least one bearing 1421. Specifically, one end of the connecting seat 1422 is sleeved on the outside of the two bearings 1421, and the two bearings 1421 can move up and down together with the connecting rod 144.

[0103] The other end of the connecting seat 1422 extends in a direction perpendicular to the axial direction and is fixedly connected to the moving seat 13 .

[0104] See also Figure 11 The connection structure 14 further includes a retaining nut 145. The retaining nut 145 is sleeved over a portion of the connection base 1422 facing away from the base plate 143. The internal threads of the retaining nut 145 are threadedly engaged with the external threads of the connecting rod 144. The end surface of the retaining nut 145 facing the connection base 1422 abuts against the bottom end of the connection base 1422 to retain the connection base 1422.

[0105] See also Figure 9The fixing base 11 has a receiving cavity 11b. The connecting structure 14 is disposed in the receiving cavity 11b. Optionally, the receiving cavity 11b of the fixing base 11 may be concave, or guide assemblies may be disposed on both sides of the fixing base 11, with the receiving cavity 11b formed between the two guide assemblies.

[0106] The bottom wall of the accommodating cavity 11 b may be a part of the fixing seat 11 , or the bottom wall of the accommodating cavity 11 b may be the outer surface of the fixing seat 11 of another adjusting assembly 10 a arranged in another direction.

[0107] The adjustment assembly 10a also includes an elastic member (not shown). One end of the elastic member abuts against the end of the connecting rod 144 facing away from the base plate 143, and the other end of the elastic member abuts against the bottom wall of the accommodating chamber 11b. The elastic member includes, but is not limited to, a spring. The elastic member is compressed between the end of the connecting rod 144 facing away from the base plate 143 and the bottom wall of the accommodating chamber 11b. The elastic member compresses and deforms when the connecting structure 14 expands or contracts.

[0108] See also Figure 5 and Figure 6 The adjustment component 10a also includes a guide rail component 15, which includes a first guide rail 151 and a second guide rail 152 that are slidably connected. The first guide rail 151 is fixed to the fixed seat 11, and the second guide rail 152 is fixed to the movable seat 13, and the second guide rail 152 can slide relative to the first guide rail 151 along the first direction X.

[0109] Optionally, the guide rail assembly 15 is disposed on a side of the movable base 13 adjacent to the fixed base 11. Optionally, the guide rail assembly 15 is a cross rail, and the guide rail assembly 15 includes a first guide rail 151 and a second guide rail 152 that are slidably connected, and the first guide rail 151 and the second guide rail 152 can be slidably connected via balls.

[0110] Optionally, the first guide rail 151 is fixed to the fixed base 11, and the second guide rail 152 is fixed to the movable base 13, and when the movable base 13 moves relative to the fixed base 11 in the first direction X, the second guide rail 152 can slide relative to the first guide rail 151 in the first direction X. In this embodiment, the provision of the guide rail assembly 15 ensures that there is less friction and resistance between the movable base 13 and the fixed base 11, thereby enabling the movable base 13 to move quickly, thereby improving the working efficiency of the position adjustment assembly 10.

[0111] The adjustment assembly 10a further includes a locking member (not shown). The locking member includes a fixing plate and a fastener. One end of the fixing plate is fixed to the fixing base 11 . The fastener is connected to the fixing plate and is detachably connected to the movable base 13 .

[0112] Optionally, the fixing plate is fixed to the fixing seat 11 , and the fixing plate can limit the fastener.

[0113] Optionally, the fastener is provided through the fixing plate, and the fastener is detachably connected to the movable base 13. When the fastener is tightly connected to the movable base 13, the fastener cooperates with the fixing plate to fix the movable base 13 to the fixed base 11, that is, the movable base 13 no longer moves relative to the fixed base 11, thereby locking the position of the movable base 13, so that the probe arm 30 and the probe 20 can maintain a stable position, thereby making the testing process of the probe station 1 more accurate and reliable.

[0114] Optionally, the movable base 13 of the adjustment assembly 10a is connected to the probe and is configured to drive the probe to move along a first direction X. The first direction is the X direction. In other embodiments, the adjustment assembly 10a can also drive the probe to move along a second direction Y, where the second direction is along the Y direction. In other embodiments, the adjustment assembly 10a can also drive the probe to move along a third direction Z, where the third direction is along the Z direction.

[0115] The number of the adjustment components 10a provided in this application is not specifically limited.

[0116] Optional, see Figure 6 At least one set of adjustment components 10a includes a first adjustment component 10b and a second adjustment component 10c.

[0117] The first adjustment assembly 10b is arranged along a first direction X. The movable base 13 of the first adjustment assembly 10b moves relative to the fixed base 11 along the first direction X. The second adjustment assembly 10c is arranged along a second direction Y. The movable base 13 of the second adjustment assembly 10c moves relative to the fixed base 11 along the second direction Y. The second direction Y is perpendicular to the first direction X. The first direction is the X direction, and the second direction is the Y direction; alternatively, the first direction is the X direction, and the second direction is the Z direction.

[0118] The fixed base 11 of the first adjustment assembly 10b serves as the movable base 13 of the second adjustment assembly 10c, thereby improving the structural compactness of the first and second adjustment assemblies 10b and 10c and miniaturizing the position adjustment assembly 10a. The movable base 13 of the first adjustment assembly 10b is connected to the probe 20 via the probe arm 30 for moving the probe 20.

[0119] The position adjustment component 10a provided in this embodiment is configured with two groups of adjustment components 10a, and the two groups of adjustment components 10a are configured in a vertical direction. The fixed seat 11 of the first adjustment component 10b is used as the movable seat 13 of the second adjustment component 10c. This enables the second adjustment component 10c to drive the first adjustment component 10b, the probe arm 30 and the probe 20 to move as a whole along the second direction Y. The movable seat 13 of the first adjustment component 10b can also drive the probe arm 30 and the probe 20 to move along the first direction X. The above realizes driving the probe 20 to move along the first direction X and the second direction Y. In addition, the fixed seat 11 of the first adjustment component 10b is used as the movable seat 13 of the second adjustment component 10c, so as to improve the structural compactness of the first adjustment component 10b and the second adjustment component 10c and realize the miniaturization of the position adjustment component 10a.

[0120] See also Figure 4 and Figure 8 At least one group of adjustment components 10a further includes a first adjustment component 10b, a second adjustment component 10c and a third adjustment component 10d.

[0121] See also Figure 4 and Figure 8 The first adjustment assembly 10b is arranged along a first direction X. The movable base 13 of the first adjustment assembly 10b moves along the first direction X relative to the fixed base 11. The second adjustment assembly 10c is arranged along a second direction Y. The movable base 13 of the second adjustment assembly 10c moves along the second direction Y relative to the fixed base 11. The second direction Y is perpendicular to the first direction X.

[0122] The fixed base 11 of the first adjustment component 10b serves as the movable base 13 of the second adjustment component 10c. The movable base 13 of the second adjustment component 10c is connected to the probe 20 via the probe arm 30 for moving the probe 20.

[0123] See also Figure 4 and Figure 8 The third adjustment assembly 10d is disposed along a third direction Z. The movable base 13 of the third adjustment assembly 10d moves along the third direction Z relative to the fixed base 11. The third direction Z is perpendicular to the first direction X. The third direction Z is perpendicular to the second direction Y. The movable base 13 of the third adjustment assembly 10d serves as the fixed base 11 of the second adjustment assembly 10c.

[0124] The position adjustment component 10a provided in this embodiment is provided with three groups of adjustment components 10a, and the three groups of adjustment components 10a are arranged in pairs in the vertical direction, the fixed seat 11 of the first adjustment component 10b is used as the movable seat 13 of the second adjustment component 10c, and the fixed seat 11 of the second adjustment component 10c is used as the movable seat 13 of the third adjustment component 10d. In this way, the third adjustment component 10d can drive the second adjustment component 10c, the first adjustment component 10b, the probe arm 30 and the probe 20 to move as a whole along the third direction Z, the second adjustment component 10c can drive the first adjustment component 10b, the probe arm 30 and the probe 20 to move as a whole along the second direction Y, and the movable seat 13 of the first adjustment component 10b can also drive the probe arm 30 and the probe 20 to move along the first direction X. In this way, the probe 20 is driven to move along the first direction X, the second direction Y and the third direction Z, and the probe 20 is moved along the X, Y and Z directions. In addition, the fixed seat 11 of the first adjustment component 10b is the movable seat 13 of the second adjustment component 10c, and the fixed seat 11 of the second adjustment component 10c is the movable seat 13 of the third adjustment component 10d, so as to improve the structural compactness of the first adjustment component 10b, the second adjustment component 10c and the third adjustment component 10d and realize the miniaturization of the position adjustment component 10a.

[0125] In this embodiment, the movable seat 13 of the first adjustment component 10b adjusts the movement of the movable seat 13 along the first direction X, adjusts the movement of the second movable seat 132 of the second adjustment component 10c along the second direction Y, and adjusts the movement of the third movable seat 133 along the third direction Z by the third adjustment component 10d, so that the probe arm 30 and the probe 20 can be fine-tuned along the first direction X, the second direction Y and the third direction Z respectively, thereby realizing the adjustment of the wafer test position of the probe 20, making the operation of the probe station 1 more accurate and convenient.

[0126] See also Figure 1 and Figure 2 The present application provides a probe station 1, which includes a probe 20, a probe arm 30 and a position adjustment component 10a. The probe 20 is connected to one end of the probe arm 30, and the movable seat 13 of the position adjustment component 10a is connected to the other end of the probe arm 30. The position adjustment component 10a is used to adjust the position of the probe arm 30 and the probe 20.

[0127] Optionally, the probe station 1 is used to detect the wafer, and the probe station 1 includes the position adjustment component 10, a probe arm 30 and a probe 20, wherein the probe 20 is used to contact the wafer and detect the wafer, one end of the probe arm 30 is connected to the probe 20, and the probe 20 adjustment mechanism is connected to the other end of the probe arm 30 and is used to adjust the position of the probe arm 30 and the probe 20.

[0128] Optionally, see Figure 1 and Figure 2 The movable seat 13 is arranged on a side of the fixed seat 11 adjacent to the probe arm 30. The movable seat 13 is used to connect the probe arm 30. The movable seat 13 can be a probe arm 30 indirectly connected to the probe station 1. The movable seat 13 can move along the first direction X relative to the fixed seat 11, and the movable seat 13 can drive the probe arm 30 to move along the first direction X during the movement.

[0129] The present application provides a probe station 1, which includes a probe 20, a probe arm 30 and a position adjustment component 10a. The probe 20 is connected to one end of the probe arm 30, and the movable seat 13 of the position adjustment component 10a is connected to the other end of the probe arm 30. The position adjustment component 10a is used to adjust the position of the probe arm 30 and the probe 20. The position adjustment component 10a includes at least one group of adjustment components 10a. The position adjustment component 10a includes a fixed seat 11, an adjustment rotation structure 12, a movable seat 13 and a connecting structure 14. The fixed seat 11 has an adjustment mounting hole 11a; the adjustment rotation structure 12 is provided in the adjustment mounting hole 11a, and at least a part of the adjustment rotation structure 12 can rotate relative to the fixed seat 11. It includes a telescopic rod 121, and the telescopic rod 121 is axially extended and retracted during the rotation of a part of the adjusting and rotating structure 12; the connecting structure 14 includes a first connecting member 141 and a second connecting member 142, the first connecting member 141 is axially connected to one end of the telescopic rod 121, one end of the second connecting member 142 is connected to the first connecting member 141, and the other end of the second connecting member 142 is connected to the movable seat 13, which is used to drive the movable seat 13 to move along the axial direction. The above design connects the movable seat 13 to the adjusting and rotating structure 12, so that the movable seat 13 moves axially with the adjusting and rotating structure 12, effectively avoiding the situation where the position adjustment component 10a is easily affected by external force and causes the probe 20 to move inaccurately, thereby improving the accuracy of the moving position of the probe 20.

[0130] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application, and these improvements and modifications are also considered to be within the scope of protection of the present application.

Claims

1. A position adjustment component, characterized in that: The position adjustment assembly includes at least one set of adjustment assemblies, and the adjustment assemblies include: A fixing seat having an adjustment mounting hole; an adjustment rotation structure, the adjustment rotation structure being disposed in the adjustment mounting hole, at least a portion of the adjustment rotation structure being rotatable relative to the fixing seat, the adjustment rotation structure comprising a telescopic rod, the telescopic rod being axially retracted during a portion of the adjustment rotation structure rotating; Mobile seat; and The connecting structure includes a first connecting member and a second connecting member, the first connecting member is axially connected to one end of the telescopic rod, one end of the second connecting member is connected to the first connecting member, and the other end of the second connecting member is connected to the movable seat, which is used to drive the movable seat to move along the axial direction.

2. The position adjustment assembly according to claim 1, wherein: The first connecting member includes a fixing sleeve having a receiving cavity. The receiving cavity receives one end of the telescopic rod. The fixing sleeve is fixedly connected to the one end of the telescopic rod.

3. The position adjustment assembly according to claim 2, wherein: The fixed sleeve includes a fixed portion and a movable portion arranged along the circumferential direction, a first end of the fixed portion is fixedly connected to a first end of the movable portion, a first gap communicating with the receiving cavity is formed between a second end of the fixed portion and a second end of the movable portion, and the movable portion and the movable portion are arranged around the circumference of the telescopic rod; The first connecting member further includes a fixing member fixedly connected between the second end of the fixing portion and the second end of the movable portion.

4. The position adjustment assembly according to claim 3, wherein: The outer peripheral portion of the first end of the fixed portion and the outer peripheral portion of the first end of the movable portion are interconnected as a whole, and a second gap is formed between the inner peripheral portion of the first end of the fixed portion and the inner peripheral portion of the second end of the movable portion, and the second gap is connected to the accommodating cavity.

5. The position adjustment assembly according to claim 4, characterized in that: The first connecting member also includes a base plate, which is arranged on a side of the fixed sleeve away from the adjustment mounting hole, and the base plate is arranged at the bottom of the accommodating cavity. A portion of the base plate is interconnected with the fixed portion as a whole, and another portion of the base plate forms a third gap with at least a portion of the movable portion, so that the size of the second gap is adjustable.

6. The position adjustment assembly according to claim 2, wherein: The first connecting member also includes a base plate, which is arranged on a side of the fixing sleeve away from the adjustment mounting hole, and the base plate is arranged at the bottom of the accommodating cavity. The first part of the base plate and the fixing sleeve are interconnected as a whole along the axial direction, and a fourth gap is formed between the second part of the base plate and the fixing sleeve, and the area of the second part of the base plate is larger than the area of the second part of the base plate.

7. The position adjustment assembly according to claim 5 or 6, characterized in that: The first connecting member further includes a connecting rod, one end of which is interconnected with a side of the base plate away from the fixing sleeve, and the connecting rod extends along the axial direction; The second connecting member includes at least one bearing and a connecting seat, the bearing is fixed to the connecting rod, the bearing and the connecting rod are relatively fixed in the axial direction, and the connecting seat has one end fixedly connected to the at least one bearing, and the other end of the connecting seat extends in a direction perpendicular to the axial direction and is fixedly connected to the movable seat; The connection structure further includes a limiting nut, which is sleeved on a section of the connection seat away from the bottom plate, and the internal thread of the limiting nut is threadedly connected to the external thread of the connecting rod; The fixing seat has a receiving cavity, the connecting structure is arranged in the receiving cavity, and the adjusting assembly also includes an elastic member, one end of the elastic member abuts against the end of the connecting rod away from the bottom plate, and the other end of the elastic member abuts against the bottom wall of the receiving cavity.

8. The position adjustment assembly according to claim 1, wherein: The adjusting and rotating structure also includes a fixed rod and a rotating handle, the fixed rod being arranged in the adjusting mounting hole, the fixed rod being fixed relatively to the fixed seat, the rotating handle being arranged on the outer peripheral side of the fixed rod, the rotating handle being able to rotate relative to the fixed rod, and the rotating handle moving axially relative to the fixed rod during the rotation process; the telescopic rod is arranged through the fixed rod, the telescopic rod is connected to the rotating handle, and the rotation of the rotating handle drives the telescopic rod to extend and retract along the axial direction; a first scale is provided on the fixed rod along the axial direction, and a second scale is provided on the axial direction of the rotating handle, and the minimum range of the first scale is the stroke of movement along the axial direction when the rotating handle rotates one circle.

9. The position adjustment assembly according to claim 1, wherein: At least one set of adjustment components includes a first adjustment component and a second adjustment component, the first adjustment component is arranged along a first direction, the second adjustment component is arranged along a second direction, the second direction is perpendicular to the first direction, the fixed seat of the first adjustment component is the movable seat of the second adjustment component, and the movable seat of the second adjustment component is used to move the probe; or, At least one group of adjustment components also includes a first adjustment component, a second adjustment component and a third adjustment component. The first adjustment component is arranged along a first direction, the second adjustment component is arranged along a second direction, the second direction is perpendicular to the first direction, the fixed seat of the first adjustment component is the movable seat of the second adjustment component, the movable seat of the second adjustment component is used to move the probe, the third adjustment component is arranged along a third direction, the third direction is perpendicular to the first direction, the third direction is perpendicular to the second direction, and the movable seat of the third adjustment component is the fixed seat of the second adjustment component.

10. A probe station, characterized in that: The probe station includes a probe, a probe arm and a position adjustment assembly as described in any one of claims 1 to 9, the probe is connected to one end of the probe arm, the movable seat of the position adjustment assembly is connected to the other end of the probe arm, and the position adjustment assembly is used to adjust the position of the probe arm and the probe.

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