Insulator for high-current ion implanter

Abstract

The utility model discloses an insulator for a high-current ion implanter, and the insulator comprises an insulator body and a protection cover, the protection cover comprises a connection part and a protection part which are integrally formed, the connection part is connected to the end part of the insulator body, and the protection part and the insulator body are coaxial and are arranged at an interval. According to the scheme, the problem that the insulation performance of the insulator body is weakened due to the fact that the ion beam passes through the insulator body for a long time in the prior art can be solved.

Description

Technical Field

[0001] The present application relates to the technical field of insulators, and in particular to an insulator for a high current ion implanter. Background Art

[0002] Insulators are devices installed between conductors at different potentials, or between a conductor and a grounded structure, capable of withstanding voltage and mechanical stress. Insulators come in a wide variety of types and shapes and are widely used in various fields.

[0003] For the insulators in high-current ion implanters, since the ion beam will pass through the insulators for a long time during ion implantation, the insulation performance of the insulators will be weakened, which will cause the high-current ion implanter to malfunction and affect production capacity. Utility Model Content

[0004] The present application provides an insulator for a high-current ion implanter, which can solve the problem in the related art that the insulation performance of the insulator is weakened due to the long-term passage of the ion beam.

[0005] An embodiment of the present application provides an insulator for a high-current ion implanter, comprising an insulator body and a protective cover, wherein the protective cover comprises an integrally formed connecting portion and a protective portion, wherein the connecting portion is connected to the end of the insulator body, and the protective portion is coaxial with the insulator body and is spaced apart.

[0006] In some embodiments, an alignment portion is provided on the end surface of the insulator body.

[0007] In some embodiments, the alignment portion is cylindrical with a notch.

[0008] In some embodiments, the axial length of the protection portion is smaller than that of the insulator body.

[0009] In some embodiments, a connection hole is formed on the end surface of the insulator body.

[0010] In some embodiments, the protective cover is detachably connected to the insulator body via a connecting portion.

[0011] In some embodiments, the insulator body and the protective cover are made of polymer resin.

[0012] The technical solution of this application has at least the following advantages:

[0013] 1. By setting a protective cover outside the insulator body, when the high current ion implanter is running, the ion beam directly passing through the insulator body is greatly reduced due to the shielding effect of the protective cover, thus solving the problem of the insulation performance of the insulator body being weakened due to the ion beam passing through the insulator body for a long time. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0015] Figure 1 1 is a schematic structural diagram of an insulator for a high current ion implanter provided by an exemplary embodiment of the present application;

[0016] Figure 2 is a cross-sectional view of an insulator for a high current ion implanter provided by an exemplary embodiment of the present application;

[0017] Figure 3 is a cross-sectional view of another insulator for a high current ion implanter provided by an exemplary embodiment of the present application;

[0018] Figure 4 is a cross-sectional view of another insulator for a high current ion implanter provided by an exemplary embodiment of the present application;

[0019] Figure 5 This is a statistical chart provided by an exemplary embodiment of the present application for reflecting the number of failures of insulators in a high current ion implanter in a production line before and after the insulators in the present application are adopted.

[0020] Explanation of the accompanying reference numerals: 1. insulator body; 2. protective cover; 21. connecting portion; 22. protecting portion; 3. alignment portion; 31. connecting hole. DETAILED DESCRIPTION

[0021] The following is a clear and complete description of the technical solutions in this application in conjunction with the accompanying drawings. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this application.

[0022] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal connections between two components; they can refer to wireless connections or wired connections. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0024] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0025] The present application provides an insulator for a high current ion implanter, referring to Figure 1-3 , which includes an insulator body 1 and a protective cover 2. The insulator body 1 is cylindrical. In other embodiments, the outer peripheral side wall of the insulator body 1 may also be provided with a plurality of shed structures. The protective cover 2 includes an integrally formed connecting portion 21 and a protective portion 22. The connecting portion 21 is connected to one end of the insulator body 1. The connection method of the connecting portion 21 and the insulator body 1 can be as follows: Figure 2 As shown, the end face of the insulator body 1 is connected to the end face of the connecting portion 21; Figure 3 As shown, the connecting portion 21 is annular and connected to the outer peripheral sidewall of the insulator end. The protective portion 22 is coaxially arranged with the insulator body 1. Its axial length is shorter than that of the insulator body 1, thereby shielding a portion of the insulator body 1 while preventing hardware discharge. A gap exists between the protective portion 22 and the insulator body 1 it shields. Due to the presence of the protective portion 22, the amount of ion beam directly passing through the insulator body 1 is significantly reduced, thus resolving the problem of the ion beam's prolonged passage through the insulator body 1, which can weaken the insulation performance of the insulator body 1.

[0026] Furthermore, the insulator body 1 and the protective cover 2 are made of polymer resin to minimize the impact of ion beam bombardment.

[0027] Furthermore, the protective cover 2 and the insulator body 1 can be integrally formed, or, in order to facilitate cleaning of the gap between the protective cover 2 and the insulator body 1, the protective cover 2 can also be configured to be detachably connected to the insulator body 1. Figure 4 A threaded hole can be opened in the connecting portion 21, and a corresponding external thread can be provided on the outer peripheral side wall of the end of the insulator body 1. Through the cooperation of the threaded hole and the external thread, the protective cover 2 and the insulator body 1 can be detachably connected.

[0028] Further, referring to the figure, the end surface of the insulator body 1 away from the mounting portion can be provided with a positioning portion 3 for connecting with relevant components in the high current ion implanter. The positioning portion 3 can be integrally formed with the insulator body 1. The shape of the positioning portion 3 can be specifically set according to actual needs. In this embodiment, referring to Figure 1 The alignment portion 3 can be cylindrical with a notch. The notch notches not only function as a limiter but also as a foolproof mechanism. A connection hole 31 extending through the interior of the insulator body 1 is also provided in the middle of the alignment portion 3. This hole, when combined with external components, further enhances the connection strength. The end face of the mounting portion facing away from the insulator body 1 can also be provided with an alignment structure, which can also be cylindrical with a notch.

[0029] The embodiment of the present application provides an insulator for a high current ion implanter. By providing a protective cover 2 outside the insulator body 1, when the high current ion implanter is in operation, the ion beam directly passing through the insulator body 1 is greatly reduced due to the shielding effect of the protective cover 2, thereby solving the problem of weakening the insulation performance of the insulator body 1 due to the ion beam passing through the insulator body 1 for a long time. Figure 5 As shown, it shows the number of insulator failures in the high current ion implanter in the production line before and after the insulator in the present application is used. The left side of the dotted line is before the insulator in the present application is used, and the right side of the dotted line is after the insulator in the present application is used. It can be found that the number of insulator failures is significantly reduced.

[0030] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of this application.

Claims

1. An insulator for a high current ion implanter, characterized in that: The invention comprises an insulator body (1) and a protective cover (2), wherein the protective cover (2) comprises an integrally formed connecting portion (21) and a protective portion (22), wherein the connecting portion (21) is connected to the end of the insulator body (1), and the protective portion (22) is coaxial with the insulator body (1) and spaced apart.

2. The insulator for a high current ion implanter according to claim 1, wherein: An alignment portion (3) is provided on the end surface of the insulator body (1).

3. The insulator for a high current ion implanter according to claim 2, wherein: The alignment portion (3) is arranged in a cylindrical shape with a notch.

4. The insulator for a high current ion implanter according to claim 1, wherein: The length of the protection portion (22) along the axial direction is smaller than that of the insulator body (1).

5. The insulator for a high current ion implanter according to claim 1, wherein: A connection hole (31) is provided on the end surface of the insulator body (1).

6. The insulator for a high current ion implanter according to claim 1, characterized in that: The protective cover (2) is detachably connected to the insulator body (1) via a connecting portion (21).

7. The insulator for a high current ion implanter according to claim 1, wherein: The insulator body (1) and the protective cover (2) are made of polymer resin.

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