Swing arm assembly, die bonding manipulator and die bonding equipment

Abstract

The utility model relates to the technical field of die bonding equipment, and particularly discloses a swing arm assembly, a die bonding manipulator and die bonding equipment, the swing arm assembly comprises a flat swing arm body, and the upper surface and the lower surface of the swing arm body are streamline curved surfaces. The swing arm assembly, the die bonding manipulator and the die bonding equipment provided by the utility model can effectively solve the problem that the existing swing arm assembly can violently shake when swinging at a high speed.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal bonding equipment, in particular to a swing arm assembly, a crystal bonding manipulator and crystal bonding equipment. Background Art

[0002] A die-bonding robot typically consists of a swing arm assembly, a suction nozzle mounted on one end of the arm assembly, and a swing arm drive mechanism connected to the other end. After the nozzle picks up a chip, the swing arm drive mechanism drives the arm assembly to rotate the nozzle above a support, where the chip is bonded to the support.

[0003] In order to reduce wind resistance, the existing swing arm assembly is usually set to a hollow structure, that is, a plurality of hollow holes are usually provided on the windward surface of the swing arm assembly to reduce the windproof area during the swinging process of the swing arm assembly, thereby reducing the swinging wind resistance.

[0004] When the swing arm assembly swings at a low speed, the hollow holes can reduce wind resistance to a certain extent. However, when the swing arm assembly swings at a high speed, air passes through the hollow holes quickly. The air flow rate at the hollow holes is much greater than the air flow rate above and below the swing arm assembly. The pressure is low in places with high flow rate. This pressure difference will cause the swing arm assembly to vibrate violently, thereby affecting the accuracy of die bonding.

[0005] Therefore, it is necessary to improve the existing swing arm assembly to solve the problem of severe shaking when it swings at high speed.

[0006] The above information disclosed in this Background section is included only for enhancement of understanding of the background of the disclosure and therefore it may contain information that does not form the prior art that is currently known to a person of ordinary skill in the art. Utility Model Content

[0007] One purpose of the present invention is to provide a swing arm assembly, a crystal bonding robot and a crystal bonding device, which can effectively solve the problem that the existing swing arm assembly will vibrate violently when swinging at high speed.

[0008] To achieve the above objectives, the present invention provides a swing arm assembly, a die bonding robot and a die bonding device, comprising a flat swing arm body, wherein the upper surface and the lower surface of the swing arm body are both streamlined curved surfaces.

[0009] Optionally, the upper surface and the lower surface of the swing arm body are symmetrically arranged in the vertical direction with respect to the horizontal plane where the axis of the swing arm body is located;

[0010] and / or,

[0011] Both the upper surface and the lower surface of the swing arm body are arranged bilaterally symmetrically with respect to a vertical plane where the axis of the swing arm body is located.

[0012] Optionally, the cross-sectional shape of the swing arm body on a plane perpendicular to the axis of the swing arm body is elliptical.

[0013] Optionally, the cross-sectional size of the swing arm body gradually decreases from one end to the other end.

[0014] Optionally, an internal cavity and / or an air flow channel is provided inside the swing arm body.

[0015] Optionally, the circumferential surfaces at both ends of the swing arm body are provided with through holes;

[0016] When the air flow channel is provided inside the swing arm body, the through hole is connected to the air flow channel;

[0017] Otherwise, the through hole communicates with the internal cavity.

[0018] Optionally, when the through hole is connected to the internal cavity, an air pipe is further provided in the internal cavity, one end of the air pipe passes through one of the through holes to be connected to the air source device, and the other end passes through another through hole to be connected to the suction nozzle assembly.

[0019] Optionally, the swing arm body is provided with a cable tie through-hole for the cable tie to pass through.

[0020] On the other hand, a die bonding robot is provided, comprising any one of the swing arm assemblies described above, a nozzle assembly mounted on one end of the swing arm assembly, and a swing arm driving mechanism for driving the swing arm assembly to rotate.

[0021] On the other hand, a die bonding device is provided, comprising a support supply mechanism for providing a support, a die supply mechanism for providing a chip, and a die bonding robot for transferring the chip to the support.

[0022] The beneficial effects of the present invention are: providing a swing arm assembly, a crystal bonding robot and a crystal bonding device, wherein the upper surface and the lower surface of the swing arm body are both streamlined curved surfaces, and when the swing arm body is driven to swing at high speed, the airflow will pass from above the upper surface and below the lower surface. Since no hollow structure is provided on the swing arm body, the airflow will not enter the interior of the swing arm assembly and cause airflow chaos, thereby effectively solving the problem of violent shaking of the existing swing arm assembly when swinging at high speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 A schematic structural diagram of the die-bonding robot provided in Example 1;

[0025] Figure 2 A cross-sectional schematic diagram of the die-bonding robot provided in Example 1;

[0026] Figure 3 A schematic structural diagram of the swing arm assembly provided in Example 1;

[0027] Figure 4 A schematic structural diagram of the swing arm assembly provided in Example 2;

[0028] Figure 5 This is a schematic structural diagram of the swing arm assembly provided in Example 3.

[0029] In the picture:

[0030] 1. Swing arm assembly; 101. Swing arm body; 1011. Upper surface; 1012. Lower surface; 1013. Internal cavity; 1014. First through-hole; 1015. Second through-hole; 1016. Airflow channel; 1017. Tie hole; 102. Nozzle mounting portion;

[0031] 2. Nozzle assembly;

[0032] 3. Swing arm drive mechanism;

[0033] 4. Trachea. DETAILED DESCRIPTION

[0034] In order to make the purpose, features, and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0035] In the description of the present invention, it should be understood that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally located component. When a component is considered to be "disposed on" another component, it may be directly disposed on the other component or there may be a centrally located component.

[0036] In addition, the terms "long", "short", "inside", "outside", etc. that indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only used to facilitate the description of the present invention. They do not indicate or imply that the device or component referred to must have this specific orientation or operate in a specific orientation structure, and should not be understood as a limitation of the present invention.

[0037] The present invention will be described in detail below with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional modifications made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0038] The utility model provides a swing arm assembly, a crystal bonding robot and a crystal bonding device, which are suitable for application scenarios of crystal bonding operations and can effectively solve the problem that the existing swing arm assembly will vibrate violently when swinging at high speed.

[0039] Example 1

[0040] In this embodiment, the die bonding equipment includes a support supply mechanism for providing a support, a die supply mechanism for providing a chip, and a die bonding robot for transferring the chip to the support.

[0041] See also Figure 1 and Figure 2 In this embodiment, the crystal bonding robot includes a swing arm assembly 1, a suction nozzle assembly 2 installed at one end of the swing arm assembly 1, a swing arm driving mechanism 3 for driving the swing arm assembly 1 to rotate, and an air pipe 4 connecting the suction nozzle assembly 2 to the air source device.

[0042] Among them, see Figure 3 The swing arm assembly 1 includes a flat swing arm body 101 and a nozzle mounting portion 102 fixed to one end of the swing arm body 101 and used to mount and fix the nozzle assembly 2. The upper surface 1011 and the lower surface 1012 of the swing arm body 101 are both streamlined curved surfaces.

[0043] The swing arm assembly 1 provided in this embodiment has an upper surface 1011 and a lower surface 1012 of the swing arm body 101 which are both streamlined surfaces. When the swing arm body 101 is driven to swing at high speed, the airflow will pass from above the upper surface 1011 and below the lower surface 1012. Since no hollow structure is provided on the swing arm body 101, the airflow will not enter the interior of the swing arm assembly 1 and cause airflow chaos, thereby effectively solving the problem of violent shaking of the existing swing arm assembly 1 when swinging at high speed.

[0044] Optionally, the upper surface 1011 and the lower surface 1012 of the swing arm body 101 are symmetrically arranged in the vertical direction with respect to the horizontal plane where the axis of the swing arm body 101 is located; and / or, the upper surface 1011 and the lower surface 1012 of the swing arm body 101 are both symmetrically arranged in the left-right direction with respect to the vertical plane where the axis of the swing arm body 101 is located. For example, the cross-sectional shape of the swing arm body 101 on a plane perpendicular to the axis of the swing arm body 101 is an ellipse, or both the upper surface 1011 and the lower surface 1012 are parabolic, which is not limited in the present invention.

[0045] It can be understood that the symmetrical arrangement of the upper surface 1011 and the lower surface 1012 is conducive to making the air flow velocity passing from above the upper surface 1011 and below the lower surface 1012 consistent, thereby avoiding the occurrence of up and down swinging of the swing arm assembly 1 due to different flow velocities above and below the swing arm assembly 1.

[0046] In this embodiment, the cross-sectional dimensions of the swing arm body 101 gradually decrease from the end closest to the swing arm drive mechanism 3 to the end closest to the nozzle mounting portion 102. The larger end provides greater structural strength and can be used for connection to the swing arm drive mechanism 3, while the smaller end, which is lighter, can be connected to the nozzle mounting portion 102, thereby maximizing die bonding accuracy.

[0047] In some other embodiments, in order to facilitate the positioning of the suction nozzle mounting portion 102, the lower surface 1012 can be extended in the horizontal direction as a whole, and the upper surface 1011 can gradually tilt downward toward the suction nozzle mounting portion 102 and approach the lower surface 1012 (that is, the upper surface 1011 and the lower surface 1012 are not symmetrically arranged up and down). In this way, the cross-sectional size of the swing arm body 101 can also gradually decrease from the end close to the swing arm drive mechanism 3 to the end close to the suction nozzle mounting portion 102.

[0048] In this embodiment, the interior of the swing arm body 101 is provided with an internal cavity 1013 through which the air supply pipe 4 passes. Furthermore, the circumferential surfaces at both ends of the swing arm body 101 are provided with through holes that connect to the internal cavity 1013 and through which the air supply pipe 4 passes (the through hole near the swing arm drive mechanism 3 is referred to as the "first through hole 1014", and the through hole near the suction nozzle assembly 2 is referred to as the "second through hole 1015"). One end of the air pipe 4 is connected to the air source device, and the other end passes through the first through hole 1014, the internal cavity 1013, and the second through hole 1015 in sequence to connect to the suction nozzle assembly 2.

[0049] The internal cavity 1013 can not only provide a space for accommodating the air pipe 4, but also reduce the weight of the swing arm assembly 1, thereby improving the precision of the die bonding. It should be noted that in the prior art, the air pipe 4 is usually fixed to the outside of the swing arm assembly 1 by cable ties or the like. When the swing arm assembly 1 swings at high speed, the airflow will collide with the air pipe 4, causing the air pipe 4 to shake violently and hit the swing arm assembly 1. The swing arm assembly 1 provided in this embodiment accommodates the air pipe 4 in the internal cavity 1013 of the swing arm body 101. When the swing arm assembly 1 swings at high speed, the airflow cannot enter the internal cavity 1013 and collide with the air pipe 4, thereby further reducing wind resistance and improving the precision of the die bonding.

[0050] In summary, the swing arm assembly 1, die bonding robot, and die bonding equipment provided in this embodiment have the following advantages:

[0051] ① The upper surface 1011 and the lower surface 1012 of the swing arm body 101 are both streamlined curved surfaces. When the swing arm body 101 is driven to swing at high speed, the airflow will pass from above the upper surface 1011 and below the lower surface 1012. Since there is no hollow structure on the swing arm body 101, the airflow will not enter the interior of the swing arm assembly 1 and cause airflow chaos, thereby effectively solving the problem of violent shaking of the existing swing arm assembly 1 when swinging at high speed;

[0052] ② The internal cavity 1013 not only provides a space for accommodating the air pipe 4, but also reduces the weight of the swing arm assembly 1, thereby improving the die bonding accuracy;

[0053] ③ The air pipe 4 is housed in the internal cavity 1013 of the swing arm body 101. When the swing arm assembly 1 swings at high speed, the airflow cannot enter the internal cavity 1013 and hit the air pipe 4, thereby further reducing wind resistance and improving the precision of die bonding.

[0054] Example 2

[0055] This embodiment provides a swing arm assembly, which is suitable for the die bonding robot and die bonding equipment in Example 1.

[0056] See also Figure 4 In this embodiment, an internal cavity 1013 and an air flow channel 1016 are provided inside the swing arm body 101, wherein the first through hole 1014 and the second through hole 1015 on the circumferential surface at both ends of the swing arm body 101 are both connected to the air flow channel 1016.

[0057] Optionally, the internal cavity 1013 and the air flow channel 1016 are formed simultaneously during the production process of the swing arm body 101, for example, 3D printing or die-casting, which not only saves materials but also eliminates the need for hole digging operations in the later stage, thereby improving production efficiency.

[0058] Furthermore, the first through hole 1014 is directly connected to the air source device through a pipe, and the second through hole 1015 is directly connected to the nozzle assembly 2 through a pipe. The air circuit connection is directly made from the outside of the swing arm body 101, which is simple and convenient.

[0059] Compared with Example 1, the swing arm assembly provided in this embodiment has the following advantages:

[0060] ① The internal cavity 1013 and the airflow channel 1016 provide dual weight reduction, which greatly reduces the weight of the swing arm body 101 and is conducive to improving operation accuracy;

[0061] ② The swing arm body 101 has a built-in air flow channel 1016. There is no need to run a pipe from the internal cavity 1013. It only needs to connect the air path from the outside of the swing arm body 101, which is simple and convenient.

[0062] Example 3

[0063] This embodiment provides a swing arm assembly, which is suitable for the die bonding robot and die bonding equipment in Example 1.

[0064] See also Figure 5 In this embodiment, the swing arm body 101 is provided with a tie hole 1017 for passing a tie. The air tube 4 is secured to the exterior of the swing arm body 101, and then secured with a tie. In this embodiment, the tie is sized to match the tie hole 1017. After passing through the tie hole 1017, the tie blocks the hole, preventing airflow from passing through.

[0065] Compared with Example 1, the swing arm assembly provided in this embodiment has the following advantages:

[0066] The air pipe 4 is arranged on the outside of the swing arm body 101 and is fixed with a cable tie, which is simple and convenient.

[0067] It should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation method can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

[0068] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the present invention. They are not intended to limit the scope of protection of the present invention. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A swing arm assembly, characterized in that: It comprises a flat swing arm body (101), wherein the upper surface (1011) and the lower surface (1012) of the swing arm body (101) are both streamlined curved surfaces; The upper surface (1011) and the lower surface (1012) of the swing arm body (101) are symmetrically arranged in the vertical direction with respect to the horizontal plane where the axis of the swing arm body (101) is located; and / or, The upper surface (1011) and the lower surface (1012) of the swing arm body (101) are both arranged bilaterally symmetrically with respect to a vertical plane where the axis of the swing arm body (101) is located; The cross-sectional shape of the swing arm body (101) on a plane perpendicular to the axis of the swing arm body (101) is an ellipse; The cross-sectional dimensions of the swing arm body (101) gradually decrease from one end to the other end.

2. The swing arm assembly according to claim 1, characterized in that: An internal cavity (1013) and / or an air flow channel (1016) is provided inside the swing arm body (101).

3. The swing arm assembly according to claim 2, characterized in that: The circumferential surfaces at both ends of the swing arm body (101) are provided with through holes; When the air flow channel (1016) is provided inside the swing arm body (101), the through hole is connected to the air flow channel (1016); Otherwise, the through hole communicates with the internal cavity (1013).

4. The swing arm assembly according to claim 3, characterized in that: When the through hole is connected to the internal cavity (1013), an air pipe (4) is also provided in the internal cavity (1013), one end of the air pipe (4) passes through one of the through holes to be connected to the air source device, and the other end passes through another through hole to be connected to the suction nozzle assembly (2).

5. The swing arm assembly according to claim 1, characterized in that: The swing arm body (101) is provided with a tie hole (1017) for the tie to pass through.

6. A die-bonding robot, characterized in that: It comprises the swing arm assembly (1) according to any one of claims 1 to 5, a suction nozzle assembly (2) installed at one end of the swing arm assembly (1), and a swing arm driving mechanism (3) for driving the swing arm assembly (1) to rotate.

7. A die bonding device, characterized in that: It comprises a support supply mechanism for providing a support, a crystal supply mechanism for providing a chip, and a crystal bonding robot as described in claim 6 for transferring the chip to the support.

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