Nitrogen supply mechanism of vacuum welding furnace

Abstract

The utility model discloses a nitrogen supply mechanism of a vacuum welding furnace, relates to the technical field of semiconductor welding, and aims to solve the problems that most of the nitrogen supply of the current vacuum furnace adopts Teflon pipes, the cost of the used Teflon pipes is high, the quantity of gas pipes going out is large, the appearance is very influenced, a large number of positions are occupied, the subsequent maintenance is inconvenient, and the production cost is high. The nitrogen supply device comprises a gas supply structure for supplying gas to the vacuum welding furnace, conveying parts are arranged at the head end and the tail end of the vacuum welding furnace, two nitrogen conveying pipes are symmetrically arranged in the conveying parts, a plurality of motor parts are arranged in the vacuum welding furnace at equal intervals, and the motor parts are connected with the conveying parts. The air supply structure comprises an air supply disc and a conveying pipeline connected to the air supply disc, the air supply route and the air supply position are optimized, the problem that the attractiveness is affected due to too many pipelines is greatly solved, occupied work sites are reduced, the service life of the motor is prolonged, and follow-up maintenance is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor welding, and more specifically to a nitrogen supply mechanism for a vacuum welding furnace. Background Art

[0002] At present, with the development of semiconductor technology, electronic technology is developing towards high power, high density and integration, which puts forward higher and more comprehensive reliability requirements for the packaging and welding of high-power devices.

[0003] Existing vacuum furnaces mostly use Teflon tubes for nitrogen supply, which is expensive and requires many gas pipes, significantly affecting the appearance and taking up a lot of space, making subsequent maintenance inconvenient. Furthermore, the nitrogen supply in existing vacuum furnaces is introduced from the side of the furnace body. In view of this, we propose a nitrogen supply mechanism for vacuum welding furnaces. Utility Model Content

[0004] The purpose of the utility model is to overcome the shortcomings of the existing technology, adapt to actual needs, and provide a nitrogen supply mechanism for a vacuum welding furnace to solve the technical problem that most of the current vacuum furnace nitrogen supply uses Teflon tubes, which are expensive, have a large number of air pipes, greatly affect the appearance, occupy a large amount of space, and make subsequent maintenance inconvenient. In addition, the existing vacuum furnace nitrogen supply is to intake air from the side of the furnace body.

[0005] In order to solve the above technical problems, the present utility model provides the following technical solutions: a nitrogen supply mechanism for a vacuum welding furnace, comprising a gas supply structure for supplying gas to the vacuum welding furnace;

[0006] The vacuum welding furnace is provided with a conveying part at both ends, and two nitrogen conveying pipes are symmetrically arranged in the conveying part. A plurality of motor parts are equidistantly arranged in the vacuum welding furnace.

[0007] The gas supply structure includes a gas supply plate and a delivery pipeline connected to the gas supply plate, wherein the delivery pipeline is connected to a plurality of nitrogen delivery pipes and a plurality of motor parts;

[0008] The delivery pipeline includes two gas delivery pipes connected to the gas supply disk, both ends of the gas delivery pipes are connected to a four-way pipe, the two ends of the four-way pipe away from the gas delivery pipe are respectively connected to the two nitrogen delivery pipes, and the remaining ends of the two four-way pipes are connected to the nitrogen pipe body;

[0009] The nitrogen pipe body is provided with two air inlets connected to the four-way pipe and a plurality of air outlets connected to the corresponding nitrogen delivery pipes.

[0010] The utility model optimizes the gas supply route, and the gas supply disk cooperates with two gas pipes to transport nitrogen to four nitrogen delivery pipes and several motor parts respectively. During gas delivery, the nitrogen discharged from the gas supply disk is diverted to the four nitrogen delivery pipes and several motor parts through the gas pipes and the four-way pipe, which greatly reduces the problem of affecting the aesthetics due to too many pipes, reduces the occupation of the work site, and facilitates subsequent maintenance.

[0011] Preferably, the nitrogen delivery pipe includes an oil seal seat fixedly connected to one side of the vacuum welding furnace, and an oil seal is fixedly provided in the oil seal seat.

[0012] Preferably, a motor body is installed on one side of the oil seal seat, and the motor body has a motor shaft rotatably arranged in the oil seal, and a wind wheel is fixedly installed on one end of the motor shaft extending into the vacuum welding furnace.

[0013] Preferably, a copper tube connected to the oil seal is fixedly mounted on one side of the oil seal seat, and one end of the copper tube away from the oil seal is connected to the air outlet.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. The utility model optimizes the gas supply route. The gas supply plate cooperates with two gas pipes to transport nitrogen to four nitrogen delivery pipes and several motor parts respectively. During gas delivery, the nitrogen discharged from the gas supply plate is diverted to the four nitrogen delivery pipes and several motor parts through the gas pipes and the four-way pipe. This greatly reduces the problem of excessive pipelines affecting the appearance, reduces the occupation of the work site, and facilitates subsequent maintenance.

[0016] 2. The present invention also supplies air into the motor part through a nitrogen pipe body having two air inlets and several air outlets in conjunction with several copper tubes to supply air into the corresponding oil seals. The nitrogen entering the oil seal reduces the operating temperature of the motor body and the motor shaft to prevent the service life of the motor body from being shortened due to excessive temperature. In addition, the nitrogen entering the vacuum welding furnace through the oil seal enters around the motor shaft, which is more conducive to the wind wheel to disperse it, making the discharge of nitrogen more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the structure of the utility model in a coordinated state with a vacuum welding furnace;

[0018] Figure 2 This is a schematic diagram of the structure of the motor part and the copper tube in a cross-sectional view of the present invention.

[0019] Description of the numbers in the figure:

[0020] 1. Nitrogen delivery pipe; 2. Motor unit; 3. Nitrogen pipe body; 4. Air supply plate; 5. Air inlet; 6. Air outlet; 7. Oil seal; 8. Motor shaft. DETAILED DESCRIPTION

[0021] like Figures 1 to 2 As shown, the present invention relates to a nitrogen supply mechanism for a vacuum welding furnace, comprising a gas supply structure for supplying gas to the vacuum welding furnace;

[0022] A conveying section is arranged at both ends of the vacuum welding furnace, and two nitrogen delivery pipes 1 are symmetrically arranged in the conveying section. Several motor sections 2 are evenly arranged in the vacuum welding furnace. The gas supply structure includes a gas supply disk 4 and a conveying pipeline connected to the gas supply disk 4. The conveying pipeline is connected to the several nitrogen delivery pipes 1 and the several motor sections 2;

[0023] In an embodiment of the present invention, in order to reduce the problem of too many pipelines affecting the aesthetics, the delivery pipeline includes two air pipes connected to the air supply disk 4, both ends of the air pipes are connected to a four-way pipe, the two ends of the four-way pipe away from the air pipe are respectively connected to the two nitrogen delivery pipes 1, and a nitrogen pipe body 3 is connected between the remaining ends of the two four-way pipes. The nitrogen pipe body 3 has two air inlets 5 connected to the four-way pipes and several air outlets 6 connected to the corresponding nitrogen delivery pipes 1. By optimizing the air supply route, the air supply disk 4 cooperates with the two air pipes to deliver nitrogen to the four nitrogen delivery pipes 1 and several motor parts 2 respectively. During air delivery, the nitrogen discharged from the air supply disk 4 is diverted to the four nitrogen delivery pipes 1 and several motor parts 2 through the air pipe and the four-way pipe, which greatly reduces the problem of too many pipelines affecting the aesthetics, reduces the occupation of the work site, and facilitates subsequent maintenance.

[0024] In an embodiment of the present invention, in order to discharge nitrogen more evenly, a nitrogen delivery pipe 1 includes an oil seal seat fixedly connected to one side of the vacuum welding furnace, and an oil seal 7 is fixedly installed in the oil seal seat. A motor body is installed on one side of the oil seal seat, and the motor body has a motor shaft 8 rotatably arranged in the oil seal 7. An impeller is fixedly installed on one end of the motor shaft 8 extending into the vacuum welding furnace. A copper tube connected to the oil seal 7 is fixedly installed on one side of the oil seal seat, and the end of the copper tube away from the oil seal 7 is connected to the gas outlet 6. By supplying gas to the motor part 2, a nitrogen pipe body 3 with two air inlets 5 and a plurality of air outlets 6 cooperates with a plurality of copper tubes to supply gas to the corresponding oil seals 7 respectively. The nitrogen entering the oil seal 7 reduces the operating temperature of the motor body and the motor shaft 8 to prevent the service life of the motor body from being shortened due to excessive temperature. In addition, the nitrogen entering the vacuum welding furnace through the oil seal 7 enters around the motor shaft 8, which is more conducive to the impeller's wind dispersion, so that the discharge of nitrogen is more even.

[0025] Working principle: This embodiment provides a nitrogen supply mechanism for a vacuum welding furnace. When in use, nitrogen is transported to two four-way pipes respectively through the gas supply disk 4 in conjunction with two gas pipes. The nitrogen is diverted through the four-way pipe so that the nitrogen flows to four nitrogen delivery pipes 1 and several motor parts 2, thereby realizing the optimization of the pipeline. After the nitrogen enters the nitrogen pipe main body 3 through the two air inlets 5, it will be further diverted through several air outlets 6. The diverted nitrogen will flow into the vacuum welding furnace along the motor shaft 8 through the oil seal 7 to reduce the operating temperature of the motor main body and the motor shaft 8, thereby preventing the problem of the motor main body reducing its service life due to excessive temperature. In addition, the nitrogen enters the vacuum welding furnace through the oil seal 7. Since it enters around the motor shaft 8, it is more conducive to the wind wheel to disperse it, so that the discharge of nitrogen is more uniform.

[0026] The embodiments disclosed in the present invention are preferred embodiments, but are not limited to them. Ordinary technicians in this field can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. As long as they do not deviate from the spirit of the present invention, they are all within the scope of protection of the present invention.

Claims

1. A nitrogen supply mechanism for a vacuum welding furnace, characterized in that: It includes a gas supply structure for supplying gas to a vacuum welding furnace; The vacuum welding furnace is provided with a conveying portion at both ends, and two nitrogen conveying pipes (1) are symmetrically arranged in the conveying portion, and a plurality of motor portions (2) are equidistantly arranged in the vacuum welding furnace; The gas supply structure comprises a gas supply disk (4) and a delivery pipeline connected to the gas supply disk (4), wherein the delivery pipeline is connected to a plurality of nitrogen delivery pipes (1) and a plurality of motor parts (2); The delivery pipeline comprises two air delivery pipes connected to the air supply disk (4), both ends of the air delivery pipes are connected to a four-way pipe, the two ends of the four-way pipe away from the air delivery pipe are respectively connected to the two nitrogen delivery pipes (1), and the remaining ends of the two four-way pipes are connected to a nitrogen pipe body (3); The nitrogen pipe body (3) is provided with two air inlets (5) connected to the four-way pipe and a plurality of air outlets (6) connected to the corresponding nitrogen delivery pipes (1).

2. The nitrogen supply mechanism for a vacuum welding furnace according to claim 1, characterized in that: The nitrogen delivery pipe (1) comprises an oil seal seat fixedly connected to one side of the vacuum welding furnace, and an oil seal (7) is fixedly arranged in the oil seal seat.

3. The nitrogen supply mechanism for a vacuum welding furnace according to claim 2, characterized in that: A motor body is installed on one side of the oil seal seat, and the motor body is provided with a motor shaft (8) rotatably arranged in the oil seal (7). The motor shaft (8) extends into the vacuum welding furnace and has a wind wheel fixedly installed on one end.

4. The nitrogen supply mechanism for a vacuum welding furnace according to claim 3, characterized in that: A copper tube connected to the oil seal (7) is fixedly mounted on one side of the oil seal seat, and an end of the copper tube away from the oil seal (7) is connected to the air outlet (6).

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