Wafer body cleaning sewage treatment equipment

Abstract

The utility model discloses wafer body cleaning sewage treatment equipment which comprises a treatment box, a water inlet is formed in the position, close to the top end, of the treatment box, a water outlet is formed in the position, close to the bottom end, of the treatment box, and a sliding groove is formed in the treatment box; the wafer body cleaning sewage treatment equipment further comprises a side wall moving assembly, the side wall moving assembly comprises a fixing rod which is arranged in the treatment box and fixedly connected with the treatment box, a sliding sleeve is slidably connected to the fixing rod, and a sliding rod with one end fixedly connected with the sliding sleeve is arranged on the sliding sleeve. The problems that when a flocculating agent and sewage are mixed originally, spiral stirring and other modes are usually utilized, floccules just coagulated can be easily sheared and degraded by blades rotating at a high speed, the impurity coagulation condition becomes poor, the impurity precipitation effect is not ideal, and the sewage treatment efficiency becomes poor are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of sewage treatment, in particular to a wafer cleaning sewage treatment device. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and then doped with silicon crystal seeds, which are then slowly pulled out to form cylindrical single crystal silicon. The silicon crystal rod is ground, polished, and sliced to form a silicon wafer, which is also a wafer body. The main processing methods for wafers are sheet processing and batch processing, that is, processing one or more wafers at the same time. As the feature size of semiconductors becomes smaller and smaller, processing and measurement equipment becomes more and more advanced, resulting in new data characteristics in wafer processing. At the same time, the reduction in feature size increases the impact of the number of particles in the air on the quality and reliability of the wafer after processing.

[0003] At present, wafer surface cleaning technology has a lot of problems. Pollutants such as dust, organic residues and metal ions on the wafer surface, even at the nanometer level, can affect device performance and even cause failure. Therefore, efficient and non-destructive cleaning technology has become the focus of industry attention. Currently, wet cleaning combined with physical energy such as ultrasound and megasonic waves, as well as the precise selection of chemical reagents, constitutes the mainstream cleaning strategy.

[0004] After cleaning is completed, the cleaning wastewater will be collected and treated in a unified manner. Flocculants are usually used. By adding the flocculants into the treatment pool, the fine particles and impurities in the water are gathered into large flocs, thereby purifying the wastewater. However, when the flocculants and sewage are mixed, spiral stirring is usually used, which can easily cause the newly condensed flocs to be sheared and degraded by the high-speed rotating blades, making the impurity coagulation worse, further resulting in unsatisfactory impurity precipitation effect and poor wastewater treatment efficiency. For this reason, we propose a wafer cleaning wastewater treatment equipment. Utility Model Content

[0005] The purpose of the present invention is to provide a wafer cleaning wastewater treatment device to solve the problems raised in the above background technology.

[0006] The top end of the sliding panel also is provided with an interlocking structure, and the interlocking structure and the like are connected with each other to form a circle which is close to the top of the sliding panel and the other end is connected with a circle which is close to the top of the sliding panel.

[0007] Preferably, the side wall moving assembly includes a rectangular block arranged on the sliding rod and slidably connected thereto, a connecting block is rotatably connected above the rectangular block, the top of the processing box is rotatably connected to a power shaft, the bottom of the power shaft is fixedly connected to the rotating block, the rotating block is slidably connected to a swing rod, one end of the swing rod is fixedly connected to the connecting block, a spring sleeved on the swing rod is provided between the connecting block and the rotating block, a fixed shaft is fixedly connected to the connecting block, a telescopic rod is provided between the fixed shaft and the power shaft, the power shaft is connected to a power mechanism located at the top end of the outside of the processing box, and a driving mechanism connected to the soft mixing assembly is provided at the bottom end of the rectangular block.

[0008] Preferably, the power mechanism includes a mounting base provided on the top of the processing box and fixedly connected thereto, a motor is fixedly connected to the mounting base, and an output end of the motor is fixedly connected to the power shaft.

[0009] Preferably, the driving mechanism includes a driving rod arranged at the bottom end of the rectangular block and fixedly connected to it at one end, a movable slot is provided on the driving rod, and a swing plate is rotatably connected to it through the movable slot, and a push plate is provided at the bottom end of the driving rod with one end fixedly connected to it.

[0010] Preferably, the soft mixing assembly includes a rotating seat arranged at the bottom end of the processing box and fixedly connected to the rotating column. A matching plate adapted to the push plate is fixedly connected to the rotating seat, which is conducive to driving the rotating column to rotate through the rotation of the rotating seat.

[0011] Preferably, one end of the swing arm away from the connecting block is fixedly connected to a blocking block, which is conducive to a more stable connection between the swing arm and the rotating block.

[0012] Preferably, the end of the pushing plate in contact with the matching plate is configured to be bent, which helps the pushing plate to push the matching plate more stably, improves the degree of fit between the two, and further mixes the flocculant with impurities in the sewage.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] The utility model effectively solves the problem that when flocculants and sewage are mixed, spiral stirring and the like are usually used, which easily causes the newly condensed flocs to be sheared and degraded by high-speed rotating blades, making the impurity condensation worse, further leading to unsatisfactory impurity precipitation effect and poor sewage treatment efficiency. The side wall moving component is operated to make the rectangular block and the driving rod move in a rectangular track in the treatment box, and finally the swing plate in the movable groove is continuously swung, close to the inner side wall of the treatment box, and gently moves the sewage, and at the same time drives the soft mixing component to operate, gently stirs the middle part of the sewage, mixes the flocculant with the impurities in the sewage, prevents the condensed impurities from being destroyed, and improves the sewage treatment efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the overall internal structure of the processing box of the utility model;

[0017] Figure 3 for Figure 2 Enlarged view of area A in the middle;

[0018] Figure 4 This is a schematic diagram of the overall internal structure of the processing box of the utility model from another perspective;

[0019] Figure 5 This is a schematic diagram of the structure coordination between the side wall moving component and the soft mixing component of the utility model;

[0020] Figure 6 for Figure 5 Enlarged view of area B in the middle;

[0021] Figure 7 This is a schematic diagram of the partial structure of the side wall moving component of the utility model;

[0022] Figure 8 This is a schematic diagram of the coordination between the driving mechanism and the soft mixing component structure of the utility model.

[0023] In the figure: 1-processing box; 2-water inlet; 3-water outlet; 4-sliding groove; 5-side wall moving component; 6-fixed rod; 7-sliding sleeve; 8-sliding rod; 9-sliding block; 10-soft mixing component; 11-rotating column; 12-arc plate; 13-rectangular block; 14-connecting block; 15-power shaft; 16-rotating block; 17-swinging rod; 18-spring; 19-fixed shaft; 20-telescopic rod; 21-power mechanism; 22-driving mechanism; 23-mounting seat; 24-motor; 25-driving rod; 26-movable notch; 27-swinging plate; 28-pushing plate; 29-rotating seat; 30-matching plate. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] See also Figure 1-8 The utility model provides a technical solution: a wafer cleaning wastewater treatment equipment, including a treatment box 1, a water inlet 2 is provided near the top of the treatment box 1, and a water outlet 3 is provided near the bottom. A sliding groove 4 is opened inside the treatment box 1; it also includes a side wall moving assembly 5, the side wall moving assembly 5 includes a fixed rod 6 arranged inside the treatment box 1 and fixedly connected thereto, a sliding sleeve 7 is slidably connected to the fixed rod 6, the sliding sleeve 7 is provided with a sliding rod 8 fixedly connected thereto at one end, and the other end of the sliding rod 8 is fixedly connected to the sliding groove 4. The sliding rod 8 and the fixed rod 6 are arranged in a vertical state. The side wall moving assembly 5 is arranged in the treatment box 1 and connected to the top end of its exterior; a soft mixing assembly 10, the soft mixing assembly 10 is arranged at the bottom end of the treatment box 1 and connected to the side wall moving assembly 5, which includes a rotating column 11 arranged at the bottom end of the treatment box 1 and rotatably connected thereto, and a plurality of groups of arc plates 12 for mixing are fixedly connected to the rotating column 11.

[0026] The side wall moving assembly 5 includes a rectangular block 13 arranged on the sliding rod 8 and slidably connected thereto, a connecting block 14 is rotatably connected above the rectangular block 13, a power shaft 15 is rotatably connected to the top of the processing box 1, a rotating block 16 is fixedly connected to the bottom end of the power shaft 15, and a swinging rod 17 is slidably connected to the rotating block 16. One end of the swinging rod 17 is fixedly connected to the connecting block 14, and a spring 18 sleeved on the swinging rod 17 is provided between the connecting block 14 and the rotating block 16. A fixed shaft 19 is fixedly connected to the connecting block 14, and a telescopic rod 20 is provided between the fixed shaft 19 and the power shaft 15. The power shaft 15 is connected to a power mechanism 21 located at the top end of the outside of the processing box 1, and a spring 18 connected to the soft mixing assembly 10 is provided at the bottom end of the rectangular block 13. The driving mechanism 22 and the power mechanism 21 include a mounting base 23 arranged at the top of the processing box 1 and fixedly connected thereto, a motor 24 is fixedly connected to the mounting base 23, and the output end of the motor 24 is fixedly connected to the power shaft 15. The driving mechanism 22 includes a driving rod 25 arranged at the bottom end of the rectangular block 13 and fixedly connected thereto at one end, a movable slot 26 is provided on the driving rod 25, and a swing plate 27 is rotatably connected thereto through the movable slot 26, and a pushing plate 28 is provided at the bottom end of the driving rod 25, wherein, in order to make the connection between the swing rod 17 and the rotating block 16 more stable, a blocking block is fixedly connected to the end of the swing rod 17 away from the connecting block 14 to prevent the swing rod 17 from moving out of the rotating block 16.

[0027] The soft mixing assembly 10 includes a rotating seat 29 arranged at the bottom end of the interior of the processing box 1 and fixedly connected to the rotating column 11. A matching plate 30 adapted to the push plate 28 is fixedly connected to the rotating seat 29. In addition, in order to enable the pushing plate 28 to push the matching plate 30 more stably, the end of the pushing plate 28 that contacts the matching plate 30 is set to a bent shape to improve the degree of adaptation between the two, thereby driving the rotating seat 29 and the rotating column 11 to rotate.

[0028] After the wafers are cleaned, the wastewater generated is collected and enters the treatment box 1 through the water inlet 2. After the flocculant is added, in order to mix the flocculant with the wastewater, the motor 24 on the mounting seat 23 is controlled to operate. The motor 24 drives the power shaft 15 to rotate through the output end. At this time, the telescopic rod 20 rotates with the power shaft 15 as the center of the circle, and the other end of the telescopic rod 20 drives the fixed shaft 19 to rotate. The connecting block 14 connected to the bottom end of the fixed shaft 19 also rotates at the same time. At the same time, the connecting block 14 cooperates with the rotating block 16 to drive the swing rod 17 to rotate, and the rectangular block 13 below the connecting block 14 is driven to move. The rectangular block 13 slides on the sliding rod 8. During this process, the rectangular block 13 and the connecting block 14 continue to rotate until the rectangular block 13 moves to the end of the sliding rod 8. The power shaft 15 continues to rotate, driving the sliding sleeve 7 to slide on the fixed rod 6, and the sliding block 9 cooperates and slides in the sliding groove 4. At this time, the swing rod 17 slides with the rotating block 16, the spring 18 cooperates, and the telescopic rod 20 cooperates to extend and retract. When the sliding sleeve 7 slides to the end of the fixed rod 6, the rectangular block 13 slides to the other end on the sliding rod 8. After the rectangular block 13 reaches the end of the sliding rod 8, the sliding sleeve 7 slides to the other end on the fixed rod 6 again, and continuously reciprocates, eventually causing the rectangular block 13 to continuously move in the rectangular track in the treatment box 1, and the driving rod 25 at the bottom end of the moving block follows and moves. During the movement of the driving rod 25, the swing plate 27 in the movable notch 26 continuously swings, close to the inner side wall of the treatment box 1, and gently moves the sewage.

[0029] When the driving rod 25 follows the rectangular rod to move in the rectangular track, the driving plate at the bottom end of the driving rod 25 follows and moves. The end of the driving plate away from the driving rod 25 contacts the matching plate 30 and pushes the matching plate 30. The matching plate 30 drives the rotating seat 29 to rotate. The rotating seat 29 then drives the rotating column 11 to rotate. The arc plate 12 on the rotating column 11 is driven and rotates slowly in the middle of the treatment box 1 to stir the sewage, mix the flocculant with the impurities in the sewage, prevent the condensed impurities from being destroyed, and improve the sewage treatment efficiency.

[0030] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer cleaning wastewater treatment device, characterized in that: include: A treatment box (1), wherein the treatment box (1) is provided with a water inlet (2) near the top end and a water outlet (3) near the bottom end, and a sliding groove (4) is provided inside the treatment box (1); Also includes: A side wall moving assembly (5), the side wall moving assembly (5) includes a fixed rod (6) arranged inside the processing box (1) and fixedly connected thereto, a sliding sleeve (7) being slidably connected to the fixed rod (6), a sliding rod (8) being provided on the sliding sleeve (7) with one end fixedly connected thereto, a sliding block (9) being adapted to the sliding groove (4) being fixedly connected to the other end of the sliding rod (8), the sliding rod (8) being arranged in a vertical state with respect to the fixed rod (6), and the side wall moving assembly (5) being arranged in the processing box (1) and connected to the external top end thereof; A soft mixing assembly (10) is provided at the bottom end of the interior of the treatment box (1) and connected to the side wall moving assembly (5), comprising a rotating column (11) provided at the bottom end of the interior of the treatment box (1) and rotatably connected thereto, wherein a plurality of groups of arc-shaped plates (12) for mixing are fixedly connected to the rotating column (11).

2. The wafer cleaning wastewater treatment equipment according to claim 1, characterized in that: The side wall moving assembly (5) includes a rectangular block (13) arranged on the sliding rod (8) and slidably connected thereto, a connecting block (14) is rotatably connected to the top of the rectangular block (13), a power shaft (15) is rotatably connected to the top of the processing box (1), a rotating block (16) is fixedly connected to the bottom end of the power shaft (15), and the rotating block (16) is slidably connected to a swing rod (17), one end of the swing rod (17) is fixedly connected to the connecting block (14), and the connecting block (1 4) and the rotating block (16) are provided with a spring (18) sleeved on the swing rod (17); a fixed shaft (19) is fixedly connected to the connecting block (14); a telescopic rod (20) is provided between the fixed shaft (19) and the power shaft (15); the power shaft (15) is connected to a power mechanism (21) located at the top end of the outside of the processing box (1); and a driving mechanism (22) connected to the soft mixing component (10) is provided at the bottom end of the rectangular block (13).

3. The wafer cleaning wastewater treatment equipment according to claim 2, characterized in that: The power mechanism (21) comprises a mounting seat (23) arranged on the top of the processing box (1) and fixedly connected thereto, a motor (24) is fixedly connected to the mounting seat (23), and an output end of the motor (24) is fixedly connected to the power shaft (15).

4. The wafer cleaning wastewater treatment equipment according to claim 3, characterized in that: The driving mechanism (22) includes a driving rod (25) arranged at the bottom end of the rectangular block (13) and fixedly connected to the rectangular block (13) at one end. The driving rod (25) is provided with a movable notch (26) and is rotatably connected to a swing plate (27) through the movable notch (26). The bottom end of the driving rod (25) is provided with a push plate (28) fixedly connected to the rectangular block (13).

5. The wafer cleaning wastewater treatment equipment according to claim 4, characterized in that: The soft mixing assembly (10) comprises a rotating seat (29) arranged at the bottom end of the interior of the processing box (1) and fixedly connected to the rotating column (11); a matching plate (30) adapted to the pushing plate (28) is fixedly connected to the rotating seat (29).

6. The wafer cleaning wastewater treatment equipment according to claim 2, characterized in that: One end of the swing rod (17) away from the connecting block (14) is fixedly connected to a blocking block.

7. The wafer cleaning wastewater treatment equipment according to claim 5, characterized in that: One end of the pushing plate (28) that contacts the matching plate (30) is configured to be bent.

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