Aluminum oxide preparation equipment and aluminum oxide film

Abstract

According to the aluminum oxide preparation equipment and the aluminum oxide film, the aluminum oxide preparation equipment comprises a vacuum cavity, an evaporation tank is arranged in the vacuum cavity, an evaporation boat and an air supply pipe are arranged on the evaporation tank, an air outlet of the air supply pipe is located above the evaporation boat, and an air outlet of the air supply pipe is located above the evaporation boat. And the air outlet direction of the air outlet of the air supply pipe is consistent with the evaporation direction of aluminum metal evaporation of the evaporation boat. The air supply pipe is arranged above the evaporation boats, and the air outlet of the air supply pipe faces upwards, so that on one hand, the air outlet cannot be blocked, and on the other hand, the binding force of aluminum oxide and a film can be improved due to the fact that the air outlet direction is consistent with the aluminum metal evaporation direction; on the other hand, alumina particles do not collide with each other and combine into large particles to sweep through the film, and the formed alumina is more uniform.

Description

Technical Field

[0001] The utility model relates to the field of aluminum oxide product manufacturing, in particular to an aluminum oxide preparation device and an aluminum oxide film. Background Art

[0002] Vacuum evaporation is currently the primary method for forming aluminum oxide films. Vacuum evaporation, or simply evaporation, involves evaporating the coating material (or film material) under vacuum conditions using a specific heating evaporation method, causing the vaporized particles to fly to the substrate surface and condense into a film. Evaporation is an older and more widely used vapor deposition technology, offering advantages such as simple film formation, high film purity and density, and unique film structure and properties.

[0003] The current method for forming aluminum oxide on a thin film is mainly to input oxygen into the vacuum evaporation equipment while evaporating aluminum metal, thereby forming an aluminum oxide film on the thin film. However, the current oxygen delivery pipe for inputting oxygen is annular, and the air outlet is located on the inner side of the ring. For example, a vacuum aluminum plating machine disclosed in the patent with publication number CN217781264U includes a vacuum box, a vacuum pump and a gas conveyor. The interior of the vacuum box is provided with a unwinding roller, a coating drum and a winding roller in sequence along the film conveying direction, baffles are provided on both sides of the coating drum, the unwinding roller and the winding roller are located above the baffles, and a base that can be raised and lowered is provided inside the vacuum box. An evaporation boat is fixed on the upper part of the base, and an aluminum material is provided on the upper part of the evaporation boat. The aluminum material is located below the baffle, and an evaporation space is formed between the aluminum material and the coating drum. The vacuum pump is connected to the interior of the vacuum box through a vacuum pipe, and the gas conveyor includes a gas delivery pipe connected to the evaporation space, and a mixed gas of oxygen and nitrogen flows in the gas delivery pipe. The utility model improves the mixing effect of aluminum, nitrogen and oxygen by pre-mixing nitrogen and oxygen, and adjusts the position of the evaporation boat by the screw rod, which is conducive to improving the aluminum plating effect. This vacuum aluminum plating machine has the following shortcomings:

[0004] 1. When the air outlet is located inside the ring, the air outlet is easily blocked when the evaporated aluminum particles move upward;

[0005] 2. The gas outlet is located inside the ring, and the gas moves horizontally, which will cause the formed aluminum oxide to be uneven on the film;

[0006] 3. The air outlet is located inside the ring, resulting in insufficient bonding between the alumina and the film;

[0007] 4. The air outlet is located inside the ring, which will cause multiple evaporated aluminum oxide particles to oxidize and combine, and it is easy for the combined particles to burn through the film. Utility Model Content

[0008] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide an alumina preparation device and an alumina membrane, which changes the design of the annular oxygen delivery pipe.

[0009] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0010] The utility model provides an aluminum oxide preparation device, comprising a vacuum cavity, an evaporation tank being provided in the vacuum cavity, an evaporation boat and an air supply pipe being provided on the evaporation tank, an air outlet of the air supply pipe being located above the evaporation boat, and an air outlet direction of the air outlet of the air supply pipe being consistent with the evaporation direction of aluminum metal evaporated by the evaporation boat.

[0011] Furthermore, in the alumina preparation equipment, a plurality of parallel evaporation boats are provided in the evaporation tank. In the horizontal plane, the evaporation boats have two rows, namely a front evaporation group and a rear evaporation group. The front evaporation group and the rear evaporation group are staggered front and back. The evaporation boats of the front evaporation group and the evaporation boats of the rear evaporation group are arranged adjacent to each other one by one, and adjacent evaporation boats are arranged at intervals.

[0012] Furthermore, in the alumina preparation equipment, the offset distance between the front evaporation group and the rear evaporation group is 1 cm to 5 cm.

[0013] Furthermore, in the alumina preparation equipment, the end of the air supply pipe where the air outlet is located extends upward from the bottom of the evaporation tank through the gaps between adjacent evaporation boats.

[0014] Furthermore, in the alumina preparation equipment, the air supply pipe is N-shaped.

[0015] Furthermore, the alumina preparation equipment has multiple air supply pipes, and the evaporation tank is provided with multiple notches for carrying the air supply pipes. The air supply pipes pass through the notches, and the multiple notches are arranged in a row, and the air supply pipes are arranged in a one-to-one correspondence with the notches.

[0016] Furthermore, in the alumina preparation equipment, wire feeding slots for aluminum wire to pass through are provided between adjacent notches on the evaporation tank.

[0017] Furthermore, in the alumina preparation equipment, the distance between the gas outlet and the evaporation boat below is 1 cm to 10 cm.

[0018] The utility model also provides a method for preparing an aluminum oxide film based on the above-mentioned aluminum oxide preparation equipment, comprising:

[0019] Evacuate the vacuum chamber;

[0020] The evaporation boat is heated to 1000-1100°C;

[0021] Oxygen is delivered to the vacuum chamber through the air supply pipe, and the evaporation boat is heated again to 1100℃-1200℃. The evaporated aluminum metal and oxygen react on the film above the evaporation boat to form an aluminum oxide layer.

[0022] Furthermore, in the aluminum oxide film preparation method, in the step of "heating the evaporation boat to 1000°C-1100°C", the evaporation boat is heated to 1000°C-1100°C and the temperature is kept at this temperature for 4-5 minutes.

[0023] Furthermore, in the aluminum oxide film preparation method, the heating rate of the evaporation boat of the front evaporation group is 10-20s slower than that of the evaporation boat of the rear evaporation group.

[0024] The utility model also provides an aluminum oxide film prepared by an aluminum oxide preparation device, comprising a thin film layer. The upper and lower surfaces of the thin film layer are both provided with an aluminum oxide layer, and the thickness of the aluminum oxide layer is 30nm-60nm.

[0025] Furthermore, in the aluminum oxide film, in the aluminum oxide layer, aluminum oxide accounts for 90-99.8%, and aluminum particles account for 0.2-10%.

[0026] Furthermore, in the aluminum oxide film, the density of the aluminum oxide layer is greater than the density of the thin film layer, and the density of the aluminum oxide layer is 2-4 times the density of the support layer.

[0027] Compared to the prior art, the present invention provides an aluminum oxide preparation device and an aluminum oxide film, wherein the aluminum oxide preparation device includes a vacuum chamber, an evaporation tank is provided in the vacuum chamber, an evaporation boat and an air supply pipe are provided on the evaporation tank, the air outlet of the air supply pipe is located above the evaporation boat, and the outlet direction of the air supply pipe is consistent with the evaporation direction of the aluminum metal evaporated by the evaporation boat. The present invention arranges the air supply pipe above the evaporation boat, with the air outlet of the air supply pipe facing upward. This arrangement prevents the air outlet from being blocked, and improves the bonding strength between the aluminum oxide and the film because the direction of gas outflow is consistent with the evaporation direction of the aluminum metal. Furthermore, the aluminum oxide particles will not collide with each other and combine into large particles to sweep through the film, and the formed aluminum oxide is more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0029] Figure 1 This is a schematic structural diagram of an evaporation tank at an angle of the alumina preparation equipment provided by the present invention.

[0030] Figure 2 This is a schematic structural diagram from another angle of the evaporation tank of the alumina preparation equipment provided by the utility model.

[0031] Description of reference numerals:

[0032] Evaporation tank 101

[0033] Evaporation boat 102

[0034] Air supply pipe 103

[0035] Air outlet 104

[0036] Front row evaporation group 105

[0037] Rear evaporation group 106

[0038] Gap 107

[0039] Aluminum wire 108

[0040] Wire feeding slot 109 DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0042] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0043] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features specified as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0044] like Figure 1 and Figure 2 As shown, the present invention provides an aluminum oxide production device, including a vacuum chamber, an evaporation tank 101 disposed within the vacuum chamber, an evaporation boat 102 and an air supply pipe 103 disposed on the evaporation tank 101, an air outlet 104 of the air supply pipe 103 located above the evaporation boat 102, and the direction of gas discharge from the air supply pipe 103 is consistent with the evaporation direction of aluminum metal evaporated by the evaporation boat 102. In this application, the air supply pipe 103 is disposed above the evaporation boat 102, with the air outlet 104 of the air supply pipe 103 facing upward. This arrangement prevents the air outlet 104 from being blocked, and improves the bonding strength between the aluminum oxide and the film because the direction of gas discharge is consistent with the evaporation direction of the aluminum metal. Furthermore, the aluminum oxide particles do not collide with each other and combine to form large particles that sweep through the film, and the formed aluminum oxide is more uniform. A film roll is generally disposed above the evaporation boat 102 for unrolling the film above the evaporation boat 102 to facilitate evaporation and coating.

[0045] Furthermore, the aluminum oxide preparation equipment provided by the present invention is provided with a plurality of parallel evaporation boats 102 in the evaporation tank 101. In the horizontal plane, the evaporation boats 102 have two rows, namely a front evaporation group 105 and a rear evaporation group 106. The front evaporation group 105 and the rear evaporation group 106 are staggered front and back. The evaporation boats 102 of the front evaporation group 105 and the evaporation boats 102 of the rear evaporation group 106 are arranged adjacent to each other one by one, and adjacent evaporation boats 102 are arranged at intervals. In the present invention, an evaporation boat 102 is provided on the inner wall of the evaporation tank 101. The evaporation boat 102 is located on one side of the inner wall of the evaporation tank 101. The evaporation boat 102 is arranged in two rows on a horizontal plane, and the evaporation boats 102 in each row are arranged alternately front to back. This not only increases the evaporation amount and improves the efficiency, but also the up-and-down staggered layout can greatly improve the uniformity of aluminum oxide on the film, preventing the aluminum oxide from being thicker in some areas and thinner in some areas. In addition, the front-and-back staggered layout can increase the accommodation space of the evaporation tank 101 and improve the space utilization rate of the evaporation tank 101.

[0046] Furthermore, in the aluminum oxide production equipment provided by the present invention, the offset distance between the front evaporation group 105 and the rear evaporation group 106 is 1 cm to 5 cm. The distance between the front evaporation boat 102 and the rear evaporation boat 102 is 1 cm to 5 cm. A distance greater than this value will increase the unevenness of the aluminum oxide on the film. This is because as the vertical distance between the evaporation boats 102 increases, the evaporated aluminum particles travel a greater distance upward. Under the premise of a constant film travel speed, when the film passes the upper evaporation boat 102 of the adjacent upper and lower evaporation boats 102, the aluminum particles on the upper evaporation boat 102 will reach it first, and the aluminum particles on the lower evaporation boat 102 will be layered on the particles on the upper evaporation boat 102, resulting in an uneven film.

[0047] Furthermore, in the aluminum oxide production equipment provided by the present invention, the end of the air supply pipe 103 where the air outlet 104 is located extends upward from the bottom of the evaporation tank 101 through the gap between adjacent evaporation boats 102. Furthermore, in the aluminum oxide production equipment provided by the present invention, the air supply pipe 103 is N-shaped. Furthermore, in the aluminum oxide production equipment provided by the present invention, there are multiple air supply pipes 103, and the evaporation tank 101 is provided with multiple notches 107 for carrying the air supply pipes 103. The air supply pipes 103 pass through the notches 107, and the multiple notches 107 are arranged in a row, and the air supply pipes 103 are arranged one-to-one with the notches 107. The notches 107 are provided mainly to support the air supply pipes 103. Furthermore, in the alumina preparation equipment provided by the present invention, wire feeding slots 109 for passing aluminum wire 108 are provided between adjacent notches 107 on the evaporation tank 101 , and the wire feeding slots 109 prevent the aluminum wire 108 from swinging due to softening at high temperature.

[0048] Furthermore, in the aluminum oxide production equipment provided by the present invention, the distance between the gas outlet 104 and the evaporation boat 102 below is 1 cm to 10 cm, so that the particles formed by the evaporation boat 102 below will not burn through the film under the influence of oxygen.

[0049] The utility model also provides a method for preparing an aluminum oxide film based on the above-mentioned aluminum oxide preparation equipment, comprising:

[0050] Evacuate the vacuum chamber;

[0051] The evaporation boat 102 is heated to 1000° C.-1100° C.;

[0052] Oxygen is delivered to the vacuum chamber through the gas delivery pipe 103 , and the evaporation boat 102 is heated again to 1100° C.-1200° C. The evaporated aluminum metal reacts with oxygen to form an aluminum oxide layer on the film above the evaporation boat 102 .

[0053] Specifically, in the method for preparing an aluminum oxide film provided by the present invention, in the step of "heating the evaporation boat 102 to 1000°C-1100°C", the evaporation boat 102 is heated to 1000°C-1100°C for 4-5 minutes. The present application first evacuates the vacuum chamber, heats the evaporation boat 102 to a temperature of 1000-1100 degrees, and first feeds a wire into the evaporation boat 102 so that the evaporation boat 102 is filled with molten aluminum liquid. The purpose of this step is to help stabilize the evaporation rate and prevent aluminum liquid from splashing. This step is maintained for 4-5 minutes, and then the temperature is continued to rise while oxygen is turned on to reach a temperature of 1100-1200 degrees. Oxygen is then allowed to enter the upper part of the evaporation boat 102 through the oxygen delivery pipe, ultimately forming an aluminum oxide layer on the film.

[0054] Furthermore, in the aluminum oxide film preparation method provided by the present invention, the heating rate of the evaporation boats 102 in the front evaporation group 105 is 10-20 seconds slower than that of the evaporation boats 102 in the rear evaporation group 106. This compensates for the vertical distance difference between the front and rear evaporation groups 105, 106, ensuring that the aluminum metal in the front and rear evaporation boats 102 reaches the film surface at the same speed after melting, thereby improving the uniformity of the aluminum oxide on the film surface.

[0055] The utility model also provides an aluminum oxide film prepared by an aluminum oxide preparation device, comprising a thin film layer. The upper and lower surfaces of the thin film layer are both provided with an aluminum oxide layer, and the thickness of the aluminum oxide layer is 30nm-60nm.

[0056] Further, the alumina film provided by the present invention, in the alumina layer, alumina accounts for 90-99.8%, and aluminum particles account for 0.2-10%. The alumina film obtained by the alumina preparation equipment of the present application has a high aluminum oxide content and good thermal conductivity. Since the aluminum particles account for 0.2-10%, aluminum metal will be formed on the above-mentioned alumina film later, and there will be a cold welding effect between the same metals. Therefore, when the aluminum metal and the aluminum particles in the alumina come into contact, the aluminum metal will penetrate each other, thereby strengthening the bonding force between the aluminum metal layer and the alumina layer. The film layer material can be a film made of materials such as polyamide, polyterephthalate, polyimide, polyethylene, polypropylene, polystyrene, polyvinyl chloride, acrylonitrile-butadiene-styrene copolymer, polybutylene terephthalate, poly(p-phenylene terephthalamide), polypropylene, polyoxymethylene, epoxy resin, phenolic resin, polytetrafluoroethylene, polyvinylidene fluoride, silicone rubber, and polycarbonate.

[0057] In this application, PP film is preferred as the thin film layer because it is more acid- and alkali-resistant and, together with the coating structure of this application, can significantly increase the service life of the current collector of this application. The PP film of this application is preferably 3μm-8μm, which can reduce the weight of the current collector of this application and improve the energy density of the battery. Furthermore, the aluminum oxide film provided by this utility model has a density greater than that of the thin film layer, and the density of the aluminum oxide layer is 2-4 times that of the support layer. This design helps prevent foreign matter from entering the support layer.

[0058] In summary, the present invention provides an aluminum oxide preparation device, comprising a vacuum chamber, an evaporation tank disposed within the vacuum chamber, an evaporation boat and an air supply pipe disposed on the evaporation tank, an air outlet of the air supply pipe being located above the evaporation boat, and an air outlet direction of the air supply pipe being consistent with the evaporation direction of aluminum metal evaporated by the evaporation boat. The present application arranges the air supply pipe above the evaporation boat, with the air outlet of the air supply pipe facing upward. This arrangement prevents the air outlet from being blocked, and improves the bonding strength between the aluminum oxide and the film because the direction in which the gas comes out is consistent with the evaporation direction of the aluminum metal. Furthermore, the aluminum oxide particles do not collide with each other and combine to form large particles that sweep through the film, and the formed aluminum oxide is more uniform.

[0059] Moreover, the utility model also provides an aluminum oxide film preparation method based on the above-mentioned aluminum oxide preparation equipment. First, the vacuum chamber is evacuated, and the evaporation boat is heated to a temperature of 1000-1100 degrees. Wire is first fed into the evaporation boat so that the evaporation boat is filled with molten aluminum liquid. The function of this step is to help stabilize the evaporation rate and prevent aluminum liquid from splashing. This step is maintained for 4-5 minutes, and then the temperature is continued to rise. At the same time, oxygen is turned on to make the temperature reach 1100-1200 degrees, so that oxygen enters the upper part of the evaporation boat through the oxygen delivery pipe, and finally an aluminum oxide layer is formed on the film.

[0060] In addition, the present invention also provides an aluminum oxide film prepared by an aluminum oxide preparation device, including a thin film layer, wherein the upper and lower surfaces of the thin film layer are both provided with an aluminum oxide layer, and the thickness of the aluminum oxide layer is 30nm-60nm. In the aluminum oxide layer, aluminum oxide accounts for 90-99.8%, and aluminum particles account for 0.2-10%. The aluminum oxide film obtained by the aluminum oxide preparation device of the present application has a high aluminum oxide content and good thermal conductivity. Since the aluminum particles account for 0.2-10%, aluminum metal will be formed on the above-mentioned aluminum oxide film later, and there will be a cold welding effect between the same metals. Therefore, when the aluminum metal and the aluminum particles in the aluminum oxide come into contact, the aluminum metal will penetrate each other, thereby strengthening the bonding force between the aluminum metal layer and the aluminum oxide layer.

[0061] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention specification and drawings under the utility model concept, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An aluminum oxide preparation device, comprising a vacuum chamber, characterized in that: An evaporation tank is provided in the vacuum chamber, an evaporation boat and an air supply pipe are provided on the evaporation tank, an air outlet of the air supply pipe is located above the evaporation boat, and an air outlet direction of the air outlet of the air supply pipe is consistent with the evaporation direction of aluminum metal evaporated by the evaporation boat.

2. The aluminum oxide production equipment according to claim 1, characterized in that: A plurality of parallel evaporation boats are arranged in the evaporation tank. In the horizontal plane, the evaporation boats have two rows, namely a front evaporation group and a rear evaporation group. The front evaporation group and the rear evaporation group are staggered front and back. The evaporation boats of the front evaporation group and the evaporation boats of the rear evaporation group are arranged adjacent to each other one by one, and adjacent evaporation boats are arranged at intervals.

3. The aluminum oxide production equipment according to claim 2, characterized in that: The offset distance between the front row evaporation group and the rear row evaporation group is 1 cm to 5 cm.

4. The aluminum oxide production equipment according to claim 3, characterized in that: The end of the air supply pipe where the air outlet is located extends upward from the bottom of the evaporation tank through the gaps between adjacent evaporation boats.

5. The aluminum oxide production equipment according to claim 4, characterized in that: The air supply pipe is in an N shape.

6. The aluminum oxide production equipment according to claim 5, characterized in that: There are multiple air supply pipes, and the evaporation tank is provided with multiple notches for carrying the air supply pipes. The air supply pipes pass through the notches, and the multiple notches are arranged in a row, and the air supply pipes are arranged in a one-to-one correspondence with the notches.

7. The aluminum oxide production equipment according to claim 6, characterized in that: On the evaporation tank, wire feeding slots for aluminum wire to pass through are provided between adjacent notches.

8. The aluminum oxide production equipment according to claim 4, characterized in that: The distance between the gas outlet and the evaporation boat below is 1 cm to 10 cm.

9. An aluminum oxide film prepared by an aluminum oxide preparation device, characterized in that: It comprises a thin film layer, wherein both the upper and lower surfaces of the thin film layer are provided with an aluminum oxide layer, and the thickness of the aluminum oxide layer is 30nm-60nm.

10. The aluminum oxide film according to claim 9, characterized in that The density of the aluminum oxide layer is greater than the density of the thin film layer, and the density of the aluminum oxide layer is 2-4 times the density of the support layer.

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