Protection device of multi-arc magnetic control coating machine

Abstract

The utility model relates to the technical field of coating equipment, in particular to a protection device of a multi-arc magnetic control coating machine, which is used for blocking components inside a coating barrel and a coating barrel cover, and comprises a baffle and a sliding component, the sliding component comprises a first guide rail, the first guide rail is arranged on the inner edge of the top of the coating barrel, and a second guide rail is arranged on the inner edge of the top of the coating barrel. The baffle is provided with a connecting piece, the end, away from the baffle, of the connecting piece extends into the first guide rail, the baffle reciprocates along the first guide rail through the connecting piece, and when the coating machine works, the baffle can prevent components in the coating barrel and the coating barrel cover from making contact with coating materials and prevent the components from losing efficacy after being affected by the coating materials. And the baffle plates can move through the guide rails, so that the normal use of the components is facilitated, and the device has the advantage of protecting the stability of the components.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a protection device for a multi-arc magnetron coating machine. Background Art

[0002] Magnetron sputtering is a key vacuum coating method. It requires a specific temperature and vacuum level. The working principle of magnetron sputtering is that electrons, under the influence of an electric field E, collide with argon atoms as they fly toward the substrate, ionizing them to produce positive Ar ions and new electrons. As the new electrons fly toward the substrate, the Ar ions are accelerated by the electric field toward the cathode target, bombarding the target surface with high energy, causing the target material to sputter. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film. Existing magnetron sputtering is primarily accomplished using a multi-arc magnetron coating machine, which primarily consists of a vacuum pumping system, a coating cylinder, a workpiece turret mounted within the cylinder, and a magnetron sputtering device. Prior to coating, the workpiece to be processed is suspended on the turret within the cylinder. During the coating process, the turret rotates with the operation of the equipment, achieving the desired coating.

[0003] The internal components of the existing coating machine are installed around the inner wall. When the multi-arc magnetron coating machine is working, the magnetron sputtering device will sputter the coating material onto the surface of the components, thereby interfering with the normal operation of the components and failing to protect the stability of the components. Summary of the Invention

[0004] The purpose of the utility model is to overcome the shortcomings and deficiencies of the prior art and to provide a protection device for a multi-arc magnetron coating machine. The utility model has the advantage of stable protection of components.

[0005] The technical solution adopted by the present invention is as follows: a protective device for a multi-arc magnetron coating machine, used to block components inside the coating cylinder and the coating cylinder cover, including a baffle and a sliding assembly, the sliding assembly including a first guide rail, the first guide rail is arranged on the inner edge of the top of the coating cylinder, the baffle is provided with a connecting piece, the end of the connecting piece away from the baffle extends into the first guide rail, and the baffle reciprocates along the first guide rail through the connecting piece.

[0006] Preferably, it also includes a driving member, which is located at the top of the coating cylinder and is connected to a gear member at one end. The end of the connecting member extending into the first guide rail is connected to a first bearing. The connecting member is connected to a rack that meshes with the gear member. The driving member drives the gear member to rotate to move the rack, and the rack drives the baffle to reciprocate along the direction of the first guide rail.

[0007] Preferably, the sliding assembly further includes a second guide rail, which is arranged at the inner edge of the bottom of the coating cylinder. The bottom of the baffle is connected to a second bearing, which extends into the second guide rail and reciprocates along the second guide rail.

[0008] Preferably, a third bearing is provided on the top of the baffle, and a groove adapted to the third bearing is provided on the baffle. One end of the third bearing extends into the first guide rail and the other end is engaged with the groove of the baffle.

[0009] Preferably, both ends of the rack are provided with a limiting part, and the limiting part includes a mounting block, a rotating shaft and a limiting block. The mounting block is fixedly connected to the rack by bolts, and an axial hole adapted to the rotating shaft is provided on the mounting block. The limiting block is fixedly connected to the rotating shaft, and the limiting block extends into the axial hole through the rotating shaft to form a rotational fit with the mounting block.

[0010] Preferably, the limiting portion further includes a pre-tightening torsion spring, which is sleeved on the rotating shaft, and one end of the pre-tightening torsion spring abuts against the top of the mounting block and the other end abuts against the bottom of the limiting block.

[0011] Preferably, the components include an arc source component, a magnetron component, an evaporation component, and a planar magnetron component, and a plurality of baffles with the same structure are provided for blocking the plurality of components respectively.

[0012] The beneficial effects of the present invention are as follows: when the coating machine is working, the baffle can prevent the components in the coating cylinder and the coating cylinder cover from contacting the coating material, preventing the components from failing after being affected by the coating material, and the baffle can be moved by the guide rail to facilitate the normal use of the components. The present invention has the advantage of protecting the components stably. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, without paying creative labor, other drawings obtained based on these drawings still fall within the scope of the present invention.

[0014] Figure 1 It is a structural diagram of a multi-arc magnetron coating machine;

[0015] Figure 2 This is a structural diagram of the multi-arc magnetron coating machine from another angle;

[0016] Figure 3 It is a structural diagram of the utility model;

[0017] Figure 4This is a schematic diagram of the partial structure of the utility model without the first guide rail;

[0018] Figure 5 This is a partial structural diagram of the cooperation between the baffle and the second track of the utility model;

[0019] Figure 6 This is a partial structural diagram of the cooperation between the baffle and the third bearing of the utility model;

[0020] Figure 7 This is a schematic diagram of the partial structure of the gear and rack in the utility model;

[0021] Figure 8 This is a schematic diagram of the partial structure of the limiting part of the utility model;

[0022] Figure 9 Schematic diagram of the structure of the multi-arc magnetron coating machine without the baffle;

[0023] In the figure, 1-coating cylinder, 2-baffle, 3-first guide rail, 4-connecting member, 5-driving member, 6-gear member, 7-first bearing, 8-rack, 9-second guide rail, 10-second bearing, 11-third bearing, 12-groove, 13-limiting part, 14-mounting block, 15-rotating shaft, 16-limiting block, 17-axis hole, 19-arc source assembly, 20-magnetic control assembly, 21-evaporation assembly, 22-planar magnetic control assembly. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be described in further detail below with reference to the accompanying drawings.

[0025] It should be noted that all expressions using "first" and "second" in the embodiments of the present invention are for the purpose of distinguishing two non-identical entities or non-identical parameters with the same name. It can be seen that "first" and "second" are only for the convenience of expression and should not be understood as limitations on the embodiments of the present invention. Subsequent embodiments will not explain this one by one.

[0026] The directional and positional terms used in this invention, such as "upper," "lower," "front," "back," "left," "right," "inner," "outer," "top," "bottom," and "side," are used solely to refer to the directions or positions in the accompanying drawings. Therefore, the directional and positional terms used are intended to illustrate and facilitate understanding of this invention and are not intended to limit the scope of protection of this invention.

[0027] like Figures 1 to 4The figure shows an embodiment of the present invention, a protective device for a multi-arc magnetron coating machine, used to block the components inside the coating cylinder 1 and the coating cylinder cover, including a baffle 2 and a sliding assembly, the sliding assembly including a first guide rail 3, the first guide rail 3 being arranged at the inner edge of the top of the coating cylinder 1, the baffle 2 being provided with a connector 4, the connector 4 extending into the first guide rail 3 at one end away from the baffle 2, and the baffle 2 reciprocating along the first guide rail 3 through the connector 4. A protective device with the same structure is also installed in the coating cylinder cover to protect the components installed on the inner wall of the coating cylinder cover. When the coating machine is working, the baffle can block the components in the coating cylinder and the coating cylinder cover from contacting with the coating material, preventing the components from being affected by the coating material and failing, and the baffle can be moved through the guide rail to facilitate the normal use of the components. The present invention has the advantage of stable protection of components.

[0028] like Figure 4 As shown, the device further includes a driving member 5, which is located at the top of the coating cylinder 1 and is connected to a gear member 6 at one end. The end of the connecting member 4 extending into the first guide rail 3 is connected to a first bearing 7. The connecting member 4 is connected to a rack 8 that meshes with the gear member 6. The driving member 5 drives the gear member 6 to rotate, causing the rack 8 to move, and the rack 8 drives the baffle 2 to reciprocate along the direction of the first guide rail 3. Through the above structure, the movement of the baffle is controlled by the connection structure of the gear and the rack, further facilitating the movement and use of the baffle.

[0029] like Figure 5 As shown, the sliding assembly further includes a second guide rail 9, which is arranged at the inner edge of the bottom of the coating cylinder 1. A second bearing 10 is connected to the bottom of the baffle 2. The second bearing 10 extends into the second guide rail 9 and reciprocates along the second guide rail 9. Through the above structure, the second bearing connected to the lower end of the baffle cooperates with the second guide rail, further improving the movement stability of the baffle.

[0030] like Figure 6 As shown, a third bearing 11 is provided on the top of the baffle 2, and a groove 12 is provided on the baffle 2 to match the third bearing 11. One end of the third bearing 11 extends into the first guide rail 3, and the other end is engaged with the groove 12 of the baffle 2. Through the above structure, the third bearing is engaged with the groove on the baffle, which further increases the structural strength of the baffle and the consistency between the baffle and the rack, making the movement of the baffle smoother.

[0031] like Figures 7 and 8As shown, both ends of the rack 8 are provided with a limit portion 13, and the limit portion 13 includes a mounting block 14, a rotating shaft 15, and a limit block 16. The mounting block 14 is fixedly connected to the rack 8 by bolts, and the mounting block 14 is provided with a shaft hole 17 adapted to the rotating shaft 15. The limit block 16 is fixedly connected to the rotating shaft 15, and the limit block 16 extends into the shaft hole 17 through the rotating shaft 15 to form a rotational fit with the mounting block 14. Through the above structure, when the gear part moves to one end of the rack, the top of the gear tooth contacts the limit block, and the limit block is pushed by the gear part to rotate until it contacts the top of the rack tooth. The gear part is no longer able to contact the rack, and the baffle stops moving, preventing the rack from disengaging from the gear part and needing to re-engage.

[0032] The limiting portion 13 further includes a preloaded torsion spring, which is sleeved on the rotating shaft 15. One end of the preloaded torsion spring abuts against the top of the mounting block 14, and the other end abuts against the bottom of the limiting block 16. With this structure, when the gear member is no longer in contact with the limiting block, the limiting block returns to a vertical position under the action of the preloaded torsion spring, and the gear member and rack are re-engaged, further improving the stability of the gear-rack engagement and facilitating the starting and stopping of the baffle movement.

[0033] like Figure 9 As shown, the components include an arc source assembly 19, a magnetron assembly 20, an evaporation assembly 21, and a planar magnetron assembly 22, and are provided with a plurality of baffles 2 of the same structure for blocking the various components. The arc source assembly, evaporation assembly, magnetron assembly, and planar magnetron assembly are installed inside the coating machine, making the coating machine integrated and multifunctional. The arc source assembly can more comprehensively decompose the coating material to ensure the coating quality. The evaporation assembly directly coats the protective film after coating. To achieve uniform coating, the target atomic ions or molecules must be uniformly sputtered. The argon ions bombarding the target material must be uniform. Argon ions are formed by the continuous collision of electrons bound by a closed magnetic field during movement. This requires a uniform magnetic field, uniformly distributed magnetron assemblies, and planar magnetron assemblies. This creates a relatively uniform spatial magnetic field inside the vacuum chamber, improving the uniformity of the film layer. Furthermore, multiple movable baffles can protect the various components, blocking the components when not in use to prevent interference. Removing the baffles also facilitates switching the components back to normal use.

[0034] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the claims of the present invention are still within the scope covered by the present invention.

Claims

1. A protective device for a multi-arc magnetron coating machine, used for isolating components inside a coating cylinder (1) and a coating cylinder cover, characterized in that: The invention comprises a baffle (2) and a sliding assembly, wherein the sliding assembly comprises a first guide rail (3), wherein the first guide rail (3) is arranged at the inner edge of the top of the coating cylinder (1), and a connecting piece (4) is provided on the baffle (2), wherein one end of the connecting piece (4) away from the baffle (2) extends into the first guide rail (3), and the baffle (2) reciprocates along the first guide rail (3) via the connecting piece (4); The device further comprises a driving member (5), the driving member (5) being located at the top of the coating cylinder (1) and having one end connected to a gear member (6), the connecting member (4) extending into the first guide rail (3) having one end connected to a first bearing (7), the connecting member (4) being connected to a rack (8) meshing with the gear member (6), the driving member (5) driving the gear member (6) to rotate and move the rack (8), and the rack (8) driving the baffle (2) to reciprocate along the direction of the first guide rail (3); Both ends of the rack (8) are provided with a limiting portion (13), the limiting portion (13) includes a mounting block (14), a rotating shaft (15) and a limiting block (16), the mounting block (14) is fixedly connected to the rack (8) by a bolt, the mounting block (14) is provided with an axial hole (17) adapted to the rotating shaft (15), the limiting block (16) is fixedly connected to the rotating shaft (15), and the limiting block (16) extends into the axial hole (17) through the rotating shaft (15) to form a rotational fit with the mounting block (14); The limiting portion (13) also includes a pre-tightening torsion spring, which is sleeved on the rotating shaft (15), and one end of the pre-tightening torsion spring abuts against the top of the installation block (14) and the other end abuts against the bottom of the limiting block (16).

2. The protective device for a multi-arc magnetron coating machine according to claim 1, characterized in that: The sliding assembly further comprises a second guide rail (9), which is arranged at the inner edge of the bottom of the coating cylinder (1); a second bearing (10) is connected to the bottom of the baffle (2); the second bearing (10) extends into the second guide rail (9) and reciprocates along the second guide rail (9).

3. The protective device for a multi-arc magnetron coating machine according to claim 1, characterized in that: A third bearing (11) is provided on the top of the baffle (2), and a groove (12) adapted to the third bearing (11) is provided on the baffle (2); one end of the third bearing (11) extends into the first guide rail (3) and the other end is engaged with the groove (12) of the baffle (2).

4. The protective device for a multi-arc magnetron coating machine according to claim 1, characterized in that: The components include an arc source component (19), a magnetron component (20), an evaporation component (21), and a planar magnetron component (22), and are provided with a plurality of baffles (2) with the same structure, each used for blocking the plurality of components.

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