Gas inlet of waste gas treatment equipment and waste gas treatment equipment

Abstract

The utility model provides a gas inlet of waste gas treatment equipment and the waste gas treatment equipment, and relates to the technical field of waste gas treatment. The air inlet comprises an air inlet pipe, a sealing assembly, a scraper, a driving assembly and a purging air inlet pipe, an air outlet is formed in one end of the air inlet pipe, and an opening is formed in the other end of the air inlet pipe; the sealing assembly is arranged at the other end of the air inlet pipe and blocks the opening. And the scraper is arranged in the air inlet pipe. As a smaller space is formed between the scraper and the sealing assembly and a smaller gap is formed between the scraper and the inner wall of the gas inlet pipe, gas is conveyed into the gas inlet pipe by blowing the gas inlet pipe, so that the space between the scraper and the sealing assembly is in a positive pressure state, and waste gas in the gas inlet pipe is prevented from entering the space between the scraper and the sealing assembly; waste gas is prevented from making contact with a connecting shaft or a speed reducer; gas enters the gap between the scraper and the inner wall of the gas inlet pipe through the space between the scraper and the sealing assembly, the scraper is protected from being corroded by waste gas, and the service life of the scraper is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, in particular to an air inlet of waste gas treatment equipment and the waste gas treatment equipment. Background Art

[0002] The growing prosperity of the semiconductor industry and the surge in production capacity have generated various waste gases (NF3, PH3, B2H6, SiH4, etc.) during the production process. Many of these gases pose serious risks to humans and the environment. Most of these waste gases are heavier than air. If released into the atmosphere, they spread and settle on the ground, reaching very high concentrations, causing serious environmental pollution and harming human health. If they encounter a fire source, they can cause a fire or even an explosion. Consequently, the market demand for waste gas treatment equipment is extremely high. However, due to the varying facilities and environments within semiconductor manufacturers, there is also a significant demand for various practical, specialized devices. Currently, waste gas treatment equipment includes an intake pipe and a negative pressure pipe. During use, waste gas can enter the intake pipe and come into contact with the scraper or motor, causing damage to the motor or scraper. Utility Model Content

[0003] The utility model provides an air inlet of waste gas treatment equipment, which is used to solve the problem in the prior art that waste gas enters the air inlet pipe and contacts with a scraper or a motor, causing damage to the motor or the scraper.

[0004] The utility model provides an air inlet of an exhaust gas treatment device, comprising:

[0005] an air inlet pipe, wherein one end of the air inlet pipe is provided with an air outlet, and the other end of the air inlet pipe is provided with an opening;

[0006] a sealing assembly, the sealing assembly being disposed at the other end of the air inlet pipe and sealing the opening;

[0007] a scraper, the scraper being arranged inside the air intake pipe;

[0008] a drive assembly connected to the sealing assembly and the scraper, the drive assembly being used to drive the scraper to rotate so as to scrape off dust on the inner wall of the intake pipe;

[0009] The purge air inlet pipe is provided with an air inlet hole connected to the interior of the air inlet pipe, the purge air inlet pipe is connected to the air inlet hole, and the purge air inlet pipe is used to transport gas into the air inlet pipe through the air inlet hole.

[0010] According to the air inlet of the exhaust gas treatment equipment provided by the utility model, the scraper is in a rod-shaped structure, and the scraper extends along the axial direction of the air inlet pipe.

[0011] According to the air inlet of the exhaust gas treatment equipment provided by the utility model, the cross section of the scraper is semicircular, and the plane of the scraper faces the inner wall of the air inlet pipe.

[0012] According to the air inlet of the exhaust gas treatment equipment provided by the utility model, an air intake connecting pipe is provided on the side wall of the air intake pipe, and the air intake connecting pipe is perpendicular to the air intake pipe.

[0013] According to an air inlet of an exhaust gas treatment device provided by the utility model, the sealing assembly includes:

[0014] A sealing flange, wherein the outer peripheral surface of the other end of the air inlet pipe is provided with a connecting flange, the sealing flange is connected to the connecting flange and blocks the opening, and the air inlet hole is provided on the sealing flange;

[0015] A motor flange is sleeved on an end of the sealing flange away from the air inlet pipe, and the motor flange is connected to the drive assembly.

[0016] According to the air inlet of an exhaust gas treatment device provided by the present invention, the sealing flange forms a step on the side of the motor flange facing the drive assembly, and the drive assembly abuts against the step.

[0017] According to the air inlet of an exhaust gas treatment device provided by the utility model, the step is provided with a sealing ring, and the sealing ring is sealed with the driving component and the step.

[0018] According to the air inlet of an exhaust gas treatment device provided by the utility model, the step is provided with a groove, and the sealing ring is partially embedded in the groove.

[0019] According to the air inlet of an exhaust gas treatment device provided by the utility model, a connecting shaft is passed through the sealing flange, one end of the connecting shaft is connected to the scraper, and the other end of the connecting shaft is connected to the driving assembly.

[0020] The utility model also provides an exhaust gas treatment device, which includes an air inlet of any of the exhaust gas treatment devices described above.

[0021] The air inlet of the exhaust gas treatment equipment provided by the utility model has a small space between the scraper and the sealing component, and a small gap between the scraper and the inner wall of the intake pipe. By blowing the intake pipe and delivering gas into the intake pipe, the space between the scraper and the sealing component is in a positive pressure state, which prevents the exhaust gas in the intake pipe from entering the space between the scraper and the sealing component, and avoids the exhaust gas from contacting the connecting shaft or the reducer; the gas enters the gap between the scraper and the inner wall of the intake pipe through the space between the scraper and the sealing component, thereby protecting the scraper from being corroded by the exhaust gas and extending the service life of the scraper. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a schematic diagram of the three-dimensional structure of the air inlet of the exhaust gas treatment equipment provided by the utility model.

[0024] Figure 2 It is a schematic diagram of the top structure of the air inlet of the exhaust gas treatment equipment provided by the utility model.

[0025] Figure 3 It is a side view cross-sectional structural diagram of the air inlet of the exhaust gas treatment equipment provided by the utility model.

[0026] Reference numerals:

[0027] 10. Inlet pipe; 11. Connecting flange; 12. Inlet connecting pipe; 20. Sealing assembly; 21. Sealing flange; 22. Motor flange; 23. Step; 24. Connecting shaft; 25. Outer sealing ring; 26. Inner sealing ring; 30. Scraper; 40. Drive assembly; 41. Motor; 42. Reducer; 50. Scraper fixing plate; 60. Purge intake pipe. DETAILED DESCRIPTION

[0028] To make the purpose, technical solutions, and advantages of the present invention more clear, the following will be combined with the accompanying drawings to clearly and completely describe the technical solutions of the present invention. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0030] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on specific circumstances.

[0031] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0033] The following combination Figure 1-Figure 3 The specific structure and working principle of the air inlet of the exhaust gas treatment equipment of the present invention are described.

[0034] like Figures 1 to 3 As shown, the air inlet of the exhaust gas treatment equipment includes an air inlet pipe 10, a sealing assembly 20, a scraper 30, a driving assembly 40 and a purge air inlet pipe 60. An air outlet is provided at one end of the air inlet pipe 10, and an opening is provided at the other end of the air inlet pipe 10; the sealing assembly 20 is provided at the other end of the air inlet pipe 10 and seals the opening; the scraper 30 is provided inside the air inlet pipe 10; the driving assembly 40 is connected to the sealing assembly 20 and the scraper 30, and the driving assembly 40 is used to drive the scraper 30 to rotate to scrape off the dust on the inner wall of the air inlet pipe 10; the sealing assembly 20 is provided with an air inlet hole connected to the inside of the air inlet pipe 10, and the purge air inlet pipe 60 is connected to the air inlet hole, and the purge air inlet pipe 60 is used to transport gas into the air inlet pipe 10 through the air inlet hole.

[0035] The air inlet of the exhaust gas treatment device provided by the present invention has a small space between the scraper 30 and the sealing assembly 20, and a small gap between the scraper 30 and the inner wall of the intake pipe 10. By purging the intake pipe 60 and delivering gas into the intake pipe 10, the space between the scraper 30 and the sealing assembly 20 is kept at a positive pressure, preventing exhaust gas in the intake pipe 10 from entering the space between the scraper 30 and the sealing assembly 20, thereby preventing exhaust gas from contacting the connecting shaft 24 or the reducer. Gas passes through the space between the scraper 30 and the sealing assembly 20 and enters the gap between the scraper 30 and the inner wall of the intake pipe 10, protecting the scraper 30 from corrosion by the exhaust gas and extending the service life of the scraper 30. The motor 41 and reducer 42 are mostly made of carbon steel or aluminum, which are not corrosion-resistant. By providing the purge intake pipe 60 and delivering gas into the intake pipe 10 through the air inlet hole, the problem of damage to the motor 41 caused by corrosion is solved.

[0036] In one embodiment of the present invention, the air inlet pipe 10 is a circular tube. An air inlet connecting pipe 12 is provided on the sidewall of the air inlet pipe 10 and is in communication with the air inlet pipe 10. The air inlet connecting pipe 12 is perpendicular to the air inlet pipe 10. The air inlet pipe 10 and the air inlet connecting pipe 12 cooperate to form a three-way connector. The air inlet pipe 10 and the air inlet connecting pipe 12 are welded together or integrally formed. The air outlet is used to communicate with the reaction chamber. Air enters the air inlet pipe 10 through the air inlet connecting pipe 12 and then enters the reaction chamber through the air outlet.

[0037] In one embodiment of the present invention, the scraper 30 is made of a corrosion-resistant material and has a rod-shaped structure. The scraper 30 extends along the axial direction of the air intake pipe.

[0038] In one embodiment of the present invention, the cross-section of the scraper 30 is semicircular, and the plane of the scraper 30 faces the inner wall of the air intake pipe 10, that is, the plane of the scraper 30 faces outward and the circular surface faces inward, so as to reduce the contact area between the scraper 30 and the dust, thereby reducing the accumulation of dust on the scraper 30.

[0039] In a preferred embodiment of the present invention, the surface of the scraper 30 is provided with an anti-stick coating to reduce the accumulation of dust on the scraper 30 .

[0040] In one embodiment of the present invention, the drive assembly 40 includes a motor 41 and a reducer 42. The input end of the reducer 42 is connected to the rotating shaft of the motor 41, and the output end of the reducer 42 is connected to the other end of the connecting shaft 24. The housing of the reducer 42 abuts the step 23. Of course, the step 23 can also be set on the reducer 42, and the step 23 abuts the side of the sealing flange 21 facing the reducer 42. Because the scraper 30 encounters greater resistance during the dust scraping process, the reduction gear 42 is provided between the motor 41 and the scraper 30 to increase the torque output by the drive assembly 40 and enhance the scraping effect of the scraper 30. The housing of the motor 41 is connected to the housing of the reducer 42. Of course, the reducer 42 can also be integrated into the motor housing.

[0041] In one embodiment of the present invention, a sealing assembly 20 includes a sealing flange 21 and a motor flange 22. A connecting flange 11 is provided on the outer circumferential surface of the other end of the intake pipe 10. The sealing flange 21 is connected to the connecting flange 11. Preferably, a flange sealing ring is provided between the sealing flange 21 and the connecting flange 11 to improve the sealing between the sealing flange 21 and the connecting flange 11. The provision of the sealing flange 21 facilitates connection with the intake pipe 10. The sealing flange 21 seals the opening. A through hole is provided within the sealing flange 21, extending along the central axis of the sealing flange 21. The through hole is used to mount a connecting shaft 24. An air inlet is provided on the sealing flange 21, preferably, on the edge of the sealing flange 21. In this embodiment, a single air inlet is provided. Of course, the number of air inlet holes is not limited to this. Multiple air inlet holes can also be provided, with the multiple air inlet holes spaced circumferentially.

[0042] In this embodiment, the sealing flange 21 is a KF flange. Of course, the specific structure of the sealing flange 21 is not limited thereto and is determined according to actual needs.

[0043] The motor flange 22 is provided to facilitate the connection between the scraper 30 and the drive assembly 40. The motor flange 22 is sleeved on the end of the sealing flange 21 away from the intake pipe 10, and the motor flange 22 is connected to the drive assembly 40. Specifically, the motor flange 22 is a sheet-like structure. The motor flange 22 is sleeved on the end of the sealing flange 21 away from the intake pipe 10, that is, the motor flange 22 is sleeved on the left end of the sealing flange 21. The motor flange 22 is welded to the sealing flange 21 or integrally formed. A through hole is provided at each of the four corners of the motor flange 22, and the motor flange 22 is connected to the reducer housing by screws in the through hole. Compared with the use of a cylinder or other types of driving mechanisms, the use of the motor 41 in combination with the reducer 42 effectively reduces the volume of the drive assembly 40.

[0044] In one embodiment of the present invention, the sealing flange 21 forms a step 23 on the side of the motor flange 22 facing the drive assembly 40. That is, the sealing flange 21 protrudes relative to the motor flange 22, forming a gap between the motor flange 22 and the reducer housing. The drive assembly 40 abuts against the step 23. Specifically, the reducer housing abuts against the step 23. The step 23 is circular and is provided to seal with the reducer housing to prevent exhaust gas from contacting the reducer 42 or the motor 41 and causing corrosion to the motor 41 or the reducer 42.

[0045] In one embodiment of the present invention, the step 23 is provided with a sealing ring made of rubber, and the sealing ring is sealed with the drive assembly 40 and the step 23. Preferably, there are two sealing rings, namely an outer sealing ring 25 and an inner sealing ring 26. The diameter of the outer sealing ring 25 is larger than the diameter of the inner sealing ring 26. The inner sealing ring 26 is coaxially arranged with the through hole. The inner sealing ring 26 is sleeved on the outer circumferential surface of the rotating shaft. The inner sealing ring 26 is used to seal the gap between the step 23 and the reducer housing, and also to seal the gap between the rotating shaft and the step 23. The outer sealing ring 25 is located on the outside of the inner sealing ring 26. The outer sealing ring 25 is used to seal the gap between the step 23 and the reducer housing to form a secondary seal. If one of the outer sealing ring 25 and the inner sealing ring 26 is damaged, it will not affect the normal operation of the equipment.

[0046] In one embodiment of the present invention, step 23 is provided with a groove into which the sealing ring is partially embedded. Specifically, two grooves are provided: an inner groove and an outer groove. The inner groove is coaxial with and communicates with the through-hole, and the inner sealing ring 26 is embedded in the inner groove. The outer groove is provided on the periphery of the inner groove, with the central axis of the outer groove being aligned with the central axis of the inner groove. The outer sealing ring 25 is embedded in the outer groove.

[0047] In one embodiment of the present invention, a connecting shaft 24 is provided within the sealing flange 21. One end of the connecting shaft 24 is connected to the scraper 30, and the other end of the connecting shaft 24 is connected to the drive assembly 40. Specifically, the connecting shaft 24 is provided within the through-hole and is sealed with the sealing flange 21 via an inner sealing ring 26. One end of the connecting shaft 24 is directly connected to the scraper 30 or connected to the scraper 30 via a scraper fixing plate 50. The output end of the reducer 42 is provided with a plug-in hole. The plug-in hole is a non-circular hole, and the cross-section of the other end of the connecting shaft 24 is non-circular. The other end of the connecting shaft 24 is inserted into the plug-in hole. Of course, in some embodiments, the output end of the reducer 42 can also be directly connected to the scraper 30 or the scraper fixing plate 50 after passing through the through-hole.

[0048] In one embodiment of the present invention, the air inlet of the exhaust gas treatment equipment further includes a scraper fixing plate 50. The scraper fixing plate 50 is a circular sheet-like structure. The gap between the circular scraper fixing plate 50 and the inner wall of the intake pipe 10 can be minimized, which can fully block the dust in the intake pipe 10 from spreading to the motor end, effectively preventing dust blockage from causing the drive assembly 40 to jam or be damaged. The scraper fixing plate 50 is arranged inside the intake pipe 10. The scraper fixing plate 50 is welded to the scraper 30. Of course, the scraper fixing plate 50 can also be connected to the scraper 30 by plugging or other detachable connection methods to facilitate the replacement of the scraper fixing plate 50 or the scraper 30. The side of the scraper fixing plate 50 facing away from the scraper 30 is connected to one end of the connecting shaft 24. Specifically, the side of the scraper fixing plate 50 facing away from the scraper 30 is provided with a connecting portion, and the connecting portion is provided with a threaded blind hole. One end of the connecting shaft 24 is inserted into the threaded blind hole and threadedly engaged with the threaded blind hole.

[0049] Furthermore, a threaded through hole is provided on the side wall of the blind hole, and a screw is provided in the threaded through hole. The screw abuts against one end of the connecting shaft 24, thereby fixing one end of the connecting shaft 24 in the threaded blind hole.

[0050] Furthermore, since high temperature is conducted from the scraper 30 to the connecting shaft 24 during the operation of the waste gas treatment equipment, the connection between the connecting shaft 24 and the scraper fixing plate 50 may become loose due to thermal expansion and contraction, causing the scraper 30 to separate from the motor 41. Therefore, in the process of connecting the connecting shaft 24 and the scraper fixing plate 50, high-temperature resistant fixing glue is injected between the connecting shaft 24 and the scraper fixing plate 50. The high-temperature resistant fixing glue can prevent the connecting shaft 24 and the scraper fixing plate 50 from loosening on the one hand, and prevent the exhaust gas from corroding the end face of the connecting shaft 24 or the output end of the reducer 42 on the other hand.

[0051] The utility model also provides an exhaust gas treatment device, which includes the air inlet of the exhaust gas treatment device described in any one of the above embodiments.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. An air inlet of an exhaust gas treatment device, characterized in that: include: An air intake pipe (10), wherein one end of the air intake pipe (10) is provided with an air outlet, and the other end of the air intake pipe (10) is provided with an opening; A sealing assembly (20), the sealing assembly (20) being arranged at the other end of the air intake pipe (10) and sealing the opening; a scraper (30), the scraper (30) being arranged inside the air intake pipe (10); a driving assembly (40) connected to the sealing assembly (20) and the scraper (30), the driving assembly (40) being used to drive the scraper (30) to rotate so as to scrape off dust on the inner wall of the air intake pipe (10); A purge air inlet pipe (60), wherein the sealing assembly (20) is provided with an air inlet hole communicating with the interior of the air inlet pipe (10), the purge air inlet pipe (60) being in communication with the air inlet hole, and the purge air inlet pipe (60) being used to transport gas into the air inlet pipe (10) through the air inlet hole.

2. The air inlet of the exhaust gas treatment equipment according to claim 1, characterized in that: The scraper (30) is a rod-shaped structure, and the scraper (30) extends along the axial direction of the air intake pipe (10).

3. The air inlet of the exhaust gas treatment equipment according to claim 2, characterized in that: The scraper (30) has a semicircular cross-section, and the plane of the scraper (30) faces the inner wall of the air inlet pipe (10).

4. The air inlet of the exhaust gas treatment equipment according to claim 2, characterized in that: An air intake connecting pipe (12) is provided on the side wall of the air intake pipe (10), and the air intake connecting pipe (12) is perpendicular to the air intake pipe (10).

5. The air inlet of the exhaust gas treatment equipment according to claim 2, characterized in that: The sealing assembly (20) comprises: A sealing flange (21), wherein the outer peripheral surface of the other end of the air inlet pipe (10) is provided with a connecting flange (11), the sealing flange (21) is connected to the connecting flange (11) and blocks the opening, and the air inlet hole is provided on the sealing flange (21); A motor flange (22) is sleeved on an end of the sealing flange (21) away from the air intake pipe (10), and the motor flange (22) is connected to the drive assembly (40).

6. The air inlet of the exhaust gas treatment equipment according to claim 5, characterized in that: The sealing flange (21) forms a step (23) on a side of the motor flange (22) facing the drive assembly (40), and the drive assembly (40) abuts against the step (23).

7. The air inlet of the exhaust gas treatment equipment according to claim 6, characterized in that: The step (23) is provided with a sealing ring, and the sealing ring is in sealing cooperation with the drive assembly (40) and the step (23).

8. The air inlet of the exhaust gas treatment equipment according to claim 7, characterized in that: The step (23) is provided with a groove, and the sealing ring is partially embedded in the groove.

9. The air inlet of the exhaust gas treatment equipment according to claim 6, characterized in that: A connecting shaft (24) is provided in the sealing flange (21), one end of the connecting shaft (24) is connected to the scraper (30), and the other end of the connecting shaft (24) is connected to the driving assembly (40).

10. A waste gas treatment device, characterized in that: The exhaust gas treatment device comprises the air inlet of the exhaust gas treatment device according to any one of claims 1 to 9.

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