Leakage detection barrel for target disc scanning arm of ion implanter and scanning arm

Abstract

The utility model provides a leak hunting barrel for a target disk scanning arm of an ion implanter and the scanning arm, and aims to solve the problem that effective leak hunting cannot be carried out on the scanning arm in the prior art. The jig comprises a leak hunting barrel, a fixed cover and a sealing cover, and can independently detect each joint of a scanning arm; the fixed cover is installed at a joint to be detected, efficient sealing is achieved through the sealing ring, the leak hunting barrel is connected with the other end of the fixed cover, and closing of the sealing structure is completed through the sealing cover. The jig is matched with an external leak detection machine to quickly detect vacuum leakage points of the scanning arm, so that unnecessary overall replacement is reduced, the maintenance cost is reduced, and the operation efficiency and reliability of equipment are improved; the scanning arm leak detection device is simple in structure, reliable in test performance, and suitable for scanning arm leak detection operation of the ion implanter in a high vacuum environment.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implanter testing, in particular to a leak detection barrel and a scanning arm for a target plate scanning arm of an ion implanter, which are suitable for leak detection of joints of the scanning arm. Background Art

[0002] The Purion implanter is an advanced ion implantation device widely used in semiconductor manufacturing processes to implant ions into silicon wafers or other semiconductor materials to change the electrical properties of the materials. The core feature of this equipment is high-precision ion beam scanning in a high-vacuum environment, especially the need to maintain an extremely high vacuum degree during the process to ensure the quality and accuracy of the implantation.

[0003] In existing Purion implanters, the scanning arm requires repetitive motion under high vacuum. However, over time, some seals may age or internal components may require replacement, leading to vacuum leaks. These leaks will not meet process requirements. Furthermore, because the scanning arm consists of multiple joints, each exposed to atmospheric air, traditional leak detection equipment cannot effectively detect these joints. Replacing each joint is costly and environmentally unfriendly. Consequently, existing leak detection tools are limited and cannot quickly and accurately identify specific leaks.

[0004] Based on this, a leak detection bucket for the target disk scanning arm of an ion implanter is needed to provide effective and rapid leak detection for the scanning arm joint to solve this problem. Utility Model Content

[0005] The purpose of the present invention is to provide a leak detection barrel for the target disk scanning arm of an ion implanter, aiming to solve the problem that the existing technology cannot effectively detect leaks on the scanning arm; the purpose of the present invention is achieved by the following technical solutions:

[0006] In a first aspect, the utility model provides a leak detection bucket for a target disk scanning arm of an ion implanter, comprising:

[0007] A leak detection barrel body, wherein both sides of the leak detection barrel body are open;

[0008] A fixed cover, the fixed cover being connected to the joint of the scanning arm to be tested through a detachable structure;

[0009] Sealing cover;

[0010] The distal end of the leak detection barrel body is connected to the fixed cover via a sealing structure, and the proximal end is connected to the sealing cover via a sealing structure.

[0011] In a second aspect, the present invention provides a leak detection bucket for a target disk scanning arm of an ion implanter, comprising:

[0012] A leak detection barrel body, wherein one side of the leak detection barrel body is open;

[0013] A fixed cover, the fixed cover being connected to the joint of the scanning arm to be tested through a detachable structure;

[0014] The distal end of the leak detection barrel body forms a sealed connection with the fixed cover.

[0015] Preferably, the sealing structure includes at least one sealing ring.

[0016] Preferably, the sealing structure includes at least two sealing rings.

[0017] Preferably, the detachable structure is any one of a snap connection structure, a bolt connection structure, a magnetic connection structure, a latch connection structure and a slot connection structure.

[0018] Furthermore, screw holes are provided on the fixing cover, and the fixing cover is detachably connected to the joint of the scanning arm to be tested by screws.

[0019] Preferably, the sealing cover is provided with at least one air hole.

[0020] Furthermore, the air holes are opened on the side surface of the barrel body of the leak detection barrel and / or the bottom surface of the barrel body of the leak detection barrel.

[0021] Preferably, the air hole is connected to an external leak detector; the working gas of the external leak detector is helium.

[0022] In a third aspect, the present invention provides an ion implanter target disk scanning arm, the scanning arm comprising at least one joint and the aforementioned leak detection bucket for the ion implanter target disk scanning arm, the leak detection bucket being detachably connected to the joint.

[0023] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0024] First, the utility model seals the scanning arm joints through the connection method of leak detection barrel body-fixed cover-sealing ring, which helps to effectively isolate the external environment, thereby ensuring that no external gas enters or internal gas leaks during leak detection, thereby increasing the accuracy of the leak detection process.

[0025] Second, the utility model can accurately detect the leakage position of the scanning arm joint, thereby avoiding the replacement of the entire part and greatly reducing the maintenance and repair costs; through the quick connection between the leak detection barrel and the scanning arm joint, the detection efficiency is improved and unnecessary equipment loss is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 The utility model is a structural schematic diagram of a leak detection barrel used for a target plate scanning arm of an ion implanter.

[0028] Description of Reference Numerals

[0029] 1. Leak detection barrel body; 2. Sealing cover; 3. Fixed cover; 31. Screw hole; 4. Sealing ring. DETAILED DESCRIPTION

[0030] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0031] The following describes the implementation of the present invention through specific concrete examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. The present invention can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0032] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present invention, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0033] The "proximal end" mentioned in this application refers to the end of the leak detection bucket close to the operator, that is, the end away from the scanning arm joint; the "distal end" refers to the end of the leak detection bucket away from the operator, that is, the end close to the scanning arm joint; this application uses the scanning arm of the Purion implanter as a preferred embodiment, but it should be understood that the leak detection bucket of the utility model can be used for leak detection of scanning arms of all types of ion implanters.

[0034] Example 1:

[0035] This embodiment provides a leak detection barrel for the target plate scanning arm of an ion implanter, which is specially designed to detect leaks at multiple joints of the scanning arm in a purion implanter. Since the joints of the scanning arm are in an atmospheric state, ordinary leak detection devices cannot work effectively, so this device solves this technical problem.

[0036] The leak detection bucket includes a leak detection bucket body 1, a fixed cover 3, a sealing cover 2 and a sealing ring 4; the leak detection bucket body 1 is cylindrical in design with open ends, used to cover the joint part of the scanning arm to form a leak detection area; the fixing cover 3 is installed on the joint of the scanning arm to be tested, and the fixing cover is provided with a screw hole 31, which is fixedly connected to the joint of the scanning arm by screws to ensure a stable connection between the device and the joint of the scanning arm; but it should be understood that the detachable connection method using screw holes and screws is only preferred. In other embodiments, any detachable connection method such as a snap connection structure, a bolt connection structure, a magnetic connection structure, a pin connection structure and a slot connection structure can be adopted; one side of the leak detection bucket body 1 is sealed with the fixing cover 3, and the other side is sealed with the sealing cover 2 to form a closed leak detection space; two sealing rings 4 are provided at the connection between the leak detection bucket body 1 and the fixing cover 3 and the sealing cover 2 to enhance the sealing effect and prevent gas leakage.

[0037] In this solution, the leak detection barrel has a simple structure and is easy to install and disassemble. By fixing it with screws and using the sealing ring 4, no complicated tools are required during the operation, and the detection preparation work can be completed quickly, reducing equipment downtime and improving detection efficiency; avoiding the high cost of replacing the entire scanning arm every time; using this leak detection barrel can greatly reduce the maintenance cost of the equipment, and only local repair or replacement of the leaking joint part is required.

[0038] In a preferred embodiment, the sealing cover 2 is provided with an air hole for connecting an external leak detection device to measure whether there is a gas leak in the scanning arm joint; preferably, the air hole can also be provided on the leak detection barrel body 1; the air hole is connected to an external leak detector, and the external leak detector is preferably a helium leak detector.

[0039] It should be noted that although a helium leak detector is preferred, the air hole setting is also compatible with other external leak detection equipment, such as a pressure decay leak detector, a vacuum leak detector, etc.

[0040] In this solution, air holes can be set on the sealing cover 2 or the leak detection barrel body 1 according to actual needs, allowing the device to flexibly adapt to different detection environments. Based on the characteristics of the detection area and the device structure, the tester can select the most suitable air hole location, which facilitates operation and connection to external equipment, improving the convenience of the leak detection process. The external leak detector uses helium as the working gas. Helium molecules are extremely small and highly permeable, and can enter the detection space through extremely small leak points. Therefore, using a helium leak detector can greatly improve the sensitivity and accuracy of detection, and is particularly suitable for scanning structures such as arm joints that require high-precision leak detection. Even the smallest leaks can be quickly detected.

[0041] Example 2:

[0042] This embodiment 2 provides a leak detection bucket. This embodiment 2 is different from embodiment 1 in that the barrel body 1 of the leak detection bucket is open on only one side, and the air holes are arranged on the side or bottom surface of the barrel body 1; accordingly, the sealing ring 4 is arranged at the far end of the barrel body 1 of the leak detection bucket, which saves sealing materials and reduces manufacturing costs.

[0043] Example 3:

[0044] This embodiment 3 provides a leak detection barrel. This embodiment 3 is different from embodiment 2. The air hole is connected to an external air pump, and the external air pump uses helium as the working gas. By installing a helium sensor on the outer wall of the leak detection barrel, the leakage of helium can be detected in real time to determine whether the scanning arm joint is leaking. Preferably, after the leak detection barrel is connected to the scanning arm joint, a sealing cover is also provided on the outside, and the external air pump and the leak detection barrel are both located in the sealing cover.

[0045] In a preferred embodiment, the external air pump is located outside the sealing cover, and the helium sensor is located inside the leak detection barrel body 1. By flushing helium into the sealing cover, it is detected whether helium enters the leak detection barrel to determine whether there is leakage in the scanning arm joint.

[0046] In this solution, by installing a sealing cover on the outside of the leak detection barrel, the influence of the external environment on helium leak detection can be isolated. The use of the sealing cover can prevent external air, temperature changes or airflow from interfering with the helium sensor, ensuring the accuracy and reliability of the detection results. The external sealing cover helps to create a stable detection environment and prevent helium leakage. It helps to improve the sealing performance of the entire leak detection device and further reduce the probability of false alarms and missed alarms.

[0047] Example 4:

[0048] This embodiment 4 provides a scanning arm, which includes a joint. The joint can be detachably connected to the leak detection bucket of any of the above embodiments.

[0049] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments; in particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the partial description of the aforementioned embodiments.

[0050] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A leak detection barrel for a target scanning arm of an ion implanter, characterized in that: include: A leak detection barrel body, wherein both sides of the leak detection barrel body are open; A fixed cover, the fixed cover being connected to the joint of the scanning arm to be tested through a detachable structure; Sealing cover; The distal end of the leak detection barrel body is connected to the fixed cover via a sealing structure, and the proximal end is connected to the sealing cover via a sealing structure.

2. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 1, characterized in that: The sealing structure includes at least two sealing rings.

3. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 1, characterized in that: The sealing cover is provided with at least one air hole.

4. A leak detection barrel for a target scanning arm of an ion implanter, characterized in that: include: A leak detection barrel body, wherein one side of the leak detection barrel body is open; A fixed cover, the fixed cover being connected to the joint of the scanning arm to be tested through a detachable structure; The distal end of the leak detection barrel body forms a sealed connection with the fixed cover.

5. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 1 or 4, characterized in that: The sealing structure includes at least one sealing ring.

6. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 1 or 4, characterized in that: The detachable structure is any one of a snap connection structure, a bolt connection structure, a magnetic connection structure, a latch connection structure and a slot connection structure.

7. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 6, characterized in that: The fixing cover is provided with screw holes, and the fixing cover is detachably connected to the joint of the scanning arm to be tested by screws.

8. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 1 or 4, characterized in that: The air holes are arranged on the side surface of the barrel body of the leak detection barrel and / or the bottom surface of the barrel body of the leak detection barrel.

9. The leak detection barrel for the target disk scanning arm of an ion implanter according to claim 8, characterized in that: The air hole is connected to an external leak detector; the working gas of the external leak detector is helium.

10. An ion implanter target scanning arm, characterized in that: The scanning arm comprises at least one joint and a leak detection bucket for a target disk scanning arm of an ion implanter according to any one of claims 1 to 9, wherein the leak detection bucket is detachably connected to the joint.

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