Overhead sample table for scanning electron microscope

Abstract

The utility model discloses an overhead sample table for a scanning electron microscope, which comprises a support main body, a plurality of positioning pedestals for positioning samples are sequentially arranged at the top of the support main body, and a plurality of mounting straight-through grooves for overhead sample test parts are formed among the plurality of positioning pedestals. The plurality of mounting straight-through grooves are parallel and have different widths, and a mounting column used for connecting an electron microscope base is detachably arranged at the center of the bottom surface of the supporting main body; the device has the advantages of being reliable in test result, convenient to position and clamp and simple in structure.

Description

Technical Field

[0001] The utility model belongs to the technical field of auxiliary devices for scanning electron microscopes, and in particular relates to an overhead sample stage for a scanning electron microscope. Background Art

[0002] A scanning electron microscope (SEM) is a large, precision instrument that lies between a transmission electron microscope and an optical microscope. It uses a narrow, focused, high-energy electron beam to scan a sample. The interaction between the beam and the material stimulates various physical information, which is then collected, amplified, and re-imaged to characterize the material's microscopic morphology. Modern SEMs can achieve a resolution of 1 nm and continuously adjustable magnifications of 300,000x and above. They also offer a large depth of field, a wide field of view, and excellent three-dimensional imaging. Furthermore, when combined with other analytical instruments, SEMs can simultaneously observe microscopic morphology and analyze the composition of microscopic areas. SEMs are widely used in the research of geotechnical materials, graphite, ceramics, and nanomaterials.

[0003] After obtaining the morphological information of the sample, researchers usually use the energy spectrometer equipped on the scanning electron microscope to excite the characteristic X-rays of the elements at a higher voltage, thereby achieving in-depth analysis of the types and contents of elements in the micro-area.

[0004] Current SEM sample stages are simple, mostly consisting of a single disk connected to the SEM sample base via fixed posts. However, these stages are limited by the electron beam diffusion zone caused by high voltage during energy spectrum analysis, making them only suitable for bulk samples of a certain thickness.

[0005] The problem with the existing technology is that in actual work, it is often necessary to perform elemental analysis on single-layer films or particles or strip samples. If this traditional disc-shaped sample stage is used, the analysis results will include elemental information of the substrate (such as the sample stage, conductive adhesive), resulting in deviations in the qualitative and quantitative elemental analysis results; there is also a lack of a suitable sample stage for positioning and clamping single-layer films or particles or strip samples. Utility Model Content

[0006] The purpose of the utility model is to address the problems existing in the prior art and to provide an overhead sample stage for a scanning electron microscope, which has the advantages of reliable test results, convenient positioning and clamping, and simple structure.

[0007] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: an overhead sample stage for a scanning electron microscope, comprising a supporting body, a plurality of positioning seats for positioning the sample arranged in sequence on the top of the supporting body, a plurality of installation straight-through grooves for overhead sample testing parts formed between the plurality of positioning seats, the plurality of installation straight-through grooves being parallel and of different widths, and a detachable installation column for connecting to the electron microscope base is provided at the center of the bottom surface of the supporting body.

[0008] In the above scheme, a positioning base is set on the top of the support body to cooperate with the two ends of the sample for positioning. The test part of the sample is suspended at the installation straight-through slot, thereby reducing the influence of the sample table on the sample test results. The installation straight-through slot has various widths to match the test of samples of various sizes. The installation straight-through slots are parallel to each other to facilitate sample positioning. A mounting column is set at the center of the bottom surface of the support body to facilitate the connection of the sample stage to the base of the electron microscope.

[0009] Furthermore, an elastic compression piece for compressing the sample is provided on the positioning base, and one end of the elastic compression piece is connected to the positioning base via a fastener.

[0010] The elastic pressing piece is connected to the positioning base through fasteners to press the two ends of the sample to facilitate sample positioning.

[0011] The elastic pressing piece can be a straight piece or have an arc.

[0012] Furthermore, the fastener includes a bolt, and the top surface of the positioning base is provided with a threaded hole for cooperating with the bolt.

[0013] The bolts mate with the threaded holes on the positioning base, making for easy connection and a simple structure. For samples that cannot be secured using the elastic clamp, the angle can be adjusted and the direction of the bolts removed to make room. The sample can then be secured using conductive adhesive in the usual manner, making it easy to use.

[0014] Furthermore, a second threaded hole is provided on the bottom surface of the support body, and a threaded section for threaded connection with the second threaded hole is provided on the top of the mounting post.

[0015] The second threaded hole is provided to screw the mounting post, so that the connection is stable, and the support body is prevented from being separated from the mounting post, and the support body is conveniently connected to the electron microscope base.

[0016] Furthermore, three installation straight-through grooves are provided, and the widths of the three installation straight-through grooves are 2 mm, 3 mm, and 4 mm respectively.

[0017] By setting 2mm, 3mm, and 4mm installation straight-through slots, it can adapt to the testing needs of samples of various sizes.

[0018] Furthermore, the depth of the installation through-slot is not less than 4 mm, and the width of the installation through-slot is not more than 6 mm. Sufficient height clearance is ensured to avoid the bottom of the installation through-slot affecting sample testing, and the maximum width is limited to avoid affecting the sample positioning effect.

[0019] Furthermore, the support body is a conductive metal truncated cone structure, and the outer contour of the positioning base matches the outer contour of the support body, which has a simple structure and is easy to use.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] 1. By providing a positioning platform to coordinate with both ends of the sample for positioning, and providing a through-slot to suspend the middle test portion of the sample for energy spectrum analysis, the interference of substrate elements on the elements to be measured can be accurately and effectively avoided. This allows for accurate and effective energy spectrum detection of single-layer thin films or nanoparticle samples, ensuring that the majority of the signal received by the detector comes from the sample itself. This improves the accuracy of the relative quantitative analysis results of the elements, enhances the accuracy and efficiency of the experiment, and ensures the reliability of the analysis results. This solves the problems of the existing technology in the qualitative and quantitative analysis of single-layer thin films or nanoparticle samples, which are difficult, and suffer from poor repeatability and reliability.

[0022] 2. The two ends of the sample are pressed and positioned by setting elastic pressing pieces, which makes the positioning operation convenient and eliminates the need for additional conductive adhesive, thus reducing costs.

[0023] 3. By opening multiple installation straight-through slots of different widths, it can be used for testing samples of various sizes, and can simultaneously clamp multiple samples, which is easy to operate;

[0024] 4. The overall structure is simple and easy to manufacture. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 The structure of the overhead sample stage for a scanning electron microscope is shown in Example 1 of the present invention. Figure 1 ;

[0026] Figure 2 The structure of the overhead sample stage for a scanning electron microscope is shown in Example 1 of the present invention. Figure 2 ;

[0027] Figure 3 This is a structural perspective view of an overhead sample stage for a scanning electron microscope according to Example 2 of the present utility model;

[0028] In the figure: 1. Support body; 2. Positioning base; 3. Installation straight groove; 4. Installation column; 5. Elastic pressure plate; 6. Fastener; 7. Threaded hole 2; 8. Threaded section; 9. Warped mouth structure. DETAILED DESCRIPTION

[0029] The following will clearly and completely describe the technical solution of the present invention in conjunction with the drawings in the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. In the description of the present invention, it should be noted that the terms front, back, left, right, etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention or simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed or operated in a specific direction, and therefore cannot be understood as a limitation on the present invention. Example 1

[0030] like Figure 1-2 As shown, an overhead sample stage for a scanning electron microscope comprises a support body 1, on the top of which are arranged in sequence a number of positioning seats 2 for positioning samples, a number of mounting straight-through slots 3 for overhead sample test parts are formed between the positioning seats 2, the several mounting straight-through slots 3 are parallel and have different widths, and a mounting column 4 for connecting to the electron microscope base is detachably provided at the center of the bottom surface of the support body 1.

[0031] In the above scheme, a positioning base 2 is set on the top of the support body 1 to cooperate with the two ends of the sample for positioning. The test part of the sample is suspended at the installation straight-through slot 3, thereby reducing the influence of the sample table on the sample test results. The installation straight-through slot 3 has various widths to match the test of samples of various sizes. The installation straight-through slots 3 are parallel to each other to facilitate sample positioning. A mounting column 4 is set at the center of the bottom surface of the support body 1 to facilitate the connection of the sample stage to the base of the electron microscope.

[0032] When using the energy spectrometer equipped with a scanning electron microscope to analyze the sample composition, single-layer film or nanoparticle samples are easily interfered with by the substrate element information, and the element signal of the sample itself cannot be accurately obtained, which greatly affects the repeatability and reliability of the experimental results. In this application, the sample detection part is suspended by installing a straight-through slot 3, thereby reducing the impact on the experimental results.

[0033] In order to provide good electrical conductivity, the sample stage is made of aluminum alloy. The multi-channel installation straight-through slot 3 can be used to carry multiple single-layer film or nanoparticle samples of different sizes at one time.

[0034] Furthermore, a second threaded hole 7 is provided on the bottom surface of the support body 1 , and a threaded section 8 for threaded connection with the second threaded hole 7 is provided on the top of the mounting post 4 .

[0035] The second threaded hole 7 is provided to screw the mounting post 4, so that the connection is stable, preventing the support body 1 from being separated from the mounting post 4, and facilitating the connection of the support body 1 to the base of the electron microscope.

[0036] The electronic microscope base is provided with a plug interface, and the bottom end of the mounting column 4 is plugged into and matched with the plug interface.

[0037] Furthermore, three installation straight-through grooves 3 are provided, and the widths of the three installation straight-through grooves 3 are 2 mm, 3 mm, and 4 mm respectively.

[0038] The detection needs of samples of various sizes can be met by setting the installation straight-through slots 3 of 2mm, 3mm and 4mm.

[0039] Furthermore, the depth of the installation through slot 3 is not less than 4 mm, and the width of the installation through slot 3 is not more than 6 mm. Sufficient height clearance is ensured to avoid the bottom of the installation through slot 3 affecting sample testing, and the maximum width is limited to avoid affecting the sample positioning effect.

[0040] In order to ensure that the element analysis results are not interfered with by the element information at the bottom of the sample, the groove depth, i.e., the overhead height, in the embodiment is preferably 5 mm.

[0041] Furthermore, the support body 1 is a conductive metal truncated cone structure, and the outer contour of the positioning base 2 matches the outer contour of the support body 1. The structure is simple and easy to use.

[0042] The operating principle of this utility model is as follows: Conductive tape is applied to the positioning base 2, and then a thin film sample is placed above the groove of the sample stage. The film sample is now fixed to the sample stage by the conductive tape. The screwed end of the mounting post 4 is screwed into the threaded hole 7 at the bottom of the round table, and the other end is inserted into the microscope base of the scanning electron microscope. The screw is then tightened, and the device can be used for SEM microanalysis of single-layer thin film samples.

[0043] The utility model solves the problems in the prior art of difficult qualitative and quantitative analysis of single-layer thin film or nanoparticle samples and poor repeatability and reliability. The use of the sample stage can accurately and effectively avoid the interference of substrate element information on the elements to be measured, improve the accuracy and efficiency of the experiment, and ensure the reliability of the analysis results. Example 2

[0044] like Figure 3 As shown, an overhead sample stage for a scanning electron microscope in this embodiment is further modified as follows based on Example 1:

[0045] Furthermore, an elastic pressing piece 5 for pressing the sample is provided on the positioning base 2 , and one end of the elastic pressing piece 5 is connected to the positioning base 2 via a fastener 6 .

[0046] The elastic pressing piece 5 is connected to the positioning base 2 through the fastener 6 to press the two ends of the sample to facilitate the positioning of the sample.

[0047] The elastic pressing piece 5 can be a straight piece or can be curved. An end of the elastic pressing piece 5 away from the fastener 6 is provided with a warping structure 9 to facilitate lifting the elastic pressing piece 5.

[0048] Furthermore, the fastener 6 includes a bolt, and the top surface of the positioning base 2 is provided with a threaded hole 1 for cooperating with the bolt.

[0049] The bolts fit into the threaded holes on the positioning base 2, making the connection easy and simple. For samples that cannot be fixed using the elastic pressing piece 5, the angle can be adjusted and the direction of the bolts can be removed to make room. After that, the sample can be fixed using conductive glue in a conventional way, which is convenient to use.

[0050] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An overhead sample stage for a scanning electron microscope, characterized in that: It includes a supporting body, on the top of which are arranged several positioning seats for positioning samples, and between which are formed several installation straight-through grooves for overhead sample testing parts. The several installation straight-through grooves are parallel and have different widths. A mounting column for connecting to the electron microscope base is detachably provided at the center of the bottom surface of the supporting body.

2. The overhead sample stage for a scanning electron microscope according to claim 1, characterized in that: The positioning base is provided with an elastic pressing piece for pressing the sample, and one end of the elastic pressing piece is connected to the positioning base through a fastener.

3. The overhead sample stage for a scanning electron microscope according to claim 2, characterized in that: The fastener includes a bolt, and the top surface of the positioning base is provided with a threaded hole for cooperating with the bolt.

4. The overhead sample stage for a scanning electron microscope according to claim 1, wherein: A second threaded hole is provided on the bottom surface of the support body, and a threaded section for threaded connection with the second threaded hole is provided on the top of the mounting column.

5. The overhead sample stage for a scanning electron microscope according to claim 1, wherein: There are three installation straight-through grooves, and the widths of the three installation straight-through grooves are 2mm, 3mm, and 4mm respectively.

6. The overhead sample stage for a scanning electron microscope according to claim 1, wherein: The depth of the installation straight-through groove is not less than 4 mm, and the width of the installation straight-through groove is not more than 6 mm.

7. The overhead sample stage for a scanning electron microscope according to claim 1, wherein: The support body is a conductive metal frustum structure, and the outer contour shape of the positioning seat matches the outer contour shape of the support body.

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