Blowing device for silicon wafer flower basket

By using an inclined air knife to blow the silicon wafer basket during the transfer of the silicon wafer basket, the problem of low drying efficiency caused by residual liquid and water droplets after the silicon wafer is cleaned is solved, and an efficient drainage and drying process is achieved.

CN223206234UActive Publication Date: 2025-08-08WUXI KINGENIOUS INTELLIGENT EQUIPMENT CO LTD
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Patent Information

Application Number
CN202422257499.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-14
Publication Date
2025-08-08
Estimated Expiration
2034-09-14

AI Technical Summary

Technical Problem

In the prior art, when the silicon wafer is transferred from the cleaning tank to the drying box after cleaning, the cleaning liquid and water droplets remaining on the surface of the silicon wafer basket and the silicon wafer lead to low drying efficiency.

Method used

A blowing device for silicon wafer flower basket is designed. The air knife is arranged inclined on the flower basket transfer rack. The air outlet of the air knife is facing the silicon wafer flower basket. It is used to blow the silicon wafer flower basket during the lifting process, blow the cleaning liquid into the cleaning tank, and reduce water droplets on the surface of the silicon wafer.

Benefits of technology

Effectively reduce the liquid volume of silicon wafer baskets and silicon wafers, improve drainage efficiency, and improve the drying efficiency of silicon wafer baskets transporting to drying boxes.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of silicon wafer production, in particular to a blowing device for a silicon wafer flower basket, which comprises a flower basket transfer frame, the flower basket transfer frame is used for placing and transferring the silicon wafer flower basket, an air knife is arranged on the flower basket transfer frame, and an air outlet of the air knife faces the silicon wafer flower basket placed on the flower basket transfer frame. The air blower is used for blowing the silicon wafer flower basket on the flower basket transfer frame; in the lifting and draining process of the silicon wafer flower basket, the air knife blows air to the silicon wafer flower basket, so that liquid carried on the silicon wafer flower basket and silicon wafers is blown into the cleaning tank, the liquid carrying amount of the silicon wafer flower basket and the silicon wafers is reduced, and the draining efficiency is improved; water drops on the surface of the silicon wafer can be reduced, so that the drying efficiency of transferring the silicon wafer basket into the drying box is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to a blowing device for a silicon wafer flower basket. Background Art

[0002] Photovoltaic power generation is one of the primary ways to utilize solar energy. Due to its clean, safe, convenient, and efficient characteristics, it has become an emerging industry that is attracting widespread attention and is being developed globally. Therefore, in-depth research and utilization of solar energy resources are crucial for alleviating resource crises and improving the ecological environment. Silicon wafers are an essential component of photovoltaic power generation.

[0003] Currently, silicon wafer cleaning is an important production process before silicon wafer manufacturing and testing. High decontamination and drying capabilities are key indicators of silicon wafer cleaning capabilities. When existing silicon wafers are cleaned in a cleaning tank, they are usually transferred between multiple cleaning tanks and drying ovens with the help of silicon wafer baskets. After the silicon wafers are cleaned in the cleaning tank, the silicon wafer baskets are controlled to be lifted upward from the cleaning tank. At this time, there will be a large area of cleaning liquid residue on the silicon wafer baskets and the side end surfaces of the silicon wafers. Therefore, the silicon wafer baskets and silicon wafers need to be drained. However, there are still a large number of water droplets on the surface of the silicon wafers after draining. Directly transferring the silicon wafers to the drying oven for drying at this time will lead to problems such as low drying efficiency. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a blowing device for a silicon wafer flower basket.

[0005] The utility model is realized through the following technical solutions:

[0006] A blowing device for silicon wafer flower baskets includes a flower basket transfer rack, which is used to place and transfer silicon wafer flower baskets. The flower basket transfer rack is provided with an air knife, and the air outlet of the air knife is directed toward the silicon wafer flower basket placed on the flower basket transfer rack, so as to blow air to the silicon wafer flower basket on the flower basket transfer rack.

[0007] As a further improvement of the present invention, the wind knife is obliquely arranged on the flower basket transfer rack and is located on one side of the silicon wafer flower basket placed on the flower basket transfer rack.

[0008] As a further improvement of the present invention, mounting seats are provided on both sides of the flower basket transfer rack, and the mounting seats include a connecting portion and an inclined portion provided on the lower side of the connecting portion. The distance between the inclined portions on both sides gradually increases from top to bottom, and the air knife is provided at the inner side of the inclined portion so that the air outlet of the air knife faces the cleaning liquid surface of the cleaning tank.

[0009] As a further improvement of the present invention, the flower basket transfer rack includes a transfer beam, a group of vertical mounting plates are provided on the transfer beam, and the mounting seat is provided between the group of vertical mounting plates.

[0010] As a further improvement of the present invention, connecting ends are provided on both sides of the vertical mounting plate, and connecting grooves are provided at both ends of the mounting seat, and the connecting grooves can allow the connecting ends to be embedded along a preset direction.

[0011] As a further improvement of the present invention, the mounting seat can be rotatably arranged between a group of vertical mounting plates to adjust the blowing angle of the wind knife.

[0012] As a further improvement of the present invention, connecting shafts are provided on both sides of the vertical mounting plate, and connecting grooves are provided at both ends of the mounting seat. The connecting shaft can be inserted into the connecting groove along a preset direction, and the connecting shaft and the connecting groove can rotate relative to each other. A locking piece is provided on the mounting seat for locking the mounting seat.

[0013] As a further improvement of the present invention, the locking member is a screw, which is connected to the mounting seat through threaded cooperation. The screw penetrates into the connecting groove and presses against the side wall of the connecting shaft to limit the relative rotation between the connecting shaft and the connecting groove.

[0014] As a further improvement of the present invention, a hand wheel is provided on the locking member.

[0015] As a further improvement of the present invention, a middle air inlet communicating with the interior of the air knife is provided on the inclined portion.

[0016] The beneficial effects of the present invention are as follows: during the process of lifting and draining the silicon wafer basket, the wind knife blows air on the silicon wafer basket, thereby blowing the liquid carried by the silicon wafer basket and the silicon wafers into the cleaning tank, thereby reducing the amount of liquid carried by the silicon wafer basket and the silicon wafers, and accelerating the draining efficiency. In addition, since the wind knife blows air on the silicon wafer, it can reduce the water droplets on the surface of the silicon wafer, thereby improving the drying efficiency of the silicon wafer basket when it is transferred to the drying box. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following is a detailed description of preferred embodiments of the present invention with reference to the accompanying drawings to help understand the purpose and advantages of the present invention, wherein:

[0018] Figure 1 This is a structural diagram of Example 1 of the utility model;

[0019] Figure 2 This is a structural diagram of a flower basket transfer rack according to Example 1 of the present utility model;

[0020] Figure 3 For the embodiment of the utility model corresponding Figure 2 A partial enlarged view of the middle part;

[0021] Figure 4 This is a structural diagram of Example 2 of the present utility model;

[0022] Figure 5 This is a schematic diagram of the connecting portion structure in Example 2 of the present utility model. DETAILED DESCRIPTION

[0023] The present invention will be described in further detail below based on the accompanying drawings and implementation examples.

[0024] In this specification, directional terms such as up, down, left, right, front, back, front, back, top, and bottom, which are mentioned or may be mentioned, are defined relative to the configurations shown in the accompanying drawings. The terms "inside" and "outside" refer to directions toward or away from the geometric center of a specific component, respectively. These are relative concepts and may vary depending on the location and usage of the component. Therefore, these or other directional terms should not be construed as restrictive.

[0025] Example 1, reference Figures 1 to 3 , the embodiments of the present utility model disclose:

[0026] A blowing device for silicon wafer flower baskets, comprising a flower basket transfer rack 1, wherein the flower basket transfer rack 1 is used to place and transfer silicon wafer flower baskets 1001, and an air knife 2 is provided on the flower basket transfer rack 1 (as shown in the figure, located above both sides of the silicon wafer flower basket). The air knife 2 is directed toward the silicon wafer flower basket 1001 placed on the flower basket transfer rack 1, so as to blow air to the silicon wafer flower basket 1001 on the flower basket transfer rack 1. In this embodiment, the air knife 2 is obliquely arranged on the flower basket transfer rack 1 and is located outside the silicon wafer flower basket 1001 placed on the flower basket transfer rack 1, wherein the air outlet of the air knife 2 is directed toward the silicon wafer flower basket 1001, which is conducive to improving the blowing and draining efficiency. At the same time, the setting of the air knife 2 will not affect the taking and placing of the silicon wafer flower basket 1001.

[0027] It is worth noting that the wind knife 2 is an existing structure, which is a product structure purchased on the market, such as the wind knife authorized for disclosure in December 2022 and with publication number CN218120557U. Therefore, the specific structure of the wind knife 2 will not be described here.

[0028] like Figure 1As shown, the flower basket transfer rack 1 is connected to the transport mechanism, and the silicon wafer flower basket is arranged on the flower basket transfer rack 1, and the silicon wafer is arranged on the silicon wafer flower basket, so that the flower basket transfer rack 1 can transfer the silicon wafer flower basket from the cleaning tank to the drying box; and in this embodiment, a lifting device is provided (the lifting device is a structure well known to those skilled in the art and will not be described here) to drive the silicon wafer flower basket to rise and fall; and air knives 2 are provided on both sides of the flower basket transfer rack 1, and the air blowing port of the air knife 2 is inclined downward toward the silicon wafer flower basket. In the process of lifting and draining the silicon wafer flower basket, the air knife 2 blows air to the silicon wafer flower basket, thereby blowing the liquid carried by the silicon wafer flower basket and the silicon wafer into the cleaning tank, thereby reducing the amount of liquid carried by the silicon wafer flower basket and the silicon wafer, and accelerating the draining efficiency. In addition, since the air knife 2 blows air to the silicon wafer, it can reduce the water droplets on the surface of the silicon wafer, thereby improving the drying efficiency of the silicon wafer flower basket when it is transferred to the drying box.

[0029] Mounting seats 3 are provided on both sides of the flower basket transfer rack 1, and the mounting seats 3 include a connecting portion 301 and an inclined portion 302 arranged on the lower side of the connecting portion 301. The distance between the inclined portions 302 on both sides gradually increases from top to bottom. The air knife 2 is arranged at the inner side of the inclined portion 302 so that the air outlet of the air knife 2 faces the cleaning liquid surface of the cleaning tank.

[0030] The flower basket transfer rack 1 includes a transfer beam 101 , on which a group of vertical mounting plates 102 are provided, and the mounting seat 3 is provided between the group of vertical mounting plates 102 .

[0031] The vertical mounting plate 102 is provided with connecting terminals 4 on both sides, and the mounting seat 3 is provided with connecting grooves 6 at both ends. The connecting grooves 6 allow the connecting terminals 4 to be embedded in a preset direction, and the mounting seat 3 is installed by snapping. The structure is simple and the assembly and disassembly are convenient.

[0032] In addition, in this embodiment, an intermediate air inlet 8 connected to the interior of the wind knife 2 is provided on the inclined portion 302, and air inlets are provided at both ends of the wind knife 2. At the same time, an intermediate air inlet 8 is provided to facilitate the connection of an external fan. It is worth noting that in this embodiment, an intermediate air inlet 8 is provided on the rear side of the wind knife 2, which is connected to its internal air passage. The wind knife 2 in this embodiment has an existing technical structure of the air passage, which will not be described here.

[0033] Example 2, reference Figures 4 and 5 , the embodiments of the present utility model disclose:

[0034] A blowing device for silicon wafer flower baskets includes a flower basket transfer rack 1, which is used to place and transfer silicon wafer flower baskets 1001. Air knives 2 are provided on both sides of the flower basket transfer rack 1. The air knives 2 are directed toward the middle of the flower basket transfer rack 1 to blow air to the silicon wafer flower baskets 1001 on the flower basket transfer rack 1. In this embodiment, the air knives 2 are obliquely arranged on both sides of the flower basket transfer rack 1, and the blowing ports of the air knives 2 are directed toward the silicon wafer flower baskets.

[0035] It is worth noting that the wind knife 2 is an existing structure, which is a product structure purchased on the market, such as the wind knife authorized for disclosure in December 2022 and with publication number CN218120557U. Therefore, the specific structure of the wind knife 2 will not be described here.

[0036] In this embodiment, the flower basket transfer rack 1 is connected to the transport mechanism, and the silicon wafer flower basket is arranged on the flower basket transfer rack 1, and the silicon wafer is arranged on the silicon wafer flower basket, so that the flower basket transfer rack 1 can transfer the silicon wafer flower basket from the cleaning tank to the drying box; and in this embodiment, a lifting device is provided (the lifting device is a structure well known to those skilled in the art and will not be described here) to drive the silicon wafer flower basket to rise and fall; and air knives 2 are provided on both sides of the flower basket transfer rack 1, and the air blowing port of the air knife 2 is inclined downward toward the silicon wafer flower basket. In the process of lifting and draining the silicon wafer flower basket, the air knife 2 blows air to the silicon wafer flower basket, thereby blowing the liquid carried by the silicon wafer flower basket and the silicon wafer into the cleaning tank, thereby reducing the amount of liquid carried by the silicon wafer flower basket and the silicon wafer, and accelerating the draining efficiency. In addition, since the air knife 2 blows air to the silicon wafer, it can reduce the water droplets on the surface of the silicon wafer, thereby improving the drying efficiency of the silicon wafer flower basket when it is transferred to the drying box.

[0037] Mounting seats 3 are provided on both sides of the flower basket transfer rack 1, and the mounting seats 3 include a connecting portion 301 and an inclined portion 302 arranged on the lower side of the connecting portion 301. The distance between the inclined portions 302 on both sides gradually increases from top to bottom. The air knife 2 is arranged at the inner side of the inclined portion 302 so that the air outlet of the air knife 2 faces the cleaning liquid surface of the cleaning tank.

[0038] The flower basket transfer rack 1 includes a transfer beam 101 , on which a group of vertical mounting plates 102 are provided, and the mounting seat 3 is provided between the group of vertical mounting plates 102 .

[0039] The vertical mounting plate 102 is provided with connecting terminals 4 on both sides, and the mounting seat 3 is provided with connecting grooves 6 at both ends. The connecting grooves 6 allow the connecting terminals 4 to be embedded in a preset direction, and the mounting seat 3 is installed by snapping. The structure is simple and the assembly and disassembly are convenient.

[0040] In actual work, since the depth of the silicon wafer basket immersed in the cleaning tank may be adjusted, the air blown by the air knife 2 cannot accurately blow to the part of the silicon wafer basket with the cleaning liquid. The mounting seat 3 can be rotatably set between a group of vertical mounting plates 102 to adjust the blowing angle of the air knife 2, so that the air outlet of the air knife 2 can correspond to the part of the silicon wafer basket with the cleaning liquid.

[0041] Connecting shafts 5 are provided on both sides of the vertical mounting plate 102, and connecting grooves 6 are provided at both ends of the mounting seat 3. The connecting shaft 5 can be inserted into the connecting groove 6 along a preset direction, and the connecting shaft 5 and the connecting groove 6 can rotate relative to each other. A locking piece 7 is provided on the mounting seat 3 for locking the mounting seat 3.

[0042] The locking member 7 is a screw, which is connected to the mounting seat 3 through threaded cooperation. The screw penetrates into the connecting groove 6 and presses against the side wall of the connecting shaft 5 to limit the relative rotation between the connecting shaft 5 and the connecting groove 6. A handwheel is provided on the locking member 7.

[0043] The inclined portion 302 is provided with a middle air inlet 8 connected to the interior of the air knife 2. The air knife 2 is provided with air inlets at both ends and a middle air inlet 8 to facilitate the connection of an external fan.

[0044] Finally, it should be noted that the above implementation cases are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above implementation cases, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the above implementation cases, or replace some of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the implementation cases of the present invention.

Claims

1. A blowing device for silicon wafer flower baskets, comprising a flower basket transfer rack (1), wherein the flower basket transfer rack (1) is used for placing and transferring silicon wafer flower baskets (1001), and is characterized in that: The flower basket transfer rack (1) is provided with an air knife (2), and an air outlet of the air knife (2) is directed toward the silicon wafer flower basket (1001) placed on the flower basket transfer rack (1), so as to blow air to the silicon wafer flower basket (1001) on the flower basket transfer rack (1).

2. The blowing device for a silicon wafer basket according to claim 1, characterized in that: The wind knife (2) is arranged obliquely on the flower basket transfer rack (1) and is located on one side of the silicon wafer flower basket (1001) placed on the flower basket transfer rack (1).

3. The blowing device for a silicon wafer basket according to claim 2, characterized in that: Mounting seats (3) are provided on both sides of the flower basket transfer rack (1), and the mounting seats (3) include a connecting portion (301) and an inclined portion (302) provided on the lower side of the connecting portion (301), wherein the spacing between the inclined portions (302) on both sides gradually increases from top to bottom, and the air knife (2) is provided at an inner position of the inclined portion (302) so that the air outlet of the air knife (2) faces the cleaning liquid surface of the cleaning tank.

4. The blowing device for a silicon wafer basket according to claim 3, characterized in that: The flower basket transfer rack (1) comprises a transfer beam (101), a group of vertical mounting plates (102) are provided on the transfer beam (101), and the mounting seat (3) is provided between the group of vertical mounting plates (102).

5. The blowing device for a silicon wafer basket according to claim 4, characterized in that: Connecting terminals (4) are provided on both sides of the vertical mounting plate (102), and connecting grooves (6) are provided on both ends of the mounting seat (3), wherein the connecting grooves (6) allow the connecting terminals (4) to be embedded in a preset direction.

6. The blowing device for a silicon wafer basket according to claim 4, characterized in that: The mounting seat (3) can be rotatably arranged between a group of vertical mounting plates (102) to adjust the blowing angle of the wind knife (2).

7. The blowing device for a silicon wafer basket according to claim 6, characterized in that: Connecting shafts (5) are provided on both sides of the vertical mounting plate (102), and connecting grooves (6) are provided at both ends of the mounting seat (3). The connecting shaft (5) can be inserted into the connecting groove (6) along a preset direction, and the connecting shaft (5) and the connecting groove (6) can rotate relative to each other. A locking member (7) is provided on the mounting seat (3) for locking the mounting seat (3).

8. The blowing device for a silicon wafer basket according to claim 7, characterized in that: The locking member (7) is a screw rod, which is connected to the mounting seat (3) through threaded engagement. The screw rod penetrates into the connecting groove (6) and abuts against the side wall of the connecting shaft (5) to limit relative rotation between the connecting shaft (5) and the connecting groove (6).

9. The blowing device for a silicon wafer basket according to claim 8, characterized in that: The locking member (7) is provided with a hand wheel.

10. The blowing device for a silicon wafer basket according to claim 3, characterized in that: The inclined portion (302) is provided with a middle air inlet (8) that is in communication with the interior of the air knife (2).

Citation Information

Patent Citations

  • Air knife

    CN218120557U