Vacuum platform jacking device

Abstract

The utility model discloses a vacuum platform jacking device, which comprises a mounting plate, the jacking module is arranged on the mounting plate and is used for providing a jacking driving force; the connecting plate is arranged at the output end of the jacking module and ascends and descends under the action of the jacking module; the vacuum cover plate is arranged at the top of the connecting plate; and the in-place detection module is used for detecting an in-place signal of the jacking movement of the vacuum cover plate. The utility model has the following beneficial effects: 1, the product has strong adsorption capacity and high flatness, and can be used in scenes with higher requirements on flatness; 2, the expansibility is high, and the purpose of adapting to products can be achieved by switching the vacuum cover plates; 3, the structure is compact and suitable for a semiconductor track module; 4, the structure is mainly a mechanical structure, the structure is stable, the cost is low, the operation cost is low, and the reliability is high; and 5, the whole structure adopts a modular design, and has relatively high generality and expansibility.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging back-end equipment, in particular to a vacuum platform lifting device. Background Art

[0002] With the rapid advancement of semiconductor technology, the requirements for inspection accuracy in back-end inspection processes have also increased. In addition to being equipped with suitable camera lenses, we urgently need an innovative structural design that can ensure the flatness of the back-end frame reaches extremely high standards to meet increasingly stringent inspection requirements.

[0003] Specifically, this structure should have the following key features:

[0004] Frame flatness assurance: Through precise mechanical structure and adjustment mechanism, the ultimate flatness of the back-end frame is effectively maintained, thereby reducing detection errors caused by surface unevenness and improving the accuracy of detection results.

[0005] Flexible up and down movement capability: The built-in efficient and stable drive system enables the structure to easily achieve precise up and down movement in the vertical direction to flexibly adapt to changes in different detection heights or process requirements.

[0006] Low vibration and low noise operation: The use of advanced shock-absorbing materials and noise reduction technology significantly reduces the vibration and noise generated by the equipment during movement or adjustment, providing operators with a more comfortable working environment while protecting precision testing equipment from damage.

[0007] Seamless integration into the production line: The design should fully consider compatibility with the existing production line to ensure that the structure can be smoothly integrated into the rail transmission system without affecting the normal handling and transmission of the frame on the production line, maintaining the efficiency and smoothness of the overall production process.

[0008] In summary, this structural design that integrates flatness assurance, flexible movement, low-noise operation and production line integration will be an indispensable and important part of the semiconductor back-end inspection process. It is of great significance to improve inspection accuracy and optimize production efficiency. Therefore, a vacuum platform lifting device is designed. Summary of the Invention

[0009] According to an embodiment of the present invention, a vacuum platform lifting device is provided, comprising:

[0010] Mounting plate;

[0011] A lifting module is provided on the mounting plate to provide a driving force for lifting;

[0012] The connecting plate is arranged at the output end of the jacking module and is lifted and lowered under the action of the jacking module;

[0013] A vacuum cover plate is arranged on the top of the connecting plate;

[0014] The in-place detection module is used to detect the in-place signal of the lifting movement of the vacuum cover.

[0015] Furthermore, the lifting module includes:

[0016] a first guide rail, the first guide rail being arranged on the mounting plate;

[0017] A wedge-shaped lifting block is slidably connected to the first guide rail, and a top of the wedge-shaped lifting block is provided with an inclined lifting surface;

[0018] A cam follower is provided at the bottom of the connecting plate and contacts the inclined lifting surface;

[0019] The driver is arranged on the mounting plate, and the output end of the driver is connected to the wedge-shaped lifting block;

[0020] The guide assembly is installed on the connecting plate and the mounting plate and is used to guide the jacking movement of the connecting plate.

[0021] Furthermore, the lifting module also includes:

[0022] A buffer is provided on the mounting plate and is located on one side of the first guide rail;

[0023] The buffer block is arranged on the wedge-shaped lifting block and is directly opposite to the buffer.

[0024] Furthermore, the guide component includes:

[0025] a pair of second guide rails, the pair of second guide rails being respectively arranged on both sides of the mounting plate;

[0026] A pair of guide blocks are respectively slidably connected to the pair of second guide rails, and the tops of the pair of guide blocks are respectively connected to the two sides of the bottom of the connecting plate.

[0027] Furthermore, it also includes:

[0028] A pair of first fixing seats, the pair of first fixing seats are respectively arranged on both sides of the mounting plate;

[0029] a pair of second fixing seats, wherein the pair of second fixing seats are respectively connected to the pair of guide blocks;

[0030] Springs are provided between the first fixing seat and the second fixing seat located on the same side of the mounting plate.

[0031] Furthermore, the driver is a cylinder.

[0032] Furthermore, a speed regulating valve is provided on the driver.

[0033] Furthermore, the output end of the driver is connected to the wedge-shaped lifting block via a floating joint.

[0034] Furthermore, the in-place detection module includes:

[0035] A first fixing frame, the first fixing frame is located on the outside of the mounting plate;

[0036] A first sensor, the first sensor is arranged on a first fixing frame;

[0037] a second fixing frame connected to the first fixing frame;

[0038] A second sensor is disposed on the second fixing frame and is adjacent to the bottom of the first sensor;

[0039] The descending-in-place triggering member is connected to the vacuum cover plate. When the vacuum cover plate descends into place, it is detected by the first sensor and a descending-in-place signal is sent.

[0040] The lifting-in-place triggering member is connected to the lowering-in-place triggering member. When the vacuum cover plate is lifted into place, it is detected by the second sensor and a lifting-in-place signal is sent.

[0041] Furthermore, the mounting plate is a concave structure.

[0042] A vacuum platform lifting device according to an embodiment of the present invention has the following beneficial effects:

[0043] 1. The product has strong adsorption capacity and high flatness, and can be used in scenes with high requirements on flatness;

[0044] 2. Strong scalability, and the purpose of adapting to the product can be achieved by switching the vacuum cover;

[0045] 3. Compact structure, suitable for semiconductor track modules;

[0046] 4. The structure is mainly mechanical, with stable structure, low cost, low operating cost and high reliability;

[0047] 5. The entire structure is modular in design, with high versatility and scalability;

[0048] 6. The key active parts can be disassembled, and the subsequent maintenance cost is low.

[0049] It is to be understood that both the foregoing general description and the following detailed description are exemplary, and are intended to provide further explanation of the technology as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1A schematic diagram of the three-dimensional structure of a vacuum platform lifting device according to an embodiment of the present invention Figure 1 .

[0051] Figure 2 A schematic diagram of the three-dimensional structure of a vacuum platform lifting device according to an embodiment of the present invention Figure 2 . DETAILED DESCRIPTION

[0052] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings to further illustrate the present invention.

[0053] First, combine Figures 1 and 2 The present invention describes a vacuum platform lifting device that provides a stable and precise lifting platform to meet the vacuum adsorption and inspection requirements of conventional webs. It has a wide range of applications.

[0054] like Figures 1 and 2 As shown, a vacuum platform lifting device according to an embodiment of the present invention comprises a mounting plate 100, a lifting module, a connecting plate 300, a vacuum cover plate 400 and an in-place detection module.

[0055] Specifically, if Figures 1 and 2 As shown, the mounting plate 100 is a concave structure, thereby facilitating the installation and fixation of components.

[0056] Specifically, if Figures 1 and 2 As shown, the lifting module is mounted on the mounting plate 100 and provides the driving force for lifting. The lifting module includes: a first guide rail 201, a wedge-shaped lifting block 202, a cam follower 203, a driver 204, and a guide assembly. The first guide rail 201 is mounted on the mounting plate 100; the wedge-shaped lifting block 202 is slidably connected to the first guide rail 201, and the top of the wedge-shaped lifting block 202 is provided with an inclined lifting surface 2021; the cam follower 203 is mounted on the bottom of the connecting plate 300, and the cam follower 203 contacts the inclined lifting surface 2021; the driver 204 is mounted on the mounting plate 100, and the output end of the driver 204 is connected to the wedge-shaped lifting block 202; the guide assembly is mounted on the connecting plate 300 and the mounting plate 100, and is used to guide the lifting movement of the connecting plate 300, ensuring the stability of the connecting plate 300 and the vacuum cover plate 400 during lifting. The driver 204 is operated to drive the wedge-shaped lifting block 202 to move on the first guide rail 201 , so that the cam follower 203 can drive the connecting plate 300 and the vacuum cover plate 400 to be lifted under the action of the inclined lifting surface 2021 .

[0057] Further, if Figures 1 and 2As shown, the actuator 204 is a pneumatic cylinder. A speed regulating valve 208 is provided on the actuator 204 to adjust the lifting speed of the vacuum cover plate 400. The output end of the actuator 204 is connected to the wedge-shaped lifting block 202 via a floating joint, which reduces errors and maintains smooth operation.

[0058] Further, if Figures 1 and 2 As shown, the lifting module further includes a buffer 206 and a buffer block 207. The buffer 206 is mounted on the mounting plate 100, located on one side of the first guide rail 201. The buffer block 207 is mounted on the wedge-shaped lifting block 202, facing the buffer 206. When the buffer block 207 contacts the buffer 206, it acts as a vibration dampener.

[0059] Further, if Figures 1 and 2 As shown, the guide assembly includes a pair of second guide rails 2051 and a pair of guide blocks 2052. The second guide rails 2051 are respectively provided on either side of the mounting plate 100; the guide blocks 2052 are slidably connected to the second guide rails 2051, with the tops of the guide blocks 2052 connected to the bottom sides of the connecting plate 300. The arrangement of the second guide rails 2051 and the guide blocks 2052 ensures the stability of the connecting plate 300 and the vacuum cover plate 400 during lifting.

[0060] Specifically, if Figures 1 and 2 As shown, the connecting plate 300 is located at the output end of the lifting module and is raised and lowered by the lifting module. The vacuum cover plate 400 is installed on top of the connecting plate 300 and operates in conjunction with the connecting plate 300, achieving vacuum suction on the product placed on it. When switching between different products, the vacuum cover plate 400 can be replaced to achieve the desired product. The structure is simple and reliable, and installation and maintenance are easy.

[0061] Specifically, if Figures 1 and 2As shown, the in-position detection module is used to detect the in-position signal of the lifting movement of the vacuum cover plate 400. The in-position detection module includes: a first fixing frame 501, a first sensor 502, a second fixing frame 503, a second sensor 504, a descent-in-position trigger 505, and a lift-in-position trigger 506. The first fixing frame 501 is located outside the mounting plate 100; the first sensor 502 is mounted on the first fixing frame 501; the second fixing frame 503 is connected to the first fixing frame 501; the second sensor 504 is mounted on the second fixing frame 503 and is located at the bottom of the first sensor 502; the descent-in-position trigger 505 is connected to the vacuum cover plate 400. When the vacuum cover plate 400 is lowered into position, it is detected by the first sensor 502 and generates a descent-in-position signal; the lift-in-position trigger 506 is connected to the descent-in-position trigger 505. When the vacuum cover plate 400 is lifted into position, it is detected by the second sensor 504 and generates a lift-in-position signal. Both the first sensor 502 and the second sensor 504 are slot-type photoelectric sensors.

[0062] Further, if Figure 1 As shown, the vacuum platform lifting device of the present embodiment further includes: a pair of first fixing seats 601 and a pair of second fixing seats 602. The pair of first fixing seats 601 are respectively disposed on both sides of the mounting plate 100; the pair of second fixing seats 602 are respectively connected to the pair of guide blocks 2052; and a spring 603 is provided between the first fixing seats 601 and the second fixing seats 602 located on the same side of the mounting plate 100.

[0063] The driver 204 drives the wedge-shaped lifting block 202 to move forward and backward, and under the action of the cam follower 203, drives the connecting plate 300 and the vacuum cover plate 400 to move up and down. At the same time, the descending trigger member 505 triggers the first sensor 502 or the lifting trigger member 506 triggers the second sensor 504, thereby sending an in-position signal to stop the driver 204 and achieve precise control of the position.

[0064] Above, refer to Figures 1 and 2 A vacuum platform lifting device according to an embodiment of the present invention is described, which has the following beneficial effects:

[0065] 1. The product has strong adsorption capacity and high flatness, and can be used in scenes with high requirements on flatness;

[0066] 2. Strong scalability, the vacuum cover can be switched 400 times to adapt to the product;

[0067] 3. Compact structure, suitable for semiconductor track modules;

[0068] 4. The structure is mainly mechanical, with stable structure, low cost, low operating cost and high reliability;

[0069] 5. The entire structure is modular in design, with high versatility and scalability;

[0070] 6. The key active parts can be disassembled, and the subsequent maintenance cost is low.

[0071] It should be noted that, in this specification, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, elements defined by the phrase "comprising..." do not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the elements.

[0072] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as limiting the present invention. After reading the above description, various modifications and alternatives to the present invention will be readily apparent to those skilled in the art. Therefore, the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A vacuum platform lifting device, characterized in that: Include: Mounting plate; A lifting module, the lifting module is arranged on the mounting plate and provides a driving force for lifting; A connecting plate, which is arranged at the output end of the jacking module and is lifted and lowered under the action of the jacking module; A vacuum cover plate, the vacuum cover plate being arranged on top of the connecting plate; The in-place detection module is used to detect an in-place signal of the lifting movement of the vacuum cover plate.

2. The vacuum platform lifting device according to claim 1, characterized in that: The lifting module comprises: a first guide rail, the first guide rail being disposed on the mounting plate; a wedge-shaped lifting block, the wedge-shaped lifting block being slidably connected to the first guide rail, and the top of the wedge-shaped lifting block being provided with an inclined lifting surface; a cam follower, the cam follower being disposed at the bottom of the connecting plate and contacting the inclined lifting surface; A driver, wherein the driver is arranged on the mounting plate, and an output end of the driver is connected to the wedge-shaped lifting block; A guide assembly is installed on the connecting plate and the mounting plate and is used to guide the lifting movement of the connecting plate.

3. The vacuum platform lifting device according to claim 2, characterized in that: The lifting module further comprises: a buffer, the buffer being arranged on the mounting plate and located on one side of the first guide rail; A buffer block is arranged on the wedge-shaped lifting block and is directly opposite to the buffer.

4. The vacuum platform lifting device according to claim 2, characterized in that: The guide assembly comprises: a pair of second guide rails, the pair of second guide rails being respectively arranged on both sides of the mounting plate; A pair of guide blocks are respectively slidably connected to the pair of second guide rails, and the tops of the pair of guide blocks are respectively connected to the two sides of the bottom of the connecting plate.

5. The vacuum platform lifting device according to claim 4, characterized in that: Also includes: a pair of first fixing seats, the pair of first fixing seats being respectively arranged on both sides of the mounting plate; a pair of second fixing seats, wherein the pair of second fixing seats are respectively connected to the pair of guide blocks; A spring is provided between the first fixing seat and the second fixing seat located on the same side of the mounting plate.

6. The vacuum platform lifting device according to claim 2, characterized in that: The driver is a cylinder.

7. The vacuum platform lifting device according to claim 6, characterized in that: The driver is provided with a speed regulating valve.

8. The vacuum platform lifting device according to claim 6, characterized in that: The output end of the driver is connected to the wedge-shaped lifting block via a floating joint.

9. The vacuum platform lifting device according to claim 1, characterized in that: The in-place detection module comprises: a first fixing frame, the first fixing frame being located on an outer side of the mounting plate; a first sensor, wherein the first sensor is disposed on the first fixing bracket; a second fixing frame connected to the first fixing frame; a second sensor, the second sensor being disposed on the second fixing bracket and adjacent to the bottom of the first sensor; A drop-in-place triggering member is connected to the vacuum cover plate. When the vacuum cover plate drops into place, it is detected by the first sensor and sends a drop-in-place signal. The lifting-in-place triggering member is connected to the lowering-in-place triggering member. When the vacuum cover plate is lifted into place, it is detected by the second sensor and a lifting-in-place signal is sent.

10. The vacuum platform lifting device according to claim 1, characterized in that: The mounting plate is a concave structure.

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