Treatment system for tail gas produced during preparation of germane / silane in liquid ammonia system

Abstract

The utility model relates to a system for treating tail gas produced during preparation of germane / silane in a liquid ammonia system. The system comprises an inert gas cylinder, an anti-suck-back tank and a tail gas absorption tank which are communicated through pipelines, a gas inlet of the tail gas absorption tank is communicated to a germane / silane tail gas outlet of a germane / silane synthesis device in the liquid ammonia system through an anti-suck-back tank; a top gas inlet of the anti-suck-back tank is connected to a germane / silane tail gas outlet of a germane / silane synthesis device in the liquid ammonia system, and a bottom gas outlet of the anti-suck-back tank is inserted into the bottom in the tail gas absorption tank from the top gas inlet of the tail gas absorption tank through a first pipeline; and the inert gas cylinder is connected to the gas inlet pipeline at the top of the suck-back prevention tank. The system is simple in structure, convenient to operate and high in germane / silane tail gas treatment efficiency, and can effectively prevent the suck-back of the absorption liquid and ensure that the germane / silane tail gas is discharged after reaching the standard after being treated.

Description

Technical Field

[0001] The utility model belongs to the field of tail gas treatment, and in particular relates to a treatment system for tail gas produced when preparing germane / silane in a liquid ammonia system. Background Art

[0002] Germane (GeH4) and silane are both important electronic specialty gases. Germane is a key source of high-purity elemental germanium, primarily used in semiconductors and infrared technology. Silane, on the other hand, can be pyrolyzed at high temperatures to produce crystalline silicon, primarily for applications in semiconductors and photovoltaics. Currently, numerous methods exist for preparing germane and silane. A typical, industrialized method involves reacting magnesium germanide / magnesium silicide with ammonium halides in a liquid ammonia system. This process produces a crude product gas containing not only the target germane / silane gas but also significant amounts of ammonia. Both ammonia and germane / silane are flammable and toxic gases, particularly silane, which combusts violently upon contact with air. Therefore, the exhaust gas produced, as well as the exhaust gas generated by sampling and analysis, requires qualified treatment before discharge. Currently, no suitable equipment for treating the combined exhaust gas of ammonia and germane / silane has been reported. Utility Model Content

[0003] The purpose of the utility model is to provide a treatment system for tail gas produced when preparing germane / silane in a liquid ammonia system. The treatment system has a simple structure, is easy to operate, has high efficiency in treating germane / silane tail gas, and can effectively prevent backflow of absorption liquid, thereby ensuring that the germane / silane tail gas meets emission standards after treatment.

[0004] In order to achieve the purpose of this utility model, the following technical solutions are adopted:

[0005] A system for treating tail gas produced when preparing germane / silane in a liquid ammonia system, the system comprises an inert gas cylinder, an anti-backflow tank and a tail gas absorption tank connected by a pipeline; wherein,

[0006] The tail gas absorption tank is provided with an air inlet, a liquid adding port and an air outlet at the top, and a liquid discharge port at the bottom, and the air inlet is connected to the germane / silane tail gas outlet of the germane / silane synthesis device in the liquid ammonia system through the anti-backflow tank, and is used to add absorption liquid from the liquid adding port to absorb the germane / silane and ammonia in the germane / silane tail gas introduced from the air inlet, and discharge hydrogen from the air outlet and discharge waste liquid from the liquid discharge port;

[0007] The top air inlet of the anti-backflow tank is connected to the germanium / silane tail gas outlet of the germanium / silane synthesis unit in the liquid ammonia system, and the bottom air outlet is inserted from the top air inlet of the tail gas absorption tank to the bottom of the tail gas absorption tank through a first pipeline, so as to deliver the germanium / silane tail gas from the germanium / silane synthesis unit in the liquid ammonia system to the tail gas absorption tank for absorption, and buffer the absorption liquid from the tail gas absorption tank to prevent the absorption liquid from the tail gas absorption tank from being backflowed into the germanium / silane synthesis unit in the liquid ammonia system;

[0008] The inert gas cylinder is connected to the top air inlet pipe of the anti-backflow tank and is used for purging and gas replacement of the system.

[0009] The utility model is a system for processing tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, a gas disperser is provided at the end of the first pipe inserted into the tail gas absorption tank.

[0010] The utility model is used for a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the gas disperser comprises at least three pipes, and the at least three pipes are radially distributed with the first pipe as the central axis and the end of the first pipe as the center;

[0011] One end of the pipeline located at the center of the radial distribution is connected to the end of the first pipeline, and the other end is closed;

[0012] Air holes are arranged on the bottom wall of the pipeline.

[0013] The utility model is used for a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the diameter of the pores is 2-10 mm, and / or,

[0014] The pore spacing of the air holes is 4-20 mm.

[0015] The utility model is a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the gas outlet at the top of the tail gas absorption tank is connected to a gas outlet pipe, and a fire cap is provided at the end of the gas outlet pipe to prevent the output hydrogen from catching fire.

[0016] The utility model is a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the tail gas absorption tank is further provided with a liquid communicator for testing the liquid level of the absorption liquid in the tail gas absorption tank.

[0017] The utility model is a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the tail gas absorption tank is further connected to a grounding device for anti-static purposes.

[0018] The utility model is used for a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the bottom of the anti-backflow tank is higher than the top of the tail gas absorption tank, so as to prevent the absorption liquid in the tail gas absorption tank from being backflowed.

[0019] The utility model is used for a system for processing tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the system further comprises a first bracket for supporting the anti-backflow tank; and / or,

[0020] The system further includes a second bracket for supporting the tail gas absorption tank.

[0021] The utility model is used for a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. Preferably, the volume ratio of the anti-backflow tank to the tail gas absorption tank is 1:(1-2).

[0022] The beneficial effects of the present invention are:

[0023] The utility model discloses a treatment system for tail gas produced when preparing germane / silane in a liquid ammonia system. The system has a simple structure, is easy to operate, has high efficiency in treating the germane / silane tail gas, and can effectively prevent back suction of the absorption liquid, thereby ensuring that the germane / silane tail gas meets the emission standards after treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic structural diagram of a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system according to the present invention in one embodiment;

[0025] Figure 2 This is a bottom view of a gas disperser 302 in a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system according to the present invention;

[0026] Among them, there are an inert gas cylinder 1; an anti-backflow tank 2, an air inlet pipe 201; an exhaust absorption tank 3, a first pipe 301, a gas disperser 302, a pipe 3021, an air hole 3022, a liquid filling port 303, an air outlet pipe 304, a fire cap 305, a liquid communication vessel 306, a grounding device 307, and a liquid discharge port 308; a first bracket 4; a second bracket 5; a first valve 601, a second valve 602, a third valve 603, and a fourth valve 604. DETAILED DESCRIPTION

[0027] The following further illustrates the technical solution and its effects of the present invention in conjunction with the accompanying drawings and specific embodiments. The following embodiments are intended only to illustrate the present invention and are not limited to the following embodiments or examples. Simple modifications to the present invention based on the concepts of the present invention are within the scope of protection claimed by the present invention.

[0028] like Figure 1 、 2 As shown, the present invention is a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system, the system comprising an inert gas cylinder 1, an anti-backflow tank 2 and a tail gas absorption tank 3 connected by a pipeline; wherein,

[0029] The tail gas absorption tank 3 is provided with an air inlet, a liquid adding port 303 and an air outlet at the top, and a liquid discharge port 308 at the bottom. The air inlet is connected to the germanium / silane tail gas outlet of the germanium / silane synthesis device in the liquid ammonia system through the anti-backflow tank 2, and is used to add absorption liquid from the liquid adding port 303 to absorb the germanium / silane and ammonia in the germanium / silane tail gas introduced from the air inlet, discharge hydrogen from the air outlet, and discharge waste liquid from the liquid discharge port 308;

[0030] The top air inlet of the anti-backflow tank 2 is connected to the germane / silane tail gas outlet of the germane / silane synthesis unit in the liquid ammonia system, and the bottom air outlet is inserted from the top air inlet of the tail gas absorption tank 3 to the bottom of the tail gas absorption tank 3 through a first pipe 301, so as to deliver the germane / silane tail gas from the germane / silane synthesis unit in the liquid ammonia system to the tail gas absorption tank 3 for absorption, and buffer the absorption liquid from the tail gas absorption tank 3 to prevent the absorption liquid from the tail gas absorption tank 3 from being backflowed into the germane / silane synthesis unit in the liquid ammonia system;

[0031] The inert gas cylinder 1 is connected to the top air inlet pipe 201 of the anti-backflow tank 2 for purging and gas replacement of the system.

[0032] Those skilled in the art will appreciate that the inert gas in the inert gas cylinder 1 may be helium, argon or nitrogen.

[0033] The present invention is a system for treating tail gas produced when preparing germane / silane in a liquid ammonia system. The system has a simple structure, is easy to operate, efficiently treats germane / silane tail gas, and effectively prevents backflow of the absorption liquid, ensuring that the germane / silane tail gas meets emission standards after treatment. The provision of the anti-backflow tank 2 effectively prevents backflow of the absorption liquid from the tail gas absorption tank 3 into the germane / silane synthesis unit in the liquid ammonia system, thereby preventing the germane / silane synthesis unit and its internal reactions from being affected. By inserting a first conduit 301 from the top air inlet of the tail gas absorption tank 3 to the bottom of the tail gas absorption tank 3, the germane / silane tail gas can be directly transported to the bottom of the tail gas absorption tank 3, extending its contact time with the absorption liquid and allowing it to fully contact and react with the absorption liquid in the tail gas absorption tank 3 during its ascent. This allows the germane / silane and ammonia in the germane / silane tail gas to be fully absorbed and reacted as much as possible, preventing leakage that could affect air quality and environmental safety.

[0034] In one embodiment, a gas disperser 302 is provided at the end of the first pipe 301 inserted into the exhaust gas absorption tank 3, thereby extending its contact time and contact surface in the absorption liquid, allowing it to fully contact and react with the absorption liquid in the exhaust gas absorption tank 3, thereby fully absorbing the germane / silane and ammonia in the germane / silane exhaust as much as possible, and avoiding leakage thereof and causing impacts on air quality and environmental safety.

[0035] In one embodiment, the gas disperser 302 includes at least three pipes 3021, and the at least three pipes 3021 are radially distributed with the first pipe 301 as the central axis and the end of the first pipe 301 as the center;

[0036] One end of the pipeline 3021 located at the center of the radial distribution is connected to the end of the first pipeline 301, and the other end is closed;

[0037] An air hole 3022 is provided on the bottom wall of the pipe 3021 , and preferably, the air hole 3022 is provided vertically downward.

[0038] In the present invention, air holes 3022 are provided on the bottom wall of the pipe 3021, so that the introduced germane / silane tail gas is more evenly dispersed into the absorption liquid through the gas disperser 302, so that it can fully contact and react with the absorption liquid in the tail gas absorption tank 3, thereby fully absorbing the germane / silane and ammonia in the germane / silane tail gas as much as possible, avoiding leakage thereof and causing impacts on air quality and environmental safety.

[0039] In one embodiment, in the gas disperser 302, there are 3-8 pipes 3021, such as 3, 4, 5, 6, 7, or 8. Figure 2 As shown, in the gas disperser 302, there are four pipes 3021, which are distributed in a cross shape.

[0040] In one embodiment, the pores 3022 have a diameter of 2-10 mm, such as 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, and 10 mm, and any value and range of values within this range.

[0041] In one embodiment, the pores 3022 have a pitch of 4-20 mm, such as 4 mm, 6 mm, 8 mm, 10 mm, 12 mm, 14 mm, 16 mm, 18 mm, and 20 mm, and any value and range of values within this range.

[0042] In one embodiment, in the gas disperser 302 , the pipe 3021 is a stainless steel pipe or a polytetrafluoroethylene pipe.

[0043] In one embodiment, the gas outlet at the top of the tail gas absorption tank 3 is connected to a gas outlet pipe 304 , and a fire cap 305 is provided at the end of the gas outlet pipe 304 to prevent the output hydrogen from catching fire.

[0044] In one embodiment, the tail gas absorption tank 3 is further provided with a liquid communication vessel 306 for testing the liquid level of the absorption liquid in the tail gas absorption tank 3 .

[0045] In one embodiment, the tail gas absorption tank 3 is further connected to a grounding device 307 for anti-static purposes.

[0046] Those skilled in the art understand that the gas output from the outlet of the tail gas absorption tank 3 contains flammable and explosive gases (such as hydrogen). Connecting the grounding device 307 can avoid static electricity, thereby avoiding hydrogen explosion caused by static electricity, which helps to provide stability and safety of the system.

[0047] In one embodiment, the bottom of the anti-backflow tank 2 is higher than the top of the tail gas absorption tank 3 , so as to prevent the absorption liquid in the tail gas absorption tank 3 from being backflowed.

[0048] In the present invention, by setting the bottom of the anti-backflow tank 2 to be higher than the top of the tail gas absorption tank 3, the absorption liquid in the tail gas absorption tank 3 is effectively prevented from being sucked back into the anti-backflow tank 2, and the possibility of the absorption liquid in the tail gas absorption tank 3 being sucked back into the germane / silane synthesis device in the liquid ammonia system is further avoided.

[0049] In one embodiment, the system further comprises a first bracket 4 for supporting the anti-backflow tank 2; and / or,

[0050] The system further includes a second bracket 5 for supporting the tail gas absorption tank 3 .

[0051] In the present invention, the anti-backflow tank 2 and the tail gas absorption tank 3 are mounted at a suitable height by the first bracket 4 and the second bracket 5 to prevent the absorption liquid in the tail gas absorption tank 3 from being backflowed.

[0052] In one embodiment, the volume ratio of the anti-backflow tank 2 to the tail gas absorption tank 3 is 1:(1-2), such as 1:1, 1:1.5 and 1:2 and any value and value range within this range.

[0053] In one embodiment, the absorption liquid is a mixture of an absorption solution and an organic solvent; and the organic solvent is located in the lower layer, and the absorption solution is located in the upper layer, which is used to absorb germane / silane and ammonia in the germane / silane tail gas, thereby effectively preventing the absorption liquid from being sucked back; preferably, the organic solvent includes a combination of any one or more of carbon tetrachloride, chloroform, and glycerol; preferably, the volume ratio of the absorption solution to the organic solvent is (2-5):1 (such as 2:1, 3:1, 4:1 and 5:1 and any value and numerical range within this range).

[0054] In the utility model, in the absorption liquid, the absorption solution located in the upper layer can react with the germane / silane and ammonia (ammonia is soluble in water) in the germane / silane tail gas, thereby absorbing the germane / silane and ammonia; while the organic solvent located in the lower layer cannot react with the germane / silane tail gas, that is, it cannot absorb the germane / silane tail gas, but the germane / silane tail gas directly introduced therein enters the absorption solution located in the upper layer in the form of bubbles, and the bubbling allows the germane / silane tail gas to enter the absorption solution located in the upper layer in a more dispersed manner, so that when the ammonia therein dissolves in the absorption solution, a large negative pressure will not be concentratedly formed at the germane / silane tail gas outlet to form backdraft, and the organic solvent located in the lower layer also has a buffering effect on this, thereby preventing the absorption solution located in the upper layer from being backdrafted into the germane / silane tail gas outlet pipe of the germane / silane synthesis device in the liquid ammonia system.

[0055] In one embodiment, when the germane / silane tail gas of the germane / silane synthesis unit in the liquid ammonia system is germane tail gas, the absorption solution preferably includes a combination of any one or more of potassium permanganate solution, hydrogen peroxide, and potassium dichromate solution. Preferably, the absorption solution is potassium permanganate solution, and preferably, the absorption solution is a potassium permanganate solution with a mass fraction of 3-6% (such as 3%, 4%, 5% and 6% and any value and numerical range within this range), so as to effectively absorb germane and ammonia in the germane tail gas.

[0056] In one embodiment, when the germane / silane tail gas of the germane / silane synthesis unit in the liquid ammonia system is silane tail gas, the absorption solution includes a combination of any one or more of sodium hydroxide solution, potassium hydroxide solution, lithium hydroxide solution, and water; preferably, the absorption solution is a sodium hydroxide solution, and preferably, the absorption solution is a sodium hydroxide solution with a mass fraction of 5-15% (such as 5%, 10% and 15% and any value and numerical range within this range), so as to effectively absorb silane and ammonia in the silane tail gas.

[0057] In one embodiment, the first pipe 301 is inserted into the lower layer (i.e., the organic solvent layer) in the exhaust gas absorption tank 3; preferably, the ratio of the depth of the first pipe 301 inserted into the organic solvent layer to the depth of the organic solvent is 0.5-0.8, such as 0.5, 0.6, 0.7 and 0.8 and any value and numerical range within this range.

[0058] In one embodiment, the inert gas cylinder 1 is used to purge and replace the system with gas. The inert gas cylinder 101 is used to purge the air in the replacement device until the oxygen concentration of the gas discharged from the fire cap 305 is less than 1 ppm.

[0059] Those skilled in the art will appreciate that corresponding valves are installed on the relevant pipelines to control the feeding of materials therein. For example, a first valve 601 is installed on the outlet pipeline of the inert gas cylinder 1, a second valve 602 is installed at the connection between the outlet pipeline of the inert gas cylinder and the inlet pipe 201, a third valve 603 is installed on the bottom outlet pipeline of the anti-backflow tank 2, and a fourth valve 604 is installed on the discharge pipeline of the bottom drain port 308 of the tail gas absorption tank 3. The second valve 602 is a three-way valve. The other valves may be ball valves.

[0060] The utility model discloses a treatment system for tail gas produced when preparing germane / silane in a liquid ammonia system. The system has a simple structure, is easy to operate, has high efficiency in treating the germane / silane tail gas, and can effectively prevent back suction of the absorption liquid, thereby ensuring that the germane / silane tail gas meets the emission standards after treatment.

[0061] like Figure 1 As shown, the process of treating the germane tail gas produced when preparing germane in a liquid ammonia system using the above system is as follows:

[0062] (1) According to Figure 1 Connect the devices, wherein the anti-backflow tank 2 and the tail gas absorption tank 3 are arranged according to a volume ratio (for example, 1:2);

[0063] (2) preparing a reaction solution (e.g., a 5% by mass potassium permanganate solution), and adding the prepared reaction solution and an organic solvent (e.g., carbon tetrachloride) into the tail gas absorption tank 3 from the liquid addition port 303 in a volume ratio (e.g., 3:1);

[0064] (3) Open the inert gas passage of the second valve 602, the third valve 603, and the valve of the inert gas bottle 1, then slowly open the first valve 601 to introduce inert gas (such as helium) into the device to purge and replace the air in the anti-backflow tank 2 and the pipeline connected to it until the oxygen concentration in the gas discharged from the fire cap 305 is less than 1 ppm, and then close the first valve 601 and the second valve 602;

[0065] (4) Slowly open the tail gas passage of the second valve 602 to pass the germane tail gas into the system. After the germane is absorbed by the absorption liquid in the tail gas absorption tank 3, the tail gas containing hydrogen is discharged;

[0066] When discharging tail gas, always observe the liquid communicating vessel 306. If the liquid level of the liquid communicating vessel 306 drops significantly, immediately close the second valve 602, slowly open the first valve 601, and introduce inert gas into the anti-backflow tank 2 to discharge the absorption liquid sucked back into the anti-backflow tank 2 into the tail gas absorption tank 3.

[0067] like Figure 1 As shown, the process of treating the silane tail gas produced when preparing silane in a liquid ammonia system using the above system is as follows:

[0068] (1) According to Figure 1 Connect the devices, wherein the anti-backflow tank 2 and the tail gas absorption tank 3 are arranged according to a volume ratio (for example, 1:1.5);

[0069] (2) preparing a reaction solution (e.g., a 10% sodium hydroxide solution by mass), and adding the prepared reaction solution and an organic solvent (e.g., glycerol) into the tail gas absorption tank 3 from the liquid addition port 303 according to a volume ratio (e.g., 3:1);

[0070] (3) Open the inert gas passage of the second valve 602, the third valve 603, and the valve of the inert gas bottle 1, then slowly open the first valve 601 to introduce inert gas (such as helium) into the device to purge and replace the air in the anti-backflow tank 2 and the pipeline connected to it until the oxygen concentration in the gas discharged from the fire cap 305 is less than 1 ppm, and then close the first valve 601 and the second valve 602;

[0071] (4) Slowly open the tail gas passage of the second valve 602 to allow the silane tail gas to enter the system. After the silane is absorbed by the absorption liquid in the tail gas absorption tank 3, the tail gas containing hydrogen is discharged;

[0072] When discharging tail gas, always observe the liquid communicating vessel 306. If the liquid level of the liquid communicating vessel 306 drops significantly, immediately close the second valve 602, slowly open the first valve 601, and introduce inert gas into the anti-backflow tank 2 to discharge the absorption liquid sucked back into the anti-backflow tank 2 into the tail gas absorption tank 3.

[0073] The utility model discloses a treatment system for tail gas produced when preparing germane / silane in a liquid ammonia system. The system has a simple structure, is easy to operate, has high efficiency in treating the germane / silane tail gas, and can effectively prevent back suction of the absorption liquid, thereby ensuring that the germane / silane tail gas meets the emission standards after treatment.

Claims

1. A system for treating tail gas produced when preparing germane / silane in a liquid ammonia system, characterized in that: The system comprises an inert gas cylinder (1), an anti-backflow tank (2) and an exhaust gas absorption tank (3) which are connected via a pipeline; wherein, The tail gas absorption tank (3) is provided with an air inlet, a liquid addition port (303) and an air outlet at the top, and a liquid discharge port (308) at the bottom, and the air inlet is connected to the germanium / silane tail gas outlet of the germanium / silane synthesis device in the liquid ammonia system through the anti-backflow tank (2), and is used for adding absorption liquid from the liquid addition port (303) to absorb the germanium / silane and ammonia in the germanium / silane tail gas introduced from the air inlet, and discharge hydrogen from the air outlet, and discharge waste liquid from the liquid discharge port (308); The top air inlet of the anti-backflow tank (2) is connected to the germanium / silane tail gas outlet of the germanium / silane synthesis unit in the liquid ammonia system, and the bottom air outlet is inserted from the top air inlet of the tail gas absorption tank (3) to the bottom of the tail gas absorption tank (3) through a first pipe (301), so as to send the germanium / silane tail gas from the germanium / silane synthesis unit in the liquid ammonia system to the tail gas absorption tank (3) for absorption, and buffer the absorption liquid from the tail gas absorption tank (3) to prevent the absorption liquid from the tail gas absorption tank (3) from being backflowed into the germanium / silane synthesis unit in the liquid ammonia system; The inert gas cylinder (1) is connected to the top air inlet pipe (201) of the anti-backflow tank (2) for purging and gas replacement of the system.

2. The system according to claim 1, wherein: A gas disperser (302) is provided at the end of the first pipe (301) inserted into the tail gas absorption tank (3).

3. The system according to claim 2, characterized in that The gas disperser (302) comprises at least three pipes (3021), and the at least three pipes (3021) are radially distributed with the first pipe (301) as the central axis and the end of the first pipe (301) as the center; One end of the pipeline (3021) located at the center of the radial distribution is connected to the end of the first pipeline (301), and the other end is closed; An air hole (3022) is provided on the bottom wall of the pipe (3021).

4. The system according to claim 3, characterized in that The pores (3022) have a diameter of 2-10 mm, and / or The hole spacing of the air holes (3022) is 4-20 mm.

5. The system according to any one of claims 1 to 4, characterized in that The gas outlet at the top of the tail gas absorption tank (3) is connected to a gas outlet pipe (304), and a fireproof cap (305) is provided at the end of the gas outlet pipe (304) to prevent the output hydrogen from catching fire.

6. The system according to claim 1, wherein: The tail gas absorption tank (3) is also provided with a liquid communicating vessel (306) for testing the liquid level of the absorption liquid in the tail gas absorption tank (3).

7. The system according to claim 1, wherein: The tail gas absorption tank (3) is also connected to a grounding device (307) for anti-static protection.

8. The system according to any one of claims 1 to 4 and 6 to 7, characterized in that The bottom of the anti-backflow tank (2) is higher than the top of the tail gas absorption tank (3), and is used to prevent the absorption liquid in the tail gas absorption tank (3) from being backflowed.

9. The system according to claim 1, wherein: The system further comprises a first bracket (4) for supporting the anti-backflow tank (2); and / or, The system further comprises a second bracket (5) for supporting the tail gas absorption tank (3).

10. The system according to any one of claims 1-4, 7-8 and 9, characterized in that The volume ratio of the anti-backflow tank (2) to the tail gas absorption tank (3) is 1:(1-2).

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