Belt wheel positioning and maintaining assembly and double-arm atmospheric manipulator

Through the combined design of radial and axial retainers, the problems of relative sliding or offset under concentricity difference and large torque in the pulley transmission system are solved, and the stability of the transmission and the reliability of the gas circuit are achieved, meeting the high accuracy and reliability requirements of the semiconductor industry.

CN223211419UActive Publication Date: 2025-08-12SUPER ELECTRONIC TECH (SHANGHAI) CO LTD
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Patent Information

Application Number
CN202422578893.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-24
Publication Date
2025-08-12
Estimated Expiration
2034-10-24

AI Technical Summary

Technical Problem

There are problems of relative sliding or offset under concentricity and large torque in existing pulley transmission systems, which affect the transmission stability and equipment life.

Method used

The design of combining radial retainers and axial retainers is adopted, and through mechanical embedding and threaded connection, ensuring the tight fit between the mandrel and the pulley, preventing rotational sliding and axial displacement.

Benefits of technology

It effectively solves the problems of relative sliding or offset under poor concentricity and large torque, ensures transmission stability, and reduces wear of the air circuit and wire through smooth parts design, and extends service life.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a belt wheel positioning and holding assembly and a double-arm atmospheric manipulator, which comprise a mandrel, at least one first fixing groove is formed in the peripheral side of the mandrel; an extending part is arranged at one end of the belt wheel, the belt wheel is arranged on the peripheral side of the mandrel in an extending and sleeving mode, the inner wall of the extending part abuts against the outer wall of the mandrel, at least one second fixing groove is formed in the inner wall of the extending part, and the first fixing groove and the second fixing groove are oppositely distributed and form a fixing space; a mounting gap is formed between the mandrel and the belt wheel; the radial retaining piece is arranged in the fixing space, and the radial retaining piece is used for keeping the belt wheel and the mandrel to rotate synchronously in the radial direction; and the axial retaining piece is arranged on the periphery of the mandrel in a sleeving manner and located in the mounting gap, and the axial retaining piece is used for fixing the mandrel to move synchronously with the axis of the belt wheel. According to the utility model, the concentricity deviation caused by overlarge torque in the rotating process of the belt wheel can be avoided.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafer transmission equipment, in particular to a pulley positioning and holding component and a double-arm atmospheric manipulator. Background Art

[0002] In the semiconductor production process, wafers need to be accurately transferred between different process steps, such as photolithography, etching, deposition, and chemical mechanical polishing. Pulley drive systems are often used as part of belt conveyors to move wafers.

[0003] Related patents disclose a pulley mechanism with an expansion sleeve, comprising a mounting shaft, an expansion sleeve, and a pulley. The expansion sleeve is connected to the mounting shaft and has a frustum-shaped structure. A boss is fixedly connected to the bottom of the expansion sleeve, and a plurality of threaded holes are formed on the boss. The pulley is provided with a tapered hole, which matches the tapered surface of the expansion sleeve. The pulley is provided with a plurality of through holes, which are arranged opposite to the threaded holes. The pulley is fixedly connected to the expansion sleeve via a screw. Although the pulley applies pressure on the expansion sleeve to generate friction, thereby achieving the purpose of locking the pulley and the mounting shaft, and meeting the advantage of transmitting high torque, the expansion sleeve is a keyless connection device that transmits load by tightening a high-strength bolt to generate pressure and friction between the enclosing surfaces. However, when using an expansion sleeve to fix the pulley, some problems may be encountered, such as poor concentricity and relative rotation or offset when the torque is too large.

[0004] Poor concentricity is often caused by improper installation of the expansion sleeve or insufficient manufacturing precision of the expansion sleeve itself. Poor concentricity can occur when the inner and outer tapered surfaces of the expansion sleeve don't completely align, or when the shaft and pulley are not machined to the required precision. This can cause vibration and noise during operation, impacting transmission efficiency and life. When the torque is too high, the expansion sleeve may rotate or deflect relative to the shaft. This occurs because the friction of the expansion sleeve is insufficient to withstand the high torque, causing relative slip between the pulley and shaft. This not only affects transmission stability but can also damage the pulley or shaft.

[0005] Therefore, it is necessary to provide a pulley positioning and holding assembly and a dual-arm atmospheric manipulator to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0006] The purpose of the utility model is to provide a pulley positioning and holding component and a double-arm atmospheric manipulator, so as to avoid concentricity deviation caused by excessive torque during the rotation of the pulley.

[0007] To achieve the above purpose, the technical solution of the utility model is as follows:

[0008] A pulley positioning and maintaining assembly, comprising:

[0009] The spindle has at least one first fixing groove formed on its outer circumference;

[0010] A pulley is provided at one end with an extension portion, the pulley is axially sleeved on the outer peripheral side of the spindle, the inner wall of the extension portion abuts the outer wall of the spindle, the inner wall of the extension portion is provided with at least one second fixing groove, the first fixing groove and the second fixing groove are relatively distributed and form a fixed space, and an installation gap is formed between the spindle and the pulley;

[0011] a radial retaining member, disposed in the fixed space, and configured to maintain radial synchronous rotation of the spindle and the pulley;

[0012] An axial retaining member is sleeved on the outer circumference of the spindle. The axial retaining member is located in the installation gap and is used to fix the pulley and the spindle to move synchronously along their own axes.

[0013] The beneficial effect of the pulley positioning and retaining assembly provided by the utility model is that the pulley positioning and retaining assembly effectively solves the problems of poor concentricity, relative sliding or offset under large torque in the traditional expansion sleeve transmission system through the combination of radial retaining parts and axial retaining parts, thereby ensuring transmission stability.

[0014] Furthermore, the pulley further includes a pressing portion, the axial retaining member includes an internal threaded barrel, the internal threaded barrel is threadedly connected to the outer wall of the central shaft, and one end of the internal threaded barrel close to the extension portion abuts against the surface of the pressing portion of the pulley.

[0015] Furthermore, the internally threaded barrel is provided with assembly holes, the assembly holes are distributed along the length direction of the internally threaded barrel, and the internally threaded barrel is installed in the installation gap through the assembly holes.

[0016] Furthermore, it also includes a wire lead-out piece and a bearing, the outer ring of the bearing abuts against the inner wall of one end of the pulley away from the radial retaining piece, the wire lead-out piece includes a fitting portion and an abutting portion, the fitting portion abuts against the inner ring of the bearing, and the abutting portion abuts against the end face of the inner ring of the bearing.

[0017] Furthermore, a rounded portion is provided at the connection between the fitting portion and the abutting portion, and the rounded portion has rounded corners.

[0018] A dual-arm atmospheric manipulator, comprising the above-mentioned pulley positioning and holding assembly, further comprising:

[0019] A dual-arm manipulator body having a first arm and a second arm;

[0020] A drive control mechanism connected to the dual-arm manipulator body is used to drive the first arm and the second arm to move up and down in the height direction and to rotate horizontally, and the drive control mechanism is provided with a threading hole;

[0021] A threading barrel is mounted on the drive control mechanism, wherein the inner space of the threading barrel is in communication with the threading hole;

[0022] Among them, the pipeline that provides the air source for the dual-arm manipulator body passes through the threading hole, the threading barrel and the core shaft in sequence.

[0023] The dual-arm atmospheric manipulator provided by this utility model has the following beneficial effects: by providing threading holes and threading barrels, the gas and circuit lines are rationally arranged, so that they remain stable and free from external interference during the transmission process. In particular, the gas line is the key link in the air supply to the suction cup, which optimizes the gas supply.

[0024] Furthermore, the dual-arm manipulator body also includes a base and a cylinder, and the drive control mechanism includes a controller, a driver and a lifter. The controller controls the driver to drive the cylinder to rotate, and the cylinder drives the first arm and the second arm to rotate in the horizontal direction through the base. The controller controls the lifter to drive the driver, the cylinder, the base, the first arm and the second arm to rise and fall in the height direction.

[0025] Furthermore, the first arm includes a first upper arm, a first lower arm and a first end effector, the first upper arm is hinged to the first lower arm, and the first lower arm is hinged to the first end effector;

[0026] The second arm includes a second upper arm, a second lower arm, and a second end effector. The second upper arm is hinged to the second lower arm, and the second lower arm is hinged to the second end effector.

[0027] Furthermore, the driver includes a first motor, a second motor, a driving pulley, a driven pulley and a reducer. The driving ends of the first motor and the second motor are respectively coaxially arranged with the driving pulley, the driving pulley is transmission-connected to the driven pulley, the driven pulley is coaxially arranged with the input end of the reducer, and the output end of the reducer is used to drive the first arm or the second arm to rotate horizontally.

[0028] Furthermore, the driver also includes a third motor, a first pulley, a second pulley, a third pulley and a fourth pulley. The driving end of the third motor drives the first pulley to rotate, the first pulley drives the second pulley to rotate through a synchronous belt, the second pulley drives the third pulley to rotate through a transmission shaft, the third pulley drives the fourth pulley to drive the drive seat to rotate through a synchronous belt, and the drive seat drives the cylinder to rotate. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the overall structure of the pulley positioning retainer according to an embodiment of the present utility model;

[0030] Figure 2 This is a schematic diagram of a dual-arm atmospheric manipulator according to an embodiment of the present utility model;

[0031] Figure 3 This is a schematic diagram of the air supply state of the dual-arm atmospheric manipulator according to an embodiment of the utility model;

[0032] Figure 4 This is a schematic diagram of the structure of the drive control mechanism of an embodiment of the utility model;

[0033] Figure 5 This is a schematic diagram of the structure of the upper arm pulley according to an embodiment of the utility model;

[0034] Figure 6 This is a schematic diagram of the driver structure of an embodiment of the utility model;

[0035] Figure 7 This is a schematic diagram of the structure of the lifter according to an embodiment of the present utility model.

[0036] Figure numerals: 1, spindle; 11, first fixing groove; 2, pulley; 21, extension portion; 211, second fixing groove; 22, installation gap; 23, pressing portion; 3, radial retaining member; 4, axial retaining member; 41, assembly hole; 5, wire lead-out member; 51, bearing; 52, fitting portion; 53, abutment portion; 54, smooth portion; 6, dual-arm atmospheric manipulator body; 61, first arm; 611, first large arm; 612, first small arm; 613, first end effector; 62, second arm; 621, second large arm; 622, second small arm; 623, second end effector; 63, base; 64, cylinder; 7, drive control mechanism; 71, controller; 72, driver; 721, first motor; 722 , second motor; 723, driving pulley; 724, driven pulley; 725, reducer; 726, third motor; 727, first pulley; 728, second pulley; 729, third pulley; 73, lifter; 74, threading hole; 741, threading barrel; 75, fourth pulley; 751, fourth motor; 76, fifth pulley; 77, sixth pulley; 78, screw rod; 79, guide rail; 8, first air path; 81, second air path; 82, upper arm pulley; 83, lower arm pulley; 9, first flange; 91, second flange; 92, third flange; 921, fourth flange; 93, upper cover; 94, lower cover; 95, air supply connector; 96, accommodating space; 97, shoulder pulley; 98, wrist pulley; 99, top plate. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] The specific implementation of the present invention will be further described in detail below with reference to the accompanying drawings.

[0039] The utility model is applicable to pipeline fluid transportation in various industries and fields, and the embodiment of the utility model takes semiconductor wafer picking and placing equipment as an example.

[0040] First, as Figure 1As shown, an embodiment of the present invention provides a pulley 2 positioning and retaining assembly comprising: a spindle 1 , a pulley 2 , a radial retaining member 3 and an axial retaining member 4 .

[0041] The pulley 2 is sleeved on the outer peripheral side of the main shaft 1, and a conduit channel begins to be formed on the main shaft 1 for the conduit line to pass through. The conduit line includes an air supply line and a power supply line. The air supply line supplies air to the suction cup end of the end effector, and the power supply line supplies power to the electronic equipment of the end effector. At least one first fixed groove 11 is provided on the outer peripheral side of the main shaft 1. An extension portion 21 is provided at one end of the pulley 2, and the inner wall of the extension portion 21 abuts the outer wall of the main shaft 1. The inner wall of the extension portion 21 is provided with at least one first fixed groove 11. The first fixed groove 11 and the second fixed groove 211 are relatively distributed and form a fixed space. The radial retaining member 3 is provided in the fixed space, and the radial retaining member 3 is used to radially fix the main shaft 1 and the pulley 2.

[0042] In some embodiments of the present invention, the radial retaining member 3 includes a key. The key connection is achieved by embedding the key into the first fixing groove 11 and the second fixing groove 211 between the main shaft 1 and the pulley 2. The key grooves on the main shaft 1 and the pulley 2 correspond to each other, and the key is placed in the groove, thereby forming a tight fit between the pulley 2 and the main shaft 1, which can prevent the pulley 2 from rotating on the main shaft 1, thereby ensuring that the pulley 2 remains stable during operation. The radial retaining member 3 can also adopt a pin for fixing the two by passing through corresponding through holes of the main shaft 1 and the pulley 2. The role of the pin is to prevent the main shaft 1 and the pulley 2 from moving in the radial direction by mechanical locking.

[0043] The axial retaining member 4 is sleeved on the outer circumference of the main shaft 1. A strip-shaped installation gap 22 is formed between the inner wall of the main shaft 1 away from the extension portion 21 and the pulley 2. The axial retaining member 4 is located in the installation gap 22. The axial retaining member 4 is used to axially fix the main shaft 1 and the pulley 2. The pulley 2 also includes a pressing portion 23, and the pressing portion 23 is in the shape of a ring. Specifically, the axial retaining member 4 adopts an internal threaded barrel, and the internal threaded barrel is threadedly connected to the outer wall of the main shaft 1. One end of the internal threaded barrel close to the extension portion 21 abuts against the surface of the pressing portion 23 of the pulley 2. The internal threaded barrel is connected to the outer wall of the main shaft 1 by rotating the thread, so that the bottom wall of the internal threaded barrel abuts and is fixed on the pressing portion 23.

[0044] In other embodiments of the present invention, the internally threaded barrel is provided with mounting holes 41, distributed along its length. These strip-shaped mounting holes 41 are distributed along the barrel's length, providing ample space for installation tools (such as a wrench or screwdriver). This avoids issues with limited installation space or tool alignment. Installers can insert tools into the barrel through these mounting holes 41, more easily applying rotational force and smoothly threading the barrel onto the outer wall of the mandrel 1.

[0045] In other embodiments of the present invention, a wire lead-out member 5 and a bearing 51 are further included. The outer wall of the bearing 51 abuts against the inner wall of one end of the pulley 2 away from the radial retaining member 3. The wire lead-out member 5 includes a fitting portion 52 and an abutting portion 53. The fitting portion 52 abuts against the inner wall of the bearing 51, and the abutting portion 53 abuts against one end face of the bearing 51. The cross-sections of the abutting portion 53 and the fitting portion 52 are L-shaped. The abutting portion 53 is used to abut against the bearing 51 for cooperative installation. The outer wall of the fitting portion 52 is in close contact with the inner ring of the bearing 51, and the contact area with the inner ring of the bearing 51 is increased by the fitting portion 52.

[0046] In other embodiments of the present invention, a rounded portion 54 is provided at the junction of the fitting portion 52 and the abutting portion 53. This rounded portion 54 has rounded corners. When an air path or wire passes through the junction of the fitting portion 52 and the abutting portion 53, if there are sharp edges or corners on the connecting structure, the air path or wire may be worn or even damaged due to friction during prolonged use. The rounded corners of the rounded portion 54 eliminate sharp edges, allowing the air path to more smoothly contact the structural surface during passage, thereby effectively reducing friction and extending the service life of the air path or wire.

[0047] Specifically, in the embodiments of the present invention, the combination of radial retainers 3 and axial retainers 4 effectively solves the problems of poor concentricity, relative slippage, or offset under high torque in traditional expansion sleeve transmission systems. The radial retainers 3 mechanically embed themselves to enhance the tight fit between the spindle 1 and the pulley 2, preventing rotational slippage and ensuring transmission stability. The axial retainers 4 achieve a secure axial fixation through a threaded connection, preventing displacement under excessive torque. Furthermore, the strip-shaped assembly hole 41 enhances installation convenience, and the chamfered rounded portion 54 effectively reduces wear on the air path and wires, extending their service life and meeting the semiconductor industry's requirements for high precision and reliability.

[0048] In a second aspect, the utility model provides a dual-arm atmospheric manipulator, comprising the above-mentioned pulley 2 positioning and holding assembly, and also comprising a dual-arm manipulator body, a drive control mechanism 7 and a threading barrel 741 .

[0049] Reference Figure 2-Figure 4The upper end of the dual-arm manipulator body has a first arm 61 and a second arm 62. Specifically, the first arm 61 on one side includes a first large arm 611, a first small arm 612, and a first end effector 613, wherein the first large arm 611 is hinged to the first small arm 612, and the first small arm 612 is hinged to the first end effector 613. The second arm 62 on the other side includes a second large arm 621, a second small arm 622, and a second end effector 623, wherein the second large arm 621 is hinged to the second small arm 622, and the second small arm 622 is hinged to the second end effector 623.

[0050] The drive control mechanism 7 is located at the bottom of the dual-arm manipulator body. The drive control mechanism 7 is connected to the dual-arm manipulator body and is used to drive the first arm 61 and the second arm 62 to move up and down and rotate horizontally. The bottom of the drive control mechanism 7 has a lower cover plate 94, which is provided with a threading hole 74. A threading barrel 741 is mounted on the drive control mechanism 7, and the internal space of the threading barrel 741 is interconnected with the threading hole 74. The pipeline providing the air source for the dual-arm manipulator body passes through the threading hole 74, the threading barrel 741, and the wire lead-out member 5 in sequence.

[0051] In other embodiments of the present invention, the dual-arm manipulator body also includes a base 63 and a cylinder 64, and the drive control mechanism 7 includes a controller 71, a driver 72, and a lifter 73 located at the bottom of the cylinder 64. The controller 71 controls the driver 72 to drive the cylinder 64 to rotate, and the cylinder 64 drives the first arm 61 and the second arm 62 to rotate in the horizontal direction through the base 63. The controller 71 controls the lifter 73 to drive the driver 72, the cylinder 64, the base 63, the first arm 61, and the second arm 62 to rise and fall in the height direction. Specifically, the controller 71 is electrically connected to the drive ends of the driver 72 and the lifter 73, respectively, for starting and shutting down the driver 72 and the lifter 73.

[0052] In other embodiments of the present invention, an air supply connector 95 is provided on the outside of the cylinder 64, and the air source passes through the cylinder 64 and is divided into a first air path 8 and a second air path 81. The first air path 8 and the second air path 81 supply air to the first arm 61 and the second arm 62 respectively.

[0053] In other embodiments of the present invention, the first arm 61 includes a first upper arm 611, a first lower arm 612, and a first end effector 613. The first upper arm 611 is hinged to the first lower arm 612, and the first lower arm 612 is hinged to the first end effector 613. The second arm 62 includes a second upper arm 621, a second lower arm 622, and a second end effector 623. The second upper arm 621 is hinged to the second lower arm 622, and the second lower arm 622 is hinged to the second end effector 623.

[0054] Furthermore, the driver 72 includes a first motor 721, a second motor 722, a driving pulley 723, a driven pulley 724 and a reducer 725. The driving ends of the first motor 721 and the second motor 722 are respectively coaxially arranged with the driving pulley 723, the driving pulley 723 is transmission-connected to the driven pulley 724, the driven pulley 724 is coaxially arranged with the input end of the reducer 725, and the output end of the reducer 725 is used to drive the first arm 61 or the second arm 62 to rotate horizontally.

[0055] Specifically, the system further includes a first flange 9, a second flange 91, a third flange 92, a fourth flange 921, a shoulder pulley 97, a wrist pulley 98, a first upper arm pulley 82, a first lower arm pulley 83, a second upper arm 621 pulley 2, and a second lower arm 622 pulley 2. Taking the extension or retraction of the first arm 61 as an example, the driving end of the first motor 721 or the second motor 722 drives the active pulley 723 to rotate. The active pulley 723 drives the driven pulley 724 to rotate via a synchronous belt. The driven pulley 724 drives the input end of the reducer 725 to rotate. The output end of the reducer 725 drives the cover plate to rotate via the first flange 9. A top plate 99 is provided above the first flange 9. The top plate 99 is bolted to the external housing, thereby driving the housing of the first arm 611 to rotate. The shoulder pulley 97 is fixedly connected to the upper cover plate 93 via the fourth flange 921. The shoulder pulley 97 remains stationary. During the rotation of the housing of the first arm 611 relative to the shoulder pulley 97, the position of the first arm pulley 82 relative to the shoulder pulley 97 changes, and the contact position between the transmission belt and the shoulder pulley 97 changes. The transmission belt drives the first arm pulley 82 to rotate. The first arm pulley 82 drives the housing of the first forearm 612 to rotate via the second flange 91. At this time, the position of the wrist pulley 98 relative to the first forearm pulley 83 changes, and the contact position between the first forearm pulley 83 and the transmission belt changes. The transmission belt drives the wrist pulley 98 to rotate, and the third flange 92 drives the first end effector 613 to extend or retract. The first arm 61 and the second arm 62 operate on the same principle and do not interfere with each other.

[0056] Reference Figure 4-Figure 5 In other embodiments of the present invention, a receiving space 96 is provided between the lead-out end of the threading barrel 741 and the upper cover 93 to prevent the gas and power supply lines from clinging to the cover after exiting the threading barrel 741, thereby preventing the wires from bending and being damaged. The gas line enters the threading barrel 741 through the threading hole 74, then extends through the threading barrel 741, is guided by a provided guide bracket, and enters the hollow portion of the spindle 1 of the first large arm 611. It is then guided through the wire lead-out member, passes through the guide bracket, enters the spindle 1 of the first small arm 612, and finally enters the first end effector 613 to supply gas to the gas-consuming components.

[0057] Because the dual-arm atmospheric manipulator's internal air and power supply lines run from bottom to top, all pipelines must pass through threading barrel 741, resulting in an excessively large diameter for the pipelines. Furthermore, since reducer 725 is mounted on threading barrel 741, the choice of reducer 725 is limited. The larger the wiring space required, the larger the reducer 725, and the larger the overall device.

[0058] Reference Figure 6 To this end, in some other embodiments of the present invention, the driver 72 also includes a third motor 726, a first pulley 727, a second pulley 728, a third pulley 729 and a fourth pulley 75. The driving end of the third motor 726 drives the first pulley 727 to rotate, the first pulley 727 drives the second pulley 728 to rotate through a synchronous belt, the second pulley 728 drives the third pulley 729 to rotate through a transmission shaft, the third pulley 729 drives the fourth pulley 75 to drive the drive seat to rotate through a synchronous belt, and the drive seat drives the cylinder 64 to rotate.

[0059] This embodiment increases the space for wiring by reducing the gear ratio and increasing the torque, thereby meeting the deceleration requirement. This reduces the external space, and the pulley 2 is machined and has a controllable size, thereby increasing the space for threading without increasing the space.

[0060] Reference Figure 7 In other embodiments of the present invention, the lifter 73 includes a fourth motor 751, a fifth pulley 76, a sixth pulley 77, a screw 78, a nut, a slider, and a guide rail 79. The driving end of the fourth motor 751 drives the fifth pulley 76 to rotate, and the fifth pulley 76 drives the sixth pulley 77 to rotate through a synchronous belt. The sixth pulley 77 drives the screw 78 to rotate. The nut is threadedly connected to the screw 78. The nut rises and falls along the length of the screw 78, thereby driving the slider to slide along the guide rail 79, limiting the sliding trajectory and improving the stability of the lifting and sliding. One end of the screw 78 is a free end, and the fixed seat is a split structure, which reduces the influence of the processing error of the nut seat connection part in the lifting part, facilitates adjustment, expands the adjustment range, and easily makes the screw 78 and the guide rail 79 relatively parallel.

[0061] In summary, the present invention provides a pulley 2 positioning and holding assembly and a dual-arm atmospheric manipulator with a reasonable structure and stable operation. First, the pulley 2 positioning and holding assembly effectively solves the problems of poor concentricity, relative sliding or offset under large torque in the traditional expansion sleeve transmission system through the combination of radial retaining members 3 and axial retaining members 4, ensures transmission stability, and the strip assembly hole 41 design improves installation convenience. Secondly, the chamfered design of the smooth part 54 of the assembly reduces the wear of the air path and wires, extends their service life, and meets the semiconductor industry's requirements for high precision and reliability. In terms of the dual-arm atmospheric manipulator, a unique threading structure and control system design are adopted to effectively utilize the internal space, realize the reasonable wiring and reliable supply of the air path and circuit. At the same time, the driving structure of the dual-arm manipulator optimizes the torque transmission efficiency through multi-layer gear transmission and reducer 725 structure, reduces the volume and space occupancy while meeting the transmission requirements, and improves the overall performance of the equipment. In addition, the lifting device adopts a design combining guide rails 79 and screw rods 78 to provide a stable lifting and sliding trajectory, further improving the operating accuracy of the manipulator.

[0062] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations may be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the present invention described herein may have other embodiments and may be implemented or carried out in a variety of ways.

Claims

1. A pulley positioning and holding assembly, characterized in that: include: A spindle (1) having at least one first fixing groove (11) formed on its outer peripheral side; A pulley (2) is provided with an extension portion (21) at one end, the pulley (2) is axially sleeved on the outer peripheral side of the spindle (1), the inner wall of the extension portion (21) abuts against the outer wall of the spindle (1), the inner wall of the extension portion (21) is provided with at least one second fixing groove (211), the first fixing groove (11) and the second fixing groove (211) are relatively distributed and form a fixed space, and an installation gap (22) is formed between the spindle (1) and the pulley (2); A radial retaining member (3) is arranged in the fixed space, and the radial retaining member (3) is used to maintain radial synchronous rotation of the spindle (1) and the pulley (2); An axial retaining member (4) is sleeved on the outer periphery of the spindle (1), the axial retaining member (4) is located in the installation gap (22), and the axial retaining member (4) is used to fix the pulley (2) and the spindle (1) to move synchronously along their own axis.

2. The pulley positioning and holding assembly according to claim 1, wherein: The pulley (2) further includes a pressing portion (23), the axial retaining member (4) includes an internal threaded barrel, the internal threaded barrel is threadedly connected to the outer wall of the spindle (1), and one end of the internal threaded barrel close to the extension portion (21) abuts against the surface of the pressing portion (23) of the pulley (2).

3. The pulley positioning and holding assembly according to claim 2, wherein: The internally threaded barrel is provided with assembly holes (41), the assembly holes (41) are distributed along the length direction of the internally threaded barrel, and the internally threaded barrel is installed in the installation gap (22) through the assembly holes (41).

4. The pulley positioning and holding assembly according to claim 1, wherein: The invention also includes a wire lead-out member (5) and a bearing (51), wherein the outer ring of the bearing (51) abuts against the inner ring of one end of the pulley (2) away from the radial retaining member (3), and the wire lead-out member (5) includes a fitting portion (52) and an abutting portion (53), wherein the fitting portion (52) abuts against the inner wall of the bearing (51), and the abutting portion (53) abuts against the inner ring end face of the bearing (51).

5. The pulley positioning and holding assembly according to claim 4, characterized in that: A smooth portion (54) is provided at the connection between the fitting portion (52) and the abutting portion (53), and the smooth portion (54) has rounded corners.

6. A dual-arm atmospheric manipulator, comprising a pulley positioning and holding assembly according to any one of claims 1 to 5, characterized in that: include: A dual-arm manipulator body having a first arm (61) and a second arm (62); a drive control mechanism (7) connected to the dual-arm manipulator body and used to drive the first arm (61) and the second arm (62) to move up and down in the height direction and to rotate in the horizontal direction, the drive control mechanism (7) being provided with a threading hole (74); A threading barrel (741) is mounted on the drive control mechanism (7), wherein the internal space of the threading barrel (741) is in communication with the threading hole (74); Wherein, a pipeline for providing an air source to the dual-arm manipulator body passes through the threading hole (74), the threading barrel (741) and the spindle (1) in sequence.

7. The dual-arm atmospheric manipulator according to claim 6, characterized in that: The dual-arm manipulator body also includes a base (63) and a cylinder (64), and the drive control mechanism (7) includes a controller (71), a driver (72) and a lifter (73). The controller (71) controls the driver (72) to drive the cylinder (64) to rotate, and the cylinder (64) drives the first arm (61) and the second arm (62) to rotate in the horizontal direction through the base (63). The controller (71) controls the lifter (73) to drive the driver (72), the cylinder (64), the base (63), the first arm (61) and the second arm (62) to rise and fall in the height direction.

8. The dual-arm atmospheric manipulator according to claim 7, characterized in that: The first arm (61) comprises a first large arm (611), a first small arm (612) and a first end effector (613), wherein the first large arm (611) is hinged to the first small arm (612), and the first small arm (612) is hinged to the first end effector (613); The second arm (62) comprises a second upper arm (621), a second lower arm (622) and a second end effector (623); the second upper arm (621) is hinged to the second lower arm (622); and the second lower arm (622) is hinged to the second end effector (623).

9. The dual-arm atmospheric manipulator according to claim 8, characterized in that: The driver (72) comprises a first motor (721), a second motor (722), a driving pulley (723), a driven pulley (724) and a reducer (725); the driving ends of the first motor (721) and the second motor (722) are respectively coaxially arranged with the driving pulley (723); the driving pulley (723) is transmission-connected to the driven pulley (724); the driven pulley (724) is coaxially arranged with the input end of the reducer (725); and the output end of the reducer (725) is used to drive the first arm (61) or the second arm (62) to rotate horizontally.

10. The dual-arm atmospheric manipulator according to claim 7, characterized in that: The driver (72) further includes a third motor (726), a first pulley (727), a second pulley (728), a third pulley (729) and a fourth pulley (75), wherein the driving end of the third motor (726) drives the first pulley (727) to rotate, the first pulley (727) drives the second pulley (728) to rotate via a synchronous belt, the second pulley (728) drives the third pulley (729) to rotate via a transmission shaft, the third pulley (729) drives the fourth pulley (75) to drive the seat body (63) to rotate via a synchronous belt, and the seat body (63) drives the cylinder body (64) to rotate.

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