Arc conveying device for conveying silicon wafers

Abstract

The utility model discloses an arc conveying device for conveying silicon wafers. The arc conveying device comprises an arc-shaped support assembly, a first conveying belt, a second conveying belt and a third conveying belt. The first conveying belt, the second conveying belt and the third conveying belt are sequentially connected end to end in the conveying direction. The first conveying belt is obliquely arranged upwards in the conveying direction; the third conveyor belt is horizontally arranged and is higher than the first conveyor belt; the arc-shaped support assembly is arranged in the second conveying belt. According to the conveying device disclosed by the utility model, the silicon wafers are gradually converted from a vertical state to a horizontal state in the conveying process, so that the conveying stability of the silicon wafers is effectively improved, and unnecessary loss caused by damage of the silicon wafers due to too fast steering is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production equipment, in particular to an arc conveying device for silicon wafer transmission. Background Art

[0002] During the silicon wafer production process, after debonding, the wafers need to be separated and loaded into baskets. During this loading process, a conveyor system lifts the vertically positioned wafers in the material frame one by one, rotates them horizontally, and then transfers them into the basket. The conveyor system first lifts the wafers vertically to their highest point, then uses an air blower to directly horizontalize them. The vertical wafers are then transferred horizontally to the basket and loaded. Because silicon wafers are very thin and fragile, the rapid rotation speed presents a risk of damage. Utility Model Content

[0003] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide an arc conveying device for silicon wafer transmission, so that the silicon wafer can gradually turn from a vertical state to a horizontal state during the transmission process, effectively improving the stability of silicon wafer transmission and avoiding unnecessary losses caused by damage to the silicon wafer due to excessively rapid rotation.

[0004] The utility model provides an arc conveying device for silicon wafer transmission, comprising an arc-shaped support assembly and a first conveyor belt, a second conveyor belt and a third conveyor belt connected end to end in a transmission direction;

[0005] The first conveyor belt is arranged to be tilted upward along the transmission direction; the third conveyor belt is arranged horizontally and is higher than the first conveyor belt; the arc-shaped bracket assembly is arranged in the second conveyor belt, and is used to support the top surface of the second conveyor belt from the bottom, so that the top surface of the second conveyor belt is an arc shape that gradually transitions to a horizontal state.

[0006] Furthermore, the arc-shaped bracket assembly includes arc-shaped support members arranged on both sides of the second conveyor belt, and the two arc-shaped support members are fixedly connected by a plurality of connecting rods.

[0007] Furthermore, a transmission wheel is provided at the transmission starting end of the first conveyor belt, and first brackets are provided on both sides of the transmission wheel. The transmission wheel is rotatably connected to the first bracket through a bearing, and a driving motor is provided on one side of the transmission wheel to drive it to rotate.

[0008] Furthermore, first baffles are respectively provided on both sides of the transmission wheel and the first conveyor belt; second baffles are respectively provided on both sides of the second conveyor belt and the third conveyor belt, and the second baffles are connected end to end with the first baffles.

[0009] Furthermore, a blowing assembly is provided on the side of the transmission wheel close to the transmission starting end; the blowing assembly includes a second bracket fixedly connected to the first bracket, and a plurality of first nozzles are fixedly provided on the second bracket on the side of the transmission wheel close to the transmission starting end, and a second nozzle is fixedly provided on the second bracket on the side of the first conveyor belt close to the transmission starting end, and the first nozzle and the second nozzle are respectively connected to an air pump.

[0010] Compared with the prior art, the beneficial effects of the present invention are:

[0011] (1) The conveying device of the present invention is provided with an arc-shaped support assembly, a first conveyor belt, a second conveyor belt and a third conveyor belt. The second conveyor belt is supported by the arc-shaped support assembly to form an arc-shaped transition section. After the silicon wafer is lifted, it first enters the first conveyor belt and is transported upward at an angle. Then it enters the arc-shaped second conveyor belt and gradually turns to the horizontal. Finally, it is transported into the material basket via the third conveyor belt and completed. The conveying device of the present application allows the silicon wafer to gradually turn from a vertical state to a horizontal state during the transmission process, effectively improving the stability of the silicon wafer transmission and avoiding unnecessary losses caused by damage to the silicon wafer due to excessive rotation.

[0012] (2) The arc bracket assembly has a simple structure, is quick and easy to assemble and replace, and is easy to repair and maintain.

[0013] It should be understood that the contents described in the summary of the utility model are not intended to limit the key or important features of the embodiments of the utility model, nor are they intended to limit the scope of the utility model. Other features of the utility model will become easier to understand through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Other features, objects and advantages of the present invention will become more apparent from the detailed description of the non-limiting embodiments made with reference to the following drawings:

[0015] Figure 1 It is a structural schematic diagram of a circular arc conveying device for silicon wafer transmission;

[0016] Figure 2 Schematic diagram of the connection structure of each conveyor belt and transmission wheel;

[0017] Figure 3 Schematic diagram of the structure of the arc bracket assembly;

[0018] Figure 4 Schematic diagram of the structure of the blowing component.

[0019] Reference numerals in the figure: 1, arc-shaped bracket assembly; 2, first conveyor belt; 3, second conveyor belt; 4, third conveyor belt; 5, transmission wheel; 6, first baffle; 7, second baffle; 8, blowing assembly;

[0020] 11. Arc-shaped support member; 12. Connecting rod; 13. Mounting bracket; 14. Long hole;

[0021] 51. First bracket; 52. Driving motor;

[0022] 81. Second bracket; 82. First nozzle; 83. Second nozzle. DETAILED DESCRIPTION

[0023] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are intended only to illustrate the relevant utility model and are not intended to limit the scope of the utility model. It should also be noted that, for ease of description, only the portions relevant to the utility model are shown in the accompanying drawings.

[0024] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0025] Please refer to Figures 1 to 4 The embodiment of the utility model provides an arc conveying device for silicon wafer transmission, comprising an arc-shaped support assembly 1 and a first conveyor belt 2, a second conveyor belt 3 and a third conveyor belt 4 connected end to end in a transmission direction;

[0026] The first conveyor belt 2 is arranged to be tilted upward along the transmission direction; the third conveyor belt 4 is arranged horizontally and is higher than the first conveyor belt 2; the arc-shaped bracket assembly 1 is arranged in the second conveyor belt 3, and is used to support the top surface of the second conveyor belt 3 from the bottom, so that the top surface of the second conveyor belt 3 gradually transitions to a horizontal arc.

[0027] In this embodiment, when silicon wafers are transported by the conveyor device of the present application, they first enter the first conveyor belt 2 and are transported upward at an angle. They then enter the curved second conveyor belt 3 and gradually rotate along the second conveyor belt 3 to a horizontal position. Finally, they are transported to the basket via the third conveyor belt 4 and loaded into the basket. During the transport process, the silicon wafers gradually rotate from a vertical position to a horizontal position, effectively improving the stability of the silicon wafer transport and avoiding unnecessary losses caused by damage to the silicon wafers due to excessive rotation.

[0028] In a preferred embodiment, if Figure 2 and Figure 3 As shown, the arc-shaped bracket assembly 1 includes arc-shaped support members 11 arranged on both sides of the second conveyor belt 3, and the two arc-shaped support members 11 are fixedly connected by a plurality of connecting rods 12.

[0029] In this embodiment, the curved support member 12 is fixedly supported by a mounting bracket 13, resting against the bottom of the top surface of the second conveyor belt 3. This creates a curved transition section, improving the stability of wafer transport. The mounting bracket 13 includes an elongated hole 14, through which a bolt passes to threadably connect with the curved support member 11. This hole 14 allows the height of the curved support member 11 to be adjusted, ensuring effective support and preventing the second conveyor belt 3 from slacking and affecting wafer transport.

[0030] In a preferred embodiment, if Figure 1 and Figure 2 As shown, a transmission wheel 5 is provided at the transmission starting end of the first conveyor belt 2, and first brackets 51 are provided on both sides of the transmission wheel 5. The transmission wheel 5 is rotatably connected to the first bracket 51 through a bearing, and a driving motor 52 is provided on one side of the transmission wheel 5 to drive it to rotate.

[0031] In this embodiment, a number of lifting wheels are provided on the vertical surface below the front side of the transmission wheel 5. The silicon wafer is lifted up after being attached to the lifting wheel. After being transported to the transmission wheel 5, the transmission wheel 5 drives the silicon wafer to continue to move upward along the wheel surface of the transmission wheel 5, and then enters the first conveyor belt 2 to complete subsequent transmission, with good transmission stability.

[0032] In a preferred embodiment, if Figure 1 As shown, first baffles 6 are respectively provided on both sides of the transmission wheel 5 and the first conveyor belt 2; second baffles 7 are respectively provided on both sides of the second conveyor belt 3 and the third conveyor belt 4, and the second baffles 7 are connected end to end with the first baffle 6; during the transmission of the silicon wafer, the second baffles 7 and the first baffle 6 form a limiting protection on both sides of the silicon wafer, ensuring the safety of the silicon wafer transmission.

[0033] In a preferred embodiment, if Figure 1 and Figure 4 As shown, a blowing assembly 8 is provided on the side of the transmission wheel 5 close to the transmission starting end; the blowing assembly 8 includes a second bracket 81 fixedly connected to the first bracket 51, and a plurality of first nozzles 82 are fixedly provided on the second bracket 81 on the side of the transmission wheel 5 close to the transmission starting end, and a second nozzle 83 is fixedly provided on the second bracket 81 on the side of the first conveyor belt 2 close to the transmission starting end, and the first nozzle 82 and the second nozzle 83 are respectively connected to the air pump.

[0034] In this embodiment, during the transmission of the silicon wafer, the air pump outputs high-pressure gas, which is ejected through the first nozzle 82 and the second nozzle 83 respectively; the first nozzle 82 makes the silicon wafer tightly adhere to the transmission wheel 5 and is transmitted upward along with the transmission wheel 5; the second nozzle 83 makes the silicon wafer tightly adhere to the first conveyor belt 2 and is transmitted upward along with the first conveyor belt 2, ensuring the effective transportation of the silicon wafer.

[0035] In this specification, the terms "connect," "install," and "fix" should be understood broadly. For example, "connect" can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediary. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0036] Throughout this specification, terms such as "one embodiment" or "some embodiments" mean that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0037] The above are merely preferred embodiments of the present application and are not intended to limit the present application. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A circular arc conveying device for silicon wafer transmission, characterized in that: It comprises an arc-shaped support assembly (1) and a first conveyor belt (2), a second conveyor belt (3) and a third conveyor belt (4) which are sequentially connected end to end along a transmission direction; The first conveyor belt (2) is arranged to be tilted upward along the transmission direction; the third conveyor belt (4) is arranged horizontally and is higher than the first conveyor belt (2); the arc-shaped support assembly (1) is arranged in the second conveyor belt (3) and is used to support the top surface of the second conveyor belt (3) from the bottom, so that the top surface of the second conveyor belt (3) is in an arc shape that gradually transitions to a horizontal shape.

2. The circular arc conveying device for silicon wafer transmission according to claim 1, characterized in that: The arc-shaped support assembly (1) comprises arc-shaped support members (11) respectively arranged on both sides of the second conveyor belt (3), and the two arc-shaped support members (11) are fixedly connected via a plurality of connecting rods (12).

3. The circular arc conveying device for silicon wafer transmission according to claim 1, characterized in that: A transmission wheel (5) is provided at the transmission starting end of the first conveyor belt (2), and first brackets (51) are respectively provided on both sides of the transmission wheel (5). The transmission wheel (5) is rotatably connected to the first bracket (51) through a bearing, and a driving motor (52) for driving the transmission wheel (5) to rotate is provided on one side.

4. The circular arc conveying device for silicon wafer transmission according to claim 3, characterized in that: A first baffle (6) is provided on both sides of the transmission wheel (5) and the first conveyor belt (2); a second baffle (7) is provided on both sides of the second conveyor belt (3) and the third conveyor belt (4), and the second baffle (7) is connected end to end with the first baffle (6).

5. The circular arc conveying device for silicon wafer transmission according to claim 3, characterized in that: A blowing assembly (8) is provided on the side of the transmission wheel (5) close to the transmission starting end; the blowing assembly (8) includes a second bracket (81) fixedly connected to the first bracket (51); a plurality of first nozzles (82) are fixedly provided on the second bracket (81) on the side of the transmission wheel (5) close to the transmission starting end; a second nozzle (83) is fixedly provided on the second bracket (81) on the side of the first conveyor belt (2) close to the transmission starting end; the first nozzle (82) and the second nozzle (83) are respectively connected to an air pump.

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