Dust blocking device and automatic carrying system

Abstract

The utility model discloses a dust blocking device and an automatic carrying system, which comprise a dust blocking part arranged on the outer side of a track, the top of the dust blocking part in a working state is higher than the surface of the track, and the dust blocking part is used for blocking the track from the outer side, so that chippings falling on the track from wheels of a crown block due to friction can be isolated from the surrounding environment, and the chippings can be prevented from falling on the track. The dust blocking device can prevent the chippings from further falling off from the track so as to reduce the influence of overflow of the chippings on the technological process in the surrounding environment, the chippings can be overturned outwards to facilitate maintenance, and the dust blocking device can also play a role in prompting to clean the track.

Description

Technical Field

[0001] The utility model relates to the technical field of dust prevention processing in semiconductor factories, in particular to a dust blocking device and an automatic handling system using the dust blocking device. Background Art

[0002] Currently, semiconductor factories widely utilize automated overhead handling systems to automatically transport materials between loading modules of different equipment, significantly improving production efficiency. These systems typically utilize an overhead automated transport vehicle (OHT), a type of overhead crane, that travels on a track in the air, accurately transporting suspended materials to different load ports.

[0003] As overhead cranes travel on tracks, they rely on friction between their wheels and the tracks to move and stop. Because the wheels are typically made of composite materials, friction inevitably causes wear and tear during these movements. This wear and tear also creates debris that falls from the wheels, leading to excessive particle levels in the factory environment.

[0004] Currently, while cleaning carts are used to regularly remove debris that falls onto the tracks, effective prevention of its spread has not been considered. Some debris that falls onto the tracks is easily blown outward by the fresh air system's filter fans (FFUs), landing in holes in the raised floor or on the equipment's loading ports, causing contamination.

[0005] Therefore, it is necessary to provide a new type of debris overflow prevention technology to solve the above problems existing in the prior art. Utility Model Content

[0006] The purpose of the utility model is to overcome the above-mentioned defects in the prior art and provide a dust blocking device and an automatic handling system.

[0007] To achieve the above purpose, the technical solution of the utility model is as follows:

[0008] The utility model provides a dust shielding device, comprising:

[0009] A dust shield portion, the dust shield portion being connected to the outer side of the track via a mounting portion, the mounting portion comprising a first mounting portion and a second mounting portion that are rotatably engaged, the first mounting portion being fixedly connected to the dust shield portion, and the second mounting portion being fixedly connected to the outer side of the track;

[0010] A limiting assembly is provided on the first mounting portion and the second mounting portion. The limiting assembly is used to, in a first state, fasten the first mounting portion to the second mounting portion so that the top of the dust shield is higher than the surface of the track to shield the track from the outside; and is used to, in a second state, release the fastening of the first mounting portion and the second mounting portion so that the first mounting portion rotates outward relative to the second mounting portion, thereby causing the dust shield to tilt outward relative to the track.

[0011] Furthermore, the mounting portion includes a hinge, and the hinge includes a first hinge portion and a second hinge portion that rotate in conjunction with each other. The first hinge portion serves as the first mounting portion and is fixedly connected to the bottom of the dust shield portion, and the second hinge portion serves as the second mounting portion and is fixedly connected to the outer side surface of the track. In a working state, the first hinge portion is fastened to the second hinge portion by the limiting assembly, so that the dust shield portion is fixed to the outer side surface of the track in a vertical direction. In a maintenance state, the first hinge portion and the second hinge portion are released from fastening by the limiting assembly, so that the first hinge portion is rotated outward relative to the second hinge portion, thereby causing the dust shield portion to tilt outward relative to the track, exposing the track.

[0012] Furthermore, the first hinge part is provided with a first matching part, the first matching part is provided with a pin hole arranged along a first direction, the surface of the first matching part is provided with a first limiting hole arranged along a second direction orthogonal to the first direction, the first limiting hole is communicated with the pin hole, the first direction is consistent with the direction of the track where the first hinge part is located, the second hinge part is provided with a second matching part, the second matching part is provided with a pin shaft, the pin shaft is provided with a second limiting hole, the pin shaft is used to insert the pin hole and rotatably cooperate with the pin hole, and in the working state, the second limiting hole is aligned with the first limiting hole, and is fastened by a first fastener passing through the first limiting hole and the second limiting hole, so that the dust shield is fixed to the outer surface of the track in the vertical direction, and the limiting assembly includes the first limiting hole, the second limiting hole and the first fastener.

[0013] The locking mechanism is configured to lock the hinge parts of the locking cam and the hinge parts of the locking cam are configured to lock the hinge parts of the locking cam and the hinge parts of the locking cam are configured to lock the hinge parts of the locking cam.

[0014] Furthermore, the elastic clip includes a groove body and a ball head end, a limiting portion and an elastic body arranged in the groove body and connected in sequence. The groove body is arranged in the sink groove, and the top surface of the groove body coincides with the side profile of the pin shaft. A through hole is provided on the top surface of the groove body, and the ball head end passes through the through hole from the groove body. The elastic body is connected to the bottom of the groove body, and the limiting portion is pressed against the top inner side of the groove body around the through hole, so that the ball head end protrudes from the side of the pin shaft.

[0015] Furthermore, there are multiple dust shields, and the dust shields are sequentially arranged on both sides of the track along the direction of the track, forming a closed shield for the track in a working state.

[0016] Furthermore, the dust shield portion includes a dust shield plate, and the top edge of the dust shield plate is higher than the surface of the track in a working state.

[0017] Furthermore, a counting module is included for counting the number of overhead cranes passing on the track.

[0018] Furthermore, the counting module includes a signal-connected sensor and a counter. The sensor is provided on the inner side of the dust barrier facing the track, and is used to sense each overhead crane passing by. The counter is used to accumulate the sensing signal output by the sensor each time after each reset, and output a track cleaning signal to the main control processor when the accumulated number reaches a threshold.

[0019] The utility model also provides an automatic handling system, including an overhead track, a crane traveling on the track, and the above-mentioned dust shielding device, wherein the dust shielding device is used to shield the track from the outside through a dust shielding portion provided on the outside of the track to prevent foreign objects and debris that fall on the track from overflowing.

[0020] As can be seen from the above technical solution, the present invention provides a dust shield on the outside of the overhead track of the automatic handling system to shield the track from the outside, thereby isolating the debris that falls from the overhead crane wheels onto the track due to friction from the surrounding environment, preventing the debris from further falling from the track, and thus significantly reducing the impact of the debris overflow on the process in the surrounding environment. Furthermore, by adding a numerical module to the dust shield to record the number of overhead cranes that have passed, the value of the particles accumulated on the track can be predicted based on this, thereby serving as a reminder to clean the track. In addition, by providing a mounting portion (hinge) with a tightening and flipping function to install and connect the dust shield and the track, it is possible to ensure that the dust shield is firmly installed in the working state and effectively provide a closed shielding effect on the track. In addition, in the maintenance state, the dust shield can be tilted to the outside of the track to achieve barrier-free maintenance of the overhead crane. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1-Figure 2 This is a structural schematic diagram of a dust shielding device according to a preferred embodiment of the present invention.

[0022] Figure 3 This is a schematic diagram of a hinge structure serving as a mounting portion in a preferred embodiment of the present invention.

[0023] Figure 4 This is a structural schematic diagram of a first hinge portion of a preferred embodiment of the present utility model.

[0024] Figure 5 This is a structural schematic diagram of a second hinge portion of a preferred embodiment of the present utility model.

[0025] Figure 6 The figure is a schematic structural diagram of an elastic buckle according to a preferred embodiment of the present invention.

[0026] Figure 7 This is a structural principle diagram of a counting module in a preferred embodiment of the present utility model.

[0027] Figure 8 The figure is a schematic diagram of the working state of a dust shielding device according to a preferred embodiment of the present invention.

[0028] Figure 9 The figure is a schematic diagram of the working principle of a dust shielding device according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0030] The specific implementation of the present invention is further described in detail below with reference to the accompanying drawings.

[0031] refer to Figure 1 and Figure 8 A dust shielding device 10 of the present invention includes a dust shielding portion 11 and a limiting assembly.

[0032] The dust shield 11 is provided on the outside of the track 20. In addition, in the working state (first state), the top of the dust shield 11 is higher than the surface 201 of the track 20. The dust shield 11 in the working state is used to shield the track 20 from the outside.

[0033] The dust shield 11 is connected to the outer side of the track 20 via the mounting portion 12. The mounting portion 12 includes a first mounting portion and a second mounting portion that are rotatably matched. The first mounting portion is fixedly connected to the dust shield 11, and the second mounting portion is fixedly connected to the outer side of the track 20.

[0034] The limit assembly is provided on the first mounting portion and the second mounting portion. In the operating state, the limit assembly is used to fasten the first mounting portion to the second mounting portion, causing the top of the dust shield 11 to protrude above the surface of the track 20, shielding the track 20 from the outside. In the maintenance state (the second state), the limit assembly is used to release the fastening of the first and second mounting portions, allowing the first mounting portion to rotate outward relative to the second mounting portion, thereby causing the dust shield 11 to tilt outward relative to the track 20 to facilitate maintenance.

[0035] In some embodiments, there are multiple dust shields 11 , and each dust shield 11 is sequentially arranged on both sides of the track 20 along the direction of the track 20 .

[0036] In some embodiments, there should be no gap (or substantially no gap) between any two adjacent dust shields 11 on each side of the track 20. This allows the track 20 to be closed during operation by providing multiple dust shields 11 consecutively on both sides of the track 20. It should be noted that when an obstacle is located on the outside of the track 20, such as a support structure (e.g., a pylon) for securing the suspended track 20, the dust shield 11 closest to the obstacle should be positioned closely against the obstacle to avoid a noticeable gap between the dust shield 11 and the obstacle.

[0037] In some embodiments, when multiple dust shields 11 are provided on each side of the track 20, each dust shield 11 has the same length along the track 20. This allows the lengths of each dust shield 11 to be averaged based on the desired track 20 length, facilitating batch production of dust shields 11 and saving costs. Furthermore, when a dust shield 11 needs to be replaced, there is no need to verify its length, simplifying the replacement process and reducing replacement time.

[0038] In some embodiments, when multiple dust shields 11 are provided on each side of the track 20, each dust shield 11 has a different length along the track 20. This allows the length of the dust shield 11 to be customized based on the site conditions of different areas of the track 20 to accommodate on-site installation conditions. Furthermore, when replacing a dust shield 11, a dust shield 11 of a specific length can be used at a specific location.

[0039] In some embodiments, when there are multiple dust shields 11 on each side of the track 20 , the top heights of the dust shields 11 are the same or different. Preferably, the top heights of the dust shields 11 are the same.

[0040] In some embodiments, the dust shield 11 is connected to the outer surface of the rail 20 through the mounting portion 12 .

[0041] In some embodiments, the bottom of the dust shield 11 is connected to one side of the first mounting portion, and the outer side surface of the track 20 is connected to one side of the second mounting portion.

[0042] In some embodiments, the number of mounting portions 12 installed on each dust shield 11 depends on the length of the dust shield 11 and the installation conditions on site. Figure 1 An example is shown in which two mounting portions 12 are mounted on each dust shield 11 .

[0043] refer to Figure 3-Figure 6 Combined with reference Figure 1 and Figure 8. In some embodiments, the mounting portion 12 includes a hinge 13. Each hinge 13 includes a first hinge portion 131 and a second hinge portion 132 that rotate in conjunction with each other. The first hinge portion 131 is fixedly connected to the bottom of the dust shield portion 11 as a first mounting portion, and the second hinge portion 132 is fixedly connected to the outer side surface of the track 20 as a second mounting portion. However, it can be understood that the mounting positions of the first hinge portion and the second hinge portion can be interchanged, that is, the first hinge portion is used to be fixedly connected to the outer side surface of the track 20, and the second hinge portion is used to be fixedly connected to the bottom of the dust shield portion 11.

[0044] Moreover, in the working state, the first hinge portion 131 and the second hinge portion 132 are fastened together by the limiting assembly, so that the dust shield portion 11 is fixed to the outer surface of the track 20 in a vertical direction (or substantially vertical direction), such as Figure 8 This prevents the dust shield 11 from slightly tilting inward during use and interfering with the overhead traveling crane on the track 20, while also preventing the dust shield 11 from slightly tilting outward, thereby preventing the dust shield 11 from spilling over the track 20. During maintenance, the stopper assembly releases the fastening between the first hinge 131 and the second hinge 132, allowing the first hinge 131 to rotate outward relative to the second hinge 132. This causes the dust shield 11 to tilt outward relative to the track 20, exposing the track 20 and allowing maintenance.

[0045] In some embodiments, the dust shield 11 includes a dust shield plate 111. For example, the dust shield 111 can be a rectangular dust shield plate 111 (the following description uses the dust shield plate 111 as an example). Furthermore, when in operation, the top edge of the dust shield plate 111 protrudes above the surface of the track 20. During installation, the edges of any two adjacent dust shield plates 111 should be as close together as possible to avoid significant gaps.

[0046] In some embodiments, sealing strips are provided on the adjacent edges of any two adjacent dust shields 111 to seal any gap that may exist between the two adjacent dust shields 111. The sealing strips may be provided on each of the adjacent edges of the two adjacent dust shields 111, or may be provided on only one of the adjacent edges of the two adjacent dust shields 111.

[0047] In some embodiments, a sealing strip is provided between the bottom edge of the dust shield 111 and the outer side of the track 20. For example, the sealing strip can be provided on the bottom edge of the dust shield 111 and seal against the outer side of the track 20. The sealing strip provided on the bottom edge of the dust shield 111 requires that the hinge 13 be installed in a way that avoids the hinge 13.

[0048] In some embodiments, the first hinge portion 131 includes a first mounting body 1311 and a first mating portion 1312 connected to each other. The first mounting body 1311 is used to be mounted and fixed to the bottom edge of the dust shield 111. The first mating portion 1312 is used to connect to the second hinge portion 132.

[0049] In some embodiments, the first matching portion 1312 is provided with a pin hole 1315 arranged along the first direction; and at least one end of the pin hole 1315 should be exposed on one side end surface of the first matching portion 1312 along the first direction. Figure 4 This is an example where both ends of the pin hole 1315 are exposed simultaneously on both end surfaces of the first matching portion 1312. This not only facilitates connection and matching with the second hinge portion 132, but also facilitates the processing and manufacturing of the first hinge portion 131.

[0050] In some embodiments, a first limiting hole 1313 is provided on the surface of the first mating portion 1312 along a second direction. Furthermore, the first limiting hole 1313 passes through the surface of the first mating portion 1312 and communicates with the side surface of the pin hole 1315 in the first mating portion 1312. The first direction corresponds to the direction of the track 20 where the first hinge portion 131 is located, and the second direction is perpendicular to the first direction.

[0051] In some embodiments, the second hinge portion 132 includes a second mounting body 1321 and a second mating portion 1322. The second mounting body 1321 is used to be mounted and fixed to the outer side of the rail 20. The second mating portion 1322 is used to mate with the first mating portion 1312 on the first hinge portion 131 to connect.

[0052] In some embodiments, the second mating portion 1322 is provided with a pin shaft 1323 arranged along the first direction; and a second limiting hole 1324 is provided on the side of the pin shaft 1323. The pin shaft 1323 is used to be inserted into the pin hole 1315 and form a rotational fit with the pin hole 1315. In the working state, the second limiting hole 1324 will be in a state of alignment with the first limiting hole 1313. At this time, the first limiting hole 1313 and the second limiting hole 1324 are fastened by a first fastener passing through the first limiting hole 1313 and the second limiting hole 1324, thereby achieving the fixation of the relative position between the first hinge portion 131 and the second hinge portion 132, that is, achieving the fixation of the relative position between the dust guard plate 111 and the track 20, so that the dust guard plate 111 is fixed to the outer surface of the track 20 in the vertical direction.

[0053] Further references Figure 6, which shows the partial structure of the pin 1323. In some embodiments, a recessed groove 1325 is provided on the side of the pin 1323, in which an elastic snap 16 is disposed; furthermore, the end 161 of the elastic snap 16 protrudes from the side of the pin 1323. Simultaneously, the inner wall of the pin hole 1315 is provided with a positioning hole 1314 for movably engaging with the protruding end of the elastic snap 16, and an annular groove 1316 (positioning groove) is provided along the inner circumference of the pin hole 1315 at the positioning hole 1314 and is slidably engaged with the protruding end 161 of the elastic snap 16. The positioning hole 1314 extends through the surface of the first mating portion 1312, i.e., the positioning hole 1314 is a through hole.

[0054] At the working angle, the first hinge portion 131 and the second hinge portion 132 are in a vertical position when installed, with the first hinge portion 131 located above the second hinge portion 132. The first mounting body 1311 is located above the second mounting body 1321, the first mating portion 1312 is located at the bottom of the first mounting body 1311, and the second mating portion 1322 is located at the top of the second mounting body 1321. The pin hole 1315 is horizontally disposed in the first mating portion 1312, and the pin shaft 1323 is horizontally disposed on one side of the second mating portion 1322. The first mating portion 1312 and the second mating portion 1322 are mated and connected facing each other.

[0055] During installation, the pin 1323 is inserted into the pin hole 1315 until the protruding end 161 of the elastic clip 16 falls into the annular groove 1316, indicating that the pin 1323 is properly inserted. The first hinge portion 131 can then be rotated (or the dust shield 111 attached to the first hinge portion 131 is actuated) to slide the protruding end 161 of the elastic clip 16 along the annular groove 1316 until it snaps into the positioning hole 1314, pre-positioning the first and second hinge portions 131, 132. At this point, the second retaining hole 1324 on the pin 1323 is aligned with the first retaining hole 1313 on the side of the pin hole 1315, and the dust shield 111 attached to the first hinge portion 131 is also vertically aligned. Thus, the first limiting hole 1313 and the second limiting hole 1324 can be conveniently fastened by the first fastener, effectively limiting the installation angle of the dust shield 111. Moreover, when fastening the first limiting hole 1313 and the second limiting hole 1324, the elastic buckle 16 and the positioning hole 1314 are engaged to provide a pre-positioning effect, so that the dust shield 111 can be installed on the track 20 without supporting the dust shield 111, thereby saving manpower and improving efficiency.

[0056] When maintenance is required, the first fastener can be removed from the hinge 13 to release the mutual fastening between the first hinge portion 131 and the second hinge portion 132. Furthermore, the end portion 161 of the elastic clip 16, which is engaged in the positioning hole 1314, can be squeezed inward from the outside of the positioning hole 1314 until the end portion 161 of the elastic clip 16 is disengaged (out of) the positioning hole 1314. The first hinge portion 131 is then rotated outward relative to the second hinge portion 132, causing the end portion 161 of the elastic clip 16 to move into the annular groove 1316, thereby releasing the engagement between the end portion 161 of the elastic clip 16 and the positioning hole 1314 and forming a sliding fit between the end portion 161 of the elastic clip 16 and the groove 1316. At this point, if the first hinge portion 131 is further rotated outward relative to the second hinge portion 132, the dust shield 111 can be driven to tilt outward relative to the rail 20, thereby achieving barrier-free maintenance of the overhead travelling crane. It can be understood that in actual operation, the dust shield 111 is pulled outward, which in turn drives the first hinge portion 131 to rotate outward relative to the second hinge portion 132.

[0057] The limiting assembly includes the first limiting hole 1313 , the second limiting hole 1324 , the first fastener, the elastic buckle 16 , the positioning hole 1314 and the slot 1316 .

[0058] refer to Figure 6 . In some embodiments, the elastic buckle 16 includes a groove body 165 and a ball head end 161, a limiting portion 163 and an elastic body 164 arranged in the groove body 165 and connected in sequence. The groove body 165 is arranged in the groove 1325. For example, the groove body 165 can be embedded in the groove 1325. In addition, the top surface of the groove body 165 is consistent with the side profile of the pin 1323. That is, when the groove body 165 is arranged in the groove 1325, the top surface of the groove body 165 is coplanar with the side surface of the pin 1323. For example, the pin 1323 is a cylinder, the top surface of the groove body 165 is an arc, and the radius of the arc of the top surface of the groove body 165 is equal to the radius of the cylinder of the pin 1323, and the center of the arc of the top surface of the groove body 165 and the center of the cylinder of the pin 1323 are located on the axis of the cylinder of the pin 1323.

[0059] In addition, a through hole 162 is provided on the top surface of the groove body 165, and the ball head end 161 passes through the through hole 162 in the groove body 165. The elastic body 164 is connected to the bottom of the groove body 165, and the limiting portion 163 is elastically pressed against the top inner side of the groove body 165 around the through hole 162, so that the ball head end 161 elastically protrudes from the side of the pin shaft 1323.

[0060] In some embodiments, the elastic body 164 comprises an elastic sheet or spring. One end of the elastic sheet or spring is connected to the inner side of the stopper 163 toward the center of the pin 1323, and the other end of the elastic sheet or spring is connected to the bottom of the groove 165. Furthermore, the elastic sheet or spring is in a pre-loaded state.

[0061] In some embodiments, the first fastener includes a screw or a bolt, and is used to threadably fasten the first limiting hole 1313 and the second limiting hole 1324 .

[0062] In some embodiments, a pair of mounting holes 15 are respectively defined on the first mounting body 1311 and the second mounting body 1321. Corresponding mounting holes 15 are also formed at designated mounting locations on the dust shield 111 and the side surfaces of the track 20. The number of mounting holes 15 on the dust shield 111 can be determined and punched based on the number of hinges 13 used, which can be determined based on on-site installation requirements.

[0063] When installing the dust shield 111, align the mounting holes 15 on the dust shield 111 with the mounting holes 15 on the first mounting body 1311, and fasten the corresponding mounting holes 15 through a set of second fasteners; insert the second hinge part 132 through the pin shaft 1323 into the pin hole 1315 on the first hinge part 131 to engage with each other and pre-position; align the mounting holes 15 on the second mounting body 1321 with the mounting holes 15 on the side of the rail 20, and fasten the corresponding mounting holes 15 through another set of second fasteners, thereby mounting the first hinge part 131 on the dust shield. On the plate 111, the second hinge part 132 is installed on the outer surface of the track 20; by pulling the dust guard plate 111 to make it in a vertical angle, at this time, the protruding end 161 of the elastic clip 16 will be stuck in the positioning hole 1314 and positioned, and the second limiting hole 1324 on the pin shaft 1323 and the first limiting hole 1313 on the side of the pin hole 1315 are also aligned in the limiting position. After fastening with the first fastener, the first hinge part 131 and the second hinge part 132 can form a limiting fixed connection, so that the dust guard plate 111 can be conveniently installed vertically on the outer surface of the track 20.

[0064] In some embodiments, the second fastener includes a screw or a bolt for threadedly fastening the mounting hole 15 .

[0065] In some embodiments, a counting module is further included, which is used to count the number of overhead travelling vehicles passing on the track 20 .

[0066] refer to Figure 2 and Figure 7. In some embodiments, the counting module 14 includes a sensor 141 and a counter 143 that are signal-connected. Among them, the sensor 141 is provided on the inner side of the dust guard 111 facing the track 20, and is used to sense each overhead crane that passes by. Each time the sensor 141 outputs a sensing signal, it represents that an overhead crane has passed. The counter 143 is integrated on the system board 1431, and is used to accumulate the sensing signal output by the sensor 141 each time after each reset. The system board 1431 is further connected to the master control processor 144 (Master Control Process, MCP). When the cumulative number of overhead cranes recorded by the counter 143 reaches a threshold, a track cleaning signal can be output to the master control processor 144, prompting the cleaning trolley to clean the wheel debris and other foreign particles on the track surface 201 to keep the track 20 in a clean state.

[0067] In some embodiments, sensor 141 is an infrared sensor 1411. Infrared sensor 1411 can be, for example, a photoelectric switch. Infrared sensor 1411 can be connected to a Wi-Fi module 142 mounted on dust shield 111 via a signal line. This allows infrared sensor 1411 to detect the passage of an overhead crane and output the signal to Wi-Fi module 142, which then transmits it to system board 1431, which includes a counter 143. System board 1431 calculates the particle count and, when the preset alarm threshold is reached, transmits the signal to the upper-level MCP via a signal line, prompting cleaning.

[0068] When an overhead crane passes through dust shield 111 equipped with infrared sensor 1411, infrared sensor 1411 transmits this information to counter 143, and counter 143 counts "+1". When a cumulative total of N overhead cranes have passed, the control value (threshold) can be set based on the requirements for the particle value in the surrounding environment, and the following formula 1 can be used:

[0069] PAC①=N×K Formula 1

[0070] Or, according to the following formula 2:

[0071] PAC②=N×C Formula 2

[0072] The particle value expected to have been generated on track 20 is calculated, and when a preset threshold is reached, an alarm is issued by the MCP.

[0073] In the above formula, PAC① and PAC② represent the calculated particle counts expected to have been generated on track 20, N represents the number of overhead cranes passing over track 20, and K and C represent the average number of particles collected by sampling the environment around track 20 using different sampling methods. For example, the K value is obtained as follows:

[0074] Simulate the particle counts generated by overhead cranes in advance. During each overhead crane pass, measure the particle count beneath track 20 and record the average. Various sampling methods can be used. For example, you can collect particles beneath actual track 20 within the factory and calculate the average particle count, K. This is calculated by dividing the total number of particles, Y, collected between two consecutive cleanings by the number of overhead cranes, n, that passed over track 20 during that period. K = Y / n.

[0075] The method to obtain the C value is as follows:

[0076] Simulate the particle counts generated in the area where overhead cranes pass in advance. During each overhead crane pass, measure the particle count above track 20 and record the average. Various sampling methods can be used. For example, you can collect particles above actual track 20 within the factory and calculate the average particle count, C. This is calculated by dividing the total number of particles, Y, collected between two consecutive cleanings by the number of overhead cranes, n, that passed over track 20 during that period. C = Y / n.

[0077] In this way, when PAC① or PAC② calculated by the system board 1431 reaches the threshold, the MCP will issue an alarm, prompting the need to place a cleaning trolley on track 20.

[0078] In some embodiments, multiple cleaning sections can be planned on the track 20, and each cleaning section is cleaned by a cleaning vehicle. An infrared sensor 1411 can be installed on a dust guard 111, for example, which is set at the beginning of each cleaning section, to sense and count the number of overhead cranes on the track 20 passing through the corresponding cleaning section. There is no need to install infrared sensors 1411 on other dust guards 111 on the same cleaning section. Therefore, the dust guards 111 installed on both sides of the track 20 are of two forms, one with an infrared sensor 1411 or one without an infrared sensor 1411. In addition, the dust guard 111 with an infrared sensor 1411 (refer to Figure 2 ) and the dust shield 111 without the infrared sensor 1411 (reference Figure 1 ) are consistent in structure and installation connection method with track 20.

[0079] In some embodiments, the dust shield 111 is made of antistatic material. Alternatively, an antistatic film is provided on the working surface (the surface facing the track 20) of the dust shield 111.

[0080] refer to Figure 8 Combined with reference Figure 1-Figure 7The present invention provides an automatic handling system, comprising an overhead track 20, an overhead crane (not shown) running on the track 20, and the dust shielding device 10 of the present invention. The dust shielding device 10 is used to shield the track 20 from the outside through a dust shield 111 provided on the outside of the track 20, to prevent debris (foreign matter) generated by the friction between the overhead crane wheels and the track 20 from falling onto the track 20 and then being blown off the track 20 to the outside and overflowing under the influence of the air filter fan of the fresh air system, thereby avoiding pollution to the environment surrounding the track 20.

[0081] refer to Figure 9 The tracks 20 used in semiconductor factories are usually parallel tracks 20. The overhead crane running on the parallel tracks 20 is used to lift the materials below the tracks 20 from between the two tracks 20. The filter fan 40 of the fresh air system is generally installed on the ceiling 30 above the tracks 20. The debris (particles) generated by friction often fall on the contact area A between the track 20 surface and the overhead crane wheel. Figure 9 As shown in (a), when the dust shield 111 is not installed on the track 20, the debris particles falling on the surface of the track 20 will be carried out to the outside of the track 20 by the downward airflow blown by the filter fan 40, thereby causing a negative impact on the surrounding production environment. Figure 9 As shown in (b), when the dust shield 111 is installed on the outer side of the track 20, the debris particles will not be carried out to the outside of the track 20 by the downward airflow blown by the filter fan 40 due to the blocking effect of the dust shield 111, and will be concentrated on the inner side of the track 20, thereby effectively reducing the overflow of particles and allowing them to be removed by the cleaning cart that is deployed in time.

[0082] Furthermore, by adding the counting module 14 to the dust shield 111 and calculating the estimated particle count, a prompt can be provided to clean the track 20. By providing the hinge 13 with both fastening and flipping functions, the dust shield 111 and the track 20 are mounted and connected. During maintenance, the dust shield 111 can be flipped outward from the track 20, allowing for barrier-free maintenance of the overhead crane.

[0083] In summary, the present invention provides a dust shield portion 11 of a dust shield device 10 on the outside of the overhead track 20 of the automatic handling system to shield the track 20 from the outside. This can isolate debris that falls from the overhead crane wheels onto the track 20 due to friction from the surrounding environment, preventing the debris from further falling from the track 20. This significantly reduces the impact of debris overflow on the process in the surrounding environment. Furthermore, by adding a numerical module 14 to the dust shield portion 11 to record the number of overhead cranes that have passed, the value of the accumulated particles on the track 20 can be predicted based on this information, thereby providing a prompt to clean the track 20. Furthermore, by providing a mounting portion 12 with a tightening and flipping function to connect the dust shield portion 11 to the track 20, the dust shield portion 11 can be securely mounted in the working state, effectively providing a closed shield for the track 20. Furthermore, in the maintenance state, the dust shield portion 11 can be tilted toward the outside of the track 20, achieving barrier-free maintenance of the overhead crane.

[0084] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations may be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the present invention described herein may have other embodiments and may be implemented or carried out in a variety of ways.

Claims

1. A dust shielding device, characterized in that: include: A dust shield portion, the dust shield portion being connected to the outer side of the track via a mounting portion, the mounting portion comprising a first mounting portion and a second mounting portion that are rotatably engaged, the first mounting portion being fixedly connected to the dust shield portion, and the second mounting portion being fixedly connected to the outer side of the track; A limiting assembly is provided on the first mounting portion and the second mounting portion. The limiting assembly is used to, in a first state, fasten the first mounting portion to the second mounting portion so that the top of the dust shield is higher than the surface of the track to shield the track from the outside; and is used to, in a second state, release the fastening of the first mounting portion and the second mounting portion so that the first mounting portion rotates outward relative to the second mounting portion, thereby causing the dust shield to tilt outward relative to the track.

2. The dust shielding device according to claim 1, characterized in that: The mounting portion includes a hinge, and the hinge includes a first hinge portion and a second hinge portion that rotate together. The first hinge portion serves as the first mounting portion and is fixedly connected to the bottom of the dust shield portion, and the second hinge portion serves as the second mounting portion and is fixedly connected to the outer side surface of the track. In a working state, the first hinge portion is fastened to the second hinge portion by the limiting assembly, so that the dust shield portion is fixed to the outer side surface of the track in a vertical direction. In a maintenance state, the first hinge portion and the second hinge portion are released from fastening by the limiting assembly, so that the first hinge portion is rotated outward relative to the second hinge portion, thereby causing the dust shield portion to tilt outward relative to the track, exposing the track.

3. The dust shielding device according to claim 2, characterized in that: The first hinge part is provided with a first matching part, a pin hole is provided in the first matching part along a first direction, a first limiting hole is provided on the surface of the first matching part along a second direction orthogonal to the first direction, the first limiting hole is communicated with the pin hole, the first direction is consistent with the direction of the track where the first hinge part is located, the second hinge part is provided with a second matching part, a pin shaft is provided on the second matching part, a second limiting hole is provided on the pin shaft, the pin shaft is used to insert the pin hole and rotate with the pin hole, and in the working state, the second limiting hole is aligned with the first limiting hole, and is fastened by a first fastener passing through the first limiting hole and the second limiting hole, so that the dust shield is fixed to the outer surface of the track in the vertical direction, and the limiting assembly includes the first limiting hole, the second limiting hole and the first fastener.

4. The dust shielding device according to claim 3, characterized in that: The side of the pin shaft is provided with a recessed groove, and the recessed groove is provided with an elastic clip, and the end of the elastic clip protrudes from the side of the pin shaft, and the inner wall of the pin hole is provided with a positioning hole that is engaged with the protruding end of the elastic clip, and a clip groove is provided along the inner wall circumference of the positioning hole and slidably matched with the protruding end of the elastic clip. The positioning hole passes through the surface of the first matching part. When the protruding end of the elastic clip is engaged with the positioning hole, the second limiting hole is exactly aligned with the first limiting hole. In the maintenance state, the first fastener is removed to release the fastening of the first hinge part and the second hinge part, and after the end of the elastic clip is squeezed out of the positioning hole through the positioning hole, the first hinge part is rotated outward relative to the second hinge part, so that the end of the elastic clip moves into the clip groove, thereby driving the dust shield part to tilt outward relative to the track. The limiting assembly also includes the elastic clip, the positioning hole and the clip groove.

5. The dust shielding device according to claim 4, characterized in that: The elastic clip includes a groove body and a ball head end portion, a limiting portion and an elastic body arranged in the groove body and connected in sequence. The groove body is arranged in the sink groove, and the top surface of the groove body matches the side profile of the pin shaft. A through hole is provided on the top surface of the groove body, and the ball head end portion passes through the through hole from the groove body. The elastic body is connected to the bottom of the groove body, and the limiting portion is pressed against the top inner side of the groove body around the through hole, so that the ball head end portion protrudes from the side of the pin shaft.

6. The dust shielding device according to claim 1, characterized in that: There are multiple dust shields, and the dust shields are sequentially arranged on both sides of the track along the direction of the track, forming a closed shield for the track in the working state.

7. The dust shielding device according to claim 1, characterized in that: The dust shield portion comprises a dust shield plate, and a top edge of the dust shield plate is higher than the surface of the track in a working state.

8. The dust shielding device according to claim 1, characterized in that: It also includes a counting module for counting the number of overhead cranes passing on the track.

9. The dust shielding device according to claim 8, characterized in that: The counting module includes a signal-connected sensor and a counter. The sensor is provided on the inner side of the dust barrier facing the track and is used to sense each overhead crane passing by. The counter is used to accumulate the sensing signal output by the sensor each time after each reset, and output a track cleaning signal to the main control processor when the accumulated number reaches a threshold.

10. An automatic transport system, comprising an overhead track, an overhead crane running on the track, and a dust shield according to any one of claims 1 to 9, wherein the dust shield is used to shield the track from the outside through a dust shield provided on the outside of the track to prevent foreign debris that has fallen on the track from spilling out.

Images