Mask fixing and switching device

Abstract

The utility model relates to a mask plate fixing and switching device which comprises a bottom plate, a clamping and fixing assembly arranged on the bottom plate, and a clamping plate with a mask plate embedded in the middle, a frame is arranged on the bottom plate, an inner groove is formed in the frame, and the clamping and fixing assembly is arranged on the outer side of the inner groove and partially extends to the position above the inner groove. The outline shape of the clamping plate is matched with that of the inner groove, and the clamping plate is separably matched with the inner groove; when the mask plate is installed, the clamping plate and the mask plate are placed in the inner groove together, the mask plate is positioned through the inner groove, and the clamping and fixing assembly presses the clamping plate from the upper portion so that the clamping plate can be fixed in the inner groove. And after heating is carried out in the coating process, residual stress mechanically fixed by the clamp directly acts on the clamping plate, the stress of the film mask plate body is shared by the clamping plate, and stress deformation of the mask plate in the heating process is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of mask equipment and relates to a mask fixing and switching device. Background Art

[0002] The photomask is an ideal photosensitive blank plate for making fine photomask patterns. The required photomask can be obtained through the photolithography process.

[0003] In the prior art, Chinese patent publication number CN117684124A discloses a pellicle mask clamp and a method for securing a pellicle mask to the clamp. The pellicle mask clamp includes an outer frame, a supporting portion, and a positioning portion. The outer frame is provided with a through-mounted mounting opening; the mounting opening is provided with a first clamping portion, which is configured to engage with a second clamping portion of the pellicle mask; the supporting portion is mounted at the bottom of the mounting opening and is configured to place and adhere the pellicle mask; and the positioning portion is configured to apply a force parallel to the axis of the mounting opening to the pellicle mask to position the pellicle mask on the supporting portion. The pellicle mask clamp and the pellicle mask are secured by a combination of mechanical clamping and adhesive bonding. After the mechanical and adhesive bonding, the positioning portion is used to position the pellicle mask on the supporting portion. By applying a force parallel to the axis of the mounting opening to the pellicle mask, the flatness of the pellicle mask can be improved. However, there are still some problems in the use process:

[0004] 1. Currently, due to the need for heating during the coating process, existing masks on the market will deform due to the residual stress of the mechanical fixation of the fixture;

[0005] 2. The thin film mask fixtures currently on the market require constant replacement of masks and alignment of the mask with the substrate to prepare multi-layer thin film materials. The mask fixtures cannot meet the needs of frequent mask replacement and ensure alignment with the substrate. Utility Model Content

[0006] In view of this, the purpose of the present invention is to solve the above problems and provide a mask fixing and switching device.

[0007] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0008] A mask fixing and switching device comprises a base plate and a clamping and fixing assembly arranged on the base plate, and a clamping plate with a mask embedded in the middle; a frame is provided on the base plate, an inner groove is provided in the frame, the clamping and fixing assembly is provided on the outside of the inner groove and partially extends above the inner groove; the contour shape of the clamping plate matches the inner groove, and the clamping plate and the inner groove are separable and matable; when installing the mask, the clamping plate is placed in the inner groove together with the mask, and the mask is positioned by the inner groove, and the clamping and fixing assembly presses the clamping plate from above to fix the clamping plate in the inner groove.

[0009] Furthermore, the clamping and fixing assembly includes a column, a connecting block, a stud, and a handle; the frame is provided with a column mounting hole, and the column is rotatably arranged in the column mounting hole through a bearing; the connecting block is provided on the column and extends to the outside of the column; the connecting block is provided with a threaded hole, and the stud is provided in the threaded hole, and the handle is provided at the upper end of the stud, and the lower end of the stud is opposite to the clamping plate, which is used to press the clamping plate; when the column rotates, it drives the stud to deviate from or enter the inner groove area.

[0010] Furthermore, a detachably connected rubber block is provided at the lower end of the stud, and when the stud is pressed downward, it is pressed against the clamping plate through the rubber block.

[0011] Furthermore, there are multiple clamping and fixing components, and they are evenly distributed around the inner groove.

[0012] Furthermore, the clamping plate is annular, and the mask is clamped in the clamping plate.

[0013] The beneficial effects of the present invention are:

[0014] 1. During the coating process, the mask often needs to be heated, which can cause deformation due to thermal stress. In the design of this utility model, the mask is placed in the inner groove of the clamping plate, which secures the mask through its inner cavity. After heating during the coating process, the residual stress from the mechanical fixation of the clamp acts directly on the clamping plate, distributing the stress on the thin film mask itself through the clamping plate, reducing the stress and deformation of the mask during the heating process.

[0015] 2. The design of this utility model makes reticle replacement much faster. The frame forms a connection point through a removable clamping assembly on the base plate surface. The internal groove provides installation space, and the clip plate allows for quick placement and removal of the reticle. This design greatly improves the efficiency of reticle replacement and is particularly suitable for multi-layer thin film material preparation processes that require frequent reticle replacement.

[0016] 3. The structural design of this utility model takes into account ease of operation and stability. Through the coordinated use of components such as the frame, clamping plate, column, and round bearing, the entire device ensures the stability of the mask during use while facilitating installation and replacement by the operator. In particular, the design of the studs and rubber blocks further enhances the device's ease of operation and securing effect.

[0017] Other advantages, objectives, and features of the present invention will be described in detail in the following description and, to some extent, will be apparent to those skilled in the art upon examination and study of the following or may be learned from practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be described in detail below with reference to the accompanying drawings, in which:

[0019] Figure 1 This is a schematic diagram of the overall structure of the mask fixing and switching device in the present invention.

[0020] Figure 2 This is a schematic diagram of the opening structure of an embodiment of the utility model.

[0021] Figure 3 This is a schematic diagram of the column structure of an embodiment of the present utility model.

[0022] Figure 4 This is a schematic diagram of the stud structure of an embodiment of the present utility model.

[0023] Figure 5 This is a schematic diagram of the internal structure of the clamping plate according to an embodiment of the present utility model.

[0024] Figure numerals: 1-base plate; 201-frame; 202-inner groove; 203-clamping plate; 204-inner cavity; 3-mask; 4-column mounting hole; 5-bearing; 601-column; 602-connecting block; 603-threaded hole; 604-stud; 605-rubber block; 606-handle. DETAILED DESCRIPTION

[0025] The following describes the embodiments of the present invention through specific examples. Those skilled in the art can easily understand the other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. The details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention. The following embodiments and the features in the embodiments can be combined with each other without conflict.

[0026] Among them, the accompanying drawings are only for illustrative purposes and represent only schematic diagrams rather than actual pictures, and should not be understood as limiting the present invention. In order to better illustrate the embodiments of the present invention, some parts of the accompanying drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product. For those skilled in the art, it is understandable that some well-known structures and their descriptions may be omitted in the accompanying drawings.

[0027] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "left", "right", "front", "back", etc. indicating directions or positional relationships, they are based on the directions or positional relationships shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0028] See also Figures 1 to 5 The present invention relates to a mask fixing and switching device, comprising a base plate 1, a clamping and fixing assembly disposed on the base plate 1, and a clamping plate 203 with a mask 3 embedded therein. A frame 201 is mounted in the center of the base plate 1, with an inner groove 202 defined therein. The clamping and fixing assembly is disposed outside the inner groove 202 and partially extends above the inner groove 202. The clamping plate 203 is annular and has an inner cavity 204 defined therein, into which the mask 3 is clamped. The contour of the clamping plate 203 matches the inner groove 202, and the clamping plate 203 and the inner groove 202 can be separated and engaged. When installing the mask 3, the clamping plate 203 and the mask 3 are placed together in the inner groove 202. The inner groove 202 is used to position the mask 3, and the clamping and fixing assembly presses the clamping plate 203 from above, securing the clamping plate 203 in the inner groove 202.

[0029] There are multiple clamping and fixing components, distributed in a circular array around the inner groove 202. The clamping and fixing components include a column 601, a connecting block 602, a stud 604, and a handle 606. The frame 201 is provided with a column mounting hole 4, and the column 601 is rotatably mounted in the column mounting hole 4 via a bearing 5. The connecting block 602 is mounted on the column 601 and extends to the outside of the column 601. The connecting block 602 is provided with a threaded hole 603, and the stud 604 is mounted in the threaded hole 603. The handle 606 is located at the upper end of the stud 604, and the lower end of the stud 604 is opposite to the clamping plate 203 for pressing the clamping plate 203. When the column 601 rotates, it drives the stud 604 to deviate from or enter the inner groove 202 area.

[0030] The lower end of the stud 604 is provided with a detachably connected rubber block 605 . When the stud 604 is pressed downward, it is pressed against the clamping plate 203 through the rubber block 605 .

[0031] When placing and quickly replacing the thin film mask 3, the inner groove 202 opened in the frame 201 provides an installation space, and the inner cavity 204 opened in the clamping plate 203 is used to place the thin film mask 3. The mask 3 is placed in the inner groove 202 opened in the clamping plate 203, so that the clamping plate 203 can be easily placed on the surface of the base plate 1 for work processing.

[0032] When clamping, the user rotates the handle 606 fixedly connected to the surface of the stud 604 to press the stud 604 downward, and the stud 604 presses the clamping plate 203 through the rubber block 605 at the bottom. When disassembling, the handle 606 is rotated in the opposite direction to disengage the rubber block 605 from the clamping plate 203, and the column 601 is rotated to move the stud 604 to the outside of the inner groove 202, thereby removing the clamping plate 203 and replacing the mask 3.

[0033] Preparation of multi-layer thin film materials on a thin film mask 3 fixture requires constant replacement of the mask 3 and alignment of the mask 3 with the substrate. This device can meet the needs of frequent replacement of the mask 3 and ensure alignment with the substrate.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and are not limiting. Although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the purpose and scope of the technical solution, which should be included in the scope of the claims of the utility model.

Claims

1. A mask fixing and switching device, characterized in that: It includes a base plate and a clamping and fixing component arranged on the base plate, and a clamping plate with a mask embedded in the middle; a frame is provided on the base plate, an inner groove is provided in the frame, the clamping and fixing component is provided on the outside of the inner groove and partially extends above the inner groove; the contour shape of the clamping plate matches the inner groove, and the clamping plate and the inner groove can be separated and matched; when installing the mask, the clamping plate is placed in the inner groove together with the mask, and the mask is positioned through the inner groove. The clamping and fixing component presses the clamping plate from above to fix the clamping plate in the inner groove.

2. The mask fixing and switching device according to claim 1, characterized in that: The clamping and fixing assembly includes a column, a connecting block, a stud, and a handle; the frame is provided with a column mounting hole, and the column is rotatably arranged in the column mounting hole through a bearing; the connecting block is provided on the column and extends to the outside of the column; the connecting block is provided with a threaded hole, and the stud is provided in the threaded hole, and the handle is provided at the upper end of the stud, and the lower end of the stud is opposite to the clamping plate, which is used to press the clamping plate; when the column rotates, it drives the stud to deviate from or enter the inner groove area.

3. The mask fixing and switching device according to claim 2, characterized in that: The lower end of the stud is provided with a detachably connected rubber block, and when the stud is pressed downward, it is pressed against the clamping plate through the rubber block.

4. The mask fixing and switching device according to claim 1, wherein: There are multiple clamping and fixing components, which are evenly distributed around the inner groove.

5. The mask fixing and switching device according to claim 1, wherein: The clamping plate is annular, and the mask is clamped in the clamping plate.

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