Tool for binding rotating target material
By using spiral wire tools during the binding process of rotating targets, the incomplete welding problem caused by bubble adhesion is solved, the product pass rate is improved, and the efficient and low-cost binding effect is achieved.
Patent Information
- Application Number
- CN202422494349.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-16
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2034-10-16
AI Technical Summary
In the prior art, during the binding process, the rotary target material is attached to the gap between the target tube and the back tube, resulting in incomplete welding, which affects the product pass rate.
A spiral wire is inserted into the gap between the target tube and the back tube. The number of spiral wires is between 0.6 and 1 loop. The spiral wire is made of stainless steel. One end of the spiral wire is equipped with a push handle. The bubbles are floated by rotating the spiral wire to ensure that the indium melt flows fully.
It improves the pass rate of binding targets, has a simple structure, low cost and easy operation, effectively removes bubbles and ensures welding quality.
Smart Images
Figure CN223226156U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of target material production, in particular to a tool for binding a rotating target material. Background Art
[0002] Coating targets are sputtering sources that form various functional thin films on substrates using magnetron sputtering, multi-arc ion plating, or other coating systems under appropriate process conditions. They are categorized by shape into planar and rotary targets. Rotary targets are increasingly used due to their higher utilization rates and ability to utilize higher sputtering powers. Ceramic targets are highly brittle and therefore cannot be used directly. Instead, they must be fabricated into target tubes of a certain length (generally around 200-500 mm). Multiple target tubes are then placed around a stainless steel backing tube, creating a gap between the target tubes. Molten indium is then poured into this gap. After the indium solidifies, the target tubes and backing tube are brazed together in a process called bonding. In the prior art, the gap between the target tube and the backing tube is generally between 0.5 and 1 mm, while the target tube is longer than 200 mm. When pouring indium melt, some bubbles often adhere to the inner wall of the target tube or the outer wall of the backing tube, making it difficult for them to float up from the gap between the two. As a result, after the indium solidifies, there are unwelded areas between the target tube and the backing tube. If the total area of the unwelded areas is large (which will cause the target tube to crack or even fall off during sputtering and become unusable), the product will be unqualified. Utility Model Content
[0003] The technical problem to be solved by the present invention is to provide a tool for binding a rotating target material in view of the above-mentioned technical deficiencies.
[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a tool for binding a rotating target material, comprising a spiral wire that can be inserted into the gap between a back tube and a target tube, the pitch of the virtual cylindrical spiral line in which the spiral wire is located is greater than the length of the target tube, the number of turns of the spiral wire is between 0.6 turns and 1 turn, and a push handle is provided at one end of the spiral wire, and the push handle is located on the outside of the spiral wire.
[0005] To further optimize the technical solution, the cross section of the wire on the spiral wire is rectangular.
[0006] To further optimize the technical solution, the push handle is perpendicular to the axis of the spiral wire.
[0007] To further optimize this technical solution, the spiral wire is made of stainless steel.
[0008] To further optimize the technical solution, the number of turns of the spiral wire is 0.9 turns to 1 turn.
[0009] The utility model has the following advantages: the spiral wire can be inserted into the gap between the back tube and the target tube, and by pinching the push handle and rotating the spiral wire, most of the bubbles in the indium melt in the gap between the back tube and the target tube can be floated up, thereby greatly improving the qualified rate of the bound target material. The tool of the present application has a simple structure, low cost, and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 A schematic diagram of the structure of a tool for binding a rotating target.
[0011] Figure 2 This is a schematic structural diagram of another direction of a tool for binding a rotating target.
[0012] Figure 3 The figure is a schematic diagram of the structure of a tool for binding a rotating target material.
[0013] In the figure: 1, spiral wire; 11, push handle; 2, back tube; 3, target tube. DETAILED DESCRIPTION
[0014] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely illustrative and are not intended to limit the scope of the present invention. Furthermore, descriptions of known structures and technologies are omitted in the following description to avoid unnecessary confusion regarding the concepts of the present invention.
[0015] Specific implementation method: Figure 1-3 As shown, a tool for binding a rotating target material includes a spiral wire 1 that can be inserted into the gap between a back tube 2 and a target tube 3. The inner diameter of the spiral wire 1 is slightly larger than the outer diameter of the back tube 2, and the outer diameter of the spiral wire 1 is slightly smaller than the inner diameter of the target tube 3. The pitch of the virtual cylindrical helix in which the spiral wire 1 is located is greater than the length of the target tube 3, so that the number of turns of the spiral wire 1 within the length of the target tube 3 is less than 1 turn, and the number of turns of the spiral wire 1 is between 0.6 turns and 1 turn. Because the number of turns is greater than 0.6 turns, the spiral wire 1 is not easily skewed during rotation, and because the number of turns of the spiral wire 1 is less than 1 turn, it does not have a large amount of ineffective length (i.e., the length not inserted between the back tube 2 and the target tube 3). A push handle 11 is provided at one end of the spiral wire 1, and the push handle 11 is located outside the spiral wire 1. During binding, after pouring indium melt between the back tube 2 and the target tube 3, the spiral wire 1 is inserted between the back tube 2 and the target tube 3, with the lower end of the spiral wire 1 as close as possible to the lower end of the target tube 3, and the push handle 11 is located above the target tube 3. Then, the push handle 11 is pinched and the spiral wire 1 is rotated with the axis of the back tube 2 as the axis, so that the lower end of the spiral wire 1 is at the front side of the rotation direction and the upper end of the spiral wire 1 is at the rear side of the rotation direction, that is, Figure 1The tool rotates counterclockwise from a top-down perspective. After spiral wire 1 contacts an air bubble, it sometimes floats directly above the surface of the indium melt. Sometimes, the bubble is gradually pushed upward by spiral wire 1 and eventually floats above the surface. After several rotations, if the indium melt level has dropped only slightly, you can simply pull spiral wire 1 upward and then add more indium melt between back tube 2 and target tube 3 to bring the liquid level flush with the top of the target tube 3. If the indium melt level has dropped significantly, do not pull spiral wire 1 out yet. Instead, add more indium melt, rotate spiral wire 1 several more times, and then pull it upward. After using this tool, there are virtually no bubbles between back tube 2 and target tube 3 during binding, significantly improving the qualified rate of bound targets.
[0016] Furthermore, the cross section of the spiral wire 1 is rectangular.
[0017] Furthermore, the push handle 11 is perpendicular to the axis of the spiral wire 1, so that rotating the spiral wire 1 is more labor-saving.
[0018] Furthermore, the spiral wire 1 is made of stainless steel, which is not easy to adhere to indium at the binding process temperature.
[0019] Furthermore, the number of turns of the spiral 1 is 0.9 to 1, which makes it less prone to skewing during rotation and allows bubbles to float upwards more easily. If the number of turns is greater and the pitch of the spiral 1 is much smaller than the length of the target tube 3, the bubbles will have to travel a longer distance to float upwards, requiring more turns of the spiral 1, and occupying more space that would otherwise be in the indium melt during use.
[0020] It should be understood that the above-described specific embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention shall be included within the scope of protection of the present invention. In addition, the appended claims of the present invention are intended to cover all variations and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents thereof.
Claims
1. A tool for binding a rotating target, characterized in that: The invention comprises a spiral wire (1) that can be inserted into the gap between a back tube (2) and a target tube (3), wherein the pitch of the virtual cylindrical spiral line where the spiral wire (1) is located is greater than the length of the target tube (3), the number of turns of the spiral wire (1) is between 0.6 turns and 1 turn, and a push handle (11) is provided at one end of the spiral wire (1), and the push handle (11) is located outside the spiral wire (1).
2. A tool for binding a rotating target according to claim 1, characterized in that: The cross section of the wire on the spiral wire (1) is rectangular.
3. The tool for binding a rotating target according to claim 1, characterized in that: The push handle (11) is perpendicular to the axis of the spiral wire (1).
4. The tool for binding a rotating target according to claim 1, characterized in that: The material of the spiral wire (1) is stainless steel.
5. A tool for binding a rotary target according to any one of claims 1 to 4, characterized in that: The number of turns of the spiral wire (1) is 0.9 turns to 1 turn.