Carrier, transmission system and coating equipment

Abstract

The utility model discloses a carrier, a transmission system and coating equipment, and the carrier comprises a plurality of cross beam units which are arranged in parallel at intervals along a first direction; the two lateral guide rails are arranged side by side in a spaced mode in the second direction, one lateral guide rail is connected to one ends of the multiple cross beam units, the other lateral guide rail is connected to the other ends of the multiple cross beam units, and the second direction is perpendicular to the first direction; the auxiliary guide rail is arranged between the two lateral guide rails, the auxiliary guide rail and the lateral guide rails are arranged side by side in a spaced mode in the second direction, and the auxiliary guide rail is connected to the multiple cross beam units and used for being supported by the roller assemblies. The carrier can solve the problem that after the size of the carrier is increased, the boundary dimension and the thickness of the cross beam need to be increased in order to reduce deformation of the cross beam, and the weight of the whole carrier can be greatly increased.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a carrier, a transmission system and coating equipment. Background Art

[0002] With the continuous development of the photovoltaic industry, especially the increasing application of coating equipment, the production capacity requirements for coating equipment are getting higher and higher. Among them, the carriers used to carry the parts to be coated, as a major factor affecting production capacity, are constantly developing towards larger sizes.

[0003] In related art, the primary method of transmission for a vehicle is through drive wheels mounted on its sides. The vehicle's weight is distributed across the guide rails on either side, which in turn distribute the force to the drive wheels in contact with them. When designing a vehicle, as the vehicle's width increases, the span of the drive wheels also increases. In this case, to maintain minimal deformation, calculations for the vehicle's deformation require increasing the dimensions and thickness of the crossbeams, implementing some anti-deformation treatment, or increasing the number of crossbeams to distribute the load. This significantly increases the weight of the entire vehicle, leading to higher costs. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a carrier that can improve the problem that the outer dimensions and thickness of the crossbeam need to be increased to reduce the deformation of the crossbeam after the size is increased, which significantly increases the weight of the entire carrier.

[0005] The utility model also provides a transmission system and a coating device having the above-mentioned carrier.

[0006] The carrier according to the embodiment of the first aspect of the present invention includes: multiple beam units, multiple beam units are spaced apart and arranged in parallel along a first direction; two lateral guide rails, two lateral guide rails are spaced apart and arranged in parallel along a second direction, one of the lateral guide rails is connected to one end of the multiple beam units, and the other lateral guide rail is connected to the other end of the multiple beam units, wherein the second direction is perpendicular to the first direction; an auxiliary guide rail, the auxiliary guide rail is arranged between the two lateral guide rails, and is spaced apart and arranged in parallel with the lateral guide rails along the second direction, the auxiliary guide rail is connected to the multiple beam units, and the auxiliary guide rail is used to be supported by the roller assembly.

[0007] The carrier according to the embodiment of the present utility model has at least the following beneficial effects:

[0008] In the vehicle of the present invention, the lateral guide rails are used to accommodate two rows of drive wheels, one on each side of the vehicle. The drive wheels can drive the vehicle in a first direction. The auxiliary guide rails are used to be supported by the roller assembly. By increasing the support of the roller assembly, the vehicle can be provided with more support points, so that when the ends of the crossbeam unit are supported, the middle portion is also supported. In this way, the cross-sectional strength of the crossbeam unit can be reduced accordingly (corresponding to reducing parameters such as the thickness and material strength of the crossbeam unit), thereby reducing the weight and cost of the entire vehicle. At the same time, it can also reduce the load on the drive wheels on both sides. It is understandable that if no support point is added in the middle of the beam unit, once the vehicle is enlarged, for example, the original width of the vehicle is 2 meters, and now it is to be 3 meters, the vehicle will be deformed (mainly the beam unit will be deformed); in order to solve this deformation, the traditional method is to make the beam unit thicker and use higher strength materials, but this will not only lead to a large coating shadow, but also increase the overall weight of the vehicle, increase the support burden of the drive wheels on both sides, and the material cost is also higher.

[0009] According to some embodiments of the present invention, each of the beam units is provided with a mounting groove, and the mounting grooves on multiple beam units are spaced apart and arranged opposite to each other along the first direction, and the auxiliary guide rail is passed through the mounting grooves on multiple beam units.

[0010] According to some embodiments of the present invention, the auxiliary guide rail has a guide groove with an opening facing downward, the guide groove extends along the first direction, and the opening has a first edge and a second edge spaced apart along the second direction;

[0011] The auxiliary guide rail is further connected to a blocking member extending along the first direction. The blocking member has a blocking portion extending from the first edge toward the second edge, and an avoidance gap is formed between the blocking portion and the second edge.

[0012] According to some embodiments of the present invention, the beam unit includes a plurality of beams arranged along the second direction, the length direction of each beam is parallel to the second direction, and a connecting component is provided between every two adjacent beams.

[0013] According to some embodiments of the present invention, the connecting assembly includes a connecting member and two coupling members, and the two coupling members are detachably connected to both ends of the connecting member;

[0014] In the connecting assembly and the two crossbeams located on both sides thereof, one of the couplings is detachably inserted into one of the crossbeams, and the other coupling is detachably inserted into the other crossbeam.

[0015] According to some embodiments of the present invention, the two lateral guide rails each include an end fixing portion connected to the plurality of beam units, and a supporting portion connected to the fixing portion, and an escape space is formed below the supporting portion;

[0016] The support portion is used to be supported by a transmission wheel extending into the avoidance space, and the carrier can be lifted from bottom to top to be separated from the transmission wheel.

[0017] According to some embodiments of the present invention, at least one end of the plurality of beam units is connected to a connecting plate, the connecting plate and the auxiliary guide rail are spaced apart and arranged in parallel along the second direction, and the lateral guide rail is connected to the side of the connecting plate away from the beam unit.

[0018] According to some embodiments of the present invention, the connecting plate is provided with ventilation holes running through the upper and lower sides thereof.

[0019] According to the transmission system of the embodiment of the second aspect of the present invention, it includes: the above-mentioned carrier; two rows of lateral transmission wheels, the two rows of lateral transmission wheels are arranged at intervals along the second direction, and the two rows of lateral transmission wheels are used to support the two lateral guide rails respectively; a plurality of roller assemblies arranged at intervals and in rows along the first direction, and the roller assemblies are used to support the auxiliary guide rails.

[0020] The transmission system according to the embodiment of the present utility model has at least the following beneficial effects:

[0021] In the transmission system of the present invention, the lateral guide rails are configured to receive two rows of drive wheels, one on each side of the carrier, which can drive the carrier in a first direction. The auxiliary guide rails are configured to be supported by the roller assembly. By increasing the support provided by the roller assembly, the carrier can be provided with more support points, so that while the ends of the beam unit are supported, the middle portion is also supported. This allows the cross-sectional strength of the beam unit to be reduced accordingly (corresponding to reducing parameters such as the thickness and material strength of the beam unit), thereby reducing the weight and cost of the entire carrier. Furthermore, the load on the drive wheels on both sides can be reduced. It is understood that if no support points are added to the middle of the beam unit, once the carrier is enlarged (for example, if the original width of the carrier is increased from 2 meters to 3 meters), the carrier will deform (primarily the beam unit). To address this deformation, the conventional method is to make the beam unit thicker and use stronger materials. However, this method not only results in larger coating shadows, but also increases the overall weight of the carrier, increases the support burden on the drive wheels on both sides, and increases material costs.

[0022] According to some embodiments of the present invention, the roller assembly includes a support member and a roller disposed on the support member, and the roller is used to support the auxiliary guide rail and to roll with the auxiliary guide rail.

[0023] According to some embodiments of the present invention, the auxiliary guide rail has a guide groove with an opening facing downward, the guide groove extends along the first direction, and the opening has a first edge and a second edge spaced apart along the second direction; the auxiliary guide rail is further connected to a blocking member extending along the first direction, the blocking member having a blocking portion, the blocking portion extending from the first edge toward the second edge, and an avoidance gap between the blocking portion and the second edge; the support member is used to pass through the avoidance gap to allow the roller to extend into the guide groove;

[0024] Wherein, the side wall of the support member is provided with a side groove, and the side groove is located on the moving path of the blocking part.

[0025] The coating equipment according to the embodiment of the third aspect of the present invention includes the above-mentioned transmission system.

[0026] The coating device according to the embodiment of the present invention has at least the following beneficial effects:

[0027] The coating equipment of the present invention is equipped with the above-mentioned transmission system. In the transmission system, the lateral guide rails are used to allow two rows of drive wheels, respectively arranged on both sides of the carrier, to extend into the drive wheels. The drive wheels can drive the carrier to move in a first direction. The auxiliary guide rails are used to be supported by the roller assembly. In this way, by increasing the support of the roller assembly, more support points can be provided for the carrier, so that when the ends of the beam unit are supported, the middle part is also supported. In this way, the cross-sectional strength of the beam unit can be reduced accordingly (corresponding to reducing the thickness of the beam unit, material strength, and other parameters), thereby reducing the weight of the entire carrier and reducing costs. At the same time, it can also reduce the load on the drive wheels on both sides. It is understandable that if no support point is added in the middle of the beam unit, once the vehicle is enlarged, for example, the original width of the vehicle is 2 meters, and now it is to be 3 meters, the vehicle will be deformed (mainly the beam unit will be deformed); in order to solve this deformation, the traditional method is to make the beam unit thicker and use higher strength materials, but this will not only lead to a large coating shadow, but also increase the overall weight of the vehicle, increase the support burden of the drive wheels on both sides, and the material cost is also higher.

[0028] According to some embodiments of the present invention, the interior of the coating equipment has sputtering areas and non-sputtering areas that are alternately arranged, and the plurality of roller assemblies are arranged in each of the non-sputtering areas and avoid the sputtering areas.

[0029] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0031] Figure 1 This is a structural diagram of a carrier according to an embodiment of the present utility model;

[0032] Figure 2 This is a schematic structural diagram of a transmission system according to an embodiment of the present invention;

[0033] Figure 3 This is a partial cross-sectional structural diagram of a transmission system according to an embodiment of the present utility model;

[0034] Figure 4 This is a schematic diagram of a partial explosion structure of a transmission system according to an embodiment of the present utility model;

[0035] Figure 5 This is a structural diagram of a roller assembly according to an embodiment of the present invention;

[0036] Figure 6 This is a schematic cross-sectional view of a roller assembly according to an embodiment of the present invention;

[0037] Figure 7 This is a schematic structural diagram of a carrier according to another embodiment of the present invention;

[0038] Figure 8 This is a working principle diagram of the transmission system of an embodiment of the utility model

[0039] Figure Number:

[0040] 100, carrier; 110, crossbeam unit; 111, crossbeam; 1111, sixth assembly hole; 112, connecting assembly; 1121, connecting member; 11211, mounting groove; 11212, positioning groove; 11213, second assembly hole; 11214, third assembly hole; 1122, coupling; 11221, positioning portion; 11222, fourth assembly hole; 11223, fifth assembly hole; 120, lateral guide rail; 121, fixing portion; 122, supporting portion; 123, anti-deflection portion; 124, avoidance space; 130, auxiliary guide rail; 131, guide groove; 132, first assembly hole; 140, blocking member; 141, blocking portion; 142, connecting portion; 150, connecting plate; 151, vent hole;

[0041] 200, transmission wheel;

[0042] 300, roller assembly; 310, support member; 311, side groove; 320, roller; 330, pin; 340, bushing;

[0043] 400. Pallet. DETAILED DESCRIPTION

[0044] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0045] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0046] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0047] like Figure 1 As shown, a carrier 100 provided in one embodiment of the present invention can be used to carry objects to be coated, such as silicon wafers, glass, etc.

[0048] The carrier 100 includes a beam unit 110 , lateral guide rails 120 , and auxiliary guide rails 130 .

[0049] Specifically, there are a plurality of beam units 110 , and the plurality of beam units 110 are spaced apart and arranged in parallel along the first direction.

[0050] It can be understood that the length direction of the beam unit 110 is the transverse direction, the first direction is the longitudinal direction and is perpendicular to the transverse direction, and the plurality of beam units 110 are spaced apart and arranged in parallel along the first direction.

[0051] There are two lateral guide rails 120, which are spaced apart and arranged in parallel along the second direction, one of which is connected to one end of the multiple beam units 110, and the other is connected to the other end of the multiple beam units 110, wherein the second direction is perpendicular to the first direction.

[0052] It is understood that the longitudinal direction of the lateral guide rail 120 is the longitudinal direction, i.e., the first direction; the second direction is perpendicular to the first direction and is the transverse direction. Two lateral guide rails 120 are spaced apart along the second direction, with one lateral guide rail 120 connecting all of the cross-beam units 110 at one end, and the other lateral guide rail 120 connecting all of the cross-beam units 110 at the other end.

[0053] It is understood that the two lateral guide rails 120 can connect the plurality of beam units 110 into a whole, and a tray 400 for carrying the parts to be coated can be provided in the area between each two adjacent beam units 110 (see FIG. Figure 7 ) so that the parts to be coated can be coated from top to bottom and / or from bottom to top.

[0054] like Figure 2 As shown, further, the lateral guide rail 120 is used for two rows of transmission wheels 200 respectively arranged on both sides of the carrier 100 along the second direction to extend into, and the transmission wheels 200 can drive the carrier 100 to move along the first direction, and when the transmission wheels 200 extend into the lateral guide rail 120, they also play a supporting role for the lateral guide rail 120.

[0055] Combine Figure 1 and Figure 2 The auxiliary guide rail 130 is arranged between the two lateral guide rails 120 and is spaced apart and arranged in parallel with the lateral guide rails 120 along the second direction. The auxiliary guide rail 130 is connected to the multiple beam units 110 and is used to be supported by the roller assembly 300.

[0056] It is understandable that the roller assemblies 300 are arranged in a row, and the roller assemblies 300 arranged in a row and the transmission wheels 200 arranged in a row are spaced apart along the second direction. The roller assemblies 300 can be supported on the auxiliary guide rail 130 and cooperate with the guide rail rollers 320.

[0057] It should be noted that the number of auxiliary guide rails 130 can also be set to multiple, and multiple auxiliary guide rails 130 are arranged in parallel and at intervals along the second direction, and multiple auxiliary guide rails 130 are located between the two lateral guide rails 120; similarly, the roller assembly 300 is also arranged in multiple rows, and multiple rows of roller assemblies 300 support multiple auxiliary guide rails 130 one by one.

[0058] When the carrier 100 of the present invention is in use, the lateral guide rails 120 are used to accommodate two rows of drive wheels 200, one on each side of the carrier 100. The drive wheels 200 can drive the carrier 100 in a first direction. The auxiliary guide rails 130 are used to be supported by the roller assembly 300. By increasing the support provided by the roller assembly 300, the carrier 100 can be provided with more support points, so that the ends of the beam unit 110 are supported, and the middle portion is also supported. In this way, the cross-sectional strength of the beam unit 110 can be reduced accordingly (corresponding to reducing parameters such as the thickness and material strength of the beam unit 110), thereby reducing the weight and cost of the entire carrier 100. At the same time, the load on the drive wheels 200 on both sides can also be reduced.

[0059] It is understandable that if no support point is added in the middle of the beam unit 110, once the carrier 100 is enlarged, for example, the original width of the carrier 100 is 2 meters, and now it is to be 3 meters, the carrier 100 will be deformed (mainly the beam unit 110); in order to solve this deformation, the traditional method is to make the beam unit 110 thicker and use higher strength materials, but this will not only lead to a large coating shadow, but also increase the overall weight of the carrier 100, increase the support burden of the transmission wheels 200 on both sides, and the material cost is also higher.

[0060] In some embodiments, each beam unit 110 is provided with a mounting groove 11211 , and the mounting grooves 11211 on multiple beam units 110 are spaced and arranged opposite to each other along the first direction, and the auxiliary guide rail 130 is passed through the mounting grooves 11211 on the multiple beam units 110 .

[0061] It is understandable that the auxiliary guide rail 130 is passed through the installation groove 11211 on the multiple beam units 110 to achieve the connection between the auxiliary guide rail 130 and the multiple beam units 110.

[0062] Specifically, the notch of the installation groove 11211 is formed at the lower side of the auxiliary guide rail 130 . When the auxiliary guide rail 130 is inserted into the installation groove 11211 , the auxiliary guide rail 130 supports the beam unit 110 .

[0063] Of course, in other embodiments, the auxiliary guide rail 130 may also be directly fixed to the lower side of the beam unit 110 .

[0064] like Figure 2 As shown, further, the auxiliary guide rail 130 has a guide groove 131 with an opening facing downward, and the guide groove 131 extends along the first direction, that is, the length direction of the guide groove 131 is the same as the first direction.

[0065] It can be understood that both ends of the guide groove 131 along the first direction are open structures. When the carrier 100 moves along the first direction, the roller assembly 300 located below the carrier 100 can enter the guide groove 131 from one end of the auxiliary guide rail 130 to support the auxiliary guide rail 130. The opening on the lower side of the guide groove 131 plays a avoidance role for the roller assembly 300, thereby reducing the risk of interference between the roller assembly 300 and the auxiliary guide rail 130.

[0066] It should be noted that the opening of the guide slot 131 has a first edge and a second edge spaced apart along the second direction. The auxiliary guide rail 130 is further connected to a blocking member 140 extending along the first direction. The blocking member 140 has a blocking portion 141 extending from the first edge of the opening of the guide slot 131 toward the second edge, with a clearance between the blocking portion 141 and the second edge.

[0067] It is understood that the blocking member 140 extends in the same direction as the auxiliary guide rail 130, and is used to partially cover the opening of the guide slot 131. Specifically, the clearance gap provides clearance for the roller assembly 300, allowing a portion of the roller assembly 300 to extend into the guide slot 131. The blocking member 140 covers the opening of the guide slot 131, reducing the risk of the film being plated into the guide slot 131 during the coating process. This alleviates the problem of a large amount of target material slag falling when the roller assembly 300 rubs against the groove wall of the guide slot 131. Furthermore, even if a small amount of target material slag falls, the blocking member 141 can still catch it.

[0068] Furthermore, the blocking member 140 further includes a connecting portion 142 connected to the blocking portion 141 . The connecting portion 142 is connected to a side of the blocking portion 141 away from the second edge. The connecting portion 142 is connected to a side wall of the guide groove 131 .

[0069] Furthermore, in order to reduce the risk of the target material falling on the blocking portion 141 being lifted up, a blocking hook that tilts upward is provided on one side of the blocking portion 141 close to the second edge.

[0070] like Figures 3 to 6As shown, it should be noted that the roller assembly 300 includes a support member 310 and a roller 320 disposed on the support member 310. The roller 320 is used to support the auxiliary guide rail 130 and to roll with the auxiliary guide rail 130. Specifically, the support member 310 can be fixed to a bracket, and the roller 320 is used to extend into the guide groove 131 and support the auxiliary guide rail 130. In this embodiment, the support member 310 is used to pass through the avoidance gap to allow the roller 320 to extend into the guide groove 131.

[0071] Combine Figure 2 and Figure 5 Furthermore, a side groove 311 is provided on the side wall of the support member 310 , and the side groove 311 is located on the moving path of the blocking portion 141 .

[0072] It is understandable that the blocking portion 141 can extend into the side groove 311 , so that the blocking portion 141 can achieve a better shielding effect and further reduce the risk of coating dust entering the guide groove 131 .

[0073] It can be understood that, in the process of the transmission wheel 200 driving the entire carrier 100 to move, the auxiliary guide rail 130 of the carrier 100 is supported by different roller assemblies 300 in turn, and as the carrier 100 moves, the blocking portion 141 will move toward the side groove 311 of the support member 310 on the roller assembly 300 in front of it and extend into the side groove 311.

[0074] Combine Figure 5 and Figure 6 Furthermore, the upper end of the support member 310 is connected to a pin shaft 330 , the outer sleeve of the pin shaft 330 is connected to a bushing 340 , the roller 320 is sleeved outside the bushing 340 , and the roller can rotate relative to the support member 310 .

[0075] Combine Figure 1 and Figure 2 In some embodiments, the beam unit 110 includes a plurality of beams 111 arranged along the second direction, the length direction of each beam 111 is parallel to the second direction, and a connecting component 112 is provided between each two adjacent beams 111.

[0076] It is understandable that multiple beams 111 are connected by connecting components 112 to form a beam unit 110. Compared with the beam unit 110 made of one beam, a single beam 111 can be made shorter, so that the shape and position tolerances of a single beam 111 are easy to control.

[0077] It should be noted that the installation groove 11211 is provided on the connecting component 112 , that is, the auxiliary guide rail 130 passes through the installation groove 11211 and is connected to the connecting component 112 .

[0078] It is understandable that the installation groove 11211 is provided on the connecting component 112 rather than on the beam 111 , so as to avoid the problem that the installation groove 11211 is provided on the beam 111 , which causes the beam 111 to have low rigidity and be prone to deformation.

[0079] Furthermore, both ends of the connecting assembly 112 are detachably connected to the two crossbeams 111 , so that the entire carrier 100 can be easily disassembled and cleaned.

[0080] Combine Figure 3 and Figure 4 Furthermore, the connecting component 112 includes a connecting member 1121 and two coupling members 1122, and the two coupling members 1122 are detachably connected to the two ends of the connecting member 1121; in the connecting component 112 and the two beams 111 located on both sides thereof, one of the coupling members 1122 is detachably passed through one of the beams 111, and the other coupling member 1122 is detachably passed through the other beam 111.

[0081] It should be noted that the two couplings 1122 are symmetrically arranged at both ends of the connecting member 1121 , and the two couplings 1122 are respectively passed through the two beams 111 so that the two beams 111 are coaxially arranged.

[0082] Furthermore, the installation groove 11211 is opened in the middle of the connecting member 1121, and positioning grooves 11212 are provided at both ends of the connecting member 1121, and positioning parts 11221 are provided at both ends of the coupling 1122. The positioning part 11221 at one end of the coupling 1122 is passed through the positioning groove 11212 at one end of the connecting member 1121, and the positioning part 11221 at the other end of the coupling 1122 is passed through the beam 111.

[0083] It should be noted that after the auxiliary guide rail 130 is passed through the installation groove 11211, it is also fixed with the help of a first fastener. After the coupling 1122 and the connecting member 1121 are positioned, they are also fixed with the help of a second fastener. After the coupling 1122 and the crossbeam 111 are positioned, they are also fixed with the help of a third fastener.

[0084] The auxiliary guide rail 130 is provided with a first assembly hole 132 , the connector 1121 is provided with a second assembly hole 11213 , and the first fastener is passed through the first assembly hole 132 and the second assembly hole 11213 to fix the auxiliary guide rail 130 and the connector 1121 .

[0085] Specifically, the first assembly hole 132 is opened on the side of the auxiliary guide rail 130, and the two ends of the second assembly hole 11213 respectively pass through the installation groove 11211 and the positioning groove 11212, and the first fastener is sequentially passed through the second assembly hole 11213 and the first assembly hole 132 to fix the auxiliary guide rail 130 and the connecting member 1121.

[0086] The first fastener may be a screw, the second assembly hole 11213 may be a through hole, and the first assembly hole 132 may be a screw hole.

[0087] Of course, in other embodiments, the auxiliary guide rail 130 and the connecting member 1121 can also be snapped together.

[0088] Furthermore, the connecting member 1121 is further provided with a third assembly hole 11214 , the coupling member 1122 is provided with a fourth assembly hole 11222 , and the second fastener is passed through the third assembly hole 11214 and the fourth assembly hole 11222 to fix the connecting member 1121 and the coupling member 1122 .

[0089] Specifically, the third assembly hole 11214 is arranged on the groove wall of the positioning groove 11212, the fourth assembly hole 11222 passes through both sides of the coupling 1122 in the horizontal direction, and the second fastener is sequentially passed through the fourth assembly hole 11222 and the third assembly hole 11214 to fix the connecting member 1121 and the coupling 1122.

[0090] The second fastener may be a screw, the third assembly hole 11214 may be a screw hole, and the fourth assembly hole 11222 may be a through hole.

[0091] Of course, in other embodiments, the connecting member 1121 and the coupling member 1122 may also be snap-connected together.

[0092] Furthermore, the coupling 1122 is further provided with a fifth assembly hole 11223 , the crossbeam 111 is provided with a sixth assembly hole 1111 , and the third fastener is passed through the fifth assembly hole 11223 and the sixth assembly hole 1111 to fix the coupling 1122 and the crossbeam 111 .

[0093] Specifically, the sixth assembly hole 1111 is opened on the side wall of the beam 111, the fifth assembly hole 11223 is opened on the coupling 1122 and is arranged opposite to the sixth assembly hole 1111, and the third fastener is passed through the fifth assembly hole 11223 and the sixth assembly hole 1111 to fix the coupling 1122 and the beam 111.

[0094] The third fastener may be a screw, a pin, or the like.

[0095] Please refer to Figure 2 It should be noted that, in some other embodiments, the beam unit 110 is provided with a mounting groove 11211, the notch of the mounting groove 11211 is formed on the upper side of the auxiliary guide rail 130, the auxiliary guide rail 130 is passed through the mounting groove 11211, and the auxiliary guide rail 130 is limitedly cooperated with the beam unit 110 in the vertical direction, and the auxiliary guide rail 130 plays a supporting role for the beam unit 110.

[0096] Furthermore, the guide groove 131 on the auxiliary guide rail 130 is opened upward, and both ends of the guide groove 131 along the first direction are open. When the carrier 100 moves in the first direction, the roller assembly 300 located above the carrier 100 can enter the guide groove 131 from one end of the auxiliary guide rail 130, thereby hanging the auxiliary guide rail 130, thereby supporting the auxiliary guide rail 130 and, in turn, supporting the crossbeam unit 110. The opening on the upper side of the guide groove 131 provides a clearance for the roller assembly 300, reducing the risk of interference between the roller assembly 300 and the auxiliary guide rail 130.

[0097] Specifically, the auxiliary guide rail 130 is a C-shaped guide rail, and the opening of the guide groove 131 of the auxiliary guide rail 130 faces upward.

[0098] Of course, in other embodiments, the auxiliary guide rail 130 can be directly fixed to the upper side of the beam unit 110, and the roller assembly 300 can suspend the auxiliary guide rail 130, thereby supporting the auxiliary guide rail 130 and then supporting the beam unit 110.

[0099] like Figure 7 As shown, in some embodiments, the two lateral guide rails 120 each include an end fixing portion 121 connected to the plurality of beam units 110 , and a supporting portion 122 connected to the fixing portion 121 , with an escape space 124 formed below the supporting portion 122 .

[0100] Specifically, the length direction of the fixing portion 121 is parallel to the first direction, and the fixing portion 121 is connected to the ends of the plurality of beam units 110, the support portion 122 is connected to the upper side of the fixing portion 121, and the length direction of the support portion 122 is parallel to the first direction. In addition, there is an escape space 124 below the support portion 122, that is, the lateral guide rail 120 has no other entity disposed below the support portion 122. When the transmission wheel 200 supports the support portion 122, the transmission wheel 200 is located in the escape space 124. Since the lateral guide rail 120 has no other portion disposed below the support portion 122, the lateral guide rail 120 will not affect the lifting of the carrier 100 from the bottom up and will separate from the transmission wheel 200, thereby facilitating the removal of the carrier 100.

[0101] It should be noted that the supporting portion 122 may also be connected to the middle or lower side of the fixing portion 121 .

[0102] The thickness of the support portion 122 can be set between 8 mm and 15 mm. This thickness is thicker than the thickness of the support portion of the traditional lateral guide rail, which is beneficial to reducing the risk of deformation of the support portion 122 when supported.

[0103] Furthermore, at least one lateral guide rail 120 further includes an anti-deflection portion 123 connected to a side of the support portion 122 away from the fixing portion 121, with the upper end of the anti-deflection portion 123 connected to the support portion 122. Thus, when the transmission wheel 200 supports the support portion 122 and drives the carrier 100 to move in the first direction, the anti-deflection portion 123 can prevent the carrier 100 from deflecting in the second direction.

[0104] In some embodiments, at least one end of each of the plurality of beam units 110 is connected to a connecting plate 150. Specifically, in this embodiment, both ends of each of the plurality of beam units 110 are connected to a connecting plate 150. The connecting plate 150 and the auxiliary guide rail 130 are spaced apart and arranged in parallel along the second direction, and the lateral guide rail 120 is connected to a side of the connecting plate 150 away from the beam unit 110.

[0105] It is understandable that after the span of the two rows of transmission wheels 200 on both sides of the carrier 100 is set, by providing a connecting plate 150 at the end of the beam unit 110, the length of the beam 111 can be reduced, thereby reducing the risk of deformation of the beam 111.

[0106] The connecting plate 150 and the beam unit 110 may be connected by screws or buckles.

[0107] Furthermore, the connecting plate 150 is provided with ventilation holes 151 running through the upper and lower sides thereof.

[0108] It is understandable that after the carrier 100 is placed in the coating equipment, the interior of the coating equipment needs to be evacuated and broken, which will cause a pressure difference between the upper and lower parts of the carrier 100. At this time, the gas can pass through the vent 151, thereby further balancing the pressure above and below the carrier 100.

[0109] It is understandable that during the process of evacuating or breaking the vacuum, if the pressure below the carrier 100 is high, the gas can flow to the top of the carrier 100 more quickly through the vents 151, thereby further balancing the pressure above and below the carrier 100. In this way, the pressure on the upper and lower sides of the coated parts (silicon wafers or glass) on the carrier 100 can be made closer, thereby reducing the risk of the coated parts being displaced or blown apart by the air. In addition, especially for gas flowing from bottom to top, since the gas can pass through the connecting plate 150 from bottom to top through the vents 151, the upward pressure on the connecting plate 150 can also be reduced, thereby reducing the risk of the carrier 100 being blown up.

[0110] like Figure 2As shown, one embodiment of the present invention further provides a transport system comprising the carrier 100 of the above embodiment, two rows of lateral drive wheels 200, and a plurality of roller assemblies 300 spaced apart and arranged in a row along a first direction. The two rows of lateral drive wheels 200 are spaced apart along a second direction and are used to support two lateral guide rails 120, respectively; the roller assemblies 300 are used to support the auxiliary guide rails 130.

[0111] In the transmission system of the present invention, the lateral guide rails 120 are used to accommodate two rows of drive wheels 200, one on each side of the carrier 100. The drive wheels 200 can drive the carrier 100 to move in a first direction. The auxiliary guide rails 130 are used to be supported by the roller assembly 300. In this way, by increasing the support of the roller assembly 300, more support points can be provided for the carrier 100, so that when both ends of the beam unit 110 are supported, the middle portion is also supported. In this way, the cross-sectional strength of the beam unit 110 can be reduced accordingly (corresponding to reducing the thickness of the beam unit 110, material strength, and other parameters), thereby reducing the weight of the entire carrier 100 and reducing costs. At the same time, it can also reduce the load on the drive wheels 200 on both sides.

[0112] like Figures 3 to 6 As shown, the roller assembly 300 includes a support member 310 and a roller 320 disposed on the support member 310. The roller 320 is used to support the auxiliary guide rail 130 and to roll with the auxiliary guide rail 130. Specifically, the support member 310 can be fixed to a bracket, and the roller 320 is used to extend into the guide groove 131 and support the auxiliary guide rail 130. In this embodiment, the support member 310 is used to pass through the avoidance gap to allow the roller 320 to extend into the guide groove 131.

[0113] Combine Figure 2 and Figure 5 Furthermore, a side groove 311 is provided on the side wall of the support member 310 , and the side groove 311 is located on the moving path of the blocking portion 141 .

[0114] It is understandable that the blocking portion 141 can extend into the side groove 311 , so that the blocking portion 141 can achieve a better shielding effect and further reduce the risk of coating dust entering the guide groove 131 .

[0115] It can be understood that, in the process of the transmission wheel 200 driving the entire carrier 100 to move, the auxiliary guide rail 130 of the carrier 100 is supported by different roller assemblies 300 in turn, and as the carrier 100 moves, the blocking portion 141 will move toward the side groove 311 of the support member 310 on the roller assembly 300 in front of it and extend into the side groove 311.

[0116] Combine Figure 5 and Figure 6 Furthermore, the upper end of the support member 310 is connected to a pin shaft 330 , the outer sleeve of the pin shaft 330 is connected to a bushing 340 , the roller 320 is sleeved outside the bushing 340 , and the roller can rotate relative to the support member 310 .

[0117] An embodiment of the present invention further relates to a coating device, comprising the transmission system of the above embodiment.

[0118] The coating equipment of the present invention is equipped with the above-mentioned transmission system. In the transmission system, the lateral guide rails 120 are used to allow two rows of drive wheels 200, respectively arranged on both sides of the carrier 100, to extend into. The drive wheels 200 can play a driving role, driving the carrier 100 to move in a first direction. The auxiliary guide rails 130 are used to be supported by the roller assembly 300. In this way, by increasing the support of the roller assembly 300, more support points can be provided for the carrier 100, so that when the ends of the beam unit 110 are supported, the middle part is also supported. In this way, the cross-sectional strength of the beam unit 110 can be reduced accordingly (corresponding to reducing the thickness of the beam unit 110, material strength and other parameters), thereby reducing the weight of the entire carrier 100 and reducing costs. At the same time, it can also reduce the load on the drive wheels 200 on both sides.

[0119] like Figure 8 As shown, for the multiple roller assemblies 300 arranged in a row, the multiple roller assemblies 300 are arranged to avoid the sputtering area of the coating equipment.

[0120] Specifically, the coating equipment utilizes magnetron sputtering to deposit films. Its interior features alternating sputtering and non-sputtering zones. Multiple roller assemblies 300 are positioned within the non-sputtering zones, avoiding the sputtering zones. This ensures that no roller assemblies 300 within the sputtering zones interfere with the coating. Furthermore, friction between the rollers 320 and the auxiliary guide rails 130 occurs within the non-sputtering zones, thus preventing any impact on the coating within the sputtering zones.

[0121] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0122] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vehicle, characterized in that: include: A plurality of beam units, wherein the plurality of beam units are spaced apart and arranged in parallel along a first direction; two lateral guide rails, the two lateral guide rails being spaced apart and arranged in parallel along a second direction, wherein one of the lateral guide rails is connected to one end of the plurality of cross-beam units, and the other lateral guide rail is connected to the other end of the plurality of cross-beam units, wherein the second direction is perpendicular to the first direction; An auxiliary guide rail is arranged between the two lateral guide rails and is spaced apart and arranged in parallel with the lateral guide rails along the second direction. The auxiliary guide rail is connected to a plurality of the beam units and is used to be supported by the roller assembly.

2. The carrier according to claim 1, characterized in that Each of the beam units is provided with a mounting groove, and the mounting grooves on the plurality of beam units are spaced apart and arranged opposite to each other along the first direction, and the auxiliary guide rails pass through the mounting grooves on the plurality of beam units.

3. The carrier according to claim 1, characterized in that The auxiliary guide rail has a guide groove with an opening facing downward, the guide groove extends along the first direction, and the opening has a first edge and a second edge spaced apart along the second direction; The auxiliary guide rail is further connected to a blocking member extending along the first direction. The blocking member has a blocking portion extending from the first edge toward the second edge, and an avoidance gap is formed between the blocking portion and the second edge.

4. The carrier according to claim 1, characterized in that The beam unit includes a plurality of beams arranged along the second direction, the length direction of each beam is parallel to the second direction, and a connecting component is provided between every two adjacent beams.

5. The carrier according to claim 4, characterized in that: The connecting assembly includes a connecting piece and two coupling pieces, wherein the two coupling pieces are detachably connected to both ends of the connecting piece. In the connecting assembly and the two crossbeams located on both sides thereof, one of the couplings is detachably inserted into one of the crossbeams, and the other coupling is detachably inserted into the other crossbeam.

6. The carrier according to claim 1, characterized in that The two lateral guide rails each include an end fixing portion connected to the plurality of beam units, and a supporting portion connected to the fixing portion, with an escape space formed below the supporting portion; The support portion is used to be supported by a transmission wheel extending into the avoidance space, and the carrier can be lifted from bottom to top to be separated from the transmission wheel.

7. The carrier according to claim 1, characterized in that At least one end of the plurality of beam units is connected to a connecting plate. The connecting plate and the auxiliary guide rail are spaced apart and arranged in parallel along the second direction. The lateral guide rail is connected to a side of the connecting plate away from the beam unit.

8. The carrier according to claim 7, characterized in that: The connecting plate is provided with ventilation holes running through the upper and lower sides thereof.

9. A transmission system, characterized in that: include: The carrier according to any one of claims 1 to 8; Two rows of lateral transmission wheels, the two rows of lateral transmission wheels are spaced apart along the second direction, and the two rows of lateral transmission wheels are used to support the two lateral guide rails respectively; A plurality of roller assemblies are spaced apart and arranged in a row along the first direction, and the roller assemblies are used to support the auxiliary guide rail.

10. The transmission system according to claim 9, characterized in that The roller assembly includes a support member and a roller disposed on the support member, wherein the roller is used to support the auxiliary guide rail and to roll with the auxiliary guide rail.

11. The transmission system according to claim 10, characterized in that The auxiliary guide rail has a guide groove with a downward opening, the guide groove extends along the first direction, and the opening has a first edge and a second edge spaced apart along the second direction; the auxiliary guide rail is further connected to a blocking member extending along the first direction, the blocking member having a blocking portion extending from the first edge toward the second edge, and an avoidance gap between the blocking portion and the second edge; the support member is used to pass through the avoidance gap to allow the roller to extend into the guide groove; Wherein, the side wall of the support member is provided with a side groove, and the side groove is located on the moving path of the blocking part.

12. A coating device, characterized in that: A transmission system comprising any one of claims 9 to 11.

13. The coating equipment according to claim 12, characterized in that: The coating equipment has sputtering areas and non-sputtering areas arranged alternately therewith inside, and a plurality of roller assemblies are arranged in each of the non-sputtering areas and avoid the sputtering areas.

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