Gas guide seat of chemical vapor deposition furnace

Abstract

The utility model discloses a gas guide seat of a chemical vapor deposition furnace, belongs to the technical field of deposition furnaces, and aims to solve the problems that in the prior art, due to different directions of pipelines, the pipelines are not horizontally arranged, and when the pipelines are in a turning state, inclined pulling force is applied to the gas guide seat, so that the gas guide seat is pulled to incline, and the gas guide seat is difficult to deform after being used for a long time. And the connection tightness of the gas guide seat and the deposition furnace is easily influenced. Comprising a seat body, a fixing frame and a supporting mechanism, a furnace body connecting pipe and a pipeline connecting pipe are installed at the two ends of the seat body respectively, and the furnace body connecting pipe and the pipeline connecting pipe communicate with the seat body; a fixing frame is fixed to the outer wall of the base body, the fixing frame is of a U-shaped structure and semi-surrounds the outer side of the base body, and a supporting mechanism is installed on the fixing frame. According to the gas guide seat of the chemical vapor deposition furnace, even if the hose is arranged in a bent mode, stable supporting force can be achieved, the supporting rod can be tightly attached to the outer wall of the deposition furnace to offset the pulling force, the service life of the seat body is prolonged, and damage is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of deposition furnaces, and in particular relates to a gas guide seat of a chemical vapor deposition furnace. Background Art

[0002] Chemical vapor deposition (CVD) furnaces are advanced equipment commonly used in the field of materials science. They are primarily used to deposit thin film materials on substrate surfaces through gas-phase reactions under certain vacuum or inert atmosphere conditions. The operating principle of CVD furnaces is primarily based on gas-phase reactions and mass transfer. During the deposition process, the high temperature within the furnace allows the raw gas molecules or atoms to gain sufficient energy, undergoing chemical reactions such as decomposition and combination, generating the desired gaseous products. These gaseous products are then transported to the substrate surface through diffusion and convection within the furnace. When the gaseous products come into contact with the substrate surface, processes such as adsorption, reaction, and diffusion occur, ultimately forming a dense film on the substrate surface. During CVD, the reaction gases must be introduced into the deposition furnace, necessitating the design of a gas guide device to connect the pipelines. Due to the different directions of the pipelines, the pipelines themselves are not arranged horizontally. When turning, they exert an oblique force on the gas guide seat, causing the gas guide seat to be pulled and tilted. This can easily affect the tightness of the connection between the gas guide seat and the deposition furnace after prolonged use. Therefore, the inventors have proposed a gas guide seat for a CVD furnace. Utility Model Content

[0003] (1) Technical problems to be solved

[0004] In response to the shortcomings of the existing technology, the purpose of the present invention is to provide a gas guide seat for a chemical vapor deposition furnace, aiming to solve the problem in the existing technology that due to the different directions of the pipelines, the pipelines themselves are not arranged horizontally. When in a turning state, an oblique pulling force will be applied to the gas guide seat, causing the gas guide seat to be pulled and tilted. After long-term use, it is easy to affect the tightness of the connection between the gas guide seat and the deposition furnace.

[0005] (2) Technical solution

[0006] In order to solve the above technical problems, the utility model provides a gas guide seat of a chemical vapor deposition furnace, comprising a seat body, a fixing frame and a supporting mechanism, wherein furnace body connecting pipes and pipeline connecting pipes are respectively installed at both ends of the seat body, and the furnace body connecting pipes and pipeline connecting pipes are connected to the seat body; a fixing frame is fixed on the outer wall of the seat body, and the fixing frame is in a U-shaped structure and semi-enclosed on the outer side of the seat body, and a supporting mechanism is installed on the fixing frame; the supporting mechanism comprises a movable block and a supporting rod, and a lifting slot is vertically opened on the outer side wall of the fixing frame, so that The movable block is slidably installed in the lifting groove, the support rod is L-shaped, and one end is rotatably installed at the bottom of the movable block. A liftable limit shaft is also vertically installed inside the movable block, and the bottom of the limit shaft abuts against the flipped support rod. When the base body is installed, it can support the base body. After the pipeline connecting pipe is connected to the hose, the hose can have a stable supporting force even if it is bent and arranged. The support rod will fit tightly against the outer wall of the deposition furnace to offset the pulling force, thereby completing the support of the base body, improving the service life of the base body, and reducing damage.

[0007] Preferably, a through hole for the limiting shaft to pass through is vertically installed inside the movable block, a threaded portion is partially provided on the outer wall of the limiting shaft, and the limiting shaft is threadedly connected to the movable block.

[0008] Preferably, a driving groove is vertically provided on the inner side wall of the lifting groove, and a driving block adapted to the driving groove is protruded from the outer wall of the movable block.

[0009] Preferably, the driving block passes through the driving slot, and a driving screw passes vertically through the driving block, and the driving screw is rotatably arranged in the driving slot.

[0010] Preferably, an adjusting head is rotatably mounted on the top of the fixing frame, and the adjusting head is fixedly connected to the top end of the driving screw.

[0011] Preferably, a threaded hole is vertically penetrated inside the driving block.

[0012] Preferably, the top of the limiting shaft extends out of the upper surface of the movable block.

[0013] (3) Beneficial effects

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] Thanks to the setting of the supporting mechanism, the utility model can support the base body when it is installed. After the pipeline connecting pipe is connected to the hose, the hose can have a stable supporting force even if it is bent and arranged. The support rod will fit tightly with the outer wall of the deposition furnace to offset the pulling force, thereby completing the support of the base body, improving the service life of the base body, and reducing damage. The tilting pulling force on the base body will be offset. The support rod is easy to unfold and is storable. When not in use, it can be stored in the fixed frame, which is convenient to carry and takes up little space. It can be widely promoted. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 It is a structural diagram of the utility model;

[0018] Figure 2 It is a structural diagram of the support rod in the unfolded state;

[0019] Figure 3 Schematic diagram of the supporting mechanism structure;

[0020] Figure 4 for Figure 2 Enlarged structural diagram at point A in the middle.

[0021] The marks in the accompanying drawings are: 1. base; 2. fixing frame; 3. furnace body connecting pipe; 4. pipeline connecting pipe; 5. supporting mechanism; 6. supporting rod; 7. movable block; 8. limiting shaft; 9. lifting groove; 10. threaded part; 11. driving block; 12. threaded hole; 13. adjusting head; 14. driving groove; 15. driving screw. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] This specific embodiment is a gas guide seat of a chemical vapor deposition furnace, and its structural diagram is as follows Figure 1As shown, it includes a base body 1, a fixing frame 2 and a supporting mechanism 5. A furnace body connecting pipe 3 and a pipeline connecting pipe 4 are respectively installed at both ends of the base body 1, and the furnace body connecting pipe 3 and the pipeline connecting pipe 4 are connected to the base body 1; a fixing frame 2 is fixed on the outer wall of the base body 1, and the fixing frame 2 has a U-shaped structure and semi-encloses the outer side of the base body 1. The supporting mechanism 5 is installed on the fixing frame 2;

[0024] Reference Figure 3 The support mechanism 5 includes a movable block 7 and a support rod 6. A lifting groove 9 is vertically provided on the outer wall of the fixed frame 2. The movable block 7 is slidably installed in the lifting groove 9. The support rod 6 has an L-shaped structure, and one end is rotatably installed at the bottom of the movable block 7. A lifting limit shaft 8 is also vertically installed inside the movable block 7. The bottom of the limit shaft 8 abuts against the flipped support rod 6. A through hole for the limit shaft 8 to pass through is vertically installed inside the movable block 7. A threaded portion 10 is partially provided on the outer wall of the limit shaft 8. The limit shaft 8 is threadedly connected to the movable block 7. A threaded hole 12 is vertically provided inside the driving block 11.

[0025] Reference Figure 4 A drive slot 14 is vertically defined on the inner sidewall of the lifting slot 9, and a drive block 11 is protruding from the outer wall of the movable block 7, adapted to fit within the drive slot 14. The drive block 11 is inserted into the drive slot 14, and a drive screw 15 is vertically passed through the drive block 11. The drive screw 15 is rotatably disposed within the drive slot 14. An adjustment head 13 is rotatably mounted on the top of the fixed frame 2, and the adjustment head 13 is fixedly connected to the top end of the drive screw 15.

[0026] Working principle: When in use, connect the furnace body connecting pipe 3 on the base body 1 to the exhaust port of the deposition furnace, and then connect the pipeline connecting pipe 4 to the hose. When the gas inside the deposition furnace is discharged, it is transmitted and discharged through the base body 1. When the hose is bent, it will apply an oblique pulling force to the base body 1. At this time, the base body 1 can be supported by unfolding the support rod 6, so that the base body 1 has a supporting force to offset the pulling force of the hose arrangement. Turn the adjusting head 13, and the adjusting head 13 drives the driving screw 15 to rotate. The driving block 11 threadedly connected to the driving screw 15 slides vertically along the driving groove 14, and then the movable block 7 is forced to move along the lifting and lowering When the groove 9 slides down to the bottom of the fixed frame 2, the support rod 6 is also completely moved out of the lifting groove 9. At this time, the support rod 6 is flipped toward the outer wall of the deposition furnace until it is tightly against the outer wall of the deposition furnace. Then the limit shaft 8 is rotated. The outside of the limit shaft 8 has a threaded portion 10. The threaded portion 10 descends along the external thread of the movable block 7 until the drive shaft contacts the flipped support rod 6, limiting the support rod 6. When the hose is bent and applies an oblique pulling force to the seat body 1, the support rod 6 will fit tightly with the outer wall of the deposition furnace to offset the pulling force, thereby completing the support of the seat body 1, improving the service life of the seat body 1, and reducing damage.

[0027] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A gas guide seat for a chemical vapor deposition furnace, comprising a seat body (1), a fixing frame (2) and a supporting mechanism (5), characterized in that: A furnace body connecting pipe (3) and a pipeline connecting pipe (4) are respectively installed at both ends of the base body (1), and the furnace body connecting pipe (3) and the pipeline connecting pipe (4) are in communication with the base body (1); A fixing frame (2) is fixed on the outer wall of the base body (1), the fixing frame (2) is in a U-shaped structure and half surrounds the outer side of the base body (1), and a supporting mechanism (5) is installed on the fixing frame (2); The support mechanism (5) comprises a movable block (7) and a support rod (6). A lifting groove (9) is vertically provided on the outer side wall of the fixed frame (2). The movable block (7) is slidably mounted in the lifting groove (9). The support rod (6) is L-shaped, and one end is rotatably mounted at the bottom of the movable block (7). A lifting limit shaft (8) is also vertically mounted inside the movable block (7). The bottom of the limit shaft (8) abuts against the flipped support rod (6).

2. The gas guide seat of a chemical vapor deposition furnace according to claim 1, characterized in that: A through hole for the limiting shaft (8) to pass through is vertically installed inside the movable block (7), a threaded portion (10) is partially provided on the outer wall of the limiting shaft (8), and the limiting shaft (8) is threadedly connected to the movable block (7).

3. The gas guide seat of a chemical vapor deposition furnace according to claim 1, characterized in that: A driving groove (14) is vertically provided on the inner side wall of the lifting groove (9), and a driving block (11) adapted to the driving groove (14) is protruded from the outer wall of the movable block (7).

4. The gas guide seat of a chemical vapor deposition furnace according to claim 3, characterized in that: The driving block (11) penetrates into the driving groove (14), and a driving screw (15) vertically penetrates the driving block (11), and the driving screw (15) is rotatably arranged in the driving groove (14).

5. The gas guide seat of a chemical vapor deposition furnace according to claim 4, characterized in that: An adjusting head (13) is rotatably mounted on the top of the fixing frame (2), and the adjusting head (13) is fixedly connected to the top end of the driving screw (15).

6. The gas guide seat of a chemical vapor deposition furnace according to claim 4, characterized in that: A threaded hole (12) is vertically penetrated inside the driving block (11).

7. The gas guide seat of a chemical vapor deposition furnace according to claim 1, characterized in that: The top of the limiting shaft (8) extends out of the upper surface of the movable block (7).

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