Adjustable multifunctional heating furnace
By designing an adjustable multi-function heating furnace, flexible adaptation to different crystal growth processes is achieved, equipment costs and site requirements are reduced, and existing heating furnaces cannot meet multiple process needs.
Patent Information
- Application Number
- CN202422476139.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-14
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2034-10-14
AI Technical Summary
The existing heating furnace cannot meet the needs of different crystal growth processes, resulting in high equipment procurement and maintenance costs, occupying a large number of sites, and serious waste of resources.
A adjustable multi-function heating furnace is designed to simulate dual temperature zones, three temperature zones, four temperature zones, etc. through the lifting and lowering drive group and independent temperature control system to form VB furnaces, THM crystal growth furnaces, zone melting purification furnaces, etc., to flexibly adjust the temperature gradient and temperature zones to meet the needs of various crystal growth processes.
It reduces equipment procurement and maintenance costs, reduces site demand, and improves equipment flexibility and production efficiency.
Smart Images
Figure CN223226222U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of crystal growth, and in particular relates to an adjustable multifunctional heating furnace. Background Art
[0002] Crystal growth technology is widely used in the semiconductor industry, optical material preparation, and gemstone manufacturing. Crystal growth technology involves various temperature processes, requiring precise control of the furnace temperature to create specific temperature zones and gradients. Furthermore, during the crystal growth process, the temperature distribution and gradient must be adjusted accordingly based on the material's properties and state. Furthermore, during crystal production, different furnaces are required depending on the production process. For example, a zone furnace is required for purifying raw materials or ingots. For crystal growth using the Vertical Bridgman (VB) or Vertical Gradient Freezing (VGF) method, a VB furnace or VGF furnace is required. For crystal growth using the Moving Heater (THM) method, a THM furnace is required. Annealing furnaces are required for annealing finished products.
[0003] A single heating furnace cannot meet the needs of different crystal growth processes. Multiple heating furnaces must be equipped to meet different crystal growth processes. Multiple types of heating furnaces increase equipment procurement costs, increase equipment maintenance costs, occupy a large amount of site area, and result in a waste of resources.
[0004] Therefore, the above problems need to be solved urgently. Utility Model Content
[0005] Purpose of the utility model: In order to overcome the above shortcomings, the utility model provides an adjustable multifunctional heating furnace, which can simulate dual-temperature zones, three-temperature zones, and four-temperature zones to form a dual-temperature zone furnace, a VB furnace, a THM crystal growth furnace, a zone melting purification furnace, and an annealing furnace to meet the needs of different crystal growth processes, reduce equipment procurement and maintenance costs, and reduce equipment requirements for site.
[0006] Technical Solution: To achieve the above objectives, the present invention provides an adjustable multifunctional heating furnace, comprising a furnace frame, which is a rectangular parallelepiped composed of multiple square tubes. The frame comprises a top plate at the top and a bottom plate at the bottom. A support plate is disposed between the top and bottom plates. An adjustable heating furnace assembly is disposed between the support and top plates. A lifting drive assembly is disposed between the support and bottom plates, extending through the support plates and drivingly connected to the adjustable heating furnace assembly. The adjustable heating furnace assembly comprises a second heating furnace and a third heating furnace, which are coaxially arranged. The lifting drive assembly drives the second and third heating furnaces up and down, respectively. The second and third heating furnaces are equipped with independent temperature control systems, enabling independent temperature control of the second and third heating furnaces, forming a dual-temperature zone furnace. The lifting drive assembly separates the second and third heating furnaces, allowing refractory material to be spliced between the second and third heating furnaces. The temperature of the second heating furnace is controlled to form a low-temperature zone, while the temperature of the third heating furnace is controlled to form a high-temperature zone. This creates a gradually varying temperature gradient between the second and third heating furnaces, forming a VB furnace. The utility model can independently control the temperature of the second heating furnace and the third heating furnace to form two temperature zones, and by controlling the distance between the second heating furnace and the third heating furnace, transform them into different furnace bodies to meet different crystal growth process requirements, reduce equipment procurement and maintenance costs, reduce equipment site requirements, and reduce production costs.
[0007] Furthermore, in the aforementioned adjustable multifunctional heating furnace, a first heating furnace is positioned above the second heating furnace, and a fourth heating furnace is positioned below the third heating furnace. A lifting drive group drives the first, second, third, and fourth heating furnaces up and down, respectively. The third and fourth heating furnaces are positioned above and below the first and second heating furnaces, respectively. The temperatures of the third and fourth heating furnaces can be independently controlled, allowing for arbitrary temperature variations between the first and fourth furnaces and controlling the movement of the temperature field, thereby forming a VGF furnace. The lifting drive group drives the first, second, and third heating furnaces apart from each other, setting the temperature of the second heating furnace higher than that of the first, third, and fourth furnaces, thereby forming a THM crystal growth furnace. Refractory material is spliced between the first and second heating furnaces, and between the second and third furnaces, forming a high-temperature protrusion area. This high-temperature protrusion area further promotes material mixing and solute transport, thereby reducing crystal defects. The lift drive group separately separates the first, second, third, and fourth heating furnaces. Refractory material is spliced between them, setting them to the same temperature. The temperature at the spliced refractory material between them is lower, creating a wavy temperature curve from top to bottom, suitable for use in zone melting and purification furnaces. By setting four furnaces and individually adjusting their temperatures, the distances between them can be adjusted to simulate dual, triple, or quadruple temperature zones, creating THM crystal growth furnaces and zone melting and purification furnaces, enhancing flexibility.
[0008] Furthermore, in the above-mentioned adjustable multifunctional heating furnace, guide posts are connected between the top plate and the support plate. The guide posts are respectively provided at the four corners of the top plate and the support plate. The guide posts are slidably connected to the first furnace plate, the second furnace plate, the third furnace plate, and the fourth furnace plate. The first heating furnace is connected to the top surface of the first furnace plate, the second heating furnace is connected to the top surface of the second furnace plate, the third heating furnace is connected to the top surface of the third furnace plate, and the fourth heating furnace is connected to the top surface of the fourth furnace plate. The first furnace plate, the second furnace plate, the third furnace plate, and the fourth furnace plate can slide up and down respectively along the guide posts.
[0009] Furthermore, in the adjustable multifunctional heating furnace, the lifting drive group includes a first drive mechanism, a second drive mechanism, a third drive mechanism, and a fourth drive mechanism. The first, second, third, and fourth drive mechanisms are staggered, with the first drive mechanism drivingly connected to the first furnace plate, the second drive mechanism drivingly connected to the second furnace plate, the third drive mechanism drivingly connected to the third furnace plate, and the fourth drive mechanism drivingly connected to the fourth furnace plate. The first, second, third, and fourth drive mechanisms can respectively drive the first, second, third, and fourth furnace plates up and down to form different temperature ranges to meet different crystal growth processes.
[0010] Furthermore, in the aforementioned adjustable multifunctional heating furnace, the first, second, third, and fourth drive mechanisms each comprise: a motor mounted on the top surface of the base plate, a gearbox assembly drivingly connected to the motor, and a lead screw disposed parallel to the guide post, the lead screw and the gearbox assembly drivingly connected. The first, second, third, and fourth drive mechanisms each comprise one motor, one gearbox assembly, and two or more lead screws, and the first, second, third, and fourth furnace plates are each drivingly connected via a lead screw nut and the lead screw.
[0011] Furthermore, in the above-mentioned adjustable multifunctional heating furnace, the gearbox assembly includes a main right-angle reducer, a first sub-right-angle reducer, a second sub-right-angle reducer, a first reversing gearbox, and a second reversing gearbox. The main right-angle reducer includes an input end and two output ends. The first sub-right-angle reducer and the second sub-right-angle reducer are mirror-imaged on either side of the main right-angle reducer. The output end of the main right-angle reducer is driven and connected to the input end of the first sub-right-angle reducer and the input end of the second sub-right-angle reducer respectively via a coupling. The output end of the first sub-right-angle reducer is driven and connected to the first reversing gearbox, and the output end of the second sub-right-angle reducer is driven and connected to the second reversing gearbox. The output ends of the first reversing gearbox and the second reversing gearbox are both arranged vertically. The output ends of the first reversing gearbox and the second reversing gearbox are respectively connected to the screw drive. The input end of the first main right-angle reducer is driven and connected to the motor.
[0012] Furthermore, in the above-mentioned adjustable multifunctional heating furnace, the input end of the main right-angle reducer and the output end of the main right-angle reducer are arranged at a horizontal right angle. The input end of the first secondary right-angle reducer is arranged parallel to the input end of the main right-angle reducer, the input end of the first secondary right-angle reducer and the output end of the first secondary right-angle reducer are arranged at a horizontal right angle, the input end of the first secondary right-angle reducer and the input end of the second secondary right-angle reducer are arranged parallel, and the input end of the second secondary right-angle reducer and the output end of the second secondary right-angle reducer are arranged at a horizontal right angle. The input end of the first reversing gearbox is arranged parallel to the input end of the first secondary right-angle reducer, the input end of the first reversing gearbox and the input end of the second reversing gearbox are arranged parallel, and the output end of the first reversing gearbox and the output end of the second reversing gearbox are arranged vertically.
[0013] Furthermore, in the above-mentioned adjustable multifunctional heating furnace, heating cavities are respectively provided in the centers of the first heating furnace, the second heating furnace, the third heating furnace and the fourth heating furnace. The heating cavities of the first heating furnace, the second heating furnace, the third heating furnace and the fourth heating furnace are coaxially arranged to form a through cavity, and the crystal grows in the above-mentioned through cavity.
[0014] Furthermore, in the aforementioned adjustable multifunctional heating furnace, the first, second, third, and fourth heating furnaces are each heated by resistance heating, and are each equipped with a thermocouple. The thermocouples detect the temperature within each of the first, second, third, and fourth heating furnaces. The resistance heating of the first, second, third, and fourth heating furnaces, combined with the internal thermocouples detecting the temperature within the heating chamber, allows precise control of the temperature within each of the heating chambers to meet crystal growth requirements.
[0015] Furthermore, in the above-mentioned adjustable multifunctional heating furnace, in order to facilitate the movement of the heating furnace, rollers are provided on the bottom surface of the furnace frame, and the rollers are provided at the four corners of the furnace frame.
[0016] As can be seen from the above technical solution, the present invention has the following beneficial effects: The present invention's adjustable multifunctional heating furnace has four heating furnaces installed within a furnace frame. Thermocouples within the heating furnaces detect the temperature of the heating chambers, and the heating power of the four heating furnaces is then controlled separately, achieving control over the internal temperatures of the respective heating furnaces to form distinct temperature zones. Furthermore, the distances between the first, second, third, and fourth heating furnaces can be adjusted to form different temperature gradients, simulating dual-temperature zone furnaces, VB furnaces, THM crystal growth furnaces, zone melting and purification furnaces, annealing furnaces, and the like, thereby improving equipment flexibility and reducing equipment procurement and maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1This is a structural diagram of the adjustable multifunctional heating furnace of the utility model;
[0018] Figure 2 is a structural diagram of the lifting drive group;
[0019] Figure 3 is a structural schematic diagram of the first driving mechanism;
[0020] Figure 4 Schematic diagram of the position of the heating furnace in the embodiment of the adjustable multifunctional heating furnace disclosed herein;
[0021] Figure 5 Schematic diagram of the position of the heating furnace in the embodiment of the adjustable multifunctional heating furnace disclosed herein;
[0022] Figure 6 Schematic diagram of the position of the heating furnace in the embodiment of the adjustable multifunctional heating furnace disclosed herein;
[0023] Figure 7 Schematic diagram of the position of the heating furnace in the embodiment of the adjustable multifunctional heating furnace disclosed herein.
[0024] In the figure: 1. furnace rack, 11. top plate, 12. bottom plate, 13. support plate, 14. guide column, 2. adjustable heating furnace group, 21. first heating furnace, 211. first furnace plate, 22. second heating furnace, 221. second furnace plate, 23. third heating furnace, 231. third furnace plate, 24. fourth heating furnace, 241. fourth furnace plate, 3. lifting drive group, 31. first drive mechanism, 311. motor, 312. gear box group, 3121. main right-angle reducer, 3122. first secondary right-angle reducer, 3123. second secondary right-angle reducer, 3124. first reversing gear box, 3125. second reversing gear box, 313. lead screw, 32. second drive mechanism, 33. third drive mechanism, 34. fourth drive mechanism, 34. roller. DETAILED DESCRIPTION
[0025] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. The description of the exemplary embodiments is merely illustrative and is in no way intended to limit the present disclosure, its application, or use. The present disclosure can be implemented in many different forms and is not limited to the embodiments described herein.
[0026] Example 1
[0027] like Figure 1The adjustable multifunctional heating furnace shown includes a furnace frame 1, which is a rectangular parallelepiped composed of multiple square tubes. A top plate 11 is provided at the top of the furnace frame 1, and a bottom plate 12 is provided at the bottom of the furnace frame 1. A support plate 13 is provided between the top plate 11 and the bottom plate 12. An adjustable heating furnace group 2 is provided between the support plate 13 and the top plate 11. A lifting drive group 3 is provided between the support plate 13 and the bottom plate 12. The lifting drive group 3 passes through the support plate 13 and is connected to the adjustable heating furnace group 2. The adjustable heating furnace group 2 includes a second heating furnace 22 and a third heating furnace 23, which are coaxially arranged. A first heating furnace 21 is provided above the second heating furnace 22, and a fourth heating furnace 24 is provided below the third heating furnace 23. The lifting drive group 3 drives the first heating furnace 21, the second heating furnace 22, the third heating furnace 23, and the fourth heating furnace 24 to move up and down, respectively. Guide posts 14 are connected between the top plate 11 and the support plate 13. Guide posts 14 are located at the four corners of the top plate 11 and the support plate 13. The guide posts 14 slidably connect the first furnace plate 211, the second furnace plate 221, the third furnace plate 231, and the fourth furnace plate 241. The first heating furnace 21 is connected to the top surface of the first furnace plate 211, the second heating furnace 22 is connected to the top surface of the second furnace plate 221, the third heating furnace 23 is connected to the top surface of the third furnace plate 231, and the fourth heating furnace 24 is connected to the top surface of the fourth furnace plate 241. The first furnace plate 211, the second furnace plate 221, the third furnace plate 231, and the fourth furnace plate 241 slide up and down along the guide posts 14. A heating cavity is located in the center of each of the first, second, third, and fourth heating furnaces 21, 22, 23, and 24. The heating cavities of the first, second, third, and fourth heating furnaces 21, 22, 23, and 24 are coaxially arranged to form a through cavity. The first, second, third, and fourth heating furnaces 21, 22, 23, and 24 are each resistance-heated and equipped with thermocouples. To facilitate movement of the heating furnaces, rollers 4 are provided on the bottom of the grate 1 at its four corners.
[0028] like Figure 2 In the adjustable multifunctional heating furnace shown, the lifting drive group 3 includes a first drive mechanism 31, a second drive mechanism 32, a third drive mechanism 33, and a fourth drive mechanism 34. The first drive mechanism 31, the second drive mechanism 32, the third drive mechanism 33, and the fourth drive mechanism 34 are staggered. The first drive mechanism 31 is drivingly connected to the first furnace plate 211, the second drive mechanism 32 is drivingly connected to the second furnace plate 221, the third drive mechanism 33 is drivingly connected to the third furnace plate 231, and the fourth drive mechanism 34 is drivingly connected to the fourth furnace plate 241.
[0029] like Figure 3The adjustable multifunctional heating furnace shown in FIG. 1 includes a first drive mechanism 31, a second drive mechanism 32, a third drive mechanism 33, and a fourth drive mechanism 34, each comprising a motor 311 mounted on the top surface of the base plate 12, a gearbox assembly 312 drivingly connected to the motor 311, and a lead screw 313 disposed parallel to the guide post 14. The lead screw 313 is drivingly connected to the gearbox assembly 312. The first drive mechanism 31, the second drive mechanism 32, the third drive mechanism 33, and the fourth drive mechanism 34 each comprise a motor 311, a gearbox assembly 312, and two or more lead screws 313. The first, second, third, and fourth furnace plates 211, 221, 231, and 241 are drivingly connected to the lead screws 313 via lead screw nuts. The gearbox assembly 312 includes a main right-angle reducer 3121, a first secondary right-angle reducer 3122, a second secondary right-angle reducer 3123, a first reversing gearbox 3124, and a second reversing gearbox 3125. The main right-angle reducer 3121 includes an input and two outputs. The first and second sub-right-angle reducers 3122 and 3123 are mirror images of each other on either side of the main right-angle reducer 3121. The output of the main right-angle reducer 3121 is drivingly connected to the inputs of the first and second sub-right-angle reducers 3122 and 3123, respectively, via couplings. The output of the first sub-right-angle reducer 3122 is drivingly connected to the first reversing gearbox 3124, while the output of the second sub-right-angle reducer 3123 is drivingly connected to the second reversing gearbox 3125. The outputs of the first and second reversing gearboxes 3124 and 3125 are both vertically arranged and drivingly connected to the lead screw 313. The input of the first main right-angle reducer 3121 is drivingly connected to the motor 311. The input end of the main right-angle reducer 3121 and its output end are arranged horizontally at right angles. The input end of the first secondary right-angle reducer 3122 is arranged parallel to the input end of the main right-angle reducer 3121. The input end of the first secondary right-angle reducer 3122 and its output end are arranged horizontally at right angles. The input end of the first secondary right-angle reducer 3122 and the input end of the second secondary right-angle reducer 3123 are arranged parallel to each other. The input end of the second secondary right-angle reducer 3123 and the output end of the second secondary right-angle reducer 3123 are arranged horizontally at right angles. The input end of the first reversing gearbox 3124 and its input end are arranged parallel to the input end of the first secondary right-angle reducer 3122. The input end of the first reversing gearbox 3124 and the input end of the second reversing gearbox 3125 are arranged parallel to each other. The output ends of the first reversing gearbox 3124 and the second reversing gearbox 3125 are arranged vertically.
[0030] like Figure 4As shown, when used for crystal growth, the lifting drive group 3 drives the first heating furnace 21, the second heating furnace 22, the third heating furnace 23 and the fourth heating furnace 24 to be arranged closely in sequence from top to bottom, and the furnace body temperatures are set to: the first heating furnace 21 is set to 1000°C, the second heating furnace 22 is set to 1100°C, the third heating furnace 23 is set to 900°C, and the fourth heating furnace 24 is set to 800°C. The crystal grows in the second heating furnace 22 and the third heating furnace 23 area, and the first heating furnace 21 and the fourth heating furnace 24 respectively keep the second heating furnace 22 and the third heating furnace 23 warm, and the second heating furnace 22 and the third heating furnace 23 form a dual-temperature zone furnace with different temperatures.
[0031] Applied to the above embodiment, during the VGF growth process, the crystal grows in the second heating furnace 22 and the third heating furnace 23 areas, and the temperatures of the first heating furnace 21, the second heating furnace 22, the third heating furnace 23 and the fourth heating furnace 24 are precisely adjusted to form a movement of the temperature field to form a VGF furnace.
[0032] Example 2
[0033] The adjustable multifunctional heating furnace described in Example 1 is used, and the furnace body temperatures are set to: the first heating furnace 21 is set to 1000°C, the second heating furnace 22 is set to 1100°C, the third heating furnace 23 is set to 900°C, and the fourth heating furnace 24 is set to 800°C. The lifting drive group drives the second heating furnace 22 and the third heating furnace 23 to separate. The first heating furnace 21 and the second heating furnace 22 are close to each other, and the third heating furnace 23 and the fourth heating furnace 24 are close to each other. Refractory materials are spliced between the second heating furnace 22 and the third heating furnace 23, and a through hole is left in the center of the refractory material. The temperature of the second heating furnace 22 is controlled to form a low-temperature zone, and the temperature of the third heating furnace 23 is controlled to form a high-temperature zone. A gradually changing temperature gradient is formed between the second heating furnace 22 and the third heating furnace 23 to form a VB furnace. Crystals grow in the temperature gradient area formed in the second heating furnace 22, the third heating furnace 23 and therebetween.
[0034] In Example 2, the first heating furnace 21 and the second heating furnace 22 are set to 500°C to form a temperature zone, and the third heating furnace 23 and the fourth heating furnace 24 are set to 300°C to form another temperature zone. Refractory materials are spliced in the second heating furnace 22 and the third heating furnace 23, and a through hole is left in the center of the refractory material. A temperature gradient is formed between the second heating furnace 22 and the third heating furnace 23, forming a two-temperature zone temperature gradient annealing furnace.
[0035] Example 3
[0036] The adjustable multifunctional heating furnace described in Example 1 is used to set the furnace body temperatures to 1000°C for the first heating furnace 21, 1100°C for the second heating furnace 22, 900°C for the third heating furnace 23, and 800°C for the fourth heating furnace 24. The lifting drive group drives the first heating furnace 21 and the second heating furnace 22 to separate, the second heating furnace 22 and the third heating furnace 23 to separate, and the third heating furnace 23 and the fourth heating furnace 24 to be close together. Refractory materials are respectively spliced between the first heating furnace 21 and the second heating furnace 22, and between the second heating furnace 22 and the third heating furnace 23, with a through hole in the center of the refractory material. The temperature gradually increases from the first heating furnace 21 to the second heating furnace 22, and gradually decreases from the second heating furnace 22 to the third heating furnace 23. The temperature of the second heating furnace 22 is higher than that of the first heating furnace 21 to the third heating furnace 23, forming a high-temperature protrusion zone. This high-temperature protrusion zone can further promote material mixing and solute transmission, thereby reducing crystal defects.
[0037] In Example 3, the furnace temperatures are set to: the first heating furnace 21 is not working, the second heating furnace 22 is set to 950°C, the third heating furnace 23 is set to 500°C, and the fourth heating furnace 24 is set to 500°C. Crystal growth is carried out in the second heating furnace 22, which is suitable for crystal growth in the THM process, forming a THM furnace.
[0038] Alternatively, the first heating furnace 21 is set to 950°C, the second heating furnace 22 is set to 500°C, the third heating furnace 23 is set to 500°C, and the fourth heating furnace 24 is set to 500°C. The first heating furnace 21 and the second heating furnace 22 are separated, and the second heating furnace 22, the third heating furnace 23, and the fourth heating furnace 24 are close to each other to form a longer heating zone. Crystal growth is carried out in the area of the first heating furnace 21, which is suitable for the THM process and can grow longer crystals.
[0039] Example 4
[0040] For the adjustable multifunctional heating furnace described in Example 1, the lifting drive group 3 drives the first heating furnace 21, the second heating furnace 22, the third heating furnace 23 and the fourth heating furnace 24 to separate from each other, and refractory materials are spliced between the first heating furnace 21 and the second heating furnace 22, the second heating furnace 22 and the third heating furnace 23, and the third heating furnace 23 and the fourth heating furnace 24. The first heating furnace 21, the second heating furnace 22, the third heating furnace 23 and the fourth heating furnace 24 are all set to 800°C. Since the temperature of the refractory material splicing position between the first heating furnace 21, the second heating furnace 22, the third heating furnace 23 and the fourth heating furnace 24 gradually decreases, a wavy temperature curve is formed from top to bottom of the heating furnace, which can be used for zone melting to purify materials, and multiple zone melting can be achieved in a single operation.
[0041] The above embodiments are illustrative and intended to illustrate the technical concepts and features of the present invention so that those skilled in the art can understand the present invention and implement it accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications based on the spirit of the present invention shall be included within the scope of protection of the present invention.
Claims
1. An adjustable multifunctional heating furnace, characterized in that: The invention comprises a furnace frame (1), wherein the furnace frame (1) is a rectangular parallelepiped composed of a plurality of square tubes, a top plate (11) is provided at the top of the furnace frame (1), a bottom plate (12) is provided at the bottom of the furnace frame (1), a support plate (13) is provided between the top plate (11) and the bottom plate (12), an adjustable heating furnace group (2) is provided between the support plate (13) and the top plate (11), a lifting drive group (3) is provided between the support plate (13) and the bottom plate (12), the lifting drive group (3) passes through the support plate (13) and is driven and connected to the adjustable heating furnace group (2); the adjustable heating furnace group (2) comprises a second heating furnace (22) and a third heating furnace (23), the second heating furnace (22) and the third heating furnace (23) are coaxially arranged, and the lifting drive group (3) drives the second heating furnace (22) and the third heating furnace (23) to move up and down respectively.
2. The adjustable multifunctional heating furnace according to claim 1, characterized in that: A first heating furnace (21) is provided on the upper side of the second heating furnace (22), a fourth heating furnace (24) is provided on the lower side of the third heating furnace (23), and the lifting drive group (3) drives the first heating furnace (21), the second heating furnace (22), the third heating furnace (23) and the fourth heating furnace (24) to move up and down respectively.
3. The adjustable multifunctional heating furnace according to claim 2, characterized in that: A guide column (14) is connected between the top plate (11) and the support plate (13), and the guide column (14) is respectively arranged at the four corners of the top plate (11) and the support plate (13). The guide column (14) is slidably connected to the first furnace plate (211), the second furnace plate (221), the third furnace plate (231), and the fourth furnace plate (241). The first heating furnace (21) is connected to the top surface of the first furnace plate (211), the second heating furnace (22) is connected to the top surface of the second furnace plate (221), the third heating furnace (23) is connected to the top surface of the third furnace plate (231), and the fourth heating furnace (24) is connected to the top surface of the fourth furnace plate (241).
4. The adjustable multifunctional heating furnace according to claim 3, characterized in that: The lifting drive group (3) comprises a first drive mechanism (31), a second drive mechanism (32), a third drive mechanism (33), and a fourth drive mechanism (34); the first drive mechanism (31), the second drive mechanism (32), the third drive mechanism (33), and the fourth drive mechanism (34) are staggered, the first drive mechanism (31) is drive-connected to the first furnace plate (211), the second drive mechanism (32) is drive-connected to the second furnace plate (221), the third drive mechanism (33) is drive-connected to the third furnace plate (231), and the fourth drive mechanism (34) is drive-connected to the fourth furnace plate (241).
5. The adjustable multifunctional heating furnace according to claim 4, characterized in that: The first drive mechanism (31), the second drive mechanism (32), the third drive mechanism (33), and the fourth drive mechanism (34) respectively include: a motor (311) provided on the top surface of the bottom plate (12), a gear box group (312) driven and connected to the motor (311), and a lead screw (313) provided parallel to the guide column (14), wherein the lead screw (313) and the gear box group (312) are driven and connected; the first drive mechanism (31), the second drive mechanism (32), the third drive mechanism (33), and the fourth drive mechanism (34) respectively include one motor (311), one gear box group (312), and two or more lead screws (313); the first furnace plate (211), the second furnace plate (221), the third furnace plate (231), and the fourth furnace plate (241) are driven and connected respectively via a lead screw nut and a lead screw (313).
6. The adjustable multifunctional heating furnace according to claim 5, characterized in that: The gearbox assembly (312) includes a main right-angle reducer (3121), a first sub-right-angle reducer (3122), a second sub-right-angle reducer (3123), a first reversing gearbox (3124) and a second reversing gearbox (3125); the main right-angle reducer (3121) includes an input end and two output ends, the first sub-right-angle reducer (3122) and the second sub-right-angle reducer (3123) are mirror-imaged on both sides of the main right-angle reducer (3121), and the output end of the main right-angle reducer (3121) is connected to the input end of the first sub-right-angle reducer (3122), the input end of the second sub-right-angle reducer (3123) and the output end of the second sub-right-angle reducer (3124) through a coupling. 123) input end driving connection, the output end of the first secondary right-angle reducer (3122) is drivingly connected to the first reversing gear box (3124), the output end of the second secondary right-angle reducer (3123) is drivingly connected to the second reversing gear box (3125), the output end of the first reversing gear box (3124) and the output end of the second reversing gear box (3125) are both vertically arranged, and the output end of the first reversing gear box (3124) and the output end of the second reversing gear box (3125) are respectively drivingly connected to the lead screw (313); the input end of the main right-angle reducer (3121) is drivingly connected to the motor (311).
7. The adjustable multifunctional heating furnace according to claim 6, characterized in that: The input end of the main right-angle reducer (3121) and the output end of the main right-angle reducer (3121) are arranged at a horizontal right angle; the input end of the first secondary right-angle reducer (3122) and the input end of the main right-angle reducer (3121) are arranged in parallel, the input end of the first secondary right-angle reducer (3122) and the output end of the first secondary right-angle reducer (3122) are arranged at a horizontal right angle, and the input end of the first secondary right-angle reducer (3122) and the input end of the second secondary right-angle reducer (3123) are arranged in parallel. The input end of the second right-angle reducer (3123) and the output end of the second right-angle reducer (3123) are arranged horizontally at a right angle; the input end of the first reversing gear box (3124) and the input end of the first right-angle reducer (3122) are arranged in parallel, the input end of the first reversing gear box (3124) and the input end of the second reversing gear box (3125) are arranged in parallel, and the output end of the first reversing gear box (3124) and the output end of the second reversing gear box (3125) are arranged vertically.
8. The adjustable multifunctional heating furnace according to claim 2, characterized in that: The first heating furnace (21), the second heating furnace (22), the third heating furnace (23) and the fourth heating furnace (24) are respectively provided with a heating cavity at the center, and the heating cavity of the first heating furnace (21), the heating cavity of the second heating furnace (22), the heating cavity of the third heating furnace (23) and the heating cavity of the fourth heating furnace (24) are coaxially arranged.
9. The adjustable multifunctional heating furnace according to claim 2, characterized in that: The first heating furnace (21), the second heating furnace (22), the third heating furnace (23) and the fourth heating furnace (24) are respectively heated by resistance heating, and the first heating furnace (21), the second heating furnace (22), the third heating furnace (23) and the fourth heating furnace (24) are respectively provided with thermocouples.
10. The adjustable multifunctional heating furnace according to claim 1, characterized in that: The bottom surface of the furnace rack (1) is provided with rollers (4), and the rollers (4) are arranged at the four corners of the furnace rack (1).