Solid-liquid interface detection device and crystal growth equipment

Abstract

The utility model discloses a solid-liquid interface detection device and crystal growth equipment, the solid-liquid interface detection device comprises a fixed ring, a distance measuring assembly and a connecting frame, the fixed ring is suitable for sleeving outside a crystal bar and is fixed with the crystal bar, the distance measuring assembly and the fixed ring are arranged at an interval along the axial direction of the fixed ring, and the distance measuring assembly is connected with the connecting frame. The distance measuring assembly is suitable for being arranged at an interval with the growth interface of the crystal bar, the distance measuring assembly comprises a mounting frame and distance measuring units, the distance measuring units are used for acquiring the distance between the distance measuring units and the growth interface, the connecting frame is connected with the fixing ring and the mounting frame, and the multiple distance measuring units are arranged on the mounting frame at intervals in the direction perpendicular to the axial direction of the fixing ring. Therefore, the solid-liquid interface detection device can more conveniently and accurately measure the morphology of the growth interface of the crystal bar, so that process parameters can be better configured, and crystals with better quality can be obtained in the crystal production process.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth, in particular to a solid-liquid interface detection device and crystal growth equipment. Background Art

[0002] During the crystal growth process, in order to better configure process parameters and produce better quality crystals, it is necessary to understand the solid-liquid interface morphology at different positions of the crystal rod.

[0003] In related technologies, parameter simulation is often used to simulate the interface curve at the solid-liquid interface of the crystal ingot. This interface curve does not fully match the actual crystal ingot growth interface, resulting in large errors. This can be misleading in production guidance and have a certain impact on crystal quality. In some other technologies, the crystal ingot is removed at any time during the production process and manually measured with calipers to obtain the crystal ingot growth interface morphology. Since the crystal ingot is located in the furnace body, manual measurement is often blocked by the furnace body, making measurement inconvenient. Manual measurement can also introduce measurement errors, resulting in inaccurate measurement results. Therefore, the method of obtaining the solid-liquid interface morphology of the crystal ingot needs to be optimized. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a solid-liquid interface detection device and a crystal growth apparatus. The solid-liquid interface detection device can more conveniently and accurately measure the morphology of the solid-liquid interface of a crystal ingot, thereby facilitating better configuration of process parameters to obtain higher-quality crystals during the crystal production process. The device is also applicable to measuring crystal ingots of different specifications.

[0005] According to the solid-liquid interface detection device of the first aspect embodiment of the present utility model, it includes: a fixed ring, a distance measuring assembly and a connecting frame. The fixed ring is suitable for being sleeved on the outside of the crystal rod and fixed to the crystal rod. The distance measuring assembly and the fixed ring are arranged at intervals along the axial direction of the fixed ring, and the distance measuring assembly is suitable for being arranged at intervals from the growth interface of the crystal rod. The distance measuring assembly includes a mounting frame and a distance measuring unit. The distance measuring unit is used to obtain the distance between it and the growth interface. The connecting frame connects the fixed ring and the mounting frame. There are multiple distance measuring units, and the multiple distance measuring units are arranged on the mounting frame at intervals along a direction perpendicular to the axial direction of the fixed ring. There are multiple fixed rings, the connecting frame is detachably connected to the fixed ring, and the multiple fixed rings can be replaced with the connecting frame. The inner diameters of at least two fixed rings are different.

[0006] According to the solid-liquid interface detection device of the embodiment of the present invention, the crystal rod is fixed on the fixed ring, and the distance measuring assembly and the fixed ring are arranged at intervals along the axial direction of the fixed ring, so that the central axes of the distance measuring assembly, the fixed ring and the crystal rod coincide with each other. The distance measuring assembly includes a mounting frame and multiple distance measuring units, and the multiple distance measuring units are arranged on the mounting frame at intervals along the direction perpendicular to the axial direction of the fixed ring. The distance measuring units can be used to more conveniently and accurately measure the distance between the distance measuring units and the crystal rod growth interface, thereby obtaining the morphology of the solid-liquid interface of the crystal rod, so that better quality crystals can be obtained during the crystal production process.

[0007] In some embodiments, the multiple fixing rings include a first fixing ring, a second fixing ring and a third fixing ring, the inner diameter of the first fixing ring is d1, 150mm≤d1≤160mm, the inner diameter of the second fixing ring is d2, 200mm≤d2≤210mm, and the inner diameter of the third fixing ring is d3, 300mm≤d3≤310mm.

[0008] In some embodiments, the minimum axial distance x between the distance measuring assembly and the fixing ring is 10 cm ≤ x ≤ 20 cm.

[0009] In some embodiments, the solid-liquid interface detection device is constructed to meet at least one of the following conditions: the fixing ring includes two detachable semicircular arc segments; the ranging unit is a distance sensor; the connecting frame includes a plurality of connecting rods arranged at intervals along the circumference of the fixing ring, and the connecting rods are threadedly connected to the fixing ring.

[0010] In some embodiments, all ranging units are located on the same plane perpendicular to the axis of the fixing ring, and the distance between the ranging unit adjacent to the outer edge of the mounting frame and the center of the mounting frame is y, the largest inner diameter of the multiple fixing rings is D, and satisfies: y≥D / 2.

[0011] In some embodiments, the mounting frame includes: a support ring connected to the connecting frame; a support structure, the support structure is provided on the support ring, at least part of the support structure is located radially inward of the support ring, and the support structure is used to carry the ranging unit.

[0012] In some embodiments, the support structure includes: a support frame, the support frame is connected to the inner circumferential wall of the support ring, and / or the support frame is connected to the end face of the support ring facing away from the fixed ring; a rotating member, the rotating member is rotatably arranged on the side of the support frame facing the fixed ring, the angle between the two side edges of the rotating member in its rotation direction is less than 180°, and the ranging unit is arranged on the side of the rotating member facing away from the support frame; a driver, the driver is arranged on the support frame and is located on the side of the rotating member facing away from the fixed ring, and the driver is used to drive the rotating member to rotate relative to the support frame.

[0013] In some embodiments, the solid-liquid interface detection device further includes: a support plate, the support plate is connected to the support ring, and defines an accommodating cavity open toward the fixing ring with the support ring, and the support structure is disposed in the accommodating cavity.

[0014] In some embodiments, the central axis of the fixed ring extends vertically, the ranging assembly is spaced apart below the fixed ring, the support structure includes a support frame, a rotating member and a driver, the support frame is connected to the inner circumferential wall of the support ring, the rotating member is rotatably arranged on the upper side of the support frame, the ranging unit is arranged on the upper side of the rotating member, the driver is arranged on the lower side of the support frame, the drive shaft of the driver passes through the support frame and is used to drive the rotating member to rotate relative to the support frame, and the support disk stops at the lower side of the driver.

[0015] According to the second aspect of the present invention, the crystal growth equipment includes: a crystal growth furnace, which defines a main chamber and a sub-chamber, and the sub-chamber is arranged on the upper side of the main chamber; a pulling and rotating mechanism, which is installed on the top of the sub-chamber; and the above-mentioned solid-liquid interface detection device, which is arranged on the outside of the crystal growth furnace, the pulling and rotating mechanism is suitable for moving the crystal rod grown in the crystal growth furnace out of the main chamber, and the solid-liquid interface detection device is suitable for being installed at the bottom of the crystal rod to detect the growth interface morphology at the bottom of the crystal rod.

[0016] According to the crystal growth equipment of the embodiment of the present invention, by adopting the above-mentioned solid-liquid interface detection device, the morphology of the crystal rod growth interface can be directly and accurately obtained without completely lifting the crystal rod out of the auxiliary chamber. The operation is convenient and relatively safe, thereby providing more accurate guidance for the configuration of process parameters in actual production, and facilitating the acquisition of better quality crystals during the crystal production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic diagram of a solid-liquid interface detection device according to some embodiments of the present invention, in which only one fixing ring is shown;

[0019] Figure 2 yes Figure 1 Another schematic diagram of the solid-liquid interface detection device shown in;

[0020] Figure 3 yes Figure 1 Another schematic diagram of the solid-liquid interface detection device shown in ;

[0021] Figure 4 yes Figure 1 Exploded view of the solid-liquid interface detection device shown in ;

[0022] Figure 5 yes Figure 1 Schematic diagram of the third fixing ring of the solid-liquid interface detection device shown in ;

[0023] Figure 6 yes Figure 1 Schematic diagram of the second fixing ring of the solid-liquid interface detection device shown in ;

[0024] Figure 7 yes Figure 1 A schematic diagram of the first fixing ring of the solid-liquid interface detection device shown in ;

[0025] Figure 8 yes Figure 1 Schematic diagram of the assembly of the support plate, support structure and ranging unit shown in ;

[0026] Figure 9 Schematic diagrams of solid-liquid interface detection devices according to other embodiments of the present invention, showing a semicircular arc segment of a first fixing ring, a semicircular arc segment of a second fixing ring, and a third fixing ring;

[0027] Figure 10 yes Figure 9 Another schematic diagram of the solid-liquid interface detection device shown in;

[0028] Figure 11 is a schematic diagram of an assembly of a solid-liquid interface detection device for obtaining the growth interface morphology according to some embodiments of the present application;

[0029] Figure 12 It is a schematic diagram of different growth interfaces applicable to the solid-liquid interface detection device of an embodiment of the present application.

[0030] Reference numerals:

[0031] Solid-liquid interface detection device 1000, crystal rod 2000, growth interface 2000a, fixing ring 100, semicircular arc segment 110, first fixing ring 100a, second fixing ring 100b, third fixing ring 100c, distance measuring assembly 200, mounting frame 210, support ring 212, support structure 214, support frame 214a, rotating part 214b, driver 214c, distance measuring unit 220, connecting frame 300, connecting rod 310, support plate 400. DETAILED DESCRIPTION

[0032] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0033] The disclosure below provides many different embodiments or examples for realizing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but a person of ordinary skill in the art will appreciate the applicability of other processes and / or the use of other materials.

[0034] Hereinafter, referring to the accompanying drawings, a solid-liquid interface detection device 1000 according to an embodiment of the present invention will be described. The solid-liquid interface detection device 1000 is used in a crystal growth device, which may be a single crystal silicon growth furnace or a silicon carbide growth furnace, but is not limited thereto.

[0035] like Figure 1-Figure 4 As shown, the solid-liquid interface detection device 1000 includes a fixed ring 100, a distance measuring component 200 and a connecting frame 300. The fixed ring 100 is suitable for being sleeved on the outside of the crystal rod 2000, and the fixed ring 100 is suitable for being fixed to the crystal rod 2000. The distance measuring component 200 and the fixed ring 100 are spaced apart along the axial direction of the fixed ring 100, and the distance measuring component 200 is suitable for being spaced apart from the growth interface 2000a of the crystal rod 2000. The connecting frame 300 connects the fixed ring 100 and the mounting frame 210; the distance measuring component 200 includes the mounting frame 210 and a distance measuring unit 220, and the distance measuring unit 220 is used to obtain the distance between the distance measuring unit 220 and the growth interface 2000a. There are multiple distance measuring units 220, and the multiple distance measuring units 220 are spaced apart on the mounting frame 210 along a direction perpendicular to the axial direction of the fixing ring 100. In a plane perpendicular to the axial direction of the fixing ring 100, the orthographic projections of the multiple distance measuring units 220 can be spaced apart (for example, the multiple distance measuring units 220 can be spaced apart along the radial direction and / or the axial direction of the fixing ring 100, or the multiple distance measuring units 220 can be arranged in multiple rows and columns). Based on the growth principle of the crystal ingot 2000, under specific conditions, the growth interface 2000a at the bottom of the crystal ingot 2000 is the solid-liquid interface during phase transformation from melt to crystal.

[0036] For example, taking the growth interface 2000a of the crystal rod 2000 as an example, Figure 11When the solid-liquid interface detection device 1000 is used to obtain the morphology of the growth interface 2000a of the crystal ingot 2000, the fixing ring 100 can be sleeved on the outside of the crystal ingot 2000, and the fixing ring 100 is fixed to the bottom of the crystal ingot 2000. At this time, the central axis L of the fixing ring 100 can coincide with the central axis of the crystal ingot 2000, and the distance measuring component 200 and the fixing ring 100 are spaced apart along the axial direction of the fixing ring 100, and the distance measuring component 200 and the growth interface 2000a of the crystal ingot 2000 are spaced apart, so that the fixing ring 100 and the distance measuring component 200 are respectively located on both sides of the growth interface 2000a of the crystal ingot 2000, that is, the fixing ring 100 is spaced above the growth interface 2000a of the crystal ingot 2000, and The distance measuring assembly 200 is spaced below the growth interface 2000a of the crystal ingot 2000; the distance between the distance measuring assembly 200 and the growth interface 2000a of the crystal ingot 2000 can be accurately obtained through the multiple distance measuring units 220. Since the multiple distance measuring units 220 are spaced along a direction perpendicular to the axial direction of the fixing ring 100, the orthographic projection positions of the multiple distance measuring units 220 on the plane perpendicular to the axial direction of the fixing ring 100 are different, so that the multiple distance measuring units 220 can measure the height of the growth interface 2000a of the crystal ingot 2000 at different positions relative to the distance measuring units 220, so as to achieve comprehensive measurement of the growth interface 2000a of the crystal ingot 2000, regardless of whether the growth interface 2000a of the crystal ingot 2000 is a concave interface (such as Figure 12 (b)) or a convex interface (as shown in Figure 12 (a) shows), the morphology of the solid-liquid interface of the crystal rod 2000 can be obtained, and more detailed and accurate data can be obtained.

[0037] In some embodiments, as Figure 1 、 Figure 5-Figure 7 、 Figure 9 and Figure 10As shown, there are multiple fixing rings 100, and the connecting frame 300 is detachably connected to the fixing ring 100, and multiple fixing rings 100 can be interchangeably matched with the connecting frame 300, so that multiple fixing rings 100 can be interchangeably used, which is convenient for realizing redundant settings of the fixing ring 100, and the connecting frame 300 and the distance measuring component 200 have a certain degree of versatility, and by disassembling the fixing ring 100 and the connecting frame 300 components, the use status of the solid-liquid interface detection device 1000 can be conveniently checked, and maintenance and care can be carried out in time; wherein, the inner diameters of at least two fixing rings 100 are different. Since the fixing ring 100 is suitable for being sleeved on the outside of the crystal rod 2000, the inner diameter of the fixing ring 100 matches the diameter of the crystal rod 2000, for example, the fixing ring 100 The fixing rings 100 with different inner diameters can match the crystal rods 2000 with different diameters or different diameter ranges, thereby improving the applicability of the solid-liquid interface detection device 1000 to crystal rods 2000 with different diameters, and facilitating replacement of the corresponding fixing rings 100 according to the diameter of the crystal rod 2000, so that the solid-liquid interface detection device 1000 can better meet actual differentiated needs; in other words, the solid-liquid interface detection device 1000 can adapt to crystal rods 2000 with different diameters by replacing fixing rings 100 with different inner diameters, so that the solid-liquid interface detection device 1000 can detect the morphology of the growth interface 2000a of crystal rods 2000 of various specifications.

[0038] It can be understood that the total number of the fixing rings 100 is n, and the number of the fixing rings 100 with different inner diameters is m, where m≤n, and both m and n are positive integers greater than or equal to 2.

[0039] Compared with some technologies, the crystal rod 2000 is taken out during the production process and measured manually using a caliper. During the measurement, it will be blocked by the single crystal furnace, making the measurement more difficult. Measurement errors may also be caused by human factors. At the same time, manual measurement may also cause safety accidents, and the operation risk is relatively high. In the embodiment of the present application, a fixed ring 100 is set to be fixed to the crystal rod 2000, and the distance measuring component 200 and the fixed ring 100 are set at an axial interval along the fixed ring 100. The distance measuring component 200 includes a plurality of distance measuring units 220. The distance between the distance measuring component 200 and the growth interface 2000a is measured by multiple distance measuring components 200, so as to more conveniently and accurately measure the morphology of the solid-liquid interface, reduce the error caused by manual measurement, improve the convenience and safety of operation, and reduce the possible personnel safety accidents caused during measurement.

[0040] It can be understood that when the solid-liquid interface detection device 1000 obtains the morphology of the growth interface 2000a of the crystal rod 2000, the crystal rod 2000 needs to be lifted out of the melt to separate the crystal rod 2000 from the melt and expose the growth interface 2000a of the crystal rod 2000, and then the solid-liquid interface detection device 1000 is fixed on the crystal rod 2000.

[0041] In some embodiments, as Figure 5-Figure 7 、 Figure 9 and Figure 10 As shown, the plurality of fixing rings 100 include a first fixing ring 100a, a second fixing ring 100b, and a third fixing ring 100c. The inner diameter of the first fixing ring 100a is d1, 150mm≤d1≤160mm, for example, d1 is 150mm, 152mm, 155mm, 157mm, and 160mm, etc. The inner diameter of the second fixing ring 100b is d2, 200mm≤d2≤210mm, for example, d2 is 200mm, 202mm, 205mm, 207mm, and 210mm, etc. The inner diameter of the third fixing ring 100c is d3, 300mm≤d3≤310mm, for example, d3 is 300mm, 303mm, 305mm , 309mm, and 310mm, etc. Using retaining rings 100 with corresponding inner diameters during the production process for crystal ingots 2000 of varying diameters can reduce difficulties, instability, and potential installation errors caused by a mismatch between the inner diameter of the retaining ring 100 and the diameter of the crystal ingot 2000, thereby improving processing precision and product quality. Furthermore, by providing retaining rings 100 with different inner diameters, various commonly used crystal ingot 2000 specifications can be accommodated on the market, meeting the needs of different users. Users no longer need to use separate retaining equipment for each specification of crystal ingot 2000; instead, they can use a single set of equipment containing retaining rings 100 with different inner diameters, reducing production costs. In this case, 3 ≤ m ≤ n.

[0042] For example, the ideal diameter of a 6-inch (i.e., 6-inch) crystal rod 2000 is approximately 152.48 mm, the ideal diameter of an 8-inch (i.e., 8-inch) crystal rod 2000 is approximately 203.2 mm, and the ideal diameter of a 12-inch (i.e., 12-inch) crystal rod 2000 is approximately 304.8 mm. During the processing of the crystal rod 2000, there is a certain deviation in the actual diameter of the crystal rod 2000. In the above technical solution of the present application, the first fixing ring 100a can be used to match the 6-inch crystal rod 2000 to ensure that the fixing ring 100a is not too large. The liquid interface detection device 1000 can obtain the morphology of the growth interface 2000a of the 6-inch crystal rod 2000, the second fixing ring 100b can be used to match the 8-inch crystal rod 2000, so that the solid-liquid interface detection device 1000 can obtain the morphology of the growth interface 2000a of the 8-inch crystal rod 2000, and the third fixing ring 100c can be used to match the 12-inch crystal rod 2000, so that the solid-liquid interface detection device 1000 can obtain the morphology of the growth interface 2000a of the 12-inch crystal rod 2000.

[0043] Of course, the inner diameter size setting of the plurality of fixing rings 100 is not limited thereto.

[0044] In some embodiments, as Figure 3As shown, the minimum axial spacing between the distance measuring component 200 and the fixing ring 100 is x, 10cm≤x≤20cm, for example, x is 10cm, 13cm, 15cm, 18cm and 20cm, etc. This design allows the distance measuring component 200 and the fixing ring 100 to be more reasonably distributed on both sides of the growth interface 2000a, and can better adapt to growth interfaces 2000a of various morphologies to meet measurement requirements, while not making the axial size of the entire solid-liquid interface detection device 1000 too large; in addition, the appropriate axial spacing also facilitates the installation of the distance measuring component 200 and the fixing ring 100 to a certain extent.

[0045] In some embodiments, as Figure 1 、 Figure 4-Figure 7 As shown, the solid-liquid interface detection device 1000 is constructed to meet at least one of the following conditions: Condition 1, the fixed ring 100 includes two detachable and spliced semicircular arc segments 110; Condition 2, the distance measuring unit 220 is a distance sensor; Condition 3, the connecting frame 300 includes a plurality of connecting rods 310 arranged at intervals along the circumference of the fixed ring 100, and the connecting rods 310 are threadedly connected to the fixed ring 100.

[0046] The fixing ring 100 includes two detachable and spliced semicircular arc sections 110, which fix the crystal rod 2000 in the fixing ring 100 through the two detachable and spliced semicircular arc sections 110, making it easy to clamp the fixing ring 100 on the crystal rod 2000 so as to achieve reliable installation of the fixing ring 100; at the same time, when the inner diameters of the fixing ring 100 are different, the inner diameters of the two semicircular arc sections 110 can be directly changed, which facilitates the setting of fixing rings 100 of different specifications to adapt to crystal rods 2000 of different diameters. By selecting appropriate arc segments for splicing, it can be ensured that the fixing ring 100 fits tightly on the crystal rod 2000 to provide stable support. At the same time, the detachable and spliced semicircular arc sections 110 make the installation and disassembly process of the fixing ring 100 simpler and reduce the difficulty of operation. When the fixing ring 100 is worn or damaged, the semicircular arc sections 110 can be easily removed for maintenance and replacement, ensuring the continuous and stable operation of the equipment. For example, the two semicircular arc segments 110 are connected by snaps, which makes assembly and disassembly easy.

[0047] The distance sensor may include at least one of an infrared distance sensor, an optical distance sensor, and an ultrasonic distance sensor.

[0048] The connecting frame 300 includes a plurality of connecting rods 310 spaced circumferentially along the fixing ring 100. The connecting frame 300 connects the fixing ring 100 and the mounting frame 210. The connecting rods 310 not only provide support for the fixing ring 100 but also ensure the horizontal stability of the mounting frame 210 during use. As a result, the distance measuring unit 220 mounted on the mounting frame 210 can also maintain a horizontal state, thereby avoiding measurement errors that may be caused by tilting the distance measuring unit 220 during measurement operations. The connecting rods 310 are threadedly connected to the fixing ring 100. The threaded connection is tightly fitted between the threads, making this connection less prone to loosening and providing a very stable connection. This also makes the installation and removal process between the connecting rods 310 and the fixing ring 100 relatively simple. During equipment maintenance or component replacement, the threaded connection design allows the connecting rods 310 to be easily removed, simplifying the maintenance process.

[0049] It is understood that when the connecting rod 310 is threadedly connected to the fixing ring 100 , the connecting rod 310 and the mounting bracket 210 may also be threadedly connected, or rotationally connected, but is not limited thereto.

[0050] In some embodiments, as Figure 1 and Figure 3 As shown, all the distance measuring units 220 are located on the same plane perpendicular to the axial direction of the fixing ring 100. Therefore, the measurement starting points of all the distance measuring units 220 in the axial direction of the fixing ring 100 are consistent. By measuring the distance between the growth interface 2000a of the crystal ingot 2000 and different distance measuring units 220, the solid-liquid interface morphology of the crystal ingot 2000 can be quickly obtained, and the accuracy of the measurement data can be ensured. This arrangement reduces the measurement error caused by the different positions of the distance measuring units 220, improves the reliability of the measurement, and facilitates the subsequent consistent processing of the measurement results of all the distance measuring units 220. There is no need to convert some measurement results, which simplifies data processing.

[0051] Among them, such as Figure 8 As shown, the distance between the distance measuring unit 220 near the outer edge of the mounting frame 210 and the center of the mounting frame 210 is y. The distance measuring unit 220 farthest from the center of the mounting frame 210 in the radial direction of the fixing ring 100 among the multiple distance measuring units 220 has a radial distance y from the center of the mounting frame 210. The maximum inner diameter of the multiple fixing rings 100 is D. The largest inner diameter among the multiple fixing rings 100 is D, satisfying the following: y ≥ D / 2. This indicates that the distance measuring unit 220 at the outermost edge can detect the radial outer contour of the growth interface 2000a of the crystal ingot 2000. This allows all distance measuring units 220 to cover the entire range of the growth interface 2000a of the crystal ingot 2000, achieving complete measurement of the growth interface 2000 and improving the practicality and reliability of the solid-liquid interface detection device 1000.

[0052] Of course, in other embodiments of the present application, at least two of the multiple distance measuring units 220 may also be located on different preset planes, where the preset planes are perpendicular to the axial direction of the fixing ring 100 .

[0053] In some embodiments, as Figure 1 、 Figures 8-10 As shown, the mounting frame 210 includes a support ring 212 and a support structure 214. The support ring 212 is connected to the connecting frame 300. The support ring 212 can also be formed into an annular structure. The structural form of the support ring 212 is consistent with the structural form of the fixing ring 100, which is conducive to saving the space occupied by the solid-liquid interface detection device 1000; the support structure 214 is provided on the support ring 212, and at least part of the support structure 214 is located on the radial inner side of the support ring 212, and the support structure 214 is used to carry the distance measuring unit 220. The connection between the support ring 212 and the connecting frame 300 facilitates ensuring the overall stability of the mounting frame 210, so as to provide a stable support platform for the distance measuring unit 220. The support structure 214 is partially placed on the radial inner side of the support ring 212 so as to utilize the radial inner space of the support ring 212, which can reduce the overall axial size of the mounting frame 210, so that the support structure 214 can provide a more stable and reliable support for the distance measuring unit 220.

[0054] At this time, the center of the mounting bracket 210 may be located on the central axis of the support ring 212 .

[0055] In some embodiments, as Figure 1 and Figure 9 As shown, the support structure 214 includes a support frame 214a, a rotating member 214b, and a driver 214c. The support frame 214a is connected to the inner circumferential wall of the support ring 212 so that the support frame 214a can be arranged in the radially inner space of the support ring 212, which helps to reduce the overall axial size of the mounting frame 210; and / or, the support frame 214a is connected to the end surface of the support ring 212 facing away from the fixing ring 100, which facilitates the assembly of the support frame 214a with the support ring 212 and facilitates the decentralized arrangement of the connection positions of the support frame 214a and the connecting frame 300 on the support ring 212, making it less likely for the support frame 214a and the connecting frame 300 to interfere with each other.

[0056] The rotating member 214b is rotatably arranged on the side of the support frame 214a facing the fixed ring 100, and the angle α between the two side edges of the rotating member 214b in its rotation direction is less than 180°. The distance measuring unit 220 is arranged on the side of the rotating member 214b facing away from the support frame 214a. The distance measuring unit 220 is arranged on the support frame 214a through the rotating member 214b, and the distance measuring unit 220 is arranged on the side of the rotating member 214b facing the fixed ring 100. The arrangement area of all the distance measuring units 220 is not surrounded by The annular surface provided by the rotation axis of the rotating member 214b is a part of the above-mentioned annular surface. At this time, by adjusting the angle of the rotating member 214b, the measurement range of the distance measuring unit 220 can be flexibly adjusted, thereby ensuring that the growth interface 2000a of the crystal rod 2000 can be fully measured, improving the flexibility and accuracy of the measurement, and being conducive to appropriately saving the number of distance measuring units 220, reducing the material amount and weight of the rotating member 214b, and simplifying the structure of the solid-liquid interface detection device 1000 and reducing costs.

[0057] Driver 214c is disposed on support frame 214a and is located on the side of rotating member 214b facing away from fixed ring 100, making the overall structure more compact. Driver 214c is used to drive rotating member 214b to rotate relative to support frame 214a. By controlling driver 214c, precise control of the rotation of rotating member 214b can be achieved, facilitating the determination of the position of corresponding distance measuring unit 220, and thereby the morphology of the entire growth interface 2000a of the crystal ingot 2000. Furthermore, the provision of driver 214c does not obstruct the side of rotating member 214b facing fixed ring 100, thereby preventing obstruction of distance measuring unit 220 and thereby affecting the measurement of distance measuring unit 220, thereby improving measurement reliability. Furthermore, the weight of driver 214c is less likely to act on rotating member 214b, and the rotation of rotating member 214b is less likely to be affected by the weight of driver 214c, thereby improving measurement accuracy and reliability.

[0058] In the embodiment of the present application, the shape of the rotating member 214b is not specifically limited. For example, the rotating member 214b can be formed into a fan-shaped structure, and the angle α is the central angle of the fan-shaped structure. α can be an acute angle, a right angle, an obtuse angle, etc. Of course, α can also be any angle greater than or equal to 180° and less than 360°.

[0059] Furthermore, in the embodiment of the present application, the structure of the support frame 214a is not specifically limited. For example, the support frame 214a includes at least one first rod extending along a first direction and at least one second rod extending along a second direction, wherein the first direction and the second direction intersect and are both perpendicular to the axial direction of the fixing ring 100, and the first rod and the second rod intersect, for example, the support frame 214a is formed in the shape of a cross, a crisscross frame, or the like.

[0060] In some embodiments, as Figure 1 、 Figure 2 and Figure 8 As shown, the solid-liquid interface detection device 1000 also includes a support plate 400, which is connected to the support ring 212, and the support plate 400 and the support ring 212 define a accommodating cavity R open toward the fixed ring 100, and the support structure 214 is arranged in the accommodating cavity R, then at least part of the support structure 214 is located in the accommodating cavity R, so as to rationally utilize the radial inner space of the support ring 212, so that the structure of the entire solid-liquid interface detection device 1000 is more compact, and the support plate 400 and the support ring 212 can play a certain protective role on the support structure 214.

[0061] Furthermore, the support plate 400 can provide a stable support base for the support structure 214 in the accommodating cavity R. For example, the support plate 400 is stopped on the side of the support structure 214 away from the fixing ring 100, which helps to reduce the shaking caused by vibration or external force and improve the stability of the entire detection device.

[0062] In some embodiments, as Figure 1 、 Figure 2 and Figure 8 As shown, the support structure 214 includes a support frame 214a, a rotating member 214b and a driver 214c. The support frame 214a is connected to the inner circumferential wall of the support ring 212, providing a stable support foundation for the entire support structure 214. The rotating member 214b is rotatably arranged on the side of the support frame 214a facing the fixed ring 100, the ranging unit 220 is arranged on the side of the rotating member 214b facing away from the support frame 214a, and the driver 214c is arranged on the side of the support frame 214a facing away from the fixed ring 100. The driving shaft of the driver 214c passes through the support frame 214a and is used to drive the rotating member 214b to rotate relative to the support frame 214a, so that the rotation of the rotating member 214b can be precisely controlled, and the support plate 400 stops at the side of the driver 214c facing away from the fixed ring 100.

[0063] The central axis of the fixing ring 100 extends vertically, and the axial direction of the fixing ring 100 is vertical. The distance measuring assembly 200 is spaced below the fixing ring 100. In this case, the rotating member 214b is rotatably disposed on the upper side of the support frame 214a. The distance measuring unit 220 is disposed on the upper side of the rotating member 214b. The driver 214c is disposed on the lower side of the support frame 214a. The drive shaft of the driver 214c passes through the support frame 214a and is used to drive the rotating member 214b to rotate relative to the support frame 214a. The support plate 400 abuts against the lower side of the driver 214c. In this case, the support plate 400 can bear at least part of the weight of the driver 214c, thereby improving the force applied to the support frame 214a and enhancing the stability of the support structure 214.

[0064] It can be understood that at least part of the support structure 214 is located in the accommodating chamber R, and when the support structure 214 includes a support frame 214a, a rotating member 214b and a driver 214c, it can be constructed as follows: at least part of at least one of the support frame 214a, the rotating member 214b and the driver 214c is located in the accommodating chamber R.

[0065] Of course, in other embodiments of the present application, such as Figure 9 and Figure 10 As shown, the solid-liquid interface detection device 1000 may also not be provided with the support plate 400.

[0066] According to an embodiment of the present invention, the crystal growth equipment includes a crystal growth furnace, a pulling and rotating mechanism, and a solid-liquid interface detection device 1000 according to the above embodiment of the present invention. The crystal growth furnace defines a main chamber and a sub-chamber, the sub-chamber is arranged on the upper side of the main chamber, the pulling and rotating mechanism is installed on the top of the sub-chamber, and the solid-liquid interface detection device 1000 is arranged on the outside of the crystal growth furnace. The pulling and rotating mechanism is suitable for moving the crystal rod 2000 grown in the crystal growth furnace out of the main chamber, and the solid-liquid interface detection device 1000 is suitable for being installed at the bottom of the crystal rod 2000 to detect the morphology of the growth interface 2000a at the bottom of the crystal rod 2000.

[0067] It can be seen that when it is necessary to measure the morphology of the solid-liquid interface of the crystal rod 2000, the pulling and rotating mechanism moves the crystal rod 2000 out of the main chamber, and the solid-liquid interface detection device 1000 can accurately measure the morphology of the growth interface 2000a of the crystal rod 2000, thereby providing more accurate guidance for the configuration of process parameters in actual production, and facilitating the acquisition of better quality crystals in the crystal production process. Therefore, when it is necessary to obtain the morphology of the solid-liquid interface when the crystal rod 2000 grows to a preset length, the preset length is less than the preset total length of the crystal rod 2000. When the crystal rod 2000 grows to the preset length, the crystal rod 2000 can be lifted to separate the crystal rod 2000 from the melt to expose the growth interface 2000a; for example, the preset total length of the crystal rod 2000 is 2000mm, and it is necessary to know the solid-liquid interface when the crystal rod 2000 grows to 500mm, 1000mm, and 1500mm. The crystal growth process can be carried out and one crystal rod 2000 can be lifted out of the melt when it grows to 500mm, another crystal rod 2000 can be lifted out of the melt when it grows to 1000mm, and another crystal rod 2000 can be lifted out of the melt when it grows to 1500mm. The crystal rod 2000 lifted out of the melt can obtain the morphology of the growth interface 2000a by the solid-liquid interface detection device 1000.

[0068] In some examples, a through-hole is formed at the bottom of the auxiliary chamber, which is a communication port between the bottom of the auxiliary chamber and the main chamber. When it is necessary to measure the morphology of the solid-liquid interface of the crystal rod 2000, the lifting and rotating mechanism moves the crystal rod 2000 out of the main chamber, and the user can install the solid-liquid interface detection device 1000 on the bottom of the crystal rod 2000 through the through-hole. There is no need to completely lift the grown crystal rod 2000 out of the auxiliary chamber, and the morphology of the solid-liquid interface can be directly and accurately measured, thereby improving the accuracy and reliability of the measurement results, achieving faster and more effective measurements, and enhancing operational convenience and safety. In some other examples, the through-hole is formed on the peripheral wall of the auxiliary chamber, and a side-opening door is provided at the through-hole to The switch opening can provide more operating space for the installation and disassembly of the solid-liquid interface fixing device 1000 by opening the side door, so that the user can complete the installation and disassembly of the solid-liquid interface detection device 1000 more conveniently. When it is necessary to measure the morphology of the solid-liquid interface of the crystal rod 2000, the lifting and rotating mechanism moves the crystal rod 2000 out of the main chamber, and the user can install the solid-liquid interface detection device 1000 through the opening at the bottom of the crystal rod 2000 through the side door. There is no need to completely lift the grown crystal rod 2000 out of the auxiliary chamber, and the morphology of the solid-liquid interface can be measured directly and accurately, which can also achieve faster and more effective measurements, improving operational convenience and safety.

[0069] In some embodiments, as Figures 9-11 As shown, the solid-liquid interface detection device 1000 includes a fixed ring 100, a distance measuring assembly 200 and a connecting frame 300. The fixed ring 100 is formed into a ring structure, the central axis of the fixed ring 100 is arranged vertically, the distance measuring assembly 200 and the fixed ring 100 are arranged at intervals up and down, and the connecting frame 300 connects the fixed ring 100 and the mounting frame 210; the distance measuring assembly 200 includes a mounting frame 210 and a plurality of distance measuring units 220, all of which are arranged on the mounting frame 210 and are located on the same plane perpendicular to the axial direction of the fixed ring 100, and a plurality of distance measuring units 220 arranged at intervals along the first arrangement direction constitute a distance measuring group, and the distance measuring groups are multiple groups and the multiple distance measuring groups are arranged at intervals along the second arrangement direction, the second arrangement direction, the first arrangement direction and the axial direction of the fixed ring 100 are perpendicular to each other, and each distance measuring unit 220 is a distance sensor and is used to obtain the distance between it and the growth interface 2000a.

[0070] Among them, there are multiple fixing rings 100 and include a first fixing ring 100a, a second fixing ring 100b and a third fixing ring 100c. The inner diameter of the first fixing ring 100a is d1, 150mm≤d1≤160mm, the inner diameter of the second fixing ring 100b is d2, 200mm≤d2≤210mm, and the inner diameter of the third fixing ring 100c is d3, 300mm≤d3≤310mm. The mounting frame 210 includes a support ring 212 and a support structure 214. The support ring 212 is also formed into a ring structure and is connected to the connecting frame 300. The support structure 214 includes a support frame 214a, a rotating member 214b and a driver 214c. The support frame 214a is connected to the lower end face of the support ring 212. The rotating member 214b is formed into a fan-shaped structure and is rotatably arranged on the upper side of the support frame 214a. The ranging unit 220 is arranged on the rotating member 214b. The driver 214c is arranged on the lower side of the support frame 214a. The driving shaft of the driver 214c passes through the support frame 214a and is used to drive the rotating member 214b to rotate relative to the support frame 214a.

[0071] Select a suitable fixing ring 100 according to the diameter of the crystal ingot 2000. When the crystal ingot 2000 grows to a preset length, lift the crystal ingot 2000 to expose the growth interface 2000a of the crystal ingot 2000. Fix the fixing ring 100 to the bottom of the crystal ingot 2000 and place the measuring assembly 200 below the growth interface 2000a. Figure 11 As shown, multiple distance measuring units 200 can respectively obtain the distances L1, L2, L3..., Ln between their corresponding positions and the growth interface 2000a, and obtain the morphological parameters ΔL1, ΔL2, ΔL3..., ΔLn of the growth interface 2000a through the distance a at the edge of the growth interface 2000a. The radial distance between the radial outer edge of the arrangement area of all distance measuring units 220 and the central axis of the fixing ring 100 is greater than or equal to the diameter of the crystal rod 2000. The above-mentioned distance a can be obtained by checking whether the result measured by the distance measuring unit 220 has a sudden change at a certain position, and the value of the distance a can be obtained; of course, it is also possible to obtain the morphology of the growth interface 2000a through the distances L1, L2, L3..., Ln without obtaining the distance a. Then, the driver 214c drives the rotating part 214a to rotate to obtain the morphological parameters of the entire growth interface 2000a. For example, when the central angle corresponding to the rotating part 214a is 90°, the morphology of 1 / 4 of the growth interface 2000a is obtained first, and then the rotating part 214a is rotated to obtain the morphology of the remaining 3 / 4 of the growth interface 2000a.

[0072] In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner unless there is any contradiction. In order to avoid unnecessary repetition, the present application will not further describe various possible combinations. In addition, the various different embodiments of the present application can also be arbitrarily combined, as long as they do not violate the concept of the present application, they should also be regarded as the content disclosed in the present application.

[0073] In the description of the present invention, it should be understood that the terms "center", "lateral", "length", "thickness", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention. It should be noted that the "open ring" described herein refers to: a ring with an opening (i.e., a non-closed ring), wherein "ring" is to be understood in a broad sense, i.e., not limited to a "circular ring", for example, it can also be a "polygonal ring" and so on.

[0074] In addition, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "plurality" means two or more. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and defined, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0075] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0076] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A solid-liquid interface detection device, characterized in that: The solid-liquid interface detection device is used in a crystal growth device and includes: A fixing ring, adapted to be sleeved on the outside of the crystal rod and fixed to the crystal rod; a distance measuring assembly, the distance measuring assembly and the fixing ring being spaced apart along the axial direction of the fixing ring, and the distance measuring assembly being adapted to be spaced apart from the growth interface of the crystal ingot, the distance measuring assembly comprising a mounting frame and a distance measuring unit, the distance measuring unit being configured to obtain the distance between the distance measuring unit and the growth interface, the distance measuring units being multiple, and the plurality of distance measuring units being spaced apart and disposed on the mounting frame along a direction perpendicular to the axial direction of the fixing ring; a connecting frame, the connecting frame connecting the fixing ring and the mounting frame, There are multiple fixing rings, the connecting frame is detachably connected to the fixing rings, and the multiple fixing rings can be replaced with the connecting frame, and the inner diameters of at least two of the fixing rings are different.

2. The solid-liquid interface detection device according to claim 1, characterized in that: The multiple fixing rings include a first fixing ring, a second fixing ring and a third fixing ring. The inner diameter of the first fixing ring is d1, 150mm≤d1≤160mm, the inner diameter of the second fixing ring is d2, 200mm≤d2≤210mm, and the inner diameter of the third fixing ring is d3, 300mm≤d3≤310mm.

3. The solid-liquid interface detection device according to claim 1, characterized in that: The minimum axial distance between the distance measuring component and the fixing ring is x, 10cm≤x≤20cm.

4. The solid-liquid interface detection device according to claim 1, characterized in that: The solid-liquid interface detection device is configured to satisfy at least one of the following conditions: The fixing ring comprises two detachably connected semicircular arc segments; The distance measuring unit is a distance sensor; The connecting frame includes a plurality of connecting rods spaced apart along the circumference of the fixing ring, and the connecting rods are threadedly connected to the fixing ring.

5. The solid-liquid interface detection device according to claim 1, characterized in that: All the distance measuring units are located on the same plane perpendicular to the axis of the fixing ring, and the distance between the distance measuring unit adjacent to the outer edge of the mounting frame and the center of the mounting frame is y, the largest inner diameter of the multiple fixing rings is D, and satisfies: y≥D / 2.

6. The solid-liquid interface detection device according to any one of claims 1 to 5, characterized in that: The mounting frame comprises: a support ring connected to the connecting frame; A support structure is provided on the support ring, at least a portion of the support structure is located radially inward of the support ring, and the support structure is used to carry the distance measuring unit.

7. The solid-liquid interface detection device according to claim 6, characterized in that: The support structure comprises: A support frame connected to the inner circumferential wall of the support ring and / or connected to an end surface of the support ring facing away from the fixing ring; a rotating member rotatably disposed on a side of the support frame facing the fixed ring, wherein the angle between two side edges of the rotating member in the rotation direction is less than 180°, and the distance measuring unit is disposed on a side of the rotating member facing away from the support frame; A driver is provided on the support frame and is located on a side of the rotating member away from the fixing ring, and is used for driving the rotating member to rotate relative to the support frame.

8. The solid-liquid interface detection device according to claim 6, characterized in that: The solid-liquid interface detection device further includes: The support plate is connected to the support ring and defines an accommodating cavity open toward the fixing ring with the support ring, and the support structure is arranged in the accommodating cavity.

9. The solid-liquid interface detection device according to claim 8, characterized in that: The central axis of the fixed ring extends vertically, and the distance measuring components are arranged at intervals below the fixed ring. The support structure includes a support frame, a rotating member and a driver. The support frame is connected to the inner circumferential wall of the support ring, and the rotating member is rotatably arranged on the upper side of the support frame. The distance measuring unit is arranged on the upper side of the rotating member, and the driver is arranged on the lower side of the support frame. The driving shaft of the driver passes through the support frame and is used to drive the rotating member to rotate relative to the support frame, and the support plate stops at the lower side of the driver.

10. A crystal growth device, characterized in that: include: A crystal growth furnace, wherein the crystal growth furnace defines a main chamber and a sub-chamber, wherein the sub-chamber is arranged on the upper side of the main chamber; a lifting and rotating mechanism, the lifting and rotating mechanism being installed on the top of the auxiliary chamber; and According to any one of claims 1 to 9, the solid-liquid interface detection device is arranged on the outside of the crystal growth furnace, the pulling and rotating mechanism is suitable for moving the crystal rod grown in the crystal growth furnace out of the main chamber, and the solid-liquid interface detection device is suitable for being installed at the bottom of the crystal rod to detect the growth interface morphology at the bottom of the crystal rod.

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