Miniature vacuum measuring gauge tube

Abstract

The utility model provides a miniature vacuum measuring gauge tube, belongs to the technical field of vacuum measuring gauge tubes, and solves the problem that the conventional vacuum measuring gauge tube cannot effectively detect a miniature space in real time. The device comprises a mounting base, a cathode is vertically arranged on the mounting base, collectors are vertically arranged on the two sides of the cathode, the two collectors are symmetrically arranged on the two sides of the cathode, acceleration electrodes are further vertically arranged on the two sides of the cathode, the two acceleration electrodes are symmetrically arranged on the two sides of the cathode, and the connecting line between the two collectors is perpendicular to the connecting line between the two acceleration electrodes. And a supporting electrode rod connected with the top of the cathode is arranged on the mounting seat. The two collecting electrodes and the two accelerating electrodes are symmetrically arranged on the two sides of the cathode, under the condition that the testing effect of the vacuum measuring gauge tube is guaranteed, the size of the vacuum measuring gauge tube becomes more compact, a grid electrode on an original vacuum measuring gauge tube is omitted, the height of the vacuum measuring gauge tube is further reduced, and in other words, the size of the vacuum measuring gauge tube is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum measuring gauges, in particular to a miniature vacuum measuring gauge. Background Art

[0002] A vacuum gauge is a high-precision sensor used to measure the vacuum level of a vacuum environment. Satellites are often used because both their internal and external environments must maintain a certain vacuum level while operating in space. These gauges monitor the vacuum level inside and outside the satellite in real time, ensuring that satellite equipment operates under optimal vacuum conditions, thus preventing equipment failure or damage caused by abnormal vacuum levels.

[0003] Currently, my country's independently developed small-volume, low-weight vacuum measurement gauge is being used in the Tianhe core module of my country's space station in the form of a scientific experiment cabinet. Its measurement range is 1.0×10-5Pa to 1.0×105Pa, with a volume of approximately Φ50mm×100mm, a weight of approximately 600g, and a power consumption of approximately 14 watts. The relative measurement error is ≤±30%. The vacuum measurement gauge feeds vacuum information back to a designated system via a standard communication protocol. This system then transmits all data via wired or wireless transmission to a detection and control platform, enabling real-time monitoring of the vacuum environment. Due to its large size and weight, the current vacuum measurement gauge can only meet the requirements for real-time detection in larger environments and cannot effectively detect small spaces in real time. Utility Model Content

[0004] In response to the above-mentioned problems, the present invention aims to provide a miniature vacuum measuring gauge in which two collecting electrodes and two accelerating electrodes are symmetrically arranged on either side of the cathode. This makes the vacuum measuring gauge more compact while ensuring the test effect of the vacuum measuring gauge. The grid electrode on the original vacuum measuring gauge is eliminated, further reducing the height of the vacuum measuring gauge, that is, reducing the volume of the vacuum measuring gauge, and enabling real-time and effective detection in a tiny space.

[0005] The technical solutions adopted in this utility model are as follows:

[0006] A miniature vacuum measuring gauge includes a mounting base, on which a cathode is vertically arranged, collecting electrodes are vertically arranged on both sides of the cathode and the two collecting electrodes are symmetrically arranged on both sides of the cathode, accelerating electrodes are also vertically arranged on both sides of the cathode and the two accelerating electrodes are symmetrically arranged on both sides of the cathode, the line between the two collecting electrodes is perpendicular to the line between the two accelerating electrodes, and a supporting electrode rod connected to the top of the cathode is provided on the mounting base.

[0007] Preferably, the cathode comprises an iridium wire, and an yttrium oxide protective layer is provided on the outer side of the iridium wire.

[0008] Preferably, the distance between the two collecting electrodes is 5 mm.

[0009] Preferably, the distance between the two accelerating electrodes is 7.8 mm.

[0010] Preferably, the lower end of the cathode is connected to an electrode rod fixedly arranged on a mounting base.

[0011] Preferably, the diameters of the electrode rod, supporting electrode rod, collecting electrode and accelerating electrode are 0.8 mm.

[0012] Preferably, the electrode rod, supporting electrode rod, collecting electrode and accelerating electrode are made of 4J34 Kovar alloy.

[0013] Preferably, the mounting seat is made of ceramic.

[0014] Preferably, the supporting electrode rod is L-shaped.

[0015] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0016] The two collecting electrodes and the two accelerating electrodes are symmetrically arranged on both sides of the cathode. While ensuring the test effect of the vacuum measuring gauge, the volume of the vacuum measuring gauge becomes more compact, and the grid on the original vacuum measuring gauge is omitted, thereby further reducing the height of the vacuum measuring gauge, that is, reducing the volume of the vacuum measuring gauge, and enabling real-time and effective detection in a small space. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of a three-dimensional structure provided by an embodiment of the utility model;

[0019] Figure 2 A schematic diagram of a top-view cross-sectional structure provided by an embodiment of the present utility model;

[0020] Figure 3 This is a schematic diagram of the cathode cross-sectional structure provided by an embodiment of the present utility model.

[0021] Reference numerals: 1 - mounting base; 2 - collecting electrode; 3 - accelerating electrode; 4 - cathode; 401 - yttrium oxide protective layer; 402 - iridium wire; 5 - supporting electrode rod; 6 - electrode rod. DETAILED DESCRIPTION

[0022] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0024] In the description of the present invention, it should be noted that if the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the product of the application is usually placed when in use. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention.

[0025] The following combination Figure 1-Figure 3 The utility model is described in detail.

[0026] Example

[0027] A miniature vacuum measuring gauge includes a mounting base 1, on which a cathode 4 is vertically mounted. Collectors 2 are vertically mounted on either side of the cathode 4, and the two collectors 2 are symmetrically arranged on either side of the cathode 4. Accelerators 3 are also vertically mounted on either side of the cathode 4, and the two accelerating electrodes 3 are symmetrically arranged on either side of the cathode 4. The line connecting the two collectors 2 is perpendicular to the line connecting the two accelerating electrodes 3. A supporting electrode rod 5 connected to the top of the cathode 4 is mounted on the mounting base 1. The lower end of the cathode 4 is connected to an electrode rod 6 fixedly mounted on the mounting base 1.

[0028] The supporting electrode rod 5 supports and connects the upper portion of the cathode 4 to ensure the stability of the cathode 4 .

[0029] The cathode 4 includes an iridium wire 402, and an outer side of the iridium wire 402 is provided with an yttrium oxide protective layer 401. A layer of yttrium oxide dust is sprayed on the iridium wire 402 to form the yttrium oxide protective layer 401, so as to achieve high current resistance and stable emission performance.

[0030] The distance between the two collecting electrodes 2 is 5 mm, and the distance between the two accelerating electrodes 3 is 7.8 mm. Under the above parameters, the volume of the vacuum measuring gauge is made compact while ensuring the test effect of the vacuum measuring gauge.

[0031] The diameter of the electrode rod 6, supporting electrode rod 5, collecting electrode 2, and accelerating electrode 3 is 0.8 mm. Under these specific parameters, the surface area of the electrodes is minimized, reducing the outgassing rate of the material itself. This significantly shortens the warm-up and stabilization time of the vacuum measuring gauge, while also reducing the volume of the vacuum measuring gauge without affecting its performance.

[0032] The electrode rod 6, the supporting electrode rod 5, the collecting electrode 2 and the accelerating electrode 3 are made of 4J34 Kovar alloy. 4J34 alloy has an extremely low thermal expansion coefficient, which enables it to maintain stable size and shape in an environment with large temperature changes.

[0033] The mounting base 1 is made of ceramic, which insulates the electrodes (i.e., the electrode rod 6, the supporting electrode rod 5, the collecting electrode 2, and the accelerating electrode 3) from each other. The lower end surfaces of the electrodes are connected to the lower surface of the mounting base 1 by brazing to ensure airtightness and reliability.

[0034] The supporting electrode rod 5 is L-shaped, and the L-shaped structure can better connect to the cathode 4.

[0035] The accelerating electrode 3 is 14.5 mm long, the collecting electrode 2 is 20 mm long, and the supporting electrode rod 5 is 20 mm high. The mounting base 1 has a diameter of ≤ 20 mm, and the entire gauge is 20 mm high. The entire vacuum measurement gauge weighs approximately 18 g, meeting the weight requirement of ≤ 30 g.

[0036] The vacuum measurement gauge of the present application has a compact design and has the characteristics of small size, low weight, short start-up time, and fast response, and can be applied to detection in small spaces.

[0037] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A miniature vacuum measuring gauge, comprising a mounting base (1), characterized in that: A cathode (4) is vertically arranged on the mounting seat (1), collecting electrodes (2) are vertically arranged on both sides of the cathode (4), and the two collecting electrodes (2) are symmetrically arranged on both sides of the cathode (4), and accelerating electrodes (3) are also vertically arranged on both sides of the cathode (4), and the two accelerating electrodes (3) are symmetrically arranged on both sides of the cathode (4), the connection line between the two collecting electrodes (2) is perpendicular to the connection line between the two accelerating electrodes (3), and a supporting electrode rod (5) connected to the top of the cathode (4) is arranged on the mounting seat (1).

2. A miniature vacuum measuring gauge according to claim 1, characterized in that: The cathode (4) comprises an iridium wire (402), and an yttrium oxide protective layer (401) is provided on the outer side of the iridium wire (402).

3. The micro vacuum measuring gauge according to claim 1, characterized in that: The distance between the two collecting electrodes (2) is 5 mm.

4. The micro vacuum measuring gauge according to claim 1, characterized in that: The distance between the two accelerating poles (3) is 7.8 mm.

5. The miniature vacuum measuring gauge according to claim 1, characterized in that: The lower end of the cathode (4) is connected to an electrode rod (6) fixedly arranged on the mounting base (1).

6. The miniature vacuum measuring gauge according to claim 5, characterized in that: The diameters of the electrode rod (6), the supporting electrode rod (5), the collecting electrode (2) and the accelerating electrode (3) are 0.8 mm.

7. The miniature vacuum measuring gauge according to claim 5, characterized in that: The electrode rod (6), the supporting electrode rod (5), the collecting electrode (2) and the accelerating electrode (3) are made of 4J34 Kovar alloy.

8. The miniature vacuum measuring gauge according to claim 1, characterized in that: The mounting seat (1) is made of ceramic.

9. The miniature vacuum measuring gauge according to claim 1, characterized in that: The supporting electrode rod (5) is L-shaped.

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