Straight groove type flushing device

Abstract

The utility model relates to the technical field of semiconductors, and discloses a straight groove type flushing device, which comprises an upper cover and a lower cover, the upper cover and the lower cover are covered to form a flushing groove inside, the upper cover and / or the lower cover are / is provided with a water inlet, the flushing groove is provided with a water outlet, the water inlet is respectively communicated with the flushing groove and the water outlet, and the lower cover is provided with a product limiting groove for placing a product. The product limiting groove is located in the flushing groove and communicated with the flushing groove, the product limiting groove is provided with a product bearing face, the two opposite sides of the flushing groove in the first direction are provided with a first side face and a second side face respectively, a first flushing channel is formed between the product bearing face and the first side face, and a second flushing channel is formed between the product bearing face and the second side face. According to the straight groove type flushing device, the two faces of a product can be cleaned synchronously, operation is simplified, and the cleaning effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a straight trough type flushing device. Background Art

[0002] In the manufacturing process of semiconductor integrated circuits (ICs), wafers, as critical components, must undergo a cleaning process to remove various contaminants that may be generated during the manufacturing process. However, ensuring that both sides of the wafer are thoroughly cleaned during the cleaning process is a challenge. Existing methods cannot clean both sides of the wafer simultaneously, which increases operational complexity and may affect cleaning results. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. The utility model provides a straight trough type flushing device, which can simultaneously clean both sides of the product, simplify the operation and improve the cleaning effect.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a straight trough type flushing device, including an upper cover and a lower cover, the upper cover and the lower cover are combined to form a flushing trough, the upper cover and / or the lower cover are provided with a water inlet, the flushing trough is provided with a drain outlet, the water inlet is respectively connected with the flushing trough and the drain outlet, the lower cover is provided with a product limiting groove for placing products, the product limiting groove is located in the flushing trough and is connected with the flushing trough, the product limiting groove is provided with a product supporting surface, the flushing trough is respectively provided with a first side surface and a second side surface on opposite sides of a first direction, a first flushing channel is formed between the product supporting surface and the first side surface, and a second flushing channel is formed between the product supporting surface and the second side surface.

[0005] As a preferred solution, the height a of the first flushing channel is set at 0.5 mm-1 mm, the height b of the second flushing channel is set at 0.5 mm-1 mm, and the width c of the flushing groove is set at 110 mm-112 mm.

[0006] As a preferred solution, it further includes a bracket and a lifting drive member, wherein the lifting drive member is fixed to the bracket, and a driving end of the lifting drive member is connected to the upper cover.

[0007] As a preferred solution, the lower cover is provided with a first limiting groove and a second limiting groove on opposite sides of the second direction, respectively. The first limiting groove and the second limiting groove are located in the flushing groove, and the first limiting groove and the second limiting groove define the product limiting groove.

[0008] As a preferred solution, the openings of the first limiting groove and the second limiting groove are arranged opposite to each other.

[0009] As a preferred solution, the first limiting groove and the second limiting groove are arc-shaped.

[0010] As a preferred solution, a plurality of the product limiting grooves are provided, and adjacent product limiting grooves are spaced apart along the third direction, and the first direction, the second direction and the third direction are respectively perpendicular to each other.

[0011] As a preferred solution, the water inlet is located at one end of the flushing trough, and the drain outlet is located at the other end of the flushing trough.

[0012] As a preferred solution, the flushing groove and the product limiting groove are both arranged on the lower cover.

[0013] As a preferred solution, the water inlet is opened on the upper cover.

[0014] Compared with the prior art, the straight trough type flushing device of the embodiment of the present utility model has the following beneficial effects: the flushing box body includes an upper cover and a lower cover, which form a box body when the upper cover and the lower cover are closed, and the flushing trough is located inside the upper cover and the lower cover, and the lower cover is provided with a product limiting groove for placing the product. When the upper cover is opened, the product limiting groove is provided with a product supporting surface, the product is placed in the product limiting groove and supported by the product supporting surface, and the flushing liquid enters the flushing trough from the water inlet. After the product is placed in the product limiting groove, a first flushing channel and a second flushing channel are formed on both sides of the product in the thickness direction. After the flushing liquid enters the flushing trough, the flushing liquid enters the first flushing channel and the second flushing channel respectively, thereby achieving synchronous cleaning of both sides of the product, simplifying the operation, and improving the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present utility model.

[0016] Figure 2 This is a cross-sectional view of the embodiment of the utility model in use with the product to be flushed placed in the flushing tank.

[0017] Figure 3 This is an embodiment of the utility model Figure 2 Schematic diagram of the enlarged structure at A in FIG.

[0018] Figure 4 It is a structural schematic diagram of the lower cover of an embodiment of the utility model.

[0019] In the picture:

[0020] 10. Upper cover; 11. Water inlet;

[0021] 20. Lower cover; 21. Product limiting groove; 22. Product supporting surface; 23. First limiting groove; 24. Second limiting groove;

[0022] 30. Flushing trough; 31. Drainage outlet; 32. First side surface; 33. Second side surface; 34. First flushing channel; 35. Second flushing channel;

[0023] 40. Bracket; 41. Lifting drive member; 51. Product to be rinsed;

[0024] X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0025] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like used in the present invention to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] In the description of the present invention, it should be understood that the terms "connected," "connected," "fixed," etc. used in the present invention should be interpreted broadly. For example, the terms may refer to fixed connection, detachable connection, or integration; mechanical connection, welding connection; direct connection, indirect connection through an intermediate medium, internal communication between two elements, or interaction between two elements, unless otherwise explicitly defined. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0028] like Figures 1 to 4 As shown, a straight trough type flushing device of a preferred embodiment of the utility model includes an upper cover 10 and a lower cover 20. The upper cover 10 and the lower cover 20 cover the interior to form a flushing trough 30. The upper cover 10 and / or the lower cover 20 are provided with a water inlet 11, and the flushing trough 30 is provided with a drain outlet 31. The water inlet 11 is connected with the flushing trough 30 and the drain outlet 31 respectively. The lower cover 20 is provided with a product limiting groove 21 for placing products. The product limiting groove 21 is located in the flushing trough 30 and is connected with the flushing trough 30. The product limiting groove 21 is provided with a product supporting surface 22. The flushing trough 30 is provided with a first side surface 32 and a second side surface 33 on opposite sides of the first direction X, respectively. A first flushing channel 34 is formed between the product supporting surface 22 and the first side surface 32, and a second flushing channel 35 is formed between the product supporting surface 22 and the second side surface 33.

[0029] The straight trough type flushing device of the present invention comprises a flushing box body including an upper cover 10 and a lower cover 20. When the upper cover 10 and the lower cover 20 are closed, a box body is formed. The flushing trough 30 is located inside the upper cover 10 and the lower cover 20. The lower cover 20 is provided with a product limiting groove 21 for placing the product. When the upper cover 10 is opened, the product limiting groove 21 is provided with a product supporting surface 22. The product is placed in the product limiting groove 21 and supported by the product supporting surface 22. The flushing liquid enters the flushing trough 30 from the water inlet 11. After the product is placed in the product limiting groove 21, a first flushing channel 34 and a second flushing channel 35 are formed on both sides of the product in the thickness direction. After the flushing liquid enters the flushing trough 30, the flushing liquid enters the first flushing channel 34 and the second flushing channel 35 respectively, thereby achieving synchronous cleaning of both sides of the product, simplifying operation, and improving cleaning effect.

[0030] As one embodiment, the product to be cleaned is an indium phosphide substrate.

[0031] Further, such as Figure 3 As shown, the height a of the first flushing channel 34 is set at 0.5mm-1mm, the height b of the second flushing channel 35 is set at 0.5mm-1mm, and the width c of the flushing groove 30 is set at 110mm-112mm. After the product is placed in the product limiting groove 21, the first flushing channel 34 is located below the product, and the flushing liquid enters the first flushing channel 34 to flush the lower end surface of the product. The second flushing channel 35 is located above the product, and the liquid enters the second flushing channel 35 to flush the upper end surface of the product. By limiting the width c of the flushing groove 30, the height a of the first flushing channel 34, and the height b of the second flushing channel 35, the flushing space where the product is located is controlled in a relatively narrow state. When the flushing liquid fills the flushing groove 30, under the condition of the same flushing liquid flow rate, the water flow rate can form a larger impact force, thereby improving the cleaning effect of the product.

[0032] Further, such as Figures 1 to 2 As shown, it also includes a bracket 40 and a lifting drive member 41. The lifting drive member 41 is fixed to the bracket 40, and the driving end of the lifting drive member 41 is connected to the upper cover 10. The bracket 40 is used to support the lifting drive member 41, which is connected to the upper cover 10 through the lifting drive member 41 to realize the opening and closing of the upper cover 10 and the lower cover 20. When the product to be rinsed needs to be placed in the product limiting groove 21, or the rinsed product needs to be taken out of the product limiting groove 21, the lifting drive member 41 retracts to separate the upper cover 10 from the lower cover 20 and open the upper cover 10; when rinsing is required, the lifting drive member 41 descends to cover the upper cover 10 and the lower cover 20 to form the rinsing groove 30, so that the product can be rinsed in the rinsing groove 30. The provision of the lifting drive member 41 improves the convenience of operation.

[0033] As one embodiment, the lifting driving member 41 is a cylinder.

[0034] Further, such as Figure 4 As shown, the lower cover 20 is provided with a first limiting groove 23 and a second limiting groove 24 on opposite sides in the second direction Y. The first limiting groove 23 and the second limiting groove 24 are located in the flushing groove 30 and define a product limiting groove 21. The first limiting groove 23 and the second limiting groove 24 respectively limit the product on both sides in the second direction Y to prevent the product from moving during the flushing process.

[0035] Further, such as Figure 4 As shown, the openings of the first limiting groove 23 and the second limiting groove 24 are arranged opposite each other. After the first limiting groove 23 and the second limiting groove 24 limit the product on both sides of the second direction Y, the flushing liquid in the first flushing channel 34 flows along the third direction Z, and the middle part of the product is cleaned by the flushing liquid in the first flushing channel 34.

[0036] As one embodiment, Figures 3 and 4 As shown, the product supporting surface 22 of the first limiting groove 23 and the product supporting surface 22 of the second limiting groove 24 are at the same position in the first direction X.

[0037] Further, such as Figure 4 As shown, the first limiting groove 23 and the second limiting groove 24 are arc-shaped. The wafer is circular, and the arc shape is adapted to the edge shape of the wafer. The first limiting groove 23 and the second limiting groove 24 limit the wafer to prevent the product from moving during the cleaning process.

[0038] Further, such as Figure 4 As shown, a plurality of product limiting grooves 21 are provided, and adjacent product limiting grooves 21 are spaced apart along the third direction Z. The first direction X, the second direction Y and the third direction Z are respectively perpendicular to each other. Providing multiple product limiting grooves 21 in the rinsing tank 30 allows for simultaneous cleaning of multiple products, thereby improving cleaning efficiency.

[0039] Further, such as Figure 1 As shown, the water inlet 11 is located at one end of the flushing tank 30, and the drain outlet 31 is located at the other end of the flushing tank 30. The flushing liquid enters the flushing tank 30 through the water inlet 11. The water inlet 11 is arranged away from the drain outlet 31. Since the water inlet 11 and the drain outlet 31 are located at both ends, an effective flow channel can be formed in the flushing box, which prolongs the residence time of the flushing liquid in the flushing tank 30, allowing the water to flow more smoothly through the box body, thereby enhancing the cleaning effect.

[0040] Further, such as Figure 4As shown, the flushing groove 30 and the product limiting groove 21 are both arranged on the lower cover 20, and the groove processing is concentrated on the lower cover 20, which is convenient for groove structure processing, reduces production costs, and improves production efficiency.

[0041] Further, such as Figure 1 As shown, the water inlet 11 is opened on the upper cover 10. It can prevent sewage or waste water from flowing back through the water inlet 11, avoiding the source of the flushing liquid from being contaminated.

[0042] In summary, the embodiment of the present invention provides a straight-trough flushing device, and the flushing box body includes an upper cover 10 and a lower cover 20. When the upper cover 10 and the lower cover 20 are closed, a box body is formed. The flushing tank 30 is located inside the upper cover 10 and the lower cover 20, and the lower cover 20 is provided with a product limiting groove 21 for placing the product. When the upper cover 10 is opened, the product limiting groove 21 is provided with a product supporting surface 22. The product is placed in the product limiting groove 21 and supported by the product supporting surface 22. The flushing liquid enters the flushing tank 30 from the water inlet 11. After the product is placed in the product limiting groove 21, a first flushing channel 34 and a second flushing channel 35 are formed on both sides of the product in the thickness direction. After the flushing liquid enters the flushing tank 30, the flushing liquid enters the first flushing channel 34 and the second flushing channel 35 respectively, thereby achieving synchronous cleaning of both sides of the product, simplifying the operation, and improving the cleaning effect.

[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present invention. These improvements and replacements should also be regarded as the scope of protection of the present invention.

Claims

1. A straight trough flushing device, characterized in that: The rinsing container comprises an upper cover and a lower cover, wherein the upper cover and the lower cover are combined to form a flushing trough, the upper cover and / or the lower cover are provided with a water inlet, the flushing trough is provided with a drain outlet, the water inlet is communicated with the flushing trough and the drain outlet respectively, the lower cover is provided with a product limiting groove for placing products, the product limiting groove is located in the flushing trough and is communicated with the flushing trough, the product limiting groove is provided with a product supporting surface, the flushing trough is provided with a first side surface and a second side surface on opposite sides of a first direction respectively, a first flushing channel is formed between the product supporting surface and the first side surface, and a second flushing channel is formed between the product supporting surface and the second side surface.

2. The straight trough flushing device according to claim 1, characterized in that: The height a of the first flushing channel is set to 0.5 mm-1 mm, the height b of the second flushing channel is set to 0.5 mm-1 mm, and the width c of the flushing groove is set to 110 mm-112 mm.

3. The straight trough type flushing device according to claim 1, characterized in that: It also includes a bracket and a lifting drive member, the lifting drive member is fixed to the bracket, and the driving end of the lifting drive member is connected to the upper cover.

4. The straight trough type flushing device according to claim 1, characterized in that: The lower cover is provided with a first limiting groove and a second limiting groove on opposite sides of the second direction, respectively. The first limiting groove and the second limiting groove are located in the flushing groove, and the first limiting groove and the second limiting groove define the product limiting groove.

5. The straight trough type flushing device according to claim 4, characterized in that: The openings of the first limiting groove and the second limiting groove are arranged opposite to each other.

6. The straight trough type flushing device according to claim 4, characterized in that: The first limiting groove and the second limiting groove are arc-shaped.

7. The straight trough type flushing device according to claim 1, characterized in that: There are multiple product limiting grooves, and adjacent product limiting grooves are arranged at intervals along the third direction. The first direction, the second direction and the third direction are respectively perpendicular to each other.

8. The straight trough type flushing device according to claim 1, characterized in that: The water inlet is located at one end of the flushing trough, and the drain outlet is located at the other end of the flushing trough.

9. The straight trough type flushing device according to claim 1, characterized in that: The flushing groove and the product limiting groove are both arranged on the lower cover.

10. The straight trough type flushing device according to claim 1, characterized in that: The water inlet is opened on the upper cover.

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