Film pasting system

Abstract

The utility model relates to the field of wafer processing, in particular to a film pasting system which comprises a carrier, a moving mechanism, an unwinding roller, a first winding roller and a pressing roller. The moving mechanism comprises a horizontal displacement assembly, and the carrier bears the base body and is driven by the horizontal displacement assembly to controllably move in the first direction. One end of the dry film is wound around an unwinding roller perpendicular to the first direction, and the dry film drives the unwinding roller to rotate when moving in the first direction. The first winding roller controllably rotates, so that the dry film is wound, and the dry film is tensioned and moves in the first direction. The pressing roller is higher than the carrier, and the bottom of the pressing roller presses and adheres the dry film to the surface of the base body. The ratio of the stroke of the dry film moving from the unwinding roller to the bottom of the pressing roller to the stroke of the dry film moving from the bottom of the pressing roller to the first winding roller is limited to be 1: (0.95-1.05), local loose accumulation caused by high flowability of the dry film near the pressing roller can be restrained, and large-thickness strips caused by local accumulation of the dry film are prevented.

Description

Technical Field

[0001] The utility model relates to the field of wafer processing, in particular to a film pasting system. Background Art

[0002] During wafer production, a layer of dry film is typically adhered to the wafer surface. After peeling off the protective release film from the unwound raw film, the dry film is pressed against the wafer surface. In subsequent steps, the wafer and the portion of dry film adhered to the wafer are separated from the remaining dry film, resulting in a wafer covered with dry film.

[0003] In the prior art, the film laminating system usually includes two adjacent separation rollers arranged one above the other. The raw film passes between the two separation rollers with the release film at the bottom. The release film and the dry film are separated between the two separation rollers. The release film passes around the lower separation roller and is rolled up. The dry film continues to move to the top of the wafer and is bonded to the upper surface of the wafer by pressure, thereby realizing the tearing of the raw film and the lamination of the dry film.

[0004] However, when using dry films with strong fluidity and easy deformation such as S2030 for lamination, strip marks parallel to the pressure roller are often formed on the wafers obtained by lamination. This mark is relatively thick and seriously affects the product yield. Utility Model Content

[0005] The purpose of the utility model is to provide a film-sticking system suitable for dry films with strong fluidity.

[0006] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0007] A film laminating system, characterized in that it is used to press a dry film onto a substrate surface, and the film laminating system comprises:

[0008] A carrier, used for carrying the substrate;

[0009] The moving mechanism includes a horizontal displacement component for driving the carrier to controllably displace along a first direction, wherein the horizontal displacement component is used to move the carrier to a film application position;

[0010] an unwinding roller, the axial direction of which is perpendicular to the first direction, and the unwinding roller rotates when the dry film moves along the first direction;

[0011] a first winding roller, for winding the dry film away from one end of the unwinding roller and controllably rotating the dry film so as to keep the dry film in a tensioned state and move controllably;

[0012] A pressure roller is arranged above the film laminating position, and is used to constrain the extension direction of the dry film so that the dry film is pressed and adhered to the surface of the substrate away from the carrier. The stroke of the dry film moving from the unwinding roller to the bottom of the pressure roller is a first stroke, and the stroke of the dry film moving from the bottom of the pressure roller to the first winding roller is a second stroke. The ratio of the first stroke to the second stroke is any value between 1:(0.95 and 1.05).

[0013] Optionally, a long strip of raw material film is wound on the unwinding roller, and the raw material film includes the dry film and a release film attached to the surface of the dry film. The raw material film is wound on the unwinding roller and separated into the dry film and the release film at a separation point. The separation point is located between the pressure roller and the unwinding roller, and the dry film is located above the release film. The film laminating system also includes a second winding roller arranged between the pressure roller and the first winding roller, and the second winding roller is used to wind the release film to separate the release film from the dry film.

[0014] Optionally, the angle between the direction of the dry film (102) when it reaches the pressing roller (5) and the horizontal plane is any value between 50° and 70°.

[0015] Optionally, the film laminating system further includes a first direction-changing roller, which is arranged between the pressure roller and the unwinding roller, the raw material film passes over the first direction-changing roller, and the separation point is located between the first direction-changing roller and the pressure roller.

[0016] Optionally, the film laminating system further includes a second direction-changing roller, which is arranged between the pressure roller and the second winding roller. The release film passes around the second direction-changing roller so that the distance between the separation point and the bottom of the pressure roller is any value between 1 cm and 3 cm.

[0017] Optionally, the film-sticking system further includes an adsorption platform provided on the carrier, and the adsorption platform fixes the substrate by vacuum adsorption.

[0018] Optionally, the moving mechanism further includes a first displacement component, and the first displacement component is used to drive the pressure roller to move closer to or away from the carrier in a vertical direction.

[0019] Optionally, the film laminating system further includes an adsorption component, which includes a plurality of vacuum suction heads arranged in a direction parallel to the pressure roller, the adsorption component is arranged on the side of the pressure roller away from the unwinding roller, and the adsorption component is used to adsorb the dry film when the film laminating is paused.

[0020] Optionally, the moving mechanism further includes a second displacement component, which is used to drive the adsorption component to move controllably along the vertical direction, and make the lowest position of the adsorption component correspond to the dry film.

[0021] The beneficial effect of the present invention is that by making the ratio of the first stroke of the unwinding part and the second stroke of the winding part close to 1:1, the friction and resistance generated in the two strokes are relatively symmetrical, thereby helping the dry film that is about to reach the pressure roller to overcome the friction between the pressure roller and the pressure roller, and suppressing the local relaxation and accumulation of the dry film near the pressure roller due to its strong fluidity, so that the dry film maintains a stable and uniform tension during the lamination process, thereby preventing the generation of thick strips caused by local accumulation of the dry film.

[0022] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a structural diagram of the film applying system in the first embodiment of the present invention after the frame and the moving mechanism are hidden;

[0024] Figure 2 This is a structural diagram of the film-sticking system shown in the first embodiment of the present invention when film-sticking is paused, with the frame and the moving mechanism hidden.

[0025] Legend: 101-substrate, 102-dry film, 103-raw film, 104-release film, 105-separation point, 106-negative pressure pipe, 1-carrier, 11-adsorption table, 2-unwinding roller, 3-first winding roller, 4-second winding roller, 5-pressing roller, 6-first direction-changing roller, 7-second direction-changing roller, 8-adsorption assembly, 81-vacuum suction head, 82-truss. DETAILED DESCRIPTION

[0026] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0029] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0030] See Figure 1 The film laminating system claimed in the present application includes a carrier 1, a moving mechanism, an unwinding roller 2, a first winding roller 3, and a pressure roller 5. The carrier 1 is used to support a substrate 101. The moving mechanism includes a horizontal displacement assembly, which is used to controllably transport the carrier 1 along a first direction to a film laminating position. The unwinding roller 2 is perpendicular to the first direction, and when the dry film 102 moves in the first direction, it drives the unwinding roller 2 to rotate. The first winding roller 3 is controllably rotatable, winding the dry film 102, keeping it taut and controllably movable. The pressure roller 5 is arranged above the film laminating position and is used to constrain the extension direction of the dry film 102 so that the dry film 102 is pressed and adhered to the surface of the substrate 101 away from the carrier 1. The stroke of the dry film 102 moving from the unwinding roller 2 to the bottom of the pressure roller 5 is the first stroke, and the stroke of the dry film 102 moving from the bottom of the pressure roller 5 to the first winding roller 3 is the second stroke. The ratio of the first stroke to the second stroke is any value between 1:0.95 and 1.05, for example, it can be any value among 1:0.95, 1:0.97, 1:0.99, 1:1.01, 1:1.03 and 1:1.05.

[0031] By making the ratio of the first stroke of the unwinding section and the second stroke of the rewinding section close to 1:1, the friction and resistance generated in the two strokes are relatively symmetrical, thereby helping the dry film 102 about to reach the pressure roller 5 to overcome the friction between the pressure roller 5, suppressing the local relaxation and accumulation of the dry film 102 near the pressure roller 5 due to its strong fluidity, maintaining a stable and uniform tension of the dry film 102 during the lamination process, and preventing the formation of thick strips caused by local accumulation of the dry film 102.

[0032] In some embodiments, a long strip of raw film 103 is wound around the unwinding roller 2. The raw film 103 includes a dry film 102 and a release film 104 attached to the surface of the dry film 102. The raw film 103 is wound around the unwinding roller 2 and separated into the dry film 102 and the release film 104 at a separation point 105. The separation point 105 is located between the pressure roller 5 and the unwinding roller 2, with the dry film 102 located above the release film 104. The film laminating system also includes a second take-up roller 4, which is disposed on the side of the pressure roller 5 away from the unwinding roller 2. The second take-up roller 4 is used to take up the end of the release film 104 away from the dry film 102 and controllably rotate to separate the release film 104 from the dry film 102. The provision of the second take-up roller 4 enables continuous and automatic tearing of the raw film 103, thereby making the film laminating system suitable for laminating dry films 102 protected by the release film 104 on one side.

[0033] In some embodiments, the angle between the direction of the dry film (102) when it reaches the pressure roller (5) and the horizontal plane is any value between 50° and 70°, for example, any value between 50°, 55°, 60°, 65° and 70°. The dry film 102 is tensioned by the first winding roller 3, driving the pressure roller 5 to rotate, and then the pressure roller 5 drives the dry film 102 to move, causing the unwinding roller 2 to unwind. If the inclination angle of the dry film 102 adjacent to the pressure roller 5 and located on the side of the unwinding roller 2 is too large, it will lead to a large rolling friction force, which will easily cause the dry film 102 with strong fluidity to loosen. If the inclination angle is too small, the dry film 102 that has not reached the bottom of the pressure roller 5 will interfere with the edge of the substrate 101, and then the dry film 102 will accumulate at the edge of the substrate 101, causing striping. Therefore, limiting the inclination angle to a moderate level helps to suppress the occurrence of striping and improve product yield.

[0034] In some embodiments, the film laminating system further includes a first direction-changing roller 6 positioned between the pressure roller 5 and the unwinding roller 2. The raw film 103 passes over the first direction-changing roller 6 from above, with the separation point 105 located between the first direction-changing roller 6 and the pressure roller 5. The raw film 103 is positioned between the unwinding roller 2 and the first direction-changing roller 6, so that this portion of the dry film 102, supported by the release film 104, is less likely to deform and sag due to its own weight and fluidity. The first direction-changing roller 6 further supports the dry film 102 between the pressure roller 5 and the separation point 105, minimizing tension on this portion of the dry film 102 and preventing deformation. This helps maintain the tautness of the dry film 102, thereby suppressing accumulation of dry film 102 near the bottom of the pressure roller 5, preventing the formation of banding, and improving product yield.

[0035] In some embodiments, the film laminating system further includes a second direction-changing roller 7 positioned between the pressure roller 5 and the second winding roller 4. The release film 104 passes around the second direction-changing roller 7, ensuring that the distance between the separation point 105 and the bottom of the pressure roller 5 is within a range of 1 cm to 3 cm, for example, 1 cm, 1.4 cm, 1.8 cm, 2.2 cm, 2.6 cm, and 3 cm. Friction exists between the second direction-changing roller 7 and the release film 104, and between the pressure roller 5 and the dry film 102. This balances the forces acting on the release film 104 and dry film 102 beyond the separation point 105, helping to maintain the stability of the position of the separation point 105. Limiting the distance between the separation point 105 and the bottom of the pressure roller 5 helps extend the travel distance of the dry film 102 supported by the release film 104. It also prevents the release film 104 from being caught in the bottom of the pressure roller 5 and affecting lamination to the substrate 101, thereby improving product yield.

[0036] In some embodiments, the film laminating system further includes an adsorption platform 11 disposed on the carrier 1 . The adsorption platform 11 fixes the substrate 101 by vacuum adsorption, which has high reliability and is not prone to damaging the substrate 101 .

[0037] In some embodiments, the moving mechanism further includes a first displacement assembly, which is used to drive the pressure roller 5 vertically toward or away from the carrier 1. When the film lamination operation is paused, the pressure roller 5 is moved away from the carrier 1. During this time, the dry film 102 is in a relatively relaxed state, which helps to prevent deformation of the dry film 102 due to fluidity, thereby preventing deformation of the dry film 102 from affecting the subsequent film lamination process.

[0038] In some embodiments, the film laminating system further includes a suction assembly 8, which comprises a plurality of vacuum suction heads 81 arranged parallel to the pressure roller 5. The suction assembly 8 is positioned on the side of the pressure roller 5 away from the unwinding roller 2 and is used to absorb the dry film 102 during pauses in the laminating process. When the pressure roller 5 moves away from the carrier 1, the extension direction of the dry film 102 changes, causing gravity to cause the dry film 102 to adhere to the carrier 1, hindering subsequent laminating operations. By providing the suction assembly 8 to absorb the dry film 102, sagging of the film can be prevented, facilitating subsequent laminating operations.

[0039] In some embodiments, the movement mechanism further includes a second displacement assembly, which is configured to controllably move the adsorption assembly 8 in the vertical direction, such that the lowest position of the adsorption assembly 8 corresponds to the dry film 102. During the film lamination operation, the adsorption assembly 8 rises away from the dry film 102 to prevent interference between the adsorption assembly 8 and the dry film 102, thereby improving product yield.

[0040] Please refer to the following examples for details.

[0041] Example 1:

[0042] See Figure 1 The film laminating system shown in a preferred embodiment of the present application includes a frame, a moving mechanism, a carrier 1, a unwinding roller 2, a first winding roller 3, a second winding roller 4, a pressure roller 5, a first direction-changing roller 6, and a second direction-changing roller 7. The moving mechanism, the carrier 1, the unwinding roller 2, the first winding roller 3, the second winding roller 4, the pressure roller 5, the first direction-changing roller 6, and the second direction-changing roller 7 are all supported on the frame. The raw material film 103 is composed of a dry film 102 and a release film 104 attached to the surface of the dry film 102. The film laminating system in this embodiment is used to separate the release film 104 on the surface of the raw material film 103 from the dry film 102 at one end, and adhere the dry film 102 to the surface of the substrate 101 by pressure. In this embodiment, the dry film 102 is an S2030 film, and the substrate 101 is a wafer.

[0043] The moving mechanism includes a horizontal displacement component. The horizontal displacement component includes a conveyor belt, and the carrier 1 is fixed to the conveyor belt and moves along the first direction driven by the horizontal displacement component. The first direction is a horizontal direction, with the direction in which the carrier 1 is moving being the front and the opposite direction being the rear. A plurality of carriers 1 are evenly arranged along the first direction, and each carrier 1 is fixedly connected to an adsorption platform 11, and each adsorption platform 11 is controllably moved along the first direction driven by the carrier 1 and passes through the film-sticking position in turn. A negative pressure channel is provided at the center of the adsorption platform 11, and the negative pressure channel is connected to the air pump through a negative pressure pipe 106. The wafer is placed on the surface of the adsorption platform 11 away from the carrier 1 and is fixed to the adsorption platform 11 by vacuum adsorption.

[0044] The axial direction of the pressure roller 5 is perpendicular to the first direction and remains horizontal. The pressure roller 5 is located directly above the film application site, with a gap between its bottom and the upper surface of the wafer, which is located at the film application site and fixed to the adsorption platform 11. The unwinding roller 2, the first winding roller 3, the second winding roller 4, the first direction-changing roller 6, and the second direction-changing roller 7 are all arranged parallel to the pressure roller 5. The unwinding roller 2 is located behind the pressure roller 5, at a height higher than the pressure roller 5, and rotates freely. The raw material film 103 is wound around the unwinding roller 2. The first winding roller 3 is located in front of the pressure roller 5 and rotates controllably. The end of the dry film 102, separated from the release film 104, away from the raw material film 103 is wound around the first winding roller 3. Driven by the first winding roller 3, it moves in the first direction. After the dry film 102 is tensioned, it drives the unwinding roller 2 to rotate and unwind. The first winding roller 3 is located in front of the pressure roller 5, at a height lower than the first winding roller 3, and rotates controllably. After separation from the dry film 102, the release film 104, at the end away from the raw film 103, is wound around the second take-up roller 4. Driven by the second take-up roller 4, it moves away from the first direction, separating the release film 104 from the dry film 102 moving in the first direction at a fixed separation point 105. The first direction-changing roller 6 is positioned between the unwinding roller 2 and the pressure roller 5. After passing over the first direction-changing roller 6 and reaching the pressure roller 5, the raw film 103 separates into the dry film 102 and the release film 104. By partially supporting the dry film 102 on the first direction-changing roller 6, the tension on the dry film 102 is reduced, thus preventing deformation of the dry film 102. The second direction-changing roller 7 is positioned between the pressure roller 5 and the second take-up roller 4. After separation from the dry film 102, the release film 104 passes over the second direction-changing roller 7 and reaches the second take-up roller 4. Since the forces acting on the dry film 102 and the release film 104 are relatively balanced after separation, the position of the separation point 105 remains relatively fixed.

[0045] In this embodiment, the unwinding end of the unwinding roller 2 is close to the top of the unwinding roller 2, the first winding end of the first winding roller 3 is close to the bottom of the first winding roller 3, and the second winding end of the second winding roller 4 is close to the top of the second winding roller 4. Since the first and second direction-changing rollers 6 and 7 in this embodiment are obtained by adjusting the separation rollers of the existing film laminating system, the central axis position is difficult to change. Therefore, the first direction-changing roller 6 in this embodiment is located directly above the second direction-changing roller 7.

[0046] The travel distance of the dry film 102 from the unwinding roller 2 to the bottom of the pressure roller 5 is defined as the first travel distance, and the travel distance from the bottom of the pressure roller 5 to the first winding roller 3 is defined as the second travel distance. In this embodiment, the ratio of the first travel distance to the second travel distance is 1:1.02. The angle between the direction of the dry film 102 between the pressure roller 5 and the first direction-changing roller 6 and the horizontal direction is 60°, and the distance between the separation point 105 and the bottom of the pressure roller 5 is 2.3 cm. By maintaining a balanced tension on the dry film 102 on both sides of the pressure roller 5, the dry film 102 is less likely to accumulate in front of the bottom of the pressure roller 5. By adjusting the angle at which the dry film 102 reaches the pressure roller 5, the wafer is prevented from contacting the dry film 102 before reaching the bottom of the pressure roller 5, thereby reducing the risk of thick stripes on the wafer surface.

[0047] The moving mechanism further includes a first displacement component which is fixedly connected to the frame and drives the pressing roller 5 to controllably move in the vertical direction, thereby helping the laminating system to adapt to dry films 102 and wafers of different thicknesses.

[0048] See Figure 1 and Figure 2 The film laminating system also includes an adsorption component 8, and the moving mechanism also includes a second displacement component that drives the adsorption component 8 to move controllably in the vertical direction. The adsorption component 8 includes a truss 82 parallel to the axial direction of the pressure roller 5, and the truss 82 moves under the drive of the second displacement component. The truss 82 is arranged in front of the pressure roller 5 and is adjacent to the pressure roller 5. A plurality of vacuum suction heads 81 are evenly arranged on the truss 82. The adsorption direction of the vacuum suction head 81 is vertically downward, and its top is connected to the air pump through another negative pressure pipe 106. When the film laminating system is performing continuous film laminating, the vacuum suction head 81 is located above the dry film 102 and no adsorption is performed. When the film laminating is paused, the second displacement component drives the vacuum suction head 81 to move vertically downward until the vacuum suction head 81 contacts the dry film 102. The vacuum head 81 securely holds the dry film 102. The first displacement assembly drives the pressure roller 5 upward, loosening the dry film 102 between the vacuum head 81 and the first redirecting roller 6. The second displacement assembly then drives the vacuum head 81 vertically upward, moving the dry film 102 away from the carrier 1, thereby protecting the dry film 102. When the film lamination system resumes lamination, the second displacement assembly drives the vacuum head 81 vertically downward, while the first winding roller 3 begins to wind, tightening the dry film 102. The first displacement assembly drives the pressure roller 5 vertically downward, causing the vacuum head 81 to cease suction and move vertically upward away from the dry film 102 to prevent interference with the dry film 102 during its movement.

[0049] The beneficial effect of the present invention is that it adapts the film laminating system to the dry film 102 with high fluidity in a simple manner, thereby improving the product yield. Moreover, the film laminating system of the present invention can be obtained by simply adjusting the existing conventional film laminating system, which is low in cost and highly practical.

[0050] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0051] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. A film laminating system, characterized in that: Used for pressing a dry film (102) onto a surface of a substrate (101), the film laminating system comprises: A carrier (1) for carrying the substrate (101); The moving mechanism comprises a horizontal displacement component for driving the carrier (1) to controllably displace along a first direction, the horizontal displacement component being used to move the carrier (1) to a film application position; an unwinding roller (2), the axial direction of which is perpendicular to the first direction, and when the dry film (102) moves along the first direction, the unwinding roller (2) rotates; A first winding roller (3) is used for winding the dry film (102) away from one end of the unwinding roller (2) and controlling the rotation thereof so as to keep the dry film (102) in a tensioned state and controllably move the dry film (102); A pressure roller (5) is arranged above the film laminating position, and the pressure roller (5) is used to constrain the extension direction of the dry film (102) so that the dry film (102) is pressed and adhered to the surface of the substrate (101) away from the carrier (1). The stroke of the dry film (102) moving from the unwinding roller (2) to the bottom of the pressure roller (5) is a first stroke, and the stroke of the dry film (102) moving from the bottom of the pressure roller (5) to the first winding roller (3) is a second stroke. The ratio of the first stroke to the second stroke is any value between 1: (0.95 and 1.05).

2. The film-sticking system according to claim 1, characterized in that: A long strip of raw material film (103) is wound on the unwinding roller (2), and the raw material film (103) includes the dry film (102) and a release film (104) attached to the surface of the dry film (102). The raw material film (103) is wound on the unwinding roller (2) and separated into the dry film (102) and the release film (104) at a separation point (105). The separation point (105) is located between the pressure roller (5) and the unwinding roller (2), and the dry film (102) is located above the release film (104). The film laminating system also includes a second winding roller (4) arranged between the pressure roller (5) and the first winding roller (3). The second winding roller (4) is used to wind the release film (104) to separate the release film (104) from the dry film (102).

3. The film-sticking system according to claim 2, characterized in that: The angle between the direction of the dry film (102) when it reaches the pressing roller (5) and the horizontal plane is any value between 50° and 70°.

4. The film-sticking system according to claim 3, characterized in that: It also includes a first direction-changing roller (6), which is arranged between the pressure roller (5) and the unwinding roller (2), and the raw material film (103) passes over the first direction-changing roller (6), and the separation point (105) is located between the first direction-changing roller (6) and the pressure roller (5).

5. The film-sticking system according to claim 4, characterized in that: It also includes a second direction-changing roller (7), which is arranged between the pressing roller (5) and the second winding roller (4), and the release film (104) bypasses the second direction-changing roller (7) so that the distance between the separation point (105) and the bottom of the pressing roller (5) is any value between 1 cm and 3 cm.

6. The film-sticking system according to claim 1, characterized in that: It also includes an adsorption platform (11) arranged on the carrier (1), and the adsorption platform (11) fixes the substrate (101) by vacuum adsorption.

7. The film-sticking system according to claim 1, characterized in that: The moving mechanism further comprises a first displacement component, which is used to drive the pressing roller (5) to move closer to or away from the carrier (1) in a vertical direction.

8. The film-sticking system according to claim 7, characterized in that: The invention also includes an adsorption component (8), wherein the adsorption component (8) includes a plurality of vacuum suction heads (81) arranged in a direction parallel to the pressure roller (5), the adsorption component (8) is arranged on the side of the pressure roller (5) away from the unwinding roller (2), and the adsorption component (8) is used to adsorb the dry film (102) when the film application is paused.

9. The film-sticking system according to claim 8, characterized in that: The moving mechanism further comprises a second displacement component, which is used to drive the adsorption component (8) to move controllably in a vertical direction and to make the lowest position of the adsorption component (8) correspond to the dry film (102).

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