Semiconductor manipulator frame with height convenient to adjust

Abstract

The utility model discloses a semiconductor manipulator frame convenient for height adjustment, which comprises a bottom frame and a manipulator frame, the bottom frame comprises a mounting bottom plate and four supporting sleeves, the four supporting sleeves extend along the vertical direction and form a square in the same height direction, and the mounting bottom plate is horizontally connected among the four supporting sleeves. Two rotating rods in meshed connection are installed at the top of the base, the two ends of the two rotating rods are perpendicularly connected with supporting arms respectively, and any rotating rod is connected with a rotating driving mechanism; the manipulator frame comprises a mounting top plate and four moving parts, the mounting top plate is connected to the tops of the four moving parts and provided with a mechanical gripper, the four moving parts are inserted into the four supporting sleeves in a sliding fit mode and hinged to the four supporting arms correspondingly, and through hinge joint, when the two rotating rods rotate in a meshed mode, the two rotating rods rotate in a meshed mode; and the four supporting arms can drive the four moving parts to synchronously ascend or descend, so that the height of the mounting top plate and the mechanical gripper can be flexibly adjusted, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a semiconductor manipulator frame with convenient height adjustment. Background Art

[0002] Semiconductors are materials with electrical conductivity between conductors and insulators at room temperature. They are used in integrated circuits, consumer electronics, communications systems, photovoltaic power generation, lighting, and high-power power conversion. Diodes, for example, are devices made from semiconductors.

[0003] Patent announcement number CN218525545U discloses a semiconductor manipulator frame, which includes a mounting plate, a manipulator body is fixedly arranged on the mounting plate, a heat conducting mechanism is fixedly arranged on the manipulator body, the heat conducting mechanism consists of a substrate and a heat conductor, the substrate is fixedly arranged on the lower end surface of the manipulator body, the heat conductor is fixedly arranged on the lower end surface of the substrate, the heat conductor is rod-shaped, the heat conductor is hollow, and a plurality of through holes are opened on the heat conductor, and the through holes are evenly distributed on the heat conductor, a fixing box is fixedly arranged on the mounting plate, a baffle is fixedly arranged at the lower end of the fixing box, an air inlet is opened at the fixing box corresponding to the baffle, a mounting frame is arranged in the air inlet, a fan is fixedly arranged on the mounting frame, a plurality of interfaces are opened at the left and right ends of the fixing box, the interfaces are connected to the air duct, and the air duct extends to the upper end of the manipulator body from the end connected to the fixing box. When in use, the present invention can cool the upper and lower ends of the wafer.

[0004] However, the semiconductor robot frame does not have the function of adjusting its height, which means that the robot frame cannot be quickly and accurately adjusted to the height requirements of different working heights on the production line, increasing the downtime caused by height mismatch, thereby reducing overall production efficiency. Utility Model Content

[0005] An embodiment of the present application provides a semiconductor manipulator frame with convenient height adjustment, which can very conveniently adjust the height of the manipulator frame so that the manipulator frame can adapt to the process requirements of production lines of different heights, thereby improving the flexibility and adaptability of the production line, reducing the downtime caused by height mismatch, and improving production efficiency as a whole.

[0006] The embodiment of the present application provides a semiconductor manipulator frame with convenient height adjustment, comprising a base frame and a manipulator frame, wherein the base frame comprises a mounting base plate and four supporting sleeves, wherein the four supporting sleeves extend in a vertical direction and surround the four supporting sleeves to form a square at the same height direction, the mounting base plate is horizontally connected between the four supporting sleeves, and two rotating rods extending horizontally in the same direction and meshingly connected are mounted on the top of the mounting base plate, and support arms are respectively fixedly connected vertically to the two ends of the two rotating rods, and a rotation drive mechanism is connected to any of the rotating rods to drive the rotating rod to rotate;

[0007] The manipulator frame includes a mounting top plate and four moving parts. The mounting top plate is fixedly connected to the top of the four moving parts and is equipped with a mechanical gripper. The four moving parts are respectively inserted into the four supporting sleeves in a sliding manner and are respectively hinged to the four supporting arms. The hinge enables the four supporting arms to drive the four moving parts to rise or fall synchronously when the two rotating rods engage and rotate.

[0008] In a possible implementation, the bottom of the support sleeve is vertically connected to a seat plate, and the support sleeve and the seat plate are connected circumferentially via an L-shaped reinforcing rib plate.

[0009] In a possible implementation, the two rotating rods are respectively a first rotating rod and a second rotating rod, and the first rotating rod and the second rotating rod are respectively provided with a first spur gear and a second spur gear that mesh with each other near the middle of the mounting base plate, and the first rotating rod is fixedly provided with a turbine, and a worm gear that cooperates with the turbine is installed on the top of the mounting base plate.

[0010] In a possible implementation, a handwheel is installed at one end of the worm.

[0011] In one possible implementation, the turbine is close to the first spur gear, and support members are symmetrically installed on the top of the mounting base on both sides of the first spur gear and the second spur gear, and the first rotating rod and the second rotating rod respectively pass through the support members in a rotationally fitted manner.

[0012] In one possible implementation, the support sleeve is provided with a strip-shaped avoidance hole in a direction perpendicular to the rotating rod, and the strip-shaped avoidance hole extends in a vertical direction. A ring is connected to the end of the support arm away from the rotating rod, and the ring passes through the strip-shaped avoidance hole. A avoidance step is provided at the bottom of the movable part, and a hinged protrusion is vertically connected to the avoidance step, and the hinged protrusion is inserted into the ring in a clearance fit manner.

[0013] In a possible implementation, the supporting sleeve is a square sleeve, and the moving member is a rectangular plate; or, the supporting sleeve is a circular sleeve, and the moving member is a cylinder.

[0014] In one possible implementation, the mounting top plate is connected to the four moving parts through an I-plate structure, the I-plate structure includes a first mounting plate, a second mounting plate and a connecting plate vertically connected between the first mounting plate and the second mounting plate, the extension direction of the connecting plate is the same as the extension direction of the rotating rod, a lead screw and a guide rod are vertically connected between the first mounting plate and the second mounting plate, a lead screw nut is connected to the lead screw in a threaded manner, the mounting top plate is sleeved on the guide rod in a sliding manner, and is fixedly connected to the lead screw nut, and one end of the lead screw is coaxially connected to the motor.

[0015] Beneficial effects: Compared with the prior art, the semiconductor manipulator frame with convenient height adjustment provided by the present application can rotate any one of the rotating rods. Under the meshing relationship, the two rotating rods will rotate synchronously in opposite directions. Under the hinged action of the support arms and the moving parts, and the sliding cooperation between the moving parts and the support sleeves, the four support arms will drive the four moving parts to rise or fall synchronously, thereby flexibly adjusting the height position of the top mechanical gripper, so that the semiconductor manipulator frame can adapt to the process requirements of production lines of different heights, improve the flexibility and adaptability of the production line, reduce the downtime caused by height mismatch, and thus improve the overall production efficiency;

[0016] The cooperation of the motor, lead screw and lead screw nut can drive the mechanical gripper to move in a horizontal direction, facilitating the subsequent processing of semiconductors.

[0017] These and other purposes, features and advantages of the present invention are fully reflected in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a semiconductor manipulator frame with convenient height adjustment is shown in the present application.

[0019] Figure 2 A schematic diagram of the local structure of the installation base plate in this application is shown.

[0020] Figure 3 A partial cross-sectional structural diagram of a semiconductor manipulator frame with convenient height adjustment according to the present application is shown.

[0021] Figure 4 A schematic diagram of the local structure of the top plate installation in this application is shown. DETAILED DESCRIPTION

[0022] The following description is intended to disclose the present invention and enable those skilled in the art to implement the present invention. The preferred embodiments described below are provided for illustrative purposes only, and those skilled in the art will readily appreciate other obvious variations. The basic principles of the present invention as defined in the following description may be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.

[0023] Those skilled in the art should understand that, in the disclosure of the specification, the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms cannot be understood as limiting the present invention.

[0024] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the elements may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0025] refer to Figures 1 to 4 , the embodiment of the present application provides a semiconductor manipulator frame with convenient height adjustment, including a base frame 10 and a manipulator frame 20. The base frame 10 includes a mounting base 11 and four supporting sleeves 12, wherein the four supporting sleeves 12 extend in the vertical direction and surround the same height direction to form a square, wherein the mounting base 11 is horizontally connected between the four supporting sleeves 12 and close to the lower part of the supporting sleeves 12, and at the same time, two rotating rods 13 extending horizontally in the same direction and meshingly connected are installed on the top of the mounting base 11, wherein the two rotating rods 13 extend along the length direction of the mounting base 11, and the two ends of the two rotating rods 13 are respectively vertically fixedly connected to support arms 14, and any of the rotating rods 13 is connected to a rotation drive mechanism to drive the rotating rod 13 to rotate, so that the two rotating rods 13 can rotate synchronously in opposite directions under the meshing relationship;

[0026] The manipulator frame 20 includes a mounting top plate 21 and four moving parts 22. The mounting top plate 21 is fixedly connected to the top of the four moving parts 22 and is equipped with a mechanical gripper 23 for clamping and fixing the semiconductor. The four moving parts 22 are respectively inserted into the four supporting sleeves 12 in a sliding manner and are respectively hinged to the four support arms 14. At the same time, this hinged relationship enables the four support arms 14 to drive the four moving parts 22 to rise or fall synchronously when the two rotating rods 13 are engaged and rotated, thereby being able to flexibly adjust the height position of the mechanical gripper 23. In this way, the semiconductor manipulator frame can quickly adjust the height according to the different working height requirements of the production line, thereby reducing the downtime caused by height mismatch, improving work efficiency as a whole, and thus improving the flexibility and adaptability of the production line.

[0027] In one embodiment, the bottom of the support sleeve 12 is vertically connected to a seat plate 15, and the support sleeve 12 and the seat plate 15 are connected circumferentially by an L-shaped reinforcing rib 16, so that the contact area with the ground can be increased by the seat plate 15 to improve the stability of the support sleeve 12, and the connection stability and structural connection strength between the support sleeve 12 and the seat plate 15 can be improved by the L-shaped reinforcing rib 16.

[0028] In one embodiment, the two rotating rods 13 are defined as a first rotating rod 131 and a second rotating rod 132. The first rotating rod 131 and the second rotating rod 132 are respectively provided with a first spur gear 133 and a second spur gear 134 meshing with each other near the middle of the mounting base 11, thereby achieving a meshing connection between the two rotating rods 13. Furthermore, the first rotating rod 131 is fixedly provided with a worm gear 135, and a worm gear 111 is mounted on the top of the mounting base 11, which cooperates with the worm gear 135. Rotating the worm gear 111 can drive the worm gear 135 to rotate in a certain direction, thereby driving the first rotating rod 131 and the second rotating rod 132 to rotate synchronously under the meshing action of the first spur gear 133 and the second spur gear 134.

[0029] In addition, in order to facilitate the stable rotation of the worm 111, a rotation support seat 112 is also installed on the top of the installation base 11, and the worm 111 horizontally penetrates the rotation support seat 112 in a threaded manner.

[0030] Further preferably, a hand wheel 113 is installed at one end of the worm 111 to facilitate the rotation of the worm 111 .

[0031] In one embodiment, the turbine 135 is located near the first flat gear 133. Support members 136 are symmetrically mounted on the top of the mounting base 11 on both sides of the first flat gear 133 and the second flat gear 134. The first rotating rod 131 and the second rotating rod 132 respectively penetrate the support members 136 in a rotationally engaged manner. Thus, the first rotating rod 131 and the second rotating rod 132 can be supported by the support members 136, thereby improving the rotational stability of the first rotating rod 131 and the second rotating rod 132. The support member 136 can be a support seat or a support plate.

[0032] In one embodiment, the support sleeve 12 is provided with a strip-shaped avoidance hole 101 in a direction perpendicular to the rotating rod 13. The strip-shaped avoidance hole 101 extends in the vertical direction. The support arm 14 is connected to a collar 17 at one end away from the rotating rod 13, and the collar 17 passes through the strip-shaped avoidance hole 101. Correspondingly, a avoidance step 221 is provided at the bottom of the movable member 22, and a hinge protrusion 222 is vertically connected to the avoidance step 221, and the hinge protrusion 222 is inserted into the collar 17 in a clearance fit manner. When the two rotating rods 13 rotate synchronously in opposite directions, the four support arms 14 rotate synchronously, and the collar 17 deflects in the height direction in the strip-shaped avoidance hole 101, and can then drive the movable member 22 to move up and down through the hinge protrusion 222, thereby adjusting the height position of the mechanical gripper 23.

[0033] In one embodiment, the support sleeve 12 is a square sleeve, and correspondingly, the moving member 22 is a rectangular plate. In another embodiment, the support sleeve 12 is a circular sleeve, and correspondingly, the moving member 22 is a cylinder.

[0034] In one embodiment, the mounting top plate 11 is connected to the four moving parts 22 through an I-plate structure. The I-plate structure includes a first mounting plate 31, a second mounting plate 32, and a connecting plate 33 vertically connected between the first mounting plate 31 and the second mounting plate 32, wherein the extension direction of the connecting plate 33 is the same as the extension direction of the rotating rod 13, and a lead screw 34 and a guide rod 35 are vertically connected between the first mounting plate 31 and the second mounting plate 32, wherein a lead screw nut 36 is connected to the lead screw 34 in a threaded manner, and the mounting top plate 21 is sleeved on the guide rod 35 in a sliding manner and fixedly connected to the lead screw nut 36, and one end of the lead screw 34 is coaxially connected to a motor 37 to rotate through The motor 37 drives the lead screw 34 to rotate. In this way, when the lead screw 34 rotates, based on the threaded connection relationship between the lead screw nut 36 and the lead screw 34, and the guiding relationship formed by the sliding fit between the mounting top plate 21 and the guide rod 35, the lead screw nut 36 can drive the mounting top plate 21 to move in a directional manner along the extension direction of the lead screw 34, and then drive the mechanical gripper 23 to move flexibly in the horizontal direction, so that the position of the semiconductor on the mechanical gripper 23 can be adjusted in the horizontal direction, which is convenient for subsequent processing of the semiconductor, wherein the mechanical gripper 23 can clamp and fix the semiconductor to avoid the phenomenon of the semiconductor being offset and loosened during the processing of the semiconductor.

[0035] It should be noted that the terms "first" and "second" in this application are used for descriptive purposes only and do not indicate any order. They cannot be understood as indicating or implying relative importance. These terms can be interpreted as names.

[0036] Those skilled in the art will appreciate that the embodiments of the present invention described above and shown in the accompanying drawings are provided for illustrative purposes only and do not limit the present invention. The advantages of the present invention have been fully and effectively realized. The functional and structural principles of the present invention have been demonstrated and illustrated in the embodiments. Any variations or modifications may be made to the embodiments of the present invention without departing from the principles described.

Claims

1. A semiconductor manipulator frame with convenient height adjustment, characterized in that: The invention comprises a base frame and a manipulator frame, wherein the base frame comprises a mounting base plate and four supporting sleeves, wherein the four supporting sleeves extend in the vertical direction and surround the four supporting sleeves at the same height to form a square, the mounting base plate is horizontally connected between the four supporting sleeves, and two rotating rods extending horizontally in the same direction and meshingly connected are installed on the top of the mounting base plate, and the two ends of the two rotating rods are respectively vertically fixedly connected to support arms, and any of the rotating rods is connected to a rotation drive mechanism to drive the rotating rod to rotate; The manipulator frame includes a mounting top plate and four moving parts. The mounting top plate is fixedly connected to the top of the four moving parts and is equipped with a mechanical gripper. The four moving parts are respectively inserted into the four supporting sleeves in a sliding manner and are respectively hinged to the four supporting arms. The hinge enables the four supporting arms to drive the four moving parts to rise or fall synchronously when the two rotating rods engage and rotate.

2. The semiconductor manipulator stand with convenient height adjustment according to claim 1, characterized in that: The bottom of the support sleeve is vertically connected to a seat plate, and the support sleeve and the seat plate are connected along the circumferential direction through an L-shaped reinforcing rib plate.

3. The semiconductor manipulator stand with convenient height adjustment according to claim 1, characterized in that: The two rotating rods are respectively the first rotating rod and the second rotating rod. The first rotating rod and the second rotating rod are respectively provided with a first spur gear and a second spur gear that mesh with each other near the middle of the mounting base. The first rotating rod is fixed with a turbine, and a worm gear that cooperates with the turbine is installed on the top of the mounting base.

4. The semiconductor manipulator stand with convenient height adjustment according to claim 3, characterized in that: A hand wheel is installed at one end of the worm.

5. The semiconductor manipulator stand with convenient height adjustment according to claim 3, characterized in that: The turbine is close to the first spur gear, and support members are symmetrically installed on the top of the mounting base on both sides of the first spur gear and the second spur gear. The first rotating rod and the second rotating rod respectively penetrate the support members in a rotationally fitted manner.

6. The semiconductor manipulator stand with convenient height adjustment according to claim 1, characterized in that: The support sleeve is provided with a strip-shaped avoidance hole in a direction perpendicular to the rotating rod, and the strip-shaped avoidance hole extends in the vertical direction. The end of the support arm away from the rotating rod is connected with a ring, and the ring passes through the strip-shaped avoidance hole. The bottom of the movable part is provided with an avoidance step, and the avoidance step is vertically connected with a hinged protrusion, and the hinged protrusion is inserted into the ring in a clearance fit manner.

7. The semiconductor manipulator stand with convenient height adjustment according to claim 6, characterized in that: The supporting sleeve is a square sleeve, and the moving part is a rectangular plate; or, the supporting sleeve is a circular sleeve, and the moving part is a cylinder.

8. The semiconductor manipulator stand with convenient height adjustment according to claim 1, characterized in that: The mounting top plate is connected to the four moving parts through an I-plate structure, and the I-plate structure includes a first mounting plate, a second mounting plate and a connecting plate vertically connected between the first mounting plate and the second mounting plate, the extension direction of the connecting plate is the same as the extension direction of the rotating rod, a lead screw and a guide rod are vertically connected between the first mounting plate and the second mounting plate, a lead screw nut is connected to the lead screw in a threaded manner, the mounting top plate is sleeved on the guide rod in a sliding manner and is fixedly connected to the lead screw nut, and one end of the lead screw is coaxially connected to the motor.

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