Hoisting tool

Abstract

The embodiment of the utility model provides a hoisting tool, which is used for hoisting a graphite heater of a single crystal furnace, and comprises a base, a lifting device and a lifting device, the lifting rod is arranged on the base; one end of each suspension arm is movably connected to the base so that the suspension arms can move between a first position and a second position, in the first position, the suspension arms are in a folded state close to the center of the base, and in the second position, the suspension arms are in a folded state close to the center of the base. According to the lifting tool, the lifting arm is in the unfolding state that the lifting arm is far away from the center of the base and extends out of the base, through the moving and extending functions of the lifting arm of the lifting tool, the application range of the lifting tool is widened, the operation flexibility of the lifting tool is improved, and the lifting tool can be stored in a more space-saving and safer mode.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a lifting tool. Background Art

[0002] In the semiconductor industry, the Czochralski method is widely used to grow semiconductor single crystals, such as silicon and germanium. Polycrystalline silicon is melted and then pulled through a seed crystal, forming a single crystal silicon rod layer by layer. Graphite heaters play a crucial role in the single crystal growth process, directly impacting the uniformity of the melt temperature field and the quality and efficiency of crystal growth.

[0003] Graphite heaters, as key thermal field components in Czochralski single crystal furnaces, are primarily responsible for providing and maintaining the required temperature environment, ensuring stability and quality during the crystal growth process. Graphite heaters are typically made of graphite. Under high-temperature production environments, oxides may adhere to the heater's surface, which not only affects subsequent production but also reduces product quality. Therefore, regular cleaning and replacement of graphite heaters is essential.

[0004] The disassembly and assembly of the graphite heaters in traditional Czochralski single crystal furnaces mainly rely on manual operation. Due to the brittleness and fragility of graphite, the graphite heaters are often damaged during manual disassembly and assembly. Especially under high temperature conditions, if the graphite heaters are not cooled enough, there is a risk of burns to the operators. Although operators also use lifting devices, existing lifting devices are generally only suitable for graphite heaters of specific sizes, which means that different sizes of graphite heaters require different lifting devices. In addition, existing lifting devices often take up a large amount of space and are difficult to place stably due to their irregular shapes. These factors increase the difficulty of storing the lifting devices. Utility Model Content

[0005] To solve the above technical problems, the present invention provides a lifting tool with a technical solution. The movable and extendable boom of the lifting tool not only improves the application range and operational flexibility of the lifting tool, but also makes the storage and retrieval of the lifting tool more space-saving and safer.

[0006] The technical solution of the embodiment of the utility model is achieved as follows:

[0007] The present invention provides a lifting tool for lifting a graphite heater of a single crystal furnace. The lifting tool includes:

[0008] base;

[0009] a boom disposed on the base;

[0010] A plurality of booms, one end of each boom being movably connected to the base so as to move between a first position in which the booms are folded toward a center of the base and a second position in which the booms are deployed away from the center of the base and extend beyond the base.

[0011] In some optional examples, in the second position, the boom extends beyond the base in a direction parallel to the upper surface of the base.

[0012] In some optional examples, the boom is configured to be telescopic along its length.

[0013] In some optional examples, the main body and the moving part connected to the main body, wherein,

[0014] The first end of the body portion serves as the end of the boom connected to the base;

[0015] The moving portion is arranged at the second end of the main body and is configured to be movable relative to the main body to achieve extension and retraction of the boom in the length direction thereof.

[0016] In some optional examples, the moving portion can be moved so that one end of the moving portion extends from the second end of the main body, and an end surface of the one end of the moving portion is arc-shaped.

[0017] In some optional examples, the moving part is detachably connected to the main body and is made of Teflon.

[0018] In some optional examples, the lifting tool is further provided with a first limiting member for keeping the lifting arm in the first position, and a second limiting member for keeping the lifting arm in the second position.

[0019] In some optional examples, the plurality of booms are spaced apart at uniform angular intervals around the base.

[0020] In some optional examples, the base includes a base plate and a plurality of connecting members arranged around the base plate, wherein the boom is movably connected to one end of the connecting member, and the other end of the connecting member is detachably connected to the base plate.

[0021] In some optional examples, the lifting tool further includes a bearing seat, wherein the bearing seat is provided with a first accommodating portion for accommodating the substrate and a second accommodating portion for accommodating the connecting member.

[0022] An embodiment of the present utility model provides a lifting tool for lifting a graphite heater of a single crystal furnace. The lifting tool includes a base, a suspension rod arranged on the base, and a suspension arm connected to the base. The suspension arm is configured to be movable between different positions. At different positions, the length of the suspension arm extending from the base is also different, thereby being suitable for lifting graphite heaters of different sizes, so that a single lifting tool has a certain versatility. In addition, after the lifting operation is completed, the suspension arm can be retracted to the maximum extent relative to the base so that the lifting tool is in a minimum volume state as a whole. The lifting tool in this state will occupy a smaller storage space, and the risk of accidental damage to the suspension arm of the lifting tool is also reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional schematic diagram of a lifting tool and a graphite heater provided in one embodiment of the utility model;

[0024] Figure 2 A front view of a lifting tool provided in one embodiment of the present utility model;

[0025] Figure 3 for Figure 2 Another front view of the lifting tool;

[0026] Figure 4 for Figure 2 Another front view of the lifting tool;

[0027] Figure 5 A partial schematic diagram of a lifting tool provided in another embodiment of the present utility model;

[0028] Figure 6 A front view of a lifting tool provided in yet another embodiment of the present utility model;

[0029] Figure 7 A front view of a lifting tool provided in yet another embodiment of the present utility model;

[0030] Figure 8 A schematic diagram of a portion of a lifting tool provided in another embodiment of the present utility model;

[0031] Figure 9 A top view of a lifting tool provided in accordance with another embodiment of the present invention;

[0032] Figure 10 A front view of a lifting tool provided in yet another embodiment of the present utility model;

[0033] Figure 11 for Figure 10 A top view of a portion of a lifting tool. DETAILED DESCRIPTION

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0035] Graphite heaters typically utilize a cylindrical structure. This design facilitates uniform heat distribution and creates a stable temperature field. The cylindrical structure surrounds the silicon melt and growing single crystal, providing uniform radiant heating and avoiding crystal defects caused by uneven temperature distribution. Graphite material offers excellent thermal conductivity and oxidation resistance, and can withstand high temperatures. Its mechanical strength is excellent under high-temperature conditions, making it suitable for the high-temperature environments found in single crystal furnaces.

[0036] See also Figure 1 , which shows a graphite heater 100 of a conventional single crystal furnace. Figure 1 As shown in Figure 1, graphite heaters are usually composed of comb-shaped graphite sheets. Figure 1 As shown, a plurality of slits are provided in the circumferential wall 101A of the graphite heater 100, thereby forming a comb-like structure. This comb-like structure not only increases the heat dissipation area of the graphite heater 100, facilitating uniform temperature conduction and radiation, but also reduces the weight of the graphite heater 100, lowering thermal inertia and enabling the graphite heater to respond more quickly to temperature changes.

[0037] Installation and removal of a graphite heater are relatively complex due to its weight and size. However, the comb-like structure of the graphite heater 100 provides a degree of convenience during installation and removal. For example, the slits in the circumferential wall 101A can be used as support points for lifting points, facilitating the movement and precise positioning of the graphite heater using lifting tools throughout the entire process.

[0038] In practice, different graphite heaters may have different sizes, such as diameters or slit widths. Accordingly, a lifting tool that matches the specific dimensions of the graphite heater is required to ensure uniform force application, thereby reducing shaking and displacement during lifting and improving operational safety and stability. Furthermore, this also means that the maximum size of the lifting tool may be comparable to the graphite heater itself. Therefore, how to safely store large lifting tools has become another pressing issue in this field.

[0039] In view of the above situation, the present invention provides a lifting tool. Through the rotation and extension function of the lifting arm of the lifting tool, not only the application range and operational flexibility of the lifting tool are improved, but also the storage and storage of the lifting tool are more space-saving and safer.

[0040] Specifically, see Figures 1 to 3 The utility model proposes a lifting tool 1. The lifting tool 1 can be used to lift the graphite heater 100 of the single crystal furnace. The lifting tool 1 may include a lifting assembly 2. The lifting assembly 2 may include a base 21, a suspension rod 22 and a plurality of suspension arms 23. The suspension rod 22 may be set on the base 21. One end of the suspension arm 23 is movably connected to the base 21 so as to move and rotate between a first position and a second position. In the first position, the suspension arm 23 is in a folded state close to the center of the base 21. In the second position, the suspension arm 23 is in an unfolded state away from the center of the base 21 and extending beyond the base 21.

[0041] exist Figure 2 In the embodiment of the present invention, the base 21 is substantially in the shape of a circular plate and includes an upper surface 21A. It will be understood that this is merely exemplary. In embodiments not shown in the present invention, the base 21 may be in other shapes.

[0042] The suspension rod 22 can be set at the center of the upper surface 21A of the base 21 and can be perpendicular to the upper surface 21A. One end of the suspension rod 22 is fixed to the upper surface of the base 21, and the other end is set in a form that is convenient for a lifting device (not shown in the figure) to be hooked, so that the lifting device can lift the entire lifting tool 1 and the graphite heater 100. Figure 2 As clearly shown in FIG, the upper end of the boom 22 can be configured to be ring-shaped to allow a lifting device to pass through and be hooked.

[0043] Multiple arms 23 may be provided on the upper surface of the base 21. For example, two, three, four, or more arms 23 may be provided. The number and distribution of the arms 23 can be adjusted based on the specific object being hoisted, flexibly adapting to the size and shape of the object. This design not only enhances the applicability of the hoisting tool 1 but also ensures safe and reliable support under various hoisting conditions.

[0044] One end of the boom 23 is rotatably connected to the upper surface of the base 21, and the other end is a free end, so that the boom 23 can rotate as a whole around the end connected to the base 21. As the boom 23 rotates, the position of the free end of the boom 23 relative to the base 21 also changes. Figure 2 and Figure 3 The position change of the boom 23 will be described in detail.

[0045] exist Figure 2The figure shows the boom 23 in the first position, at which point the boom 23 is in a folded state. In the first position, each boom 23 is rotated to be tilted toward the center of the base 21 as a whole, so that the multiple booms 23 are in a state of being retracted toward the central axis of the base, wherein the free ends of the booms 23 are close to the boom 22 erected at the center of the base 21. At this time, the projection of the boom 23 on the plane where the upper surface 21A of the base 21 is located is completely within the range of the base, which means that the boom 23 does not extend beyond the base in the radial direction of the base 21. Due to the folding of the boom 23, the lifting tool 1 as a whole occupies less space, while reducing the risk of damage to the boom 23, especially its free end. When the lifting tool is not in use, it can be adjusted to a retracted state to have a compact form for easy storage.

[0046] exist Figure 3 , the figure shows the boom 23 in the second position, at which point the boom 23 is in an extended state. In the second position, each boom 23 is rotated to tilt as a whole away from the center of the base 21, so that the multiple booms 23 are extended outward from the base 21. Compared to the first position, the free ends of the booms 23 are further away from the boom 22 erected at the center of the base 21. At this point, the projection of the boom 23 on the plane of the upper surface 21A of the base 21 substantially extends beyond the base, meaning that the boom 23 extends beyond the base in the radial direction of the base 21. Due to the extended boom 23, the lifting tool 1 has a larger support range and can provide stable support, making it suitable for actual lifting operations.

[0047] In view of the above content, it should be understood that in the embodiment of the present invention, the "first position" and the "second position" do not refer to a fixed or specific position of the boom, but are functional positions flexibly set based on application requirements, so that the lifting tool 1 can be highly adaptable and can be adjusted according to actual operation scenarios and needs.

[0048] For example, the first position could describe the boom's folded, non-operating state, optimizing space utilization and minimizing exposure. The second position, on the other hand, could describe the boom's deployed, operational state, to meet the demands of lifting operations. However, these positions are not intended to be limiting and can be flexibly adjusted based on the needs of specific applications. For example, in some applications, the boom may require a third or additional intermediate position to accommodate more complex lifting requirements.

[0049] Furthermore, by diversifying the design of the boom position, the application range of the lifting tool can be expanded, making it suitable for objects of different shapes and / or sizes. For example, for larger objects, the boom position range can be further adjusted to provide a wider operating space; for smaller objects, the boom position can be precisely controlled to improve the stability and accuracy of the lifting.

[0050] An embodiment of the present utility model provides a lifting tool 1 for lifting a graphite heater of a single crystal furnace. The lifting tool 1 includes a lifting assembly 2. The lifting assembly 2 includes a base 21, a suspension rod 22 arranged on the base 21, and a suspension arm 23 connected to the base 21. The suspension arm 23 is configured to be able to rotate between different positions. At different positions, the length of the suspension arm 23 extending from the base 21 is also different, so that it can be used to lift graphite heaters of different sizes, so that the single lifting tool 1 has a certain versatility. In addition, after the lifting operation is completed, the suspension arm 23 can be retracted to the maximum extent relative to the base 21 so that the lifting tool 1 is in a minimum volume state as a whole. The lifting tool 1 in this state will occupy a smaller storage space, and the risk of accidental damage to the suspension arm 23 of the lifting tool 1 is also reduced.

[0051] In order to further improve the flexibility and safety of the lifting tool 1, in some embodiments of the present invention, see Figure 4 In the second position, the boom 23 extends beyond the base 21 in a direction parallel to the upper surface of the base 21 .

[0052] When the boom 23 is in Figure 4 In the deployed position, the boom 23 extends parallel to the upper surface of the base 21 and extends beyond the base 21 to its maximum extent. With the boom 23 of a fixed length, the lifting tool 1 in this deployed position can have its maximum deployed size, thereby meeting the needs of specific application scenarios, especially suitable for supporting and securing large graphite heaters. This design significantly expands the reach of the lifting tool 1, enabling it to flexibly adapt to different lifting environments and exhibiting good adaptability.

[0053] Furthermore, the boom 23 extends parallel to the upper surface of the base 21, which not only optimizes the deployment range of the hoisting tool 1 but also helps evenly distribute the supporting force. This parallel extension structure effectively reduces the risk of instability caused by a shift in the center of gravity of the hoisted object, thereby improving the safety and reliability of the hoisting process.

[0054] In addition to being foldable, the boom 23 can be further extended to provide a telescopic feature, so that the boom 23 can not only reduce space usage through the folding mechanism but also achieve more functionality through telescopic adjustment in the length direction. Specifically, in some embodiments of the present invention, the boom 23 is configured to be telescopic along its length direction.

[0055] In various embodiments of the present invention, the length direction of the boom 23 may be the direction of the boom 23 along its main extension axis, that is, the straight line direction from the end of the boom connected to the base to the free end.

[0056] The extension and retraction of the boom 23 along its length can be operated independently of its folding function, or they can be combined. For example, the boom 23 can be first extended to a working position and then adjusted in length by retraction as needed; or the boom 23 can be shortened in the folded state to further optimize storage.

[0057] It can be seen that the combination of foldability and retractability can not only enable the lifting tool 1 to adapt to more complex lifting scenarios, but also improve operational flexibility by shortening the boom to the greatest extent even in a small space and provide a larger coverage range when lifting large objects, and can further reduce the volume in the folded state.

[0058] In order to realize the scalability of the boom 23, in some embodiments of the present invention, see Figure 5 The boom 23 may include a main body 23A and a movable portion 23B connected to the main body 23A. The first end of the main body 23A may serve as the end of the boom 23 connected to the base 21. The movable portion 23B may be provided at the second end of the main body 23A and configured to be movable relative to the main body 23A to enable the boom 23 to extend or retract along its length.

[0059] In a further embodiment, the moving portion 23B can move so that one end of the moving portion 23B extends from the second end of the body portion 23A, and an end surface of the one end of the moving portion 23B is arc-shaped.

[0060] exist Figure 5 In the embodiment shown in FIG, the boom 23 adopts a two-part structure, and the boom 23 is extended and retracted in its length direction by changing the relative positions of the two parts. Specifically, the main body 23A may include a first end and a second end that are opposite to each other. The movable portion 23B may also include a first end and a second end that are opposite to each other. The main body 23A and the movable portion 23B are positioned so that the first end of the main body 23A serves as the end of the boom 23 connected to the base 21, and the movable portion 23B is located near the second end of the main body 23A.

[0061] The movable portion 23B can always remain connected to the main body portion 23A via the first end. The second end of the movable portion 23B can extend from the second end of the main body portion 23A to different lengths by the movement of the movable portion 23B relative to the main body portion 23A. Accordingly, the boom 23 also has different lengths, namely the sum of the length of the main body portion 23A and the length of the portion of the movable portion 23B extending from the second end of the main body portion 23A. In this case, the second end of the movable portion 23B can serve as the free end of the boom 23. Alternatively, the movable portion 23B can also be moved to be completely located on the main body portion 23A without extending from the second end of the main body portion 23A. In this case, the second end of the main body portion 23A or the second ends of the main body portion 23A and the movable portion 23B can serve as the free end of the boom 23, and the length of the boom 23 is equal to the length of the main body portion 23A.

[0062] The moving part 23B can adopt a nested tubular structure, a slide rail structure, or other mechanical connection methods that can achieve relative sliding or extension. Figure 5 As shown in , the movable portion 23B can be sleeved on one end of the main body 23A and be movably connected to the main body 23A via a slider-slide rail mechanism. An elongated groove or hole 231 extending along the length direction of the main body 23A can be provided on the main body 23A. Accordingly, a protrusion 232 is formed on the movable portion 23B that can be inserted into the elongated groove or hole 231 in the main body 23A and slide along it. By sliding the protrusion 232 in the elongated groove or hole 231, the length of the movable portion 23B extending from the second end of the main body 23A changes, thereby achieving a change in the length of the boom 23.

[0063] The size of the moving portion 23B can be determined according to the slit width in the circumferential wall 101A of the graphite heater 100 to allow the moving portion 23B to pass through the slit without leaving an excessive gap between the moving portion 23B and the slit, causing the moving portion 23B to swing in the slit.

[0064] It is understood that the length change of the boom 23 can also be achieved through other structures, for example, see Figure 2 and Figure 3 , the first end of the moving portion 23B can be connected to the second end of the main body portion 23A, and the total length of the boom 23 can be changed by rotating the moving portion 23B around its first end.

[0065] The movable portion 23B is detachably connected to the main body 23A. This two-piece design, consisting of the main body 23A and movable portion 23B, allows the lifting tool 1 to be adapted for graphite heaters with slits of varying widths by replacing the movable portion 23B. Furthermore, the telescopic function of the lifting arm 23 provides greater flexibility. This functionality allows for more efficient adjustment of the arm's length, thus meeting the requirements for lifting graphite heaters of varying sizes.

[0066] Before using the lifting tool 1 to lift the graphite heater 100, the lifting assembly 2 of the lifting tool 1 needs to be placed within the hollow interior of the graphite heater 100. Typically, the lifting assembly 2 is lowered from directly above the graphite heater 100 into the hollow interior of the graphite heater 100. During this process, if improperly operated, the lifting assembly 2, particularly the free end of the lifting arm 23 of the lifting assembly 2, may collide with the graphite heater 100. To prevent damage to the graphite heater 100 and / or the lifting assembly 2 caused by accidental collisions, the free end of the lifting arm 23 can be configured to be at least partially arc-shaped.

[0067] For example, Figure 5 In the embodiment shown in FIG, the end surface of the second end of the movable portion 23B can be configured as a curved surface to reduce the impact force when it collides with the graphite heater 100 and reduce stress concentration at the contact point. In this case, even if the suspension assembly 2 and the graphite heater 100 make slight contact, the smooth curved surface of the free end of the suspension arm 23 can prevent scratches or hard collisions.

[0068] In order to further reduce the risk of scratches or collision damage, and considering that the moving portion 23B will directly contact the graphite heater 100 and thus requires better heat resistance and non-stick properties, in some embodiments of the present invention, the moving portion 23B can be made of Teflon.

[0069] Teflon's low friction and self-lubricating properties allow for smoother and more retractable movement of the movable portion 23B. Furthermore, Teflon's wear resistance, high temperature resistance, and corrosion resistance make the movable portion 23B adaptable to harsh environments such as high temperatures and chemical corrosion, making it particularly suitable for hoisting high-temperature equipment such as graphite heaters. Furthermore, because the fluorine atoms in Teflon's molecular structure are highly hydrophobic and oleophobic, the material effectively resists the adhesion of impurities, particles, and chemical solutions. This non-stick property ensures that the surface of the lifting tool 1 remains clean even during prolonged use, even if it comes into contact with dust, oil, or chemicals.

[0070] In some implementations of the present invention, see Figure 6 and Figure 7The lifting tool 1 may be provided with a first position-limiting member 24 for maintaining the lifting arm 23 at the first position, and a second position-limiting member 25 for maintaining the lifting arm 23 at the second position, so as to ensure the accuracy and reliability of the position adjustment of the lifting arm 23 .

[0071] The first limiter 24 and the second limiter 25 can use mechanical locking, such as a buckle, a locking pin, a spring locking mechanism, or a friction braking mechanism to limit and fix the boom 23. The arrangement and specific implementation of the two limiters can be selected according to application requirements.

[0072] For example, see Figure 6 The first stopper 24 can be a raised portion formed on the boom 23 and located near the end of the boom 23 connected to the base 21. The first stopper 24 can be displaced as the boom 23 rotates. When the boom 23 is rotated to tilt toward the center of the base 21 at a certain angle, the first stopper 24 abuts against other components of the lifting tool 1 to support the boom 23 from the underside. The first stopper 24, in conjunction with the weight of the boom 23, can maintain the boom 23 in this position, i.e., the first position.

[0073] Combine Figure 6 and Figure 7 The second stopper 25 may not be provided on the boom 23, but may be provided on other parts of the hoisting tool 1 and also be located near the end of the boom 23 connected to the base 21. The second stopper 25 can support the boom 23 from below when the boom 23 is parallel to the upper surface 21A of the base 21 and extends beyond the base 21, so as to prevent the boom 23 from deviating from this position under the action of gravity or a downward hoisting load, thereby maintaining the boom 23 in the deployed state.

[0074] To prevent the arm 23 and the second stopper 25 from damaging each other due to their interaction, in some embodiments of the present invention, a buffer material may be provided on the portion of the second stopper 25 that contacts the arm 23 to extend the service life of the arm 23 and the second stopper 25. For example, the surface of the second stopper 25 may be covered with Teflon material, or the second stopper 25 may be made of Teflon material.

[0075] In some embodiments of the present invention, see Figure 8 The second limiting member 25 may include a stopper 25A to prevent the boom 23 in the second position from swinging laterally.

[0076] exist Figure 8In the embodiment, the second position-limiting member 25 includes two spaced-apart stoppers 25A. The stopper 33 is a columnar projection from the surface of the second position-limiting member 25. When the boom 23 moves to its second position, it abuts the surface of the second position-limiting member 25 on which the stoppers 25A are located, and lies between the two stoppers 25A, such that both sides of the boom 23 are adjacent to the two stoppers 25A. The use of the second position-limiting member 25 limits the position of the boom 23 in three directions.

[0077] The multi-directional positioning of the boom 23 by the second stopper 25 securely locks the boom 23 in its second position, reducing the risk of the boom 23 tilting or deflecting relative to its second position due to load shifting during the lifting operation. Especially for lifting scenarios with heavy loads, multi-directional positioning of the boom 23 effectively distributes stress, preventing damage to the boom structure caused by excessive force in a single direction.

[0078] According to some embodiments of the present invention, a plurality of booms 23 may be arranged around the base 21 at uniform angular intervals to improve load balancing and operational stability of the lifting tool 1 .

[0079] exist Figure 9 In the illustrated embodiment, the lifting assembly 2 of the lifting tool 1 includes four lifting arms 23. The four lifting arms 23 are spaced apart around the base 21, and any two adjacent lifting arms 23 are spaced 90 degrees apart, so that the lifting arms 23 are evenly and symmetrically arranged.

[0080] The evenly distributed booms 23 allow the hoisting tool 1 to flexibly adapt to hoisting objects of different sizes, particularly cylindrical graphite heaters 100. More importantly, the evenly distributed booms 23 can evenly distribute the weight of the graphite heater 100 and make the overall force on the hoisting tool 1 more reasonable. This not only avoids tilting or imbalance caused by eccentric loads, improving the safety and stability of the hoisting operation, but also effectively reduces local stress concentration on the base 21 and booms 23.

[0081] In some embodiments of the present invention, see Figure 6 、 Figure 7 、 Figure 9 The base 21 may include a base plate 211 and a plurality of connecting members 212 arranged around the base plate 211. The suspension arm 23 is movably connected to one end of the connecting member 212, and the other end of the connecting member 212 is detachably connected to the base plate 211.

[0082] In this embodiment, the base 21 has a two-part structure. The base plate 211 is located at the center of the base, and the suspension rod 22 can be disposed at the center of the upper surface of the base plate 211. The second stopper 25 can also be disposed on the connecting member 212. The suspension arms 23 can be connected to the base plate 211 via the connecting member 212, so the number of connecting members 212 and suspension arms 23 is the same.

[0083] For example, see Figure 9 The four booms 23 are connected to the base plate 211 via four connectors 212, respectively. One end of the connector 212 is detachably fixed to the base plate 211, for example, by fasteners such as bolts, so that the connector 212 and the base plate 211 are integrally formed, thereby forming the base 21. The other end of the connector 212 is connected to one end of the boom 23, wherein the boom 23 is rotatably connected to the connector 212, so that the boom 23 can move between a first position and a second position.

[0084] The removable connection between the connector and the base plate increases component versatility, simplifies base installation and maintenance, and improves the utilization of the lifting tool. For example, for different graphite heater sizes, only the connector and the lifting arm can be replaced, and if an individual lifting arm is damaged, it can be replaced separately. Furthermore, the removable connection allows the lifting tool to be further disassembled, making storage and transportation more convenient.

[0085] In some embodiments of the present invention, see Figure 7 、 Figure 9 、 Figure 10 、 Figure 11 The lifting tool 1 may further include a bearing seat 3 , wherein the bearing seat 3 may be provided with a first accommodating portion 31 for accommodating the substrate and a second accommodating portion 32 for accommodating the connector.

[0086] like Figures 9 to 11 As shown, the bearing seat 3 can be roughly annular, wherein the through hole located in the center thereof can serve as a first accommodating portion 31. The first accommodating portion 31 has a radial dimension greater than the substrate 211 to allow the substrate 211 to be accommodated therein. The second accommodating portion 32 can be formed on the annular area, for example, can be formed in a groove shape, and has a width greater than the boom 23 or the connector 212 to allow the boom 23 or the connector 212 to be accommodated therein. In order to allow the lifting tool 1 to be stably placed on the bearing seat 3, the number and position of the second accommodating portions 32 can correspond to the number and position of the booms or connectors of the lifting tool 1, so that the second accommodating portions 32 can accommodate each boom or connector in a one-to-one correspondence.

[0087] After the lifting assembly 2 of the lifting tool 1 completes the lifting operation, the lifting assembly 2 can be placed on the support base 3 with the lifting arm 23 in the second position. Because the two receiving portions of the support base 3 provide stable support for the lifting assembly 2, the position of the lifting arm 23 can be conveniently adjusted in this situation to switch it to a folded position that facilitates the storage of the lifting tool 1, reducing the risk of the lifting tool 1 accidentally tipping over during the adjustment process. After the lifting arm 23 is folded, the lifting tool 1 can continue to be stably supported by the support base 3, which not only improves the protection of the lifting tool 1 but also optimizes the management and maintenance of the lifting tool 1.

[0088] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A lifting tool for lifting a graphite heater of a single crystal furnace, characterized in that: The lifting tools include: base; a boom disposed on the base; A plurality of booms, one end of each boom being movably connected to the base so as to move between a first position in which the booms are folded toward a center of the base and a second position in which the booms are deployed away from the center of the base and extend beyond the base.

2. The lifting tool according to claim 1, characterized in that: In the second position, the boom extends beyond the base in a direction parallel to an upper surface of the base.

3. The lifting tool according to claim 1, characterized in that: The boom is configured to be telescopic along its length.

4. The lifting tool according to claim 3, characterized in that: The boom comprises a main body and a moving part connected to the main body, wherein: The first end of the body portion serves as the end of the boom connected to the base; The moving portion is arranged at the second end of the main body and is configured to be movable relative to the main body to achieve extension and retraction of the boom in the length direction thereof.

5. The lifting tool according to claim 4, characterized in that: The moving portion is movable so that one end of the moving portion extends from the second end of the main body, and an end surface of the one end of the moving portion is arc-shaped.

6. The lifting tool according to claim 4, characterized in that: The moving part is detachably connected to the main body and is made of Teflon.

7. The lifting tool according to any one of claims 1 to 6, characterized in that: The lifting tool is further provided with a first limiting member for keeping the lifting arm in the first position, and a second limiting member for keeping the lifting arm in the second position.

8. The lifting tool according to any one of claims 1 to 6, characterized in that: The plurality of booms are spaced apart at uniform angular intervals around the base.

9. The lifting tool according to any one of claims 1 to 6, characterized in that: The base includes a base plate and a plurality of connecting members arranged around the base plate, wherein the suspension arm is movably connected to one end of the connecting member, and the other end of the connecting member is detachably connected to the base plate.

10. The lifting tool according to claim 9, characterized in that: The lifting tool further includes a bearing seat, wherein the bearing seat is provided with a first accommodating portion for accommodating the substrate and a second accommodating portion for accommodating the connecting member.

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